JP2005116483A5 - - Google Patents
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- Publication number
- JP2005116483A5 JP2005116483A5 JP2003352803A JP2003352803A JP2005116483A5 JP 2005116483 A5 JP2005116483 A5 JP 2005116483A5 JP 2003352803 A JP2003352803 A JP 2003352803A JP 2003352803 A JP2003352803 A JP 2003352803A JP 2005116483 A5 JP2005116483 A5 JP 2005116483A5
- Authority
- JP
- Japan
- Prior art keywords
- film
- inorganic insulating
- light
- insulating film
- emitting device
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
Links
- 229920000642 polymer Polymers 0.000 claims 14
- 238000000034 method Methods 0.000 claims 13
- 229920002554 vinyl polymer Polymers 0.000 claims 11
- 229910052581 Si3N4 Inorganic materials 0.000 claims 8
- 238000004519 manufacturing process Methods 0.000 claims 8
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 claims 8
- HSFWRNGVRCDJHI-UHFFFAOYSA-N alpha-acetylene Natural products C#C HSFWRNGVRCDJHI-UHFFFAOYSA-N 0.000 claims 7
- 150000001993 dienes Chemical class 0.000 claims 7
- 125000002534 ethynyl group Chemical group [H]C#C* 0.000 claims 7
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims 5
- 229910052799 carbon Inorganic materials 0.000 claims 5
- -1 ethylene, propylene, styrene Chemical group 0.000 claims 5
- 239000010410 layer Substances 0.000 claims 5
- 150000002894 organic compounds Chemical class 0.000 claims 4
- 238000004544 sputter deposition Methods 0.000 claims 4
- 239000000758 substrate Substances 0.000 claims 4
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims 3
- 229910003481 amorphous carbon Inorganic materials 0.000 claims 3
- 229910052814 silicon oxide Inorganic materials 0.000 claims 3
- NLHHRLWOUZZQLW-UHFFFAOYSA-N Acrylonitrile Chemical compound C=CC#N NLHHRLWOUZZQLW-UHFFFAOYSA-N 0.000 claims 2
- VQTUBCCKSQIDNK-UHFFFAOYSA-N Isobutene Chemical group CC(C)=C VQTUBCCKSQIDNK-UHFFFAOYSA-N 0.000 claims 2
- CERQOIWHTDAKMF-UHFFFAOYSA-N Methacrylic acid Chemical class CC(=C)C(O)=O CERQOIWHTDAKMF-UHFFFAOYSA-N 0.000 claims 2
- PPBRXRYQALVLMV-UHFFFAOYSA-N Styrene Natural products C=CC1=CC=CC=C1 PPBRXRYQALVLMV-UHFFFAOYSA-N 0.000 claims 2
- QYKIQEUNHZKYBP-UHFFFAOYSA-N Vinyl ether Chemical class C=COC=C QYKIQEUNHZKYBP-UHFFFAOYSA-N 0.000 claims 2
- 150000001252 acrylic acid derivatives Chemical class 0.000 claims 2
- YIWFBNMYFYINAD-UHFFFAOYSA-N ethenylcyclopropane Chemical compound C=CC1CC1 YIWFBNMYFYINAD-UHFFFAOYSA-N 0.000 claims 2
- KKFHAJHLJHVUDM-UHFFFAOYSA-N n-vinylcarbazole Chemical class C1=CC=C2N(C=C)C3=CC=CC=C3C2=C1 KKFHAJHLJHVUDM-UHFFFAOYSA-N 0.000 claims 2
- 239000002356 single layer Substances 0.000 claims 2
- 125000003011 styrenyl group Chemical class [H]\C(*)=C(/[H])C1=C([H])C([H])=C([H])C([H])=C1[H] 0.000 claims 2
- 229920001567 vinyl ester resin Chemical class 0.000 claims 2
- 125000000391 vinyl group Chemical class [H]C([*])=C([H])[H] 0.000 claims 2
