JP2022073306A - 基板処理装置および基板処理方法 - Google Patents
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- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
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- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
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- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67739—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber
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- B05D3/00—Pretreatment of surfaces to which liquids or other fluent materials are to be applied; After-treatment of applied coatings, e.g. intermediate treating of an applied coating preparatory to subsequent applications of liquids or other fluent materials
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Abstract
Description
110 処理槽
120 基板保持部
130 気体供給部
150 液体供給部
180 制御装置
200 気体供給部
W 基板
L 処理液
Claims (15)
- 少なくとも1つの基板を保持する基板保持部と、
前記基板保持部に保持された基板を浸漬するための処理液を貯留する処理槽と、
前記処理液に気体を供給することによって前記処理液中に気泡を発生させる複数の気泡発生管と
を備え、
前記複数の気泡発生管のうち前記処理液に浸漬された前記基板の外周領域の下方に位置する外側気泡発生管に供給される気体の流量は、前記基板の中央領域の下方に位置する内側気泡発生管に供給される気体の流量とは異なる、基板処理装置。 - 前記複数の気泡発生管は、前記基板の主面の法線方向に対して平行に延びる、請求項1に記載の基板処理装置。
- 前記複数の気泡発生管のうち前記処理液に浸漬された前記基板の外周領域の下方に位置する外側気泡発生管に供給される気体の流量は、前記基板の中央領域の下方に位置する内側気泡発生管に供給される気体の流量よりも多い、請求項1または2に記載の基板処理装置。
- 前記複数の気泡発生管と接続された複数の気体供給管と、
前記複数の気体供給管を流れる気体の流量を制御する流量制御機構と
をさらに備え、
前記流量制御機構は、前記外側気泡発生管に供給される気体の流量が前記内側気泡発生管に供給される気体の流量よりも多くなるように前記複数の気体供給管を流れる気体の流量を制御する、請求項3に記載の基板処理装置。 - 前記外側気泡発生管と接続された気体供給管を流れる気体の圧力と、前記内側気泡発生管と接続された気体供給管を流れる気体の圧力とを測定する圧力計をさらに備える、請求項4に記載の基板処理装置。
- 前記流量制御機構を制御する制御部をさらに備え、
前記制御部は、
前記外側気泡発生管と接続された気体供給管を流れる気体の圧力および前記外側気泡発生管と接続された気体供給管を流れる気体の圧力に基づいて、前記複数の気体供給管を流れる気体の流量を制御する、請求項5に記載の基板処理装置。 - 前記流量制御機構を制御する制御部と、
制御プログラムを記憶する記憶部と
をさらに備え、
前記制御部は、前記制御プログラムに従って前記流量制御機構を制御する、請求項5に記載の基板処理装置。 - 前記基板保持部は、列方向に沿って一列に並んだ基板列に配列された複数の基板を保持し、
前記内側気泡発生管は、
前記複数の基板のうちの前記基板列の一方側に位置する基板のそれぞれの中央領域の下方に配置された内側第1配管と、
前記内側第1配管から分離され、前記基板列の他方側に位置する基板のそれぞれの中央領域の下方に、前記内側第1配管と直線状に配列された内側第2配管と
を含み、
前記外側気泡発生管は、
前記複数の基板のうちの前記基板列の一方側に位置する基板のそれぞれの外周領域の下方に配置された外側第1配管と、
前記外側第1配管から分離され、前記基板列の他方側に位置する基板のそれぞれの外周領域の下方に、前記外側第1配管と直線状に配列された外側第2配管と
を含む、請求項3から7のいずれかに記載の基板処理装置。 - 前記処理槽に配置された液体吐出管をさらに備える、請求項1から8のいずれかに記載の基板処理装置。
- 前記液体吐出管は、前記基板の主面の法線方向に対して平行に延びるように配置される、請求項9に記載の基板処理装置。
- 前記処理液は、燐酸液を含む、請求項1から10のいずれかに記載の基板処理装置。
- 処理槽に貯留された処理液に基板を浸漬する浸漬工程と、
前記処理槽内に配置された複数の気泡発生管に気体を供給することによって前記処理液中に気泡を発生させ、前記処理液に浸漬された基板に前記気泡を供給する気泡供給工程と
を包含し、
前記気泡供給工程は、前記複数の気泡発生管のうち前記基板の外周領域の下方に位置する外側気泡発生管に供給される気体の流量が、前記基板の中央領域の下方に位置する内側気泡発生管に供給される気体の流量とは異なる流量不均等供給工程を含む、基板処理方法。 - 前記複数の気泡発生管は、前記基板の主面の法線方向に対して平行に延びる、請求項12に記載の基板処理方法。
- 前記流量不均等供給工程において、前記複数の気泡発生管のうち前記基板の外周領域の下方に位置する外側気泡発生管に供給される気体の流量が、前記基板の中央領域の下方に位置する内側気泡発生管に供給される気体の流量よりも多い、請求項13に記載の基板処理方法。
- 前記気泡供給工程は、
前記外側気泡発生管および前記内側気泡発生管のそれぞれに等しい流量で気体を供給する流量均等供給工程と、
前記流量均等供給工程において、前記外側気泡発生管と接続された気体供給管を流れる気体の圧力および前記内側気泡発生管と接続された気体供給管を流れる気体の圧力を測定する圧力測定工程と
をさらに含み、
前記流量不均等供給工程は、前記圧力測定工程における測定結果に基づいて、前記外側気泡発生管と接続された気体供給管を流れる気体の流量および前記内側気泡発生管と接続された気体供給管に供給される気体の流量を設定する、請求項13または14に記載の基板処理方法。
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JP2020183211A JP7508339B2 (ja) | 2020-10-30 | 2020-10-30 | 基板処理装置および基板処理方法 |
TW110140010A TWI825502B (zh) | 2020-10-30 | 2021-10-28 | 基板處理裝置及基板處理方法 |
CN202111269112.3A CN114446822A (zh) | 2020-10-30 | 2021-10-29 | 衬底处理装置及衬底处理方法 |
KR1020210147243A KR102620339B1 (ko) | 2020-10-30 | 2021-10-29 | 기판 처리 장치 및 기판 처리 방법 |
US17/513,986 US20220134375A1 (en) | 2020-10-30 | 2021-10-29 | Substrate processing apparatus and substrate processing method |
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