KR20210089206A - 피검 소자에 대해 향상된 콘택 특성을 갖는 수직형 프로브 헤드 - Google Patents

피검 소자에 대해 향상된 콘택 특성을 갖는 수직형 프로브 헤드 Download PDF

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Publication number
KR20210089206A
KR20210089206A KR1020217016991A KR20217016991A KR20210089206A KR 20210089206 A KR20210089206 A KR 20210089206A KR 1020217016991 A KR1020217016991 A KR 1020217016991A KR 20217016991 A KR20217016991 A KR 20217016991A KR 20210089206 A KR20210089206 A KR 20210089206A
Authority
KR
South Korea
Prior art keywords
guide
probe head
guide holes
contact
holes
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
KR1020217016991A
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English (en)
Korean (ko)
Inventor
스테파노 페리시
Original Assignee
테크노프로브 에스.피.에이.
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 테크노프로브 에스.피.에이. filed Critical 테크노프로브 에스.피.에이.
Publication of KR20210089206A publication Critical patent/KR20210089206A/ko
Ceased legal-status Critical Current

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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G01R1/073—Multiple probes
    • G01R1/07307—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card
    • G01R1/07342—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card the body of the probe being at an angle other than perpendicular to test object, e.g. probe card
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G01R1/073—Multiple probes
    • G01R1/07307—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card
    • G01R1/07364—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card with provisions for altering position, number or connection of probe tips; Adapting to differences in pitch
    • G01R1/07371—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card with provisions for altering position, number or connection of probe tips; Adapting to differences in pitch using an intermediate card or back card with apertures through which the probes pass
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G01R1/073—Multiple probes
    • G01R1/07307—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card
    • G01R1/07314—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card the body of the probe being perpendicular to test object, e.g. bed of nails or probe with bump contacts on a rigid support
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G01R1/073—Multiple probes
    • G01R1/07307—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card
    • G01R1/07357—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card with flexible bodies, e.g. buckling beams

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Measuring Leads Or Probes (AREA)
  • Length Measuring Devices With Unspecified Measuring Means (AREA)
  • Testing Of Individual Semiconductor Devices (AREA)
KR1020217016991A 2018-11-06 2019-11-05 피검 소자에 대해 향상된 콘택 특성을 갖는 수직형 프로브 헤드 Ceased KR20210089206A (ko)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
IT102018000010071A IT201800010071A1 (it) 2018-11-06 2018-11-06 Testa di misura a sonde verticali con migliorate proprietà di contatto con un dispositivo di test
IT102018000010071 2018-11-06
PCT/EP2019/080171 WO2020094608A1 (en) 2018-11-06 2019-11-05 Vertical probe head with improved contact properties towards a device under test

Publications (1)

Publication Number Publication Date
KR20210089206A true KR20210089206A (ko) 2021-07-15

Family

ID=65409291

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020217016991A Ceased KR20210089206A (ko) 2018-11-06 2019-11-05 피검 소자에 대해 향상된 콘택 특성을 갖는 수직형 프로브 헤드

Country Status (10)

Country Link
US (1) US12085588B2 (https=)
EP (1) EP3877768A1 (https=)
JP (1) JP7470114B2 (https=)
KR (1) KR20210089206A (https=)
CN (1) CN113039444A (https=)
IT (1) IT201800010071A1 (https=)
PH (1) PH12021550959A1 (https=)
SG (1) SG11202104299SA (https=)
TW (1) TWI837207B (https=)
WO (1) WO2020094608A1 (https=)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20240015027A (ko) * 2022-07-26 2024-02-02 스타 테크놀로지스, 인코포레이션 가이드 플레이트 구조 및 프로브 어레이
KR20240160318A (ko) 2023-05-02 2024-11-11 김상한 수직형 프로브 핀을 가진 프로브 핀 조립체 및 그 제작 방법
KR20250077306A (ko) * 2023-11-23 2025-05-30 주식회사 에스디에이 핀 포스가 조절되는 버티컬 프로브카드
KR20250118621A (ko) * 2024-01-30 2025-08-06 경북대학교 산학협력단 반도체 소자 검사용 스크럽 발생 방지형 멤스 핀

