IT201800010071A1 - Testa di misura a sonde verticali con migliorate proprietà di contatto con un dispositivo di test - Google Patents

Testa di misura a sonde verticali con migliorate proprietà di contatto con un dispositivo di test Download PDF

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Publication number
IT201800010071A1
IT201800010071A1 IT102018000010071A IT201800010071A IT201800010071A1 IT 201800010071 A1 IT201800010071 A1 IT 201800010071A1 IT 102018000010071 A IT102018000010071 A IT 102018000010071A IT 201800010071 A IT201800010071 A IT 201800010071A IT 201800010071 A1 IT201800010071 A1 IT 201800010071A1
Authority
IT
Italy
Prior art keywords
guide
guide holes
measuring head
probes
contact
Prior art date
Application number
IT102018000010071A
Other languages
English (en)
Italian (it)
Inventor
Stefano Felici
Original Assignee
Technoprobe Spa
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Technoprobe Spa filed Critical Technoprobe Spa
Priority to IT102018000010071A priority Critical patent/IT201800010071A1/it
Priority to TW108139541A priority patent/TWI837207B/zh
Priority to EP19797728.3A priority patent/EP3877768A1/en
Priority to CN201980073132.8A priority patent/CN113039444A/zh
Priority to SG11202104299SA priority patent/SG11202104299SA/en
Priority to JP2021523712A priority patent/JP7470114B2/ja
Priority to PCT/EP2019/080171 priority patent/WO2020094608A1/en
Priority to KR1020217016991A priority patent/KR20210089206A/ko
Publication of IT201800010071A1 publication Critical patent/IT201800010071A1/it
Priority to PH12021550959A priority patent/PH12021550959A1/en
Priority to US17/308,636 priority patent/US12085588B2/en

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G01R1/073—Multiple probes
    • G01R1/07307—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card
    • G01R1/07342—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card the body of the probe being at an angle other than perpendicular to test object, e.g. probe card
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G01R1/073—Multiple probes
    • G01R1/07307—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card
    • G01R1/07364—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card with provisions for altering position, number or connection of probe tips; Adapting to differences in pitch
    • G01R1/07371—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card with provisions for altering position, number or connection of probe tips; Adapting to differences in pitch using an intermediate card or back card with apertures through which the probes pass
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G01R1/073—Multiple probes
    • G01R1/07307—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card
    • G01R1/07314—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card the body of the probe being perpendicular to test object, e.g. bed of nails or probe with bump contacts on a rigid support
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G01R1/073—Multiple probes
    • G01R1/07307—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card
    • G01R1/07357—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card with flexible bodies, e.g. buckling beams

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Measuring Leads Or Probes (AREA)
  • Length Measuring Devices With Unspecified Measuring Means (AREA)
  • Testing Of Individual Semiconductor Devices (AREA)
IT102018000010071A 2018-11-06 2018-11-06 Testa di misura a sonde verticali con migliorate proprietà di contatto con un dispositivo di test IT201800010071A1 (it)

Priority Applications (10)

Application Number Priority Date Filing Date Title
IT102018000010071A IT201800010071A1 (it) 2018-11-06 2018-11-06 Testa di misura a sonde verticali con migliorate proprietà di contatto con un dispositivo di test
TW108139541A TWI837207B (zh) 2018-11-06 2019-10-31 對於待測裝置具有增進的接觸性質的垂直探針頭及其探針卡
EP19797728.3A EP3877768A1 (en) 2018-11-06 2019-11-05 Vertical probe head with improved contact properties towards a device under test
CN201980073132.8A CN113039444A (zh) 2018-11-06 2019-11-05 对被测器件具有改进的接触性能的垂直探针头
SG11202104299SA SG11202104299SA (en) 2018-11-06 2019-11-05 Vertical probe head with improved contact properties towards a device under test
JP2021523712A JP7470114B2 (ja) 2018-11-06 2019-11-05 被試験デバイスに対する改善された接触特性を有する垂直プローブヘッド
PCT/EP2019/080171 WO2020094608A1 (en) 2018-11-06 2019-11-05 Vertical probe head with improved contact properties towards a device under test
KR1020217016991A KR20210089206A (ko) 2018-11-06 2019-11-05 피검 소자에 대해 향상된 콘택 특성을 갖는 수직형 프로브 헤드
PH12021550959A PH12021550959A1 (en) 2018-11-06 2021-04-27 Vertical probe head with improved contact properties towards a device under test
US17/308,636 US12085588B2 (en) 2018-11-06 2021-05-05 Vertical probe head with improved contact properties towards a device under test

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
IT102018000010071A IT201800010071A1 (it) 2018-11-06 2018-11-06 Testa di misura a sonde verticali con migliorate proprietà di contatto con un dispositivo di test

Publications (1)

Publication Number Publication Date
IT201800010071A1 true IT201800010071A1 (it) 2020-05-06

Family

ID=65409291

Family Applications (1)

Application Number Title Priority Date Filing Date
IT102018000010071A IT201800010071A1 (it) 2018-11-06 2018-11-06 Testa di misura a sonde verticali con migliorate proprietà di contatto con un dispositivo di test

Country Status (10)

