JP2022128755A5 - - Google Patents
Download PDFInfo
- Publication number
- JP2022128755A5 JP2022128755A5 JP2021027147A JP2021027147A JP2022128755A5 JP 2022128755 A5 JP2022128755 A5 JP 2022128755A5 JP 2021027147 A JP2021027147 A JP 2021027147A JP 2021027147 A JP2021027147 A JP 2021027147A JP 2022128755 A5 JP2022128755 A5 JP 2022128755A5
- Authority
- JP
- Japan
- Prior art keywords
- nitride
- nitride material
- less
- material according
- equal
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000000463 material Substances 0.000 claims 13
- 150000004767 nitrides Chemical class 0.000 claims 12
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 claims 2
- KDLHZDBZIXYQEI-UHFFFAOYSA-N Palladium Chemical compound [Pd] KDLHZDBZIXYQEI-UHFFFAOYSA-N 0.000 claims 2
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 claims 2
- 239000000126 substance Substances 0.000 claims 2
- 239000000758 substrate Substances 0.000 claims 2
- 229910052718 tin Inorganic materials 0.000 claims 2
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 claims 1
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims 1
- 229910002601 GaN Inorganic materials 0.000 claims 1
- JMASRVWKEDWRBT-UHFFFAOYSA-N Gallium nitride Chemical compound [Ga]#N JMASRVWKEDWRBT-UHFFFAOYSA-N 0.000 claims 1
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 claims 1
- KJTLSVCANCCWHF-UHFFFAOYSA-N Ruthenium Chemical compound [Ru] KJTLSVCANCCWHF-UHFFFAOYSA-N 0.000 claims 1
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 claims 1
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 claims 1
- NRTOMJZYCJJWKI-UHFFFAOYSA-N Titanium nitride Chemical compound [Ti]#N NRTOMJZYCJJWKI-UHFFFAOYSA-N 0.000 claims 1
- 229910052782 aluminium Inorganic materials 0.000 claims 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims 1
- SJKRCWUQJZIWQB-UHFFFAOYSA-N azane;chromium Chemical compound N.[Cr] SJKRCWUQJZIWQB-UHFFFAOYSA-N 0.000 claims 1
- NWAIGJYBQQYSPW-UHFFFAOYSA-N azanylidyneindigane Chemical compound [In]#N NWAIGJYBQQYSPW-UHFFFAOYSA-N 0.000 claims 1
- CUOITRGULIVMPC-UHFFFAOYSA-N azanylidynescandium Chemical compound [Sc]#N CUOITRGULIVMPC-UHFFFAOYSA-N 0.000 claims 1
- XLWMYKCPNRBIDK-UHFFFAOYSA-N azanylidyneytterbium Chemical compound [Yb]#N XLWMYKCPNRBIDK-UHFFFAOYSA-N 0.000 claims 1
- 229910052804 chromium Inorganic materials 0.000 claims 1
- 239000011651 chromium Substances 0.000 claims 1
- 229910052802 copper Inorganic materials 0.000 claims 1
- 239000010949 copper Substances 0.000 claims 1
- PMHQVHHXPFUNSP-UHFFFAOYSA-M copper(1+);methylsulfanylmethane;bromide Chemical group Br[Cu].CSC PMHQVHHXPFUNSP-UHFFFAOYSA-M 0.000 claims 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 claims 1
- 229910052737 gold Inorganic materials 0.000 claims 1
- 239000010931 gold Substances 0.000 claims 1
- 229910052735 hafnium Inorganic materials 0.000 claims 1
- VBJZVLUMGGDVMO-UHFFFAOYSA-N hafnium atom Chemical compound [Hf] VBJZVLUMGGDVMO-UHFFFAOYSA-N 0.000 claims 1
- 229910052741 iridium Inorganic materials 0.000 claims 1
- GKOZUEZYRPOHIO-UHFFFAOYSA-N iridium atom Chemical compound [Ir] GKOZUEZYRPOHIO-UHFFFAOYSA-N 0.000 claims 1
- 229910052750 molybdenum Inorganic materials 0.000 claims 1
