JP5182610B2 - 薄膜太陽電池の製造装置 - Google Patents
薄膜太陽電池の製造装置 Download PDFInfo
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- H01L31/18—Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof
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- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
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- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
- C23C14/562—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks for coating elongated substrates
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- H01L31/02—Details
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- H01L31/022408—Electrodes for devices characterised by at least one potential jump barrier or surface barrier
- H01L31/022425—Electrodes for devices characterised by at least one potential jump barrier or surface barrier for solar cells
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- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/02—Details
- H01L31/0224—Electrodes
- H01L31/022466—Electrodes made of transparent conductive layers, e.g. TCO, ITO layers
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- H01L31/04—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices
- H01L31/042—PV modules or arrays of single PV cells
- H01L31/0445—PV modules or arrays of single PV cells including thin film solar cells, e.g. single thin film a-Si, CIS or CdTe solar cells
- H01L31/046—PV modules composed of a plurality of thin film solar cells deposited on the same substrate
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- H01L31/18—Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
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- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
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Description
ヒータにより約300°Cまで加熱された状態で、成膜が施されている(特許文献6)。
とくに、フィルム基板の片面に、発電層側(裏面とも呼ぶ)となる電極が設けられている場合には、反対側(背面とも呼ぶ)に電極を形成する製膜時に、フィルム面に比べて電極が設けられた電極面は放射率が低いことから、裏面製膜時と比較して背面製膜時はフィルムの温度履歴が大きく異なり、フィルム温度が冷めづらくなる。そして、フィルム温度が高い状態でフィルム基板の表面をフィードロールとプレスロールによって、引っ張ることになり、幅方向の張力分布が不均一となるため、搬送シワが発生してしまう不具合が生じていた。
特に、フィルム基板の幅方向が鉛直方向を向く姿勢で搬送する縦型搬送では、フィルム基板の自重による変形もあって、搬送シワがさらに大きくなっていた。
また、本発明は、前記少なくとも一方の駆動ロールの両端部周面に設けられた前記弾性部材の層の幅(M 2 −M 1 )/2は、前記発電領域が形成されない前記金属薄膜部の幅(N 2 −N 1 )/2よりも小さく設定したことにある。
さらに、本発明は、前記発電領域が形成されていない前記金属薄膜部を、前記駆動ロールの両端部で圧接し、前記駆動ロールの前記両端部の間が、前記発電領域に接触することなく前記フィルム基板を搬送することにある。
また、本発明は、搬送時にフィルム基板の駆動ロール圧接部をフィルム両端部の特定箇所に限定することにより、発電層領域を傷つけず、且つ搬送シワの発生を防止することができる。
図1は、太陽電池の製造装置における薄膜電極層形成の基本的構成部分のみを概念的に図示している。反応室、スパッタガス供給系、排気系あるいはフィルム基板搬送手段などは省略して説明する。
前記高電圧電極13はターゲットと呼ばれる、例えば、銀、アルミニウム、酸化亜鉛といった金属が用いられ、接地電極12との間の放電に伴って金属イオンを生じさせ、スパッタリング法と呼ばれる真空蒸着法によってフィルム基板1の表面に、電極となる金属の薄膜を形成するものである。