Country Link
US (1) US12085588B2 (https=)
EP (1) EP3877768A1 (https=)
JP (1) JP7470114B2 (https=)
KR (1) KR20210089206A (https=)
CN (1) CN113039444A (https=)
IT (1) IT201800010071A1 (https=)
PH (1) PH12021550959A1 (https=)
SG (1) SG11202104299SA (https=)
TW (1) TWI837207B (https=)
WO (1) WO2020094608A1 (https=)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI831307B (zh) * 2022-07-26 2024-02-01 思達科技股份有限公司 導板結構及探針陣列
IT202200026214A1 (it) * 2022-12-21 2024-06-21 Technoprobe Spa Testa di misura a sonde verticali perfezionata
KR20240160318A (ko) 2023-05-02 2024-11-11 김상한 수직형 프로브 핀을 가진 프로브 핀 조립체 및 그 제작 방법
KR102923549B1 (ko) * 2023-11-23 2026-02-06 주식회사 에스디에이 핀 포스가 조절되는 버티컬 프로브카드
KR102854722B1 (ko) * 2024-01-30 2025-09-02 경북대학교 산학협력단 반도체 소자 검사용 스크럽 발생 방지형 멤스 핀

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6411112B1 (en) * 1998-02-19 2002-06-25 International Business Machines Corporation Off-axis contact tip and dense packing design for a fine pitch probe
US20020086562A1 (en) * 2000-12-28 2002-07-04 Yamaichi Electronics Co., Ltd. Contact pin module and testing device provided with the same
FR2860347A1 (fr) * 2003-09-29 2005-04-01 Probest Connecteur electrique a au moins deux contacts
US20120025859A1 (en) * 2010-07-27 2012-02-02 Chao-Ching Huang Combined probe head for a vertical probe card and method for assembling and aligning the combined probe head thereof
JP2015118064A (ja) * 2013-12-20 2015-06-25 東京特殊電線株式会社 コンタクトプローブユニット
WO2016108520A1 (ko) * 2015-01-04 2016-07-07 김일 검사접촉장치

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007127488A (ja) * 2005-11-02 2007-05-24 Rika Denshi Co Ltd プローブカード
US8723546B2 (en) * 2007-10-19 2014-05-13 Microprobe, Inc. Vertical guided layered probe
EP2107380A1 (en) * 2008-04-01 2009-10-07 Technoprobe S.p.A Testing head having vertical probes configured to improve the electric contact with a device to be tested
JP2009276097A (ja) 2008-05-12 2009-11-26 Nidec-Read Corp 基板検査治具
MY187095A (en) * 2015-03-13 2021-08-31 Technoprobe Spa Testing head with vertical probes, particularly for high frequency applications
JP5822042B1 (ja) 2015-03-27 2015-11-24 日本電産リード株式会社 検査治具、基板検査装置、及び検査治具の製造方法
WO2016156002A1 (en) * 2015-03-31 2016-10-06 Technoprobe S.P.A. Contact probe and corresponding testing head with vertical probes, particularly for high frequency applications
WO2016177850A1 (en) 2015-05-07 2016-11-10 Technoprobe S.P.A. Testing head having vertical probes, in particular for reduced pitch applications
US10866266B2 (en) * 2015-10-29 2020-12-15 Taiwan Semiconductor Manufacturing Company Ltd. Probe head receiver and probe card assembly having the same
KR101886536B1 (ko) * 2016-12-27 2018-08-07 주식회사 텝스 접촉력을 조절할 수 있는 스트레이트 니들 프로브 카드
IT201700046645A1 (it) * 2017-04-28 2018-10-28 Technoprobe Spa Scheda di misura per un’apparecchiatura di test di dispositivi elettronici
WO2019129585A1 (en) * 2017-12-28 2019-07-04 Technoprobe S.P.A. Probe head having vertical probes with respectively opposite scrub directions

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6411112B1 (en) * 1998-02-19 2002-06-25 International Business Machines Corporation Off-axis contact tip and dense packing design for a fine pitch probe
US20020086562A1 (en) * 2000-12-28 2002-07-04 Yamaichi Electronics Co., Ltd. Contact pin module and testing device provided with the same
FR2860347A1 (fr) * 2003-09-29 2005-04-01 Probest Connecteur electrique a au moins deux contacts
US20120025859A1 (en) * 2010-07-27 2012-02-02 Chao-Ching Huang Combined probe head for a vertical probe card and method for assembling and aligning the combined probe head thereof
JP2015118064A (ja) * 2013-12-20 2015-06-25 東京特殊電線株式会社 コンタクトプローブユニット
WO2016108520A1 (ko) * 2015-01-04 2016-07-07 김일 검사접촉장치

Also Published As

Publication number Publication date
JP7470114B2 (ja) 2024-04-17
JP2022506377A (ja) 2022-01-17
US12085588B2 (en) 2024-09-10
PH12021550959A1 (en) 2021-11-29
EP3877768A1 (en) 2021-09-15
KR20210089206A (ko) 2021-07-15
TW202022387A (zh) 2020-06-16
US20210255218A1 (en) 2021-08-19
TWI837207B (zh) 2024-04-01
SG11202104299SA (en) 2021-05-28
WO2020094608A1 (en) 2020-05-14
CN113039444A (zh) 2021-06-25

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