- 239000011733 molybdenum Substances 0.000 claims 1
- 229910052759 nickel Inorganic materials 0.000 claims 1
- 229910052763 palladium Inorganic materials 0.000 claims 1
- 229910052697 platinum Inorganic materials 0.000 claims 1
- 229910052707 ruthenium Inorganic materials 0.000 claims 1
- 229910001925 ruthenium oxide Inorganic materials 0.000 claims 1
- WOCIAKWEIIZHES-UHFFFAOYSA-N ruthenium(iv) oxide Chemical compound O=[Ru]=O WOCIAKWEIIZHES-UHFFFAOYSA-N 0.000 claims 1
- 229910052706 scandium Inorganic materials 0.000 claims 1
- SIXSYDAISGFNSX-UHFFFAOYSA-N scandium atom Chemical compound [Sc] SIXSYDAISGFNSX-UHFFFAOYSA-N 0.000 claims 1
- 229910052709 silver Inorganic materials 0.000 claims 1
- 239000004332 silver Substances 0.000 claims 1
- 229910052715 tantalum Inorganic materials 0.000 claims 1
- GUVRBAGPIYLISA-UHFFFAOYSA-N tantalum atom Chemical compound [Ta] GUVRBAGPIYLISA-UHFFFAOYSA-N 0.000 claims 1
- 229910052719 titanium Inorganic materials 0.000 claims 1
- 239000010936 titanium Substances 0.000 claims 1
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 claims 1
- 229910052721 tungsten Inorganic materials 0.000 claims 1
- 239000010937 tungsten Substances 0.000 claims 1
Priority Applications (6)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2021027147A JP7572048B2 (ja) | 2021-02-24 | 2021-02-24 | 窒化物材料およびそれからなる圧電体並びにその圧電体を用いたｍｅｍｓデバイス、トランジスタ、インバーター、トランスデューサー、ｓａｗデバイスおよび強誘電体メモリ |
| US18/264,362 US20240101423A1 (en) | 2021-02-24 | 2021-11-24 | Nitride material, piezoelectric body formed of same, and mems device, transistor, inverter, transducer, saw device, and ferroelectric memory using the piezoelectric body |
| PCT/JP2021/042898 WO2022180961A1 (ja) | 2021-02-24 | 2021-11-24 | 窒化物材料およびそれからなる圧電体並びにその圧電体を用いたｍｅｍｓデバイス、トランジスタ、インバーター、トランスデューサー、ｓａｗデバイスおよび強誘電体メモリ |
| CN202180094141.2A CN116897615A (zh) | 2021-02-24 | 2021-11-24 | 氮化物材料和由其构成的压电体以及使用该压电体的mems器件、晶体管、逆变器、换能器、saw器件和铁电存储器 |
| KR1020237021492A KR102803105B1 (ko) | 2021-02-24 | 2021-11-24 | 질화물 재료 및 그것으로 이루어지는 압전체 및 그 압전체를 이용한 mems 디바이스, 트랜지스터, 인버터, 트랜스듀서, saw 디바이스 및 강유전체 메모리 |
| EP21928055.9A EP4273945A4 (en) | 2021-02-24 | 2021-11-24 | NITRIDE MATERIAL, PIEZOELECTRIC BODY MADE THEREOF, AND MEMS DEVICE, TRANSISTOR, INVERTER, TRANSDUCER, SAW DEVICE, AND FERROELECTRIC MEMORY EACH USING SAID PIEZOELECTRIC BODY |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2021027147A JP7572048B2 (ja) | 2021-02-24 | 2021-02-24 | 窒化物材料およびそれからなる圧電体並びにその圧電体を用いたｍｅｍｓデバイス、トランジスタ、インバーター、トランスデューサー、ｓａｗデバイスおよび強誘電体メモリ |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2022128755A JP2022128755A (ja) | 2022-09-05 |
| JP2022128755A5 true JP2022128755A5 (https=) | 2023-05-29 |
| JP7572048B2 JP7572048B2 (ja) | 2024-10-23 |
Family
ID=83047919
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2021027147A Active JP7572048B2 (ja) | 2021-02-24 | 2021-02-24 | 窒化物材料およびそれからなる圧電体並びにその圧電体を用いたｍｅｍｓデバイス、トランジスタ、インバーター、トランスデューサー、ｓａｗデバイスおよび強誘電体メモリ |
Country Status (6)
| Country | Link |
|---|---|
| US (1) | US20240101423A1 (https=) |
| EP (1) | EP4273945A4 (https=) |
| JP (1) | JP7572048B2 (https=) |
| KR (1) | KR102803105B1 (https=) |
| CN (1) | CN116897615A (https=) |
