JP2024034606A5 - - Google Patents

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Publication number
JP2024034606A5
JP2024034606A5 JP2022138963A JP2022138963A JP2024034606A5 JP 2024034606 A5 JP2024034606 A5 JP 2024034606A5 JP 2022138963 A JP2022138963 A JP 2022138963A JP 2022138963 A JP2022138963 A JP 2022138963A JP 2024034606 A5 JP2024034606 A5 JP 2024034606A5
Authority
JP
Japan
Prior art keywords
atomic
thin film
film laminate
producing
pzt thin
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2022138963A
Other languages
English (en)
Japanese (ja)
Other versions
JP2024034606A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP2022138963A priority Critical patent/JP2024034606A/ja
Priority claimed from JP2022138963A external-priority patent/JP2024034606A/ja
Publication of JP2024034606A publication Critical patent/JP2024034606A/ja
Publication of JP2024034606A5 publication Critical patent/JP2024034606A5/ja
Pending legal-status Critical Current

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JP2022138963A 2022-09-01 2022-09-01 Ｐｚｔ薄膜積層体の成膜方法およびｐｚｔ薄膜積層体 Pending JP2024034606A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2022138963A JP2024034606A (ja) 2022-09-01 2022-09-01 Ｐｚｔ薄膜積層体の成膜方法およびｐｚｔ薄膜積層体

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2022138963A JP2024034606A (ja) 2022-09-01 2022-09-01 Ｐｚｔ薄膜積層体の成膜方法およびｐｚｔ薄膜積層体

Publications (2)

Publication Number Publication Date
JP2024034606A JP2024034606A (ja) 2024-03-13
JP2024034606A5 true JP2024034606A5 (https=) 2025-07-25

Family

ID=90194167

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2022138963A Pending JP2024034606A (ja) 2022-09-01 2022-09-01 Ｐｚｔ薄膜積層体の成膜方法およびｐｚｔ薄膜積層体

Country Status (1)

Country Link
JP (1) JP2024034606A (https=)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP7839323B1 (ja) * 2025-02-04 2026-04-01 株式会社アルバック 多層構造体の製造方法

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