JP2022111806A5 - - Google Patents
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- Publication number
- JP2022111806A5 JP2022111806A5 JP2021007474A JP2021007474A JP2022111806A5 JP 2022111806 A5 JP2022111806 A5 JP 2022111806A5 JP 2021007474 A JP2021007474 A JP 2021007474A JP 2021007474 A JP2021007474 A JP 2021007474A JP 2022111806 A5 JP2022111806 A5 JP 2022111806A5
- Authority
- JP
- Japan
- Prior art keywords
- metal compound
- photoelectric conversion
- layer
- conversion device
- atoms
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
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- 150000002736 metal compounds Chemical class 0.000 claims 36
- 238000006243 chemical reaction Methods 0.000 claims 31
- 239000004065 semiconductor Substances 0.000 claims 21
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims 12
- 229910052799 carbon Inorganic materials 0.000 claims 12
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 claims 10
- 229910052739 hydrogen Inorganic materials 0.000 claims 10
- 239000001257 hydrogen Substances 0.000 claims 10
- 229910000449 hafnium oxide Inorganic materials 0.000 claims 4
- WIHZLLGSGQNAGK-UHFFFAOYSA-N hafnium(4+);oxygen(2-) Chemical compound [O-2].[O-2].[Hf+4] WIHZLLGSGQNAGK-UHFFFAOYSA-N 0.000 claims 4
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 claims 4
- BPUBBGLMJRNUCC-UHFFFAOYSA-N oxygen(2-);tantalum(5+) Chemical compound [O-2].[O-2].[O-2].[O-2].[O-2].[Ta+5].[Ta+5] BPUBBGLMJRNUCC-UHFFFAOYSA-N 0.000 claims 4
- 229910001936 tantalum oxide Inorganic materials 0.000 claims 4
- GWEVSGVZZGPLCZ-UHFFFAOYSA-N Titan oxide Chemical compound O=[Ti]=O GWEVSGVZZGPLCZ-UHFFFAOYSA-N 0.000 claims 3
- RVTZCBVAJQQJTK-UHFFFAOYSA-N oxygen(2-);zirconium(4+) Chemical compound [O-2].[O-2].[Zr+4] RVTZCBVAJQQJTK-UHFFFAOYSA-N 0.000 claims 3
- OGIDPMRJRNCKJF-UHFFFAOYSA-N titanium oxide Inorganic materials [Ti]=O OGIDPMRJRNCKJF-UHFFFAOYSA-N 0.000 claims 3
- 229910001928 zirconium oxide Inorganic materials 0.000 claims 3
- 238000000034 method Methods 0.000 claims 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical group O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims 1
- 230000003287 optical effect Effects 0.000 claims 1
- 229910052814 silicon oxide Inorganic materials 0.000 claims 1
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2021007474A JP7604244B2 (ja) | 2021-01-20 | 2021-01-20 | 光電変換装置および機器 |
| US17/575,504 US12159946B2 (en) | 2021-01-20 | 2022-01-13 | Photoelectric conversion apparatus including metal film containing hydrogen and carbon |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2021007474A JP7604244B2 (ja) | 2021-01-20 | 2021-01-20 | 光電変換装置および機器 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2022111806A JP2022111806A (ja) | 2022-08-01 |
| JP2022111806A5 true JP2022111806A5 (https=) | 2024-01-19 |
| JP7604244B2 JP7604244B2 (ja) | 2024-12-23 |
Family
ID=82405542
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2021007474A Active JP7604244B2 (ja) | 2021-01-20 | 2021-01-20 | 光電変換装置および機器 |
Country Status (2)
| Country | Link |
|---|---|
| US (1) | US12159946B2 (https=) |
| JP (1) | JP7604244B2 (https=) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US11450646B1 (en) * | 2012-12-22 | 2022-09-20 | Monolithic 3D Inc. | 3D semiconductor device and structure with metal layers |
Family Cites Families (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4780931B2 (ja) | 2003-05-13 | 2011-09-28 | 京セラ株式会社 | 光電変換装置および光発電装置 |
| WO2013115275A1 (ja) | 2012-01-30 | 2013-08-08 | 京セラ株式会社 | 光電変換素子の製造方法および光電変換素子 |
| EP2833418B1 (en) | 2012-03-30 | 2016-12-14 | Kyocera Corporation | Solar cell element |
| JP5801245B2 (ja) | 2012-04-09 | 2015-10-28 | 株式会社東芝 | 固体撮像装置 |
| JP2016062998A (ja) | 2014-09-16 | 2016-04-25 | 株式会社東芝 | 固体撮像装置 |
| JP7214373B2 (ja) * | 2018-06-04 | 2023-01-30 | キヤノン株式会社 | 固体撮像素子及び固体撮像素子の製造方法、撮像システム |
| JP7013425B2 (ja) | 2019-10-02 | 2022-01-31 | キヤノン株式会社 | 光電変換装置、及び撮像システム |
| JP7414492B2 (ja) * | 2019-11-29 | 2024-01-16 | キヤノン株式会社 | 光電変換装置、光電変換装置の製造方法 |
| TW202210653A (zh) * | 2020-09-07 | 2022-03-16 | 日商半導體能源研究所股份有限公司 | 金屬氧化物膜、半導體裝置以及其製造方法 |
| EP4092453A1 (en) * | 2021-05-20 | 2022-11-23 | Canon Kabushiki Kaisha | Film, element, and equipment |
-
2021
- 2021-01-20 JP JP2021007474A patent/JP7604244B2/ja active Active
-
2022
- 2022-01-13 US US17/575,504 patent/US12159946B2/en active Active
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