JP5801245B2 - 固体撮像装置 - Google Patents
固体撮像装置 Download PDFInfo
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- JP5801245B2 JP5801245B2 JP2012088587A JP2012088587A JP5801245B2 JP 5801245 B2 JP5801245 B2 JP 5801245B2 JP 2012088587 A JP2012088587 A JP 2012088587A JP 2012088587 A JP2012088587 A JP 2012088587A JP 5801245 B2 JP5801245 B2 JP 5801245B2
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- 238000003384 imaging method Methods 0.000 title claims description 15
- 230000014759 maintenance of location Effects 0.000 claims description 47
- 229910044991 metal oxide Inorganic materials 0.000 claims description 13
- 150000004706 metal oxides Chemical class 0.000 claims description 13
- 239000001301 oxygen Substances 0.000 claims description 13
- 229910052760 oxygen Inorganic materials 0.000 claims description 13
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims description 12
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 6
- 229910052814 silicon oxide Inorganic materials 0.000 claims description 6
- 229910052751 metal Inorganic materials 0.000 claims description 5
- 239000002184 metal Substances 0.000 claims description 4
- 239000010408 film Substances 0.000 description 138
- 239000010410 layer Substances 0.000 description 137
- 239000004065 semiconductor Substances 0.000 description 48
- 239000012535 impurity Substances 0.000 description 15
- 239000002356 single layer Substances 0.000 description 12
- 239000000758 substrate Substances 0.000 description 12
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 7
- 229910052799 carbon Inorganic materials 0.000 description 7
- 238000006243 chemical reaction Methods 0.000 description 7
- 238000000034 method Methods 0.000 description 7
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 6
- 238000010586 diagram Methods 0.000 description 6
- 238000002955 isolation Methods 0.000 description 5
- 238000004519 manufacturing process Methods 0.000 description 5
- 230000002093 peripheral effect Effects 0.000 description 5
- 238000005070 sampling Methods 0.000 description 5
- 239000012790 adhesive layer Substances 0.000 description 4
- 239000011229 interlayer Substances 0.000 description 4
- 239000000463 material Substances 0.000 description 4
- 239000011241 protective layer Substances 0.000 description 4
- 238000000231 atomic layer deposition Methods 0.000 description 3
- 229910000449 hafnium oxide Inorganic materials 0.000 description 3
- 239000001257 hydrogen Substances 0.000 description 3
- 229910052739 hydrogen Inorganic materials 0.000 description 3
- 238000005468 ion implantation Methods 0.000 description 3
- 238000005259 measurement Methods 0.000 description 3
- 229910052757 nitrogen Inorganic materials 0.000 description 3
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 description 3
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 2
- 125000004429 atom Chemical group 0.000 description 2
- 239000013078 crystal Substances 0.000 description 2
- WIHZLLGSGQNAGK-UHFFFAOYSA-N hafnium(4+);oxygen(2-) Chemical compound [O-2].[O-2].[Hf+4] WIHZLLGSGQNAGK-UHFFFAOYSA-N 0.000 description 2
- 238000010438 heat treatment Methods 0.000 description 2
- 238000005286 illumination Methods 0.000 description 2
- 239000011159 matrix material Substances 0.000 description 2
- 230000003647 oxidation Effects 0.000 description 2
- 238000007254 oxidation reaction Methods 0.000 description 2
- 125000004430 oxygen atom Chemical group O* 0.000 description 2
- 230000000717 retained effect Effects 0.000 description 2
- 229910052710 silicon Inorganic materials 0.000 description 2
- 239000010703 silicon Substances 0.000 description 2
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 description 1
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 description 1
- 206010037660 Pyrexia Diseases 0.000 description 1
- 229910052581 Si3N4 Inorganic materials 0.000 description 1