また、前記巻取り室5には、複数の駆動用補助ローラ10と、フィルム基板1を一定の張力を保持して搬送するフィードロール14とプレスロール15からなる駆動ロール16と、ガイドロール7と同様のガイドロール17が設けられている。フィードロール14は図示しないモータ等の駆動手段によって回転駆動されるもので、プレスロール15が圧接されて一定の張力を維持するようにフィルム基板1を搬送するものである。
図2は、本発明による薄膜太陽電池の製造装置のプレスロールの構造を示す概念図であり、(a)はプレスロール15の断面構成を、(b)はプレスロール15とフィルム基板1との寸法と接触位置をそれぞれ示している。図2(b)において、フィルム基板1は、図1に示す薄膜電極層の形成装置によって、表面に金属箔膜23が形成されるようになっており、その後、図示しないプラズマCVD装置により、半導体層からなる光電変換層が形成される発電領域22を有している。
前記プレスロール15は、図2(a)に示すように円筒状の回転体18と、この回転体18の軸線上に挿通された軸19と、この軸19と回転体18の両端部内周面との間に設けられた軸受け20とで構成され、前記回転体18の両端部外周面には、一定の幅の弾性部材の層21が設けられている。この弾性部材の層21は、ゴム等の弾性を有する材料で形成されており、両側の弾性部材の層21までの長さM1を、図2(a)(b)に示すように前記フィルム基板1の電極となる発電領域22の幅N1よりも大きく(M1≧N1)形成している。また両側の弾性部材の層2の端部までの長さM2≧フィルム基板1の幅N2に設定している。したがって、M1はN2よりも小さく、かつ、M1はN1よりも大きくN1≦M1≦N2設定している。弾性部材の層21の幅(M2−M1)/2は、フィルム基板1の発電領域22が形成されない金属薄膜部23の幅(N2−N1)/2よりも大きく設定している。
特に片面(裏面)にすでに金属薄膜を形成したフィルム基板1の反対面(背面)製膜時に際しても、発電領域22に直接、プレスロール15が接触する虞がないので、搬送シワの発生を防止することができる。こうして、両面に金属薄膜を形成したフィルム基板1は、半導体層を形成する次の工程に移る。
2 巻き出しロール
3 送り室
4 巻取りロール
5 巻取り室
6 成膜室
7 ガイドロール
8 中間室
9,10 駆動用補助ローラ
11 ヒータ
12 接地電極
13 高電圧電極
14 フィードロール(駆動ロール)
15 プレスロール(駆動ロール)
16 駆動ロール
18 回転体
21 弾性部材の層
22 発電領域
23 金属薄膜部
Claims (3)
- 巻き出しロールに巻かれた帯状可撓性のフィルム基板を略真空状態に維持された成膜室に送り、前記成膜室に互いに対向して配置された接地電極と、ターゲット材を有する印加電極との間で放電させて、幅N 2 のフィルム基板の面上に電極となる金属薄膜を、一定の加熱下で形成し、
前記金属薄膜の表面に形成された幅N 1 の発電領域は、N 1 <N 2 であり、
前記金属薄膜が形成されたフィルム基板を巻き取り室に設けられた巻取りロールで巻き取るようにした薄膜太陽電池の製造装置であって、
前記巻取り室に、前記金属薄膜が形成された前記フィルム基板を一定の張力で搬送する一対の駆動ロールを設け、前記フィルム基板の幅方向両端部に対応する前記少なくとも一方の駆動ロールの両端部周面にそれぞれ弾性部材の層を形成し、
両端の前記弾性部材の層間の長さM 1 を前記発電領域の幅N 1 よりも大きく、前記フィルム基板の幅N 2 よりも小さく設定したことを特徴とする薄膜太陽電池の製造装置。 - 前記少なくとも一方の駆動ロールの両端部周面に設けられた前記弾性部材の層の幅(M 2 −M 1 )/2は、前記発電領域が形成されない前記金属薄膜部の幅(N 2 −N 1 )/2よりも小さく設定したことを特徴とする請求項1に記載の薄膜太陽電池の製造装置。
- 前記発電領域が形成されていない前記金属薄膜部を、前記駆動ロールの両端部で圧接し、前記駆動ロールの前記両端部の間が、前記発電領域に接触することなく前記フィルム基板を搬送することを特徴とする請求項1または2に記載の薄膜太陽電池の製造装置。
Priority Applications (7)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2007265537A JP5182610B2 (ja) | 2007-10-11 | 2007-10-11 | 薄膜太陽電池の製造装置 |
AT08837228T ATE537563T1 (de) | 2007-10-11 | 2008-10-09 | System zur herstellung einer dünnschichtsolarbatterie |
US12/734,046 US20120067278A1 (en) | 2007-10-11 | 2008-10-09 | Thin film solar cell manufacturing apparatus |
PCT/JP2008/068373 WO2009048104A1 (ja) | 2007-10-11 | 2008-10-09 | 薄膜太陽電池の製造装置 |
ES08837228T ES2378262T3 (es) | 2007-10-11 | 2008-10-09 | Sistema de producción de batería solar de película delgada |
EP08837228A EP2200098B1 (en) | 2007-10-11 | 2008-10-09 | Production system of thin film solar battery |
CN200880110943A CN101821860A (zh) | 2007-10-11 | 2008-10-09 | 薄膜太阳电池制造装置 |
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JP2007265537A JP5182610B2 (ja) | 2007-10-11 | 2007-10-11 | 薄膜太陽電池の製造装置 |
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JP2009094399A JP2009094399A (ja) | 2009-04-30 |
