JP2022506377A5 - - Google Patents

Info

Publication number
JP2022506377A5
JP2022506377A5 JP2021523712A JP2021523712A JP2022506377A5 JP 2022506377 A5 JP2022506377 A5 JP 2022506377A5 JP 2021523712 A JP2021523712 A JP 2021523712A JP 2021523712 A JP2021523712 A JP 2021523712A JP 2022506377 A5 JP2022506377 A5 JP 2022506377A5
Authority
JP
Japan
Prior art keywords
guide
probe head
probe
holes
contact
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2021523712A
Other languages
English (en)
Japanese (ja)
Other versions
JP7470114B2 (ja
JP2022506377A (ja
Filing date
Publication date
Priority claimed from IT102018000010071A external-priority patent/IT201800010071A1/it
Application filed filed Critical
Publication of JP2022506377A publication Critical patent/JP2022506377A/ja
Publication of JP2022506377A5 publication Critical patent/JP2022506377A5/ja
Application granted granted Critical
Publication of JP7470114B2 publication Critical patent/JP7470114B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

JP2021523712A 2018-11-06 2019-11-05 被試験デバイスに対する改善された接触特性を有する垂直プローブヘッド Active JP7470114B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
IT102018000010071A IT201800010071A1 (it) 2018-11-06 2018-11-06 Testa di misura a sonde verticali con migliorate proprietà di contatto con un dispositivo di test
IT102018000010071 2018-11-06
PCT/EP2019/080171 WO2020094608A1 (en) 2018-11-06 2019-11-05 Vertical probe head with improved contact properties towards a device under test

Publications (3)

Publication Number Publication Date
JP2022506377A JP2022506377A (ja) 2022-01-17
JP2022506377A5 true JP2022506377A5 (https=) 2022-10-21
JP7470114B2 JP7470114B2 (ja) 2024-04-17

Family

ID=65409291

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2021523712A Active JP7470114B2 (ja) 2018-11-06 2019-11-05 被試験デバイスに対する改善された接触特性を有する垂直プローブヘッド

Country Status (10)

Country Link
US (1) US12085588B2 (https=)
EP (1) EP3877768A1 (https=)
JP (1) JP7470114B2 (https=)
KR (1) KR20210089206A (https=)
CN (1) CN113039444A (https=)
IT (1) IT201800010071A1 (https=)
PH (1) PH12021550959A1 (https=)
SG (1) SG11202104299SA (https=)
TW (1) TWI837207B (https=)
WO (1) WO2020094608A1 (https=)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI831307B (zh) * 2022-07-26 2024-02-01 思達科技股份有限公司 導板結構及探針陣列
IT202200026214A1 (it) * 2022-12-21 2024-06-21 Technoprobe Spa Testa di misura a sonde verticali perfezionata
KR20240160318A (ko) 2023-05-02 2024-11-11 김상한 수직형 프로브 핀을 가진 프로브 핀 조립체 및 그 제작 방법
KR102923549B1 (ko) * 2023-11-23 2026-02-06 주식회사 에스디에이 핀 포스가 조절되는 버티컬 프로브카드
KR102854722B1 (ko) * 2024-01-30 2025-09-02 경북대학교 산학협력단 반도체 소자 검사용 스크럽 발생 방지형 멤스 핀

Family Cites Families (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6411112B1 (en) * 1998-02-19 2002-06-25 International Business Machines Corporation Off-axis contact tip and dense packing design for a fine pitch probe
JP3942823B2 (ja) * 2000-12-28 2007-07-11 山一電機株式会社 検査装置
FR2860347A1 (fr) * 2003-09-29 2005-04-01 Probest Connecteur electrique a au moins deux contacts
JP2007127488A (ja) * 2005-11-02 2007-05-24 Rika Denshi Co Ltd プローブカード
US8723546B2 (en) * 2007-10-19 2014-05-13 Microprobe, Inc. Vertical guided layered probe
EP2107380A1 (en) * 2008-04-01 2009-10-07 Technoprobe S.p.A Testing head having vertical probes configured to improve the electric contact with a device to be tested
JP2009276097A (ja) 2008-05-12 2009-11-26 Nidec-Read Corp 基板検査治具
TWI435083B (zh) * 2010-07-27 2014-04-21 Mpi Corp Combination probe head for vertical probe card and its assembly alignment method
JP6305754B2 (ja) * 2013-12-20 2018-04-04 東京特殊電線株式会社 コンタクトプローブユニット
CN107003335B (zh) * 2015-01-04 2020-05-22 金日 接触测试装置
MY187095A (en) * 2015-03-13 2021-08-31 Technoprobe Spa Testing head with vertical probes, particularly for high frequency applications
JP5822042B1 (ja) 2015-03-27 2015-11-24 日本電産リード株式会社 検査治具、基板検査装置、及び検査治具の製造方法
WO2016156002A1 (en) * 2015-03-31 2016-10-06 Technoprobe S.P.A. Contact probe and corresponding testing head with vertical probes, particularly for high frequency applications
WO2016177850A1 (en) 2015-05-07 2016-11-10 Technoprobe S.P.A. Testing head having vertical probes, in particular for reduced pitch applications
US10866266B2 (en) * 2015-10-29 2020-12-15 Taiwan Semiconductor Manufacturing Company Ltd. Probe head receiver and probe card assembly having the same
KR101886536B1 (ko) * 2016-12-27 2018-08-07 주식회사 텝스 접촉력을 조절할 수 있는 스트레이트 니들 프로브 카드
IT201700046645A1 (it) * 2017-04-28 2018-10-28 Technoprobe Spa Scheda di misura per un’apparecchiatura di test di dispositivi elettronici
WO2019129585A1 (en) * 2017-12-28 2019-07-04 Technoprobe S.P.A. Probe head having vertical probes with respectively opposite scrub directions

Similar Documents

Publication Publication Date Title
JP2022506377A5 (https=)
TWI537565B (zh) 探針卡
JP7306993B2 (ja) 高周波用途用のプローブカード
TWI226931B (en) Needle assembly of probe card
JP2022515457A5 (https=)
KR100927157B1 (ko) 프로브블록
KR101845652B1 (ko) 부품 실장된 웨이퍼 테스트를 위한 하이브리드 프로브 카드
JP7470114B2 (ja) 被試験デバイスに対する改善された接触特性を有する垂直プローブヘッド
JPH0782030B2 (ja) プローブ・アセンブリおよびその製造方法
KR101365188B1 (ko) 다중-사이트 프로브
KR101280419B1 (ko) 프로브카드
US7532020B2 (en) Probe assembly
CN101358999A (zh) 探针组合体
JP2009198258A (ja) 縦型プローブを搭載したプローブカード
JP2000106257A (ja) 半導体素子検査用ソケット、半導体装置、半導体装置の製造方法及び半導体装置の検査方法
KR101538937B1 (ko) 프로브 핀 및 이를 갖는 프로브 카드
JP6407239B2 (ja) 垂直型プローブモジュールのプローブホルダー
JP6373011B2 (ja) プローブカード
JP2024041465A (ja) 電気的接続装置
JP4962929B2 (ja) プローバ装置及びこれに用いるプローブ組立体
KR100635524B1 (ko) 반도체 웨이퍼 검사기의 프로브장치
JP2015190977A (ja) プローブカード
TW202605374A (zh) 探測頭
US20070069748A1 (en) Probe assembly
TW202409588A (zh) 用於測試高頻裝置的改善的測量系統