- UIYCHXAGWOYNNA-UHFFFAOYSA-N vinyl sulfide Chemical class C=CSC=C UIYCHXAGWOYNNA-UHFFFAOYSA-N 0.000 claims 2
- 230000001413 cellular effect Effects 0.000 claims 1
- 239000012528 membrane Substances 0.000 claims 1
- 238000005240 physical vapour deposition Methods 0.000 claims 1
- 238000006116 polymerization reaction Methods 0.000 claims 1
- 238000009751 slip forming Methods 0.000 claims 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2003352803A JP2005116483A (ja) | 2003-10-10 | 2003-10-10 | 半導体装置およびその作製方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2003352803A JP2005116483A (ja) | 2003-10-10 | 2003-10-10 | 半導体装置およびその作製方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2005116483A JP2005116483A (ja) | 2005-04-28 |
| JP2005116483A5 true JP2005116483A5 (https=) | 2006-10-19 |
Family
ID=34543613
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2003352803A Withdrawn JP2005116483A (ja) | 2003-10-10 | 2003-10-10 | 半導体装置およびその作製方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2005116483A (https=) |
Families Citing this family (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4337852B2 (ja) * | 2006-08-30 | 2009-09-30 | セイコーエプソン株式会社 | 有機エレクトロルミネッセンス装置とその製造方法及び電子機器 |
| JP4776556B2 (ja) * | 2007-01-26 | 2011-09-21 | 株式会社アルバック | 有機ｅｌ素子、有機ｅｌ素子の製造方法 |
| JP2008226472A (ja) * | 2007-03-08 | 2008-09-25 | Tokyo Electron Ltd | 電子デバイス、電子デバイスの製造方法、封止膜の構造体、電子デバイスを製造する製造装置およびプラズマ処理装置 |
| KR101311670B1 (ko) * | 2007-07-09 | 2013-09-25 | 엘지디스플레이 주식회사 | 유기전계발광표시장치 및 그 제조방법 |
| JP2009037812A (ja) * | 2007-07-31 | 2009-02-19 | Sumitomo Chemical Co Ltd | 有機ｅｌ装置およびその製造方法 |
| JP5119865B2 (ja) * | 2007-11-02 | 2013-01-16 | セイコーエプソン株式会社 | 有機エレクトロルミネッセンス装置、電子機器 |
| JP5012848B2 (ja) * | 2009-05-13 | 2012-08-29 | セイコーエプソン株式会社 | 有機エレクトロルミネッセンス装置及び電子機器 |
| CN115377229A (zh) * | 2022-09-16 | 2022-11-22 | 武汉敏芯半导体股份有限公司 | 一种二氧化硅钝化膜及其制作方法 |
Family Cites Families (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP3175712B2 (ja) * | 1998-10-23 | 2001-06-11 | 日本電気株式会社 | Ｄｌｃ保護膜と該保護膜を用いた有機ｅｌ素子及びそれらの製造方法 |
| US6268695B1 (en) * | 1998-12-16 | 2001-07-31 | Battelle Memorial Institute | Environmental barrier material for organic light emitting device and method of making |
| JP2001307873A (ja) * | 2000-04-21 | 2001-11-02 | Toppan Printing Co Ltd | 有機エレクトロルミネッセンス表示素子およびその製造方法 |
| JP3783099B2 (ja) * | 2000-05-16 | 2006-06-07 | 株式会社豊田中央研究所 | 有機電界発光素子 |
| JP4660065B2 (ja) * | 2000-08-04 | 2011-03-30 | 積水化学工業株式会社 | 導電性微粒子及び基板構成体 |
| JP4255643B2 (ja) * | 2001-02-21 | 2009-04-15 | 株式会社半導体エネルギー研究所 | 発光装置及びその作製方法 |
| JP3694249B2 (ja) * | 2001-04-25 | 2005-09-14 | 積水化学工業株式会社 | 微粒子のめっき方法及び導電性微粒子及び接続構造体 |
| US7109653B2 (en) * | 2002-01-15 | 2006-09-19 | Seiko Epson Corporation | Sealing structure with barrier membrane for electronic element, display device, electronic apparatus, and fabrication method for electronic element |
-
2003
- 2003-10-10 JP JP2003352803A patent/JP2005116483A/ja not_active Withdrawn
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