JP5182610B2 true JP5182610B2 (ja) | 2013-04-17 |
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US (1) | US20120067278A1 (ja) |
EP (1) | EP2200098B1 (ja) |
JP (1) | JP5182610B2 (ja) |
CN (1) | CN101821860A (ja) |
AT (1) | ATE537563T1 (ja) |
ES (1) | ES2378262T3 (ja) |
WO (1) | WO2009048104A1 (ja) |
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KR100988760B1 (ko) * | 2009-12-30 | 2010-10-20 | 백산철강(주) | 태양전지 기판의 전극 제조 장치 |
JP2012043983A (ja) * | 2010-08-19 | 2012-03-01 | Fuji Electric Co Ltd | 多層膜形成方法およびそれに用いる成膜装置 |
CN102163644B (zh) * | 2010-10-09 | 2013-06-12 | 浙江哈氟龙新能源有限公司 | 宽幅太阳能电池组背板的制造方法及制造装置 |
KR101512132B1 (ko) * | 2010-10-27 | 2015-04-15 | 한국전자통신연구원 | 박막 증착 장치 |
CN102654196A (zh) * | 2011-03-04 | 2012-09-05 | 无锡尚德太阳能电力有限公司 | 动力传递装置及具备该装置的太阳电池湿制程设备 |
KR101837917B1 (ko) * | 2011-04-25 | 2018-03-12 | 가부시키가이샤 니콘 | 기판처리장치 |
JP5831759B2 (ja) * | 2011-04-28 | 2015-12-09 | 日東電工株式会社 | 真空成膜方法、及び該方法によって得られる積層体 |
US8697582B2 (en) * | 2011-11-22 | 2014-04-15 | Panasonic Corporation | Substrate conveying roller, thin film manufacturing device, and thin film manufacturing method |
WO2013103609A1 (en) * | 2012-01-03 | 2013-07-11 | Applied Materials, Inc. | Advanced platform for passivating crystalline silicon solar cells |
SE536952C2 (sv) * | 2012-06-25 | 2014-11-11 | Impact Coatings Ab | Kontinuerlig rulle-till-rulle-anordning |
CN102983216B (zh) * | 2012-11-22 | 2015-11-25 | 深圳首创光伏有限公司 | 制造cigs薄膜太阳能电池的吸收层的反应装置及方法 |
WO2017082438A1 (ko) * | 2015-11-10 | 2017-05-18 | 주식회사 제우스 | 태빙장치 |
JP6950506B2 (ja) * | 2017-12-11 | 2021-10-13 | 住友金属鉱山株式会社 | 長尺基板の処理装置と処理方法 |
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US4476636A (en) * | 1980-10-27 | 1984-10-16 | Gross Frank R | Boundary air layer modification structure for heat transfer roll |
JPH0188662U (ja) * | 1987-12-04 | 1989-06-12 | ||
US5730693A (en) * | 1996-01-02 | 1998-03-24 | Krayenhagen; Everett D. | Web tension control system |
JP2001072291A (ja) * | 1999-09-03 | 2001-03-21 | Toppan Printing Co Ltd | 搬送ロールおよびそれを用いた長尺物の搬送方法 |
JP2001114461A (ja) * | 1999-10-14 | 2001-04-24 | Sony Corp | ガイドロール装置および磁気テープ製造装置 |
JP2001230430A (ja) * | 2000-02-18 | 2001-08-24 | Fuji Electric Co Ltd | 薄膜太陽電池モジュールの製造装置 |
JP2003258280A (ja) * | 2002-03-05 | 2003-09-12 | Fuji Electric Co Ltd | 薄膜太陽電池の製造装置 |
LV13253B (en) * | 2003-06-30 | 2005-03-20 | Sidrabe As | Device and method for coating roll substrates in vacuum |
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EP2200098A4 (en) | 2010-11-10 |
ATE537563T1 (de) | 2011-12-15 |
WO2009048104A1 (ja) | 2009-04-16 |
EP2200098A1 (en) | 2010-06-23 |
ES2378262T3 (es) | 2012-04-10 |
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EP2200098B1 (en) | 2011-12-14 |
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