- GWEVSGVZZGPLCZ-UHFFFAOYSA-N Titan oxide Chemical compound O=[Ti]=O GWEVSGVZZGPLCZ-UHFFFAOYSA-N 0.000 description 1
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 238000000137 annealing Methods 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 229910052796 boron Inorganic materials 0.000 description 1
- 230000000295 complement effect Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000007789 gas Substances 0.000 description 1
- 150000002431 hydrogen Chemical class 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- -1 oxygen ions Chemical class 0.000 description 1
- BPUBBGLMJRNUCC-UHFFFAOYSA-N oxygen(2-);tantalum(5+) Chemical compound [O-2].[O-2].[O-2].[O-2].[O-2].[Ta+5].[Ta+5] BPUBBGLMJRNUCC-UHFFFAOYSA-N 0.000 description 1
- RVTZCBVAJQQJTK-UHFFFAOYSA-N oxygen(2-);zirconium(4+) Chemical compound [O-2].[O-2].[Zr+4] RVTZCBVAJQQJTK-UHFFFAOYSA-N 0.000 description 1
- 229910052698 phosphorus Inorganic materials 0.000 description 1
- 239000011574 phosphorus Substances 0.000 description 1
- 230000010287 polarization Effects 0.000 description 1
- 229910001925 ruthenium oxide Inorganic materials 0.000 description 1
- WOCIAKWEIIZHES-UHFFFAOYSA-N ruthenium(iv) oxide Chemical compound O=[Ru]=O WOCIAKWEIIZHES-UHFFFAOYSA-N 0.000 description 1
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 1
- 230000001360 synchronised effect Effects 0.000 description 1
- 229910001936 tantalum oxide Inorganic materials 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
- 229910052719 titanium Inorganic materials 0.000 description 1
- 239000010936 titanium Substances 0.000 description 1
- OGIDPMRJRNCKJF-UHFFFAOYSA-N titanium oxide Inorganic materials [Ti]=O OGIDPMRJRNCKJF-UHFFFAOYSA-N 0.000 description 1
- 229910001928 zirconium oxide Inorganic materials 0.000 description 1
Images
Classifications
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/02—Details
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/14—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation
- H01L27/144—Devices controlled by radiation
- H01L27/146—Imager structures
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/14—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation
- H01L27/144—Devices controlled by radiation
- H01L27/146—Imager structures
- H01L27/14601—Structural or functional details thereof
- H01L27/1464—Back illuminated imager structures
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/14—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation
- H01L27/144—Devices controlled by radiation
- H01L27/146—Imager structures
- H01L27/14643—Photodiode arrays; MOS imagers
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/02—Details
- H01L31/0216—Coatings
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/18—Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/14—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation
- H01L27/144—Devices controlled by radiation
- H01L27/146—Imager structures
- H01L27/14601—Structural or functional details thereof
- H01L27/14625—Optical elements or arrangements associated with the device
- H01L27/14627—Microlenses
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- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Power Engineering (AREA)
- Electromagnetism (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Manufacturing & Machinery (AREA)
- Solid State Image Pick-Up Elements (AREA)
- Transforming Light Signals Into Electric Signals (AREA)
Description
本実施形態では、固体撮像装置の一例として、入射光を光電変換する受光部における入射光が入射される側の面とは逆の面側に配線層が形成された所謂裏面照射型CMOS(Complementary Metal Oxide Semiconductor)イメージセンサを例に挙げて説明する。
次に、第2の実施形態に係るCMOSセンサについて説明する。本実施形態に係るCMOSセンサと第1の実施形態に係るCMOSセンサ1との相違点は、固定電荷層の構成が異なる点である。このため、ここでは、図4を参照して、本実施形態に係る固定電荷層7aについて説明することとし、CMOSセンサにおける他の構成要素については、その説明を省略する。
Claims (3)
- 入射光を光電変換する受光部と、
前記受光部の前記入射光が入射する面側に設けられ、負電荷を保持する固定電荷層と
を備え、
前記固定電荷層は、
前記受光部の前記入射光が入射する面側に設けられた金属酸化膜からなる第1の電荷保持膜と、
前記第1の電荷保持膜よりも酸素含有量が高く、前記第1の電荷保持膜における前記入射光が入射する面側に設けられた金属酸化膜からなり、前記第1の電荷保持膜との界面に負電荷を保持する第2の電荷保持膜と
