JP2022515457A5 - - Google Patents
Info
- Publication number
- JP2022515457A5 JP2022515457A5 JP2021537176A JP2021537176A JP2022515457A5 JP 2022515457 A5 JP2022515457 A5 JP 2022515457A5 JP 2021537176 A JP2021537176 A JP 2021537176A JP 2021537176 A JP2021537176 A JP 2021537176A JP 2022515457 A5 JP2022515457 A5 JP 2022515457A5
- Authority
- JP
- Japan
- Prior art keywords
- guide
- probe
- contact
- probe head
- guide hole
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| IT102018000021253 | 2018-12-27 | ||
| IT102018000021253A IT201800021253A1 (it) | 2018-12-27 | 2018-12-27 | Testa di misura a sonde verticali avente un contatto perfezionato con un dispositivo da testare |
| PCT/EP2019/085709 WO2020136045A1 (en) | 2018-12-27 | 2019-12-17 | Vertical probe head having an improved contact with a device under test |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2022515457A JP2022515457A (ja) | 2022-02-18 |
| JP2022515457A5 true JP2022515457A5 (https=) | 2022-12-22 |
Family
ID=66049576
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2021537176A Pending JP2022515457A (ja) | 2018-12-27 | 2019-12-17 | 被試験デバイスとの改善された接触を有する垂直プローブヘッド |
Country Status (10)
| Country | Link |
|---|---|
| US (1) | US11867723B2 (https=) |
| EP (1) | EP3903111B1 (https=) |
| JP (1) | JP2022515457A (https=) |
| KR (1) | KR20210108436A (https=) |
| CN (1) | CN113272661B (https=) |
| IT (1) | IT201800021253A1 (https=) |
| PH (1) | PH12021551509A1 (https=) |
| SG (1) | SG11202106774PA (https=) |
| TW (1) | TWI837255B (https=) |
| WO (1) | WO2020136045A1 (https=) |
Families Citing this family (13)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| IT202000020407A1 (it) | 2020-08-25 | 2022-02-25 | Technoprobe Spa | Testa di misura per il test di dispositivi elettronici comprendenti elementi ottici integrati |
| IT202100032882A1 (it) * | 2021-12-29 | 2023-06-29 | Technoprobe Spa | Sonda di contatto per teste di misura di dispositivi elettronici e relativa testa di misura |
| KR102751716B1 (ko) * | 2022-02-11 | 2025-01-09 | (주)티에스이 | 프리로드형 프로브 헤드 |
| EP4261547A1 (en) * | 2022-04-12 | 2023-10-18 | Microtest S.p.A. | Testing head with vertical probes for a probe card and corresponding method of assembly |
| TWI831307B (zh) * | 2022-07-26 | 2024-02-01 | 思達科技股份有限公司 | 導板結構及探針陣列 |
| KR102847367B1 (ko) * | 2022-10-20 | 2025-08-18 | 주식회사 에이엠에스티 | 프로브 카드 제작 방법 |
| KR102475883B1 (ko) * | 2022-11-09 | 2022-12-08 | 윌테크놀러지(주) | 니들 팁의 길이조절을 위한 가변형 스페이서를 갖는 니들블럭 |
| KR102901238B1 (ko) * | 2022-12-16 | 2025-12-17 | 주식회사 피코프리시젼 | 테스트 장치 |
| KR102802787B1 (ko) * | 2023-03-15 | 2025-05-07 | (주)티에스이 | 반도체 소자 테스트용 프로브 헤드 |
| KR102866843B1 (ko) * | 2023-05-02 | 2025-10-01 | (주)티에스이 | 반도체 소자 테스트용 프로브 헤드 |
| CN119199206A (zh) * | 2023-06-27 | 2024-12-27 | 迪科特测试科技(苏州)有限公司 | 包含不同长度探针组的探针卡结构 |
| CN119199205A (zh) * | 2023-06-27 | 2024-12-27 | 迪科特测试科技(苏州)有限公司 | 探针卡结构 |