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
IT202200026214A1 (it) * 2022-12-21 2024-06-21 Technoprobe Spa Testa di misura a sonde verticali perfezionata

Family Cites Families (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6411112B1 (en) * 1998-02-19 2002-06-25 International Business Machines Corporation Off-axis contact tip and dense packing design for a fine pitch probe
JP3942823B2 (ja) * 2000-12-28 2007-07-11 山一電機株式会社 検査装置
FR2860347A1 (fr) * 2003-09-29 2005-04-01 Probest Connecteur electrique a au moins deux contacts
JP2007127488A (ja) * 2005-11-02 2007-05-24 Rika Denshi Co Ltd プローブカード
US8723546B2 (en) * 2007-10-19 2014-05-13 Microprobe, Inc. Vertical guided layered probe
EP2107380A1 (en) * 2008-04-01 2009-10-07 Technoprobe S.p.A Testing head having vertical probes configured to improve the electric contact with a device to be tested
JP2009276097A (ja) 2008-05-12 2009-11-26 Nidec-Read Corp 基板検査治具
TWI435083B (zh) * 2010-07-27 2014-04-21 Mpi Corp Combination probe head for vertical probe card and its assembly alignment method
JP6305754B2 (ja) * 2013-12-20 2018-04-04 東京特殊電線株式会社 コンタクトプローブユニット
CN107003335B (zh) * 2015-01-04 2020-05-22 金日 接触测试装置
MY187095A (en) * 2015-03-13 2021-08-31 Technoprobe Spa Testing head with vertical probes, particularly for high frequency applications
JP5822042B1 (ja) 2015-03-27 2015-11-24 日本電産リード株式会社 検査治具、基板検査装置、及び検査治具の製造方法
WO2016156002A1 (en) * 2015-03-31 2016-10-06 Technoprobe S.P.A. Contact probe and corresponding testing head with vertical probes, particularly for high frequency applications
WO2016177850A1 (en) 2015-05-07 2016-11-10 Technoprobe S.P.A. Testing head having vertical probes, in particular for reduced pitch applications
US10866266B2 (en) * 2015-10-29 2020-12-15 Taiwan Semiconductor Manufacturing Company Ltd. Probe head receiver and probe card assembly having the same
KR101886536B1 (ko) * 2016-12-27 2018-08-07 주식회사 텝스 접촉력을 조절할 수 있는 스트레이트 니들 프로브 카드
IT201700046645A1 (it) * 2017-04-28 2018-10-28 Technoprobe Spa Scheda di misura per un’apparecchiatura di test di dispositivi elettronici
WO2019129585A1 (en) * 2017-12-28 2019-07-04 Technoprobe S.P.A. Probe head having vertical probes with respectively opposite scrub directions

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20240015027A (ko) * 2022-07-26 2024-02-02 스타 테크놀로지스, 인코포레이션 가이드 플레이트 구조 및 프로브 어레이
KR20240160318A (ko) 2023-05-02 2024-11-11 김상한 수직형 프로브 핀을 가진 프로브 핀 조립체 및 그 제작 방법
KR20250077306A (ko) * 2023-11-23 2025-05-30 주식회사 에스디에이 핀 포스가 조절되는 버티컬 프로브카드
KR20250118621A (ko) * 2024-01-30 2025-08-06 경북대학교 산학협력단 반도체 소자 검사용 스크럽 발생 방지형 멤스 핀

Also Published As

Publication number Publication date
JP7470114B2 (ja) 2024-04-17
JP2022506377A (ja) 2022-01-17
US12085588B2 (en) 2024-09-10
PH12021550959A1 (en) 2021-11-29
EP3877768A1 (en) 2021-09-15
TW202022387A (zh) 2020-06-16
US20210255218A1 (en) 2021-08-19
TWI837207B (zh) 2024-04-01
SG11202104299SA (en) 2021-05-28
WO2020094608A1 (en) 2020-05-14
CN113039444A (zh) 2021-06-25
IT201800010071A1 (it) 2020-05-06

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