CN113272661B - 具有与被测器件的改进的接触的垂直探针头 - Google Patents

具有与被测器件的改进的接触的垂直探针头 Download PDF

Info

Publication number
CN113272661B
CN113272661B CN201980086156.7A CN201980086156A CN113272661B CN 113272661 B CN113272661 B CN 113272661B CN 201980086156 A CN201980086156 A CN 201980086156A CN 113272661 B CN113272661 B CN 113272661B
Authority
CN
China
Prior art keywords
contact
probe
lower guide
guide member
guide
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
CN201980086156.7A
Other languages
English (en)
Chinese (zh)
Other versions
CN113272661A (zh
Inventor
斯太法罗·费利奇
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Technoprobe SpA
Original Assignee
Technoprobe SpA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Technoprobe SpA filed Critical Technoprobe SpA
Publication of CN113272661A publication Critical patent/CN113272661A/zh
Application granted granted Critical
Publication of CN113272661B publication Critical patent/CN113272661B/zh
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G01R1/073—Multiple probes
    • G01R1/07307—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card
    • G01R1/07357—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card with flexible bodies, e.g. buckling beams
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G01R1/06711—Probe needles; Cantilever beams; "Bump" contacts; Replaceable probe pins
    • G01R1/06733—Geometry aspects
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G01R1/073—Multiple probes
    • G01R1/07307—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card
    • G01R1/07314—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card the body of the probe being perpendicular to test object, e.g. bed of nails or probe with bump contacts on a rigid support
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G01R1/073—Multiple probes
    • G01R1/07307—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card
    • G01R1/07364—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card with provisions for altering position, number or connection of probe tips; Adapting to differences in pitch
    • G01R1/07371—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card with provisions for altering position, number or connection of probe tips; Adapting to differences in pitch using an intermediate card or back card with apertures through which the probes pass

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Geometry (AREA)
  • Measuring Leads Or Probes (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Testing Of Individual Semiconductor Devices (AREA)
CN201980086156.7A 2018-12-27 2019-12-17 具有与被测器件的改进的接触的垂直探针头 Active CN113272661B (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
IT102018000021253 2018-12-27
IT102018000021253A IT201800021253A1 (it) 2018-12-27 2018-12-27 Testa di misura a sonde verticali avente un contatto perfezionato con un dispositivo da testare
PCT/EP2019/085709 WO2020136045A1 (en) 2018-12-27 2019-12-17 Vertical probe head having an improved contact with a device under test

Publications (2)

Publication Number Publication Date
CN113272661A CN113272661A (zh) 2021-08-17
CN113272661B true CN113272661B (zh) 2024-09-27

Family

ID=66049576

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201980086156.7A Active CN113272661B (zh) 2018-12-27 2019-12-17 具有与被测器件的改进的接触的垂直探针头

Country Status (10)

Country Link
US (1) US11867723B2 (https=)
EP (1) EP3903111B1 (https=)
JP (1) JP2022515457A (https=)
KR (1) KR20210108436A (https=)
CN (1) CN113272661B (https=)
IT (1) IT201800021253A1 (https=)
PH (1) PH12021551509A1 (https=)
SG (1) SG11202106774PA (https=)
TW (1) TWI837255B (https=)
WO (1) WO2020136045A1 (https=)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20250052783A1 (en) * 2021-12-29 2025-02-13 Technoprobe S.P.A. Contact probe for probe heads of electronic devices and corresponding probe head

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
IT202000020407A1 (it) 2020-08-25 2022-02-25 Technoprobe Spa Testa di misura per il test di dispositivi elettronici comprendenti elementi ottici integrati
KR102751716B1 (ko) * 2022-02-11 2025-01-09 (주)티에스이 프리로드형 프로브 헤드
EP4261547A1 (en) * 2022-04-12 2023-10-18 Microtest S.p.A. Testing head with vertical probes for a probe card and corresponding method of assembly
TWI831307B (zh) * 2022-07-26 2024-02-01 思達科技股份有限公司 導板結構及探針陣列
KR102847367B1 (ko) * 2022-10-20 2025-08-18 주식회사 에이엠에스티 프로브 카드 제작 방법
KR102475883B1 (ko) * 2022-11-09 2022-12-08 윌테크놀러지(주) 니들 팁의 길이조절을 위한 가변형 스페이서를 갖는 니들블럭
KR102901238B1 (ko) * 2022-12-16 2025-12-17 주식회사 피코프리시젼 테스트 장치
KR102802787B1 (ko) * 2023-03-15 2025-05-07 (주)티에스이 반도체 소자 테스트용 프로브 헤드
KR102866843B1 (ko) * 2023-05-02 2025-10-01 (주)티에스이 반도체 소자 테스트용 프로브 헤드
CN119199206A (zh) * 2023-06-27 2024-12-27 迪科特测试科技(苏州)有限公司 包含不同长度探针组的探针卡结构
CN119199205A (zh) * 2023-06-27 2024-12-27 迪科特测试科技(苏州)有限公司 探针卡结构
KR102843592B1 (ko) * 2023-07-07 2025-08-07 윌테크놀러지(주) 초단 길이의 좌굴 mems 프로브를 갖는 반도체 패키지 테스트 장치