| WO (1) | WO2022180961A1 (https=) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE102022213055A1 (de) * | 2022-12-05 | 2024-06-06 | Robert Bosch Gesellschaft mit beschränkter Haftung | Piezoelektrische Wandlervorrichtung |
| CN116056553B (zh) * | 2023-01-19 | 2025-10-28 | 河北大学 | 基于氮化铝钪的铁电忆阻器、其制备方法及应用 |
Family Cites Families (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP5190841B2 (ja) | 2007-05-31 | 2013-04-24 | 独立行政法人産業技術総合研究所 | 圧電体薄膜、圧電体およびそれらの製造方法、ならびに当該圧電体薄膜を用いた圧電体共振子、アクチュエータ素子および物理センサー |
| JP2009228131A (ja) * | 2008-02-27 | 2009-10-08 | Sumitomo Electric Ind Ltd | 窒化アルミニウム薄膜およびその製造方法 |
| JP5817673B2 (ja) * | 2011-11-18 | 2015-11-18 | 株式会社村田製作所 | 圧電薄膜共振子及び圧電薄膜の製造方法 |
| JP5843198B2 (ja) * | 2012-01-23 | 2016-01-13 | 国立研究開発法人産業技術総合研究所 | 圧電素子およびその製造方法、ならびに圧電センサ |
| JP5966199B2 (ja) * | 2013-05-31 | 2016-08-10 | 株式会社デンソー | 圧電体薄膜及びその製造方法 |
| JP6123019B2 (ja) * | 2014-03-03 | 2017-04-26 | 株式会社村田製作所 | 窒化アルミニウム圧電薄膜、圧電材、圧電部品及び窒化アルミニウム圧電薄膜の製造方法 |
| JP6565118B2 (ja) * | 2015-08-24 | 2019-08-28 | 株式会社村田製作所 | 窒化アルミニウム圧電薄膜及びその製造方法、並びに圧電材及び圧電部品及び窒化アルミニウム圧電薄膜の製造方法 |
| GB2578979B (en) * | 2017-07-07 | 2023-01-18 | Skyworks Solutions Inc | Substituted aluminium nitride for improved acoustic wave filters |
| US11557716B2 (en) * | 2018-02-20 | 2023-01-17 | Akoustis, Inc. | Method and structure of single crystal electronic devices with enhanced strain interface regions by impurity introduction |
| JP7151096B2 (ja) * | 2018-02-21 | 2022-10-12 | 株式会社デンソー | 圧電膜、その製造方法、圧電膜積層体、その製造方法 |
-
2021
- 2021-02-24 JP JP2021027147A patent/JP7572048B2/ja active Active
- 2021-11-24 WO PCT/JP2021/042898 patent/WO2022180961A1/ja not_active Ceased
- 2021-11-24 US US18/264,362 patent/US20240101423A1/en active Pending
- 2021-11-24 EP EP21928055.9A patent/EP4273945A4/en active Pending
- 2021-11-24 CN CN202180094141.2A patent/CN116897615A/zh active Pending
- 2021-11-24 KR KR1020237021492A patent/KR102803105B1/ko active Active
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JP5190841B2 (ja) | 圧電体薄膜、圧電体およびそれらの製造方法、ならびに当該圧電体薄膜を用いた圧電体共振子、アクチュエータ素子および物理センサー | |
| JP2022128755A5 (https=) | ||
| US7758979B2 (en) | Piezoelectric thin film, piezoelectric material, and fabrication method of piezoelectric thin film and piezoelectric material, and piezoelectric resonator, actuator element, and physical sensor using piezoelectric thin film | |
| JP2004282050A5 (https=) | ||
| JP6605215B2 (ja) | 強誘電体薄膜積層基板、強誘電体薄膜素子、および強誘電体薄膜積層基板の製造方法 | |
| CN101507093B (zh) | 用于超声电机的压电致动器元件 | |
| JP2018181870A (ja) | 発電素子 | |
| JP6196797B2 (ja) | 圧電体薄膜積層基板及び圧電体薄膜素子 | |
| CN102639431B (zh) | 致动器和驱动致动器的方法 | |
| KR102803105B1 (ko) | 질화물 재료 및 그것으로 이루어지는 압전체 및 그 압전체를 이용한 mems 디바이스, 트랜지스터, 인버터, 트랜스듀서, saw 디바이스 및 강유전체 메모리 | |
| JPH10209517A (ja) | 圧電素子 | |
| JP2011192736A (ja) | 圧電体薄膜素子及び圧電体薄膜デバイス | |
| JPWO2024048767A5 (https=) | ||
| US20080047816A1 (en) | Mems switch | |
| JP7085208B2 (ja) | 圧電体およびそれを用いたｍｅｍｓデバイス | |
| JP2024034606A5 (https=) | ||
| US20250331194A1 (en) | Ferroelectric capacitor structure | |
| JP2005167226A5 (https=) | ||
| JPWO2024048766A5 (https=) | ||
| JP2003529943A (ja) | ピエゾセラミックス湾曲変換器 | |
| CN121398444A (zh) | 压电振膜及其制备方法、采用该压电振膜的mems器件 | |
| JP2005165305A5 (https=) | ||
| JP2005228838A (ja) | 圧電薄膜素子 | |
| JP2007242788A (ja) | 圧電薄膜素子 | |
| CN116367696A (zh) | 压电装置 |