| KR102843592B1 (ko) * | 2023-07-07 | 2025-08-07 | 윌테크놀러지(주) | 초단 길이의 좌굴 mems 프로브를 갖는 반도체 패키지 테스트 장치 |
Family Cites Families (16)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4506215A (en) * | 1981-06-30 | 1985-03-19 | International Business Machines Corporation | Modular test probe |
| US4622514A (en) * | 1984-06-15 | 1986-11-11 | Ibm | Multiple mode buckling beam probe assembly |
| US5367254A (en) * | 1993-02-01 | 1994-11-22 | International Business Machines Corporation | Test probe assembly using buckling wire probes within tubes having opposed overlapping slots |
| DE69326609T2 (de) * | 1993-07-23 | 2000-04-27 | International Business Machines Corp., Armonk | Testsondenanordnung mit Knicknadeln |
| US6404211B2 (en) * | 1999-02-11 | 2002-06-11 | International Business Machines Corporation | Metal buckling beam probe |
| IT1317517B1 (it) * | 2000-05-11 | 2003-07-09 | Technoprobe S R L | Testa di misura per microstrutture |
| ITMI20012574A1 (it) * | 2001-12-06 | 2003-06-06 | Technoprobe S R L | Sonda di contattatura per una testa di misura |
| PL1580562T3 (pl) * | 2004-03-24 | 2008-02-29 | Technoprobe Spa | Sonda kontaktowa do głowicy testującej |
| US7180318B1 (en) * | 2004-10-15 | 2007-02-20 | Xilinx, Inc. | Multi-pitch test probe assembly for testing semiconductor dies having contact pads |
| JP5337341B2 (ja) * | 2006-11-30 | 2013-11-06 | 株式会社日本マイクロニクス | 電気的接続装置およびその組み立て方法 |
| JP4539681B2 (ja) * | 2007-06-04 | 2010-09-08 | 三菱電機株式会社 | ウエハテスト用プローブカード |
| CN107003335B (zh) * | 2015-01-04 | 2020-05-22 | 金日 | 接触测试装置 |
| WO2016146499A1 (en) * | 2015-03-13 | 2016-09-22 | Technoprobe S.P.A. | Testing head with vertical probes having an improved sliding movement within respective guide holes and correct holding of the probes within the testing head under different operative conditions |
| WO2016177850A1 (en) * | 2015-05-07 | 2016-11-10 | Technoprobe S.P.A. | Testing head having vertical probes, in particular for reduced pitch applications |
| TWI713807B (zh) * | 2016-12-16 | 2020-12-21 | 義大利商探針科技公司 | 具有增進的頻率性質的測試頭 |
| IT201700017061A1 (it) * | 2017-02-15 | 2018-08-15 | Technoprobe Spa | Scheda di misura perfezionata per applicazioni ad alta frequenza |
-
2018
- 2018-12-27 IT IT102018000021253A patent/IT201800021253A1/it unknown
-
2019
- 2019-12-17 PH PH1/2021/551509A patent/PH12021551509A1/en unknown
- 2019-12-17 EP EP19818146.3A patent/EP3903111B1/en active Active
- 2019-12-17 JP JP2021537176A patent/JP2022515457A/ja active Pending
- 2019-12-17 WO PCT/EP2019/085709 patent/WO2020136045A1/en not_active Ceased
- 2019-12-17 KR KR1020217023265A patent/KR20210108436A/ko active Pending
- 2019-12-17 CN CN201980086156.7A patent/CN113272661B/zh active Active
- 2019-12-17 SG SG11202106774PA patent/SG11202106774PA/en unknown
- 2019-12-18 TW TW108146490A patent/TWI837255B/zh active
-
2021
- 2021-06-24 US US17/357,833 patent/US11867723B2/en active Active
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