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0164672A2 (en) * 1984-06-15 1985-12-18 International Business Machines Corporation A multiple mode buckling beam probe assembly

Family Cites Families (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4506215A (en) * 1981-06-30 1985-03-19 International Business Machines Corporation Modular test probe
US5367254A (en) * 1993-02-01 1994-11-22 International Business Machines Corporation Test probe assembly using buckling wire probes within tubes having opposed overlapping slots
DE69326609T2 (de) * 1993-07-23 2000-04-27 International Business Machines Corp., Armonk Testsondenanordnung mit Knicknadeln
US6404211B2 (en) * 1999-02-11 2002-06-11 International Business Machines Corporation Metal buckling beam probe
IT1317517B1 (it) * 2000-05-11 2003-07-09 Technoprobe S R L Testa di misura per microstrutture
ITMI20012574A1 (it) * 2001-12-06 2003-06-06 Technoprobe S R L Sonda di contattatura per una testa di misura
PL1580562T3 (pl) * 2004-03-24 2008-02-29 Technoprobe Spa Sonda kontaktowa do głowicy testującej
US7180318B1 (en) * 2004-10-15 2007-02-20 Xilinx, Inc. Multi-pitch test probe assembly for testing semiconductor dies having contact pads
JP5337341B2 (ja) * 2006-11-30 2013-11-06 株式会社日本マイクロニクス 電気的接続装置およびその組み立て方法
JP4539681B2 (ja) * 2007-06-04 2010-09-08 三菱電機株式会社 ウエハテスト用プローブカード
CN107003335B (zh) * 2015-01-04 2020-05-22 金日 接触测试装置
WO2016146499A1 (en) * 2015-03-13 2016-09-22 Technoprobe S.P.A. Testing head with vertical probes having an improved sliding movement within respective guide holes and correct holding of the probes within the testing head under different operative conditions
WO2016177850A1 (en) * 2015-05-07 2016-11-10 Technoprobe S.P.A. Testing head having vertical probes, in particular for reduced pitch applications
TWI713807B (zh) * 2016-12-16 2020-12-21 義大利商探針科技公司 具有增進的頻率性質的測試頭
IT201700017061A1 (it) * 2017-02-15 2018-08-15 Technoprobe Spa Scheda di misura perfezionata per applicazioni ad alta frequenza

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0164672A2 (en) * 1984-06-15 1985-12-18 International Business Machines Corporation A multiple mode buckling beam probe assembly

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20250052783A1 (en) * 2021-12-29 2025-02-13 Technoprobe S.P.A. Contact probe for probe heads of electronic devices and corresponding probe head

Also Published As

Publication number Publication date
CN113272661A (zh) 2021-08-17
KR20210108436A (ko) 2021-09-02
SG11202106774PA (en) 2021-07-29
TW202024647A (zh) 2020-07-01
US20210318355A1 (en) 2021-10-14
IT201800021253A1 (it) 2020-06-27
EP3903111B1 (en) 2024-08-07
US11867723B2 (en) 2024-01-09
EP3903111A1 (en) 2021-11-03
PH12021551509A1 (en) 2022-03-07
JP2022515457A (ja) 2022-02-18
TWI837255B (zh) 2024-04-01
WO2020136045A1 (en) 2020-07-02

Similar Documents

Publication Publication Date Title
CN113272661B (zh) 具有与被测器件的改进的接触的垂直探针头
JP7361036B2 (ja) カンチレバーコンタクトプローブおよび対応するプローブヘッド
CN107580681B (zh) 尤其用于减小节距的应用的、具有竖直探针的测试头
US7928749B2 (en) Vertical probe comprising slots and probe card for integrated circuit devices using the same
TWI865694B (zh) 供減小間距應用的探針頭
JP7470114B2 (ja) 被試験デバイスに対する改善された接触特性を有する垂直プローブヘッド
JP2018515752A (ja) 高周波適用のためのバーチカル接触プローブ、及びバーチカル接触プローブをもつ試験ヘッド
CN114207452A (zh) 电子器件用探针头及相应的探针卡
US11442080B2 (en) Contact probe and relative probe head of an apparatus for testing electronic devices
TW201930893A (zh) 具有垂直探針之改良探針頭
KR20080035468A (ko) 프로브
US20090189620A1 (en) Compliant membrane probe
TW202242423A (zh) 對準效率提升的垂直式探針卡用針頭
JP4962929B2 (ja) プローバ装置及びこれに用いるプローブ組立体
JP2025540468A (ja) 改良型垂直プローブヘッド
US20250231219A1 (en) Testing method, device under test, probe card and probe system for micro-bump test
JP2014020787A (ja) プローブカードとその製造方法
KR20240160318A (ko) 수직형 프로브 핀을 가진 프로브 핀 조립체 및 그 제작 방법
JP2007225581A (ja) 格子状配列プローブ組立体
JP2020095002A (ja) プローブユニット
KR20130102236A (ko) 프로브 조립

Legal Events

Date Code Title Description
PB01 Publication
PB01 Publication
SE01 Entry into force of request for substantive examination
SE01 Entry into force of request for substantive examination
GR01 Patent grant
GR01 Patent grant