を備えることを特徴とする固体撮像装置。 - 前記第1の電荷保持膜および前記第2の電荷保持膜は、
同一の金属元素を含む
ことを特徴とする請求項1に記載の固体撮像装置。 - 入射光を光電変換する受光部と、
前記受光部の前記入射光が入射する面側に設けられ、負電荷を保持する固定電荷層と
を備え、
前記固定電荷層は、
前記受光部の前記入射光が入射する面側に設けられた金属酸化膜からなる第1の電荷保持膜と、
前記第1の電荷保持膜の前記入射光が入射する面側に設けられた酸化シリコン膜からなる第2の電荷保持膜と、
前記第2の電荷保持膜の前記入射光が入射する面側に設けられた金属酸化膜からなる第3の電荷保持膜と
を備え、
前記第1の電荷保持膜と前記第2の電荷保持膜との界面、および前記第2の電荷保持膜と前記第3の電荷保持膜との界面に負電荷を保持する
ことを特徴とする固体撮像装置。
Priority Applications (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2012088587A JP5801245B2 (ja) | 2012-04-09 | 2012-04-09 | 固体撮像装置 |
KR20130021231A KR101484389B1 (ko) | 2012-04-09 | 2013-02-27 | 고체 촬상 장치 및 고체 촬상 장치의 제조 방법 |
CN201310066905.4A CN103367372B (zh) | 2012-04-09 | 2013-03-04 | 固体拍摄装置及固体拍摄装置的制造方法 |
US13/787,746 US9012925B2 (en) | 2012-04-09 | 2013-03-06 | Solid state imaging device having a pair of charge holding films |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2012088587A JP5801245B2 (ja) | 2012-04-09 | 2012-04-09 | 固体撮像装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2013219189A JP2013219189A (ja) | 2013-10-24 |
JP5801245B2 true JP5801245B2 (ja) | 2015-10-28 |
Family
ID=49291636
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2012088587A Active JP5801245B2 (ja) | 2012-04-09 | 2012-04-09 | 固体撮像装置 |
Country Status (4)
Country | Link |
---|---|
US (1) | US9012925B2 (ja) |
JP (1) | JP5801245B2 (ja) |
KR (1) | KR101484389B1 (ja) |
CN (1) | CN103367372B (ja) |
Families Citing this family (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR102137592B1 (ko) * | 2013-11-06 | 2020-07-24 | 삼성전자 주식회사 | 광학 결정을 포함하는 이미지 센서, 이의 동작 방법, 및 상기 이미지 센서를 포함하는 데이터 처리 시스템 |
US9111993B1 (en) * | 2014-08-21 | 2015-08-18 | Omnivision Technologies, Inc. | Conductive trench isolation |
US10847565B2 (en) * | 2018-12-20 | 2020-11-24 | Samsung Electronics Co., Ltd. | Back side illumination image sensors having an infrared filter |
JP2021048152A (ja) * | 2019-09-17 | 2021-03-25 | ソニーセミコンダクタソリューションズ株式会社 | 半導体素子および半導体装置 |
Family Cites Families (13)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2006344649A (ja) | 2005-06-07 | 2006-12-21 | Sharp Corp | 金属膜およびその形成方法、固体撮像装置およびその製造方法、および電子情報機器 |
JP2008072090A (ja) | 2006-08-14 | 2008-03-27 | Fujifilm Corp | 光電変換素子及び固体撮像素子 |
TWI436474B (zh) | 2007-05-07 | 2014-05-01 | Sony Corp | A solid-state image pickup apparatus, a manufacturing method thereof, and an image pickup apparatus |
JP5151375B2 (ja) | 2007-10-03 | 2013-02-27 | ソニー株式会社 | 固体撮像装置およびその製造方法および撮像装置 |
KR101541544B1 (ko) * | 2007-12-26 | 2015-08-03 | 소니 주식회사 | 고체 촬상 장치와 그 제조 방법 및 촬상 장치 |
US8053661B2 (en) * | 2008-01-25 | 2011-11-08 | Fujifilm Corporation | Photoelectric conversion element and imaging device |
JP5136110B2 (ja) | 2008-02-19 | 2013-02-06 | ソニー株式会社 | 固体撮像装置の製造方法 |
JP5108806B2 (ja) * | 2008-03-07 | 2012-12-26 | 富士フイルム株式会社 | 光電変換素子及び撮像素子 |
JP2009218438A (ja) | 2008-03-11 | 2009-09-24 | Sony Corp | 固体撮像装置とその製造方法、及び電子機器 |
JP5374980B2 (ja) * | 2008-09-10 | 2013-12-25 | ソニー株式会社 | 固体撮像装置 |
JP5418049B2 (ja) * | 2009-08-03 | 2014-02-19 | ソニー株式会社 | 固体撮像素子及びその製造方法、撮像装置 |
JP2011054708A (ja) * | 2009-09-01 | 2011-03-17 | Elpida Memory Inc | 絶縁膜およびその製造方法、半導体装置、ならびにデータ処理システム |
JP2012054321A (ja) * | 2010-08-31 | 2012-03-15 | Sony Corp | 固体撮像素子及びその製造方法、並びに固体撮像装置及び撮像装置 |
-
2012
- 2012-04-09 JP JP2012088587A patent/JP5801245B2/ja active Active
-
2013
- 2013-02-27 KR KR20130021231A patent/KR101484389B1/ko not_active IP Right Cessation
- 2013-03-04 CN CN201310066905.4A patent/CN103367372B/zh active Active
- 2013-03-06 US US13/787,746 patent/US9012925B2/en active Active
Also Published As
Publication number | Publication date |
---|---|
KR20130114609A (ko) | 2013-10-17 |
US9012925B2 (en) | 2015-04-21 |
KR101484389B1 (ko) | 2015-01-19 |
CN103367372B (zh) | 2016-02-10 |
JP2013219189A (ja) | 2013-10-24 |
US20130264670A1 (en) | 2013-10-10 |
CN103367372A (zh) | 2013-10-23 |
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