JP2022071846A - 基板処理装置及び基板処理方法 - Google Patents
基板処理装置及び基板処理方法 Download PDFInfo
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- 238000001816 cooling Methods 0.000 claims abstract description 110
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- NEXSMEBSBIABKL-UHFFFAOYSA-N hexamethyldisilane Chemical compound C[Si](C)(C)[Si](C)(C)C NEXSMEBSBIABKL-UHFFFAOYSA-N 0.000 description 1
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Abstract
Description
30 処理モジュール
30a 塗布ブロック
30b 現像ブロック
40 インターフェイスモジュール
50 露光装置
3200 熱処理チャンバー
3202 前段熱処理チャンバー
3204 後段熱処理チャンバー
3206 中間熱処理チャンバー
3400 搬送部
Claims (20)
- 基板を処理する装置において、
搬送路と、
前記搬送路の長さ方向に沿って配置される第1搬送ロボットと第2搬送ロボットと、
前記搬送路の一側面に配置され、基板に液を供給して基板上に液を塗布する液処理部と、
前記第1工程処理部と対向されるように前記搬送路の他側面に配置され、基板を熱処理する熱処理部と、を含み、
前記熱処理部は、
前記第1搬送ロボットと前記第2搬送ロボットとの間の基板搬送及び基板クーリングのために提供されるクーリング搬送モジュールを含む基板処理装置。 - 前記クーリング搬送モジュールは、
前記第1搬送ロボットの第1移動通路と前記第1搬送ロボットの第2移動通路が互いに接する境界に配置される請求項1に記載の基板処理装置。 - 前記クーリング搬送モジュールは、
前記搬送路の長さ方向に沿って提供される第1領域と第2領域を有するハウジングと、
前記ハウジング内に提供され、前記第1領域と前記第2領域との間の基板を搬送する搬送プレートと、を含む請求項1に記載の基板処理装置。 - 前記第1領域は、前記第1搬送ロボットが接近可能な第1基板搬送領域内に提供され、
前記第2領域は、前記第2搬送ロボットが接近可能な第2基板搬送領域内に提供される請求項3に記載の基板処理装置。 - 前記ハウジングは、
前記第1搬送ロボットによって基板が出入する、そして前記第1領域と隣接する第1開口と、
前記第2搬送ロボットによって基板が出入する、そして前記第2領域と隣接する第2開口と、を含む請求項3に記載の基板処理装置。 - 前記クーリング搬送モジュールは、
基板をクーリングする冷却ユニットを含み、
前記冷却ユニットは、
前記第1領域及び前記第2領域の中で少なくとも1つに提供される請求項3に記載の基板処理装置。 - 前記搬送プレートは、
内部に基板クーリングのための冷媒が通過する冷却流路を含む請求項3に記載の基板処理装置。 - 前記液処理部は、
前記第1搬送ロボットが接近可能な移動通路上に配置され、基板に対して第1液を塗布する工程を遂行する第1液処理チャンバーと、
前記第2搬送ロボットが接近可能な移動通路上に配置され、基板に対して第2液を塗布する工程を遂行する第2液処理チャンバーと、を含む請求項3に記載の基板処理装置。 - 前記第1液は、基板上に反射防止膜を形成するための液であり、
前記第2液は、前記基板上に形成された前記反射防止膜上にフォトレジスト膜を形成するための液である請求項8に記載の基板処理装置。 - 基板を処理する装置において、
第1方向に沿って順次的に配置されるインデックスモジュールと処理モジュールを含み、
前記インデックスモジュールは、
基板が収容される容器が置かれるロードポートと、
前記ロードポートに置かれる容器と前記処理モジュールとの間に基板を搬送するインデックスロボットが提供されたインデックスフレームと、を含み、
前記処理モジュールは、
搬送路と、
前記搬送路の長さ方向に沿って配置される第1搬送ロボットと第2搬送ロボットと、
前記搬送路の一側面に配置され、基板に液を供給して基板上に液を塗布する液処理部と、
前記第1工程処理部と対向されるように前記搬送路の他側面に配置され、基板を熱処理する熱処理モジュール及び前記第1搬送ロボットの第1移動通路と前記第1搬送ロボットの第2移動通路が互いに接する境界に配置され、前記第1搬送ロボットと前記第2搬送ロボットとの間の基板搬送及び基板クーリングのためのクーリング搬送モジュールを有する熱処理部と、を含む基板処理装置。 - 前記クーリング搬送モジュールは、
前記搬送路の長さ方向に沿って提供され、前記第1搬送ロボットが接近可能な第1領域及び前記第2搬送ロボットが接近可能な第2領域を有するハウジングと、
前記ハウジング内に提供され、前記第1領域と前記第2領域との間の基板を搬送する搬送プレートと、
前記第1領域及び前記第2領域の中でいずれか1つに提供される基板をクーリングする冷却ユニットと、を含む請求項10に記載の基板処理装置。 - 前記クーリング搬送モジュールは、
前記搬送路の長さ方向に沿って提供され、前記第1搬送ロボットが接近可能な第1領域及び前記第2搬送ロボットが接近可能な第2領域を有するハウジングと、
前記ハウジング内に提供され、前記第1領域と前記第2領域との間の基板を搬送する搬送プレートと、を含み、
前記搬送プレートは、
内部に基板クーリングのための冷媒が通過する冷却流路と、を含む請求項11に記載の基板処理装置。 - 前記ハウジングは、
前記第1搬送ロボットによって基板が出入する、そして前記第1領域と隣接する第1開口と、
前記第2搬送ロボットによって基板が出入する、そして前記第2領域と隣接する第2開口と、を含む請求項11に記載の基板処理装置。 - 前記液処理部は、
前記第1搬送ロボットが接近可能な移動通路上に配置され、基板に対して第1液を塗布する工程を遂行する第1液処理チャンバーと、
前記第2搬送ロボットが接近可能な移動通路上に配置され、基板に対して第2液を塗布する工程を遂行する第2液処理チャンバーと、を含む請求項11に記載の基板処理装置。 - 基板を処理する装置において、
第1方向に沿って第1搬送区間と第2搬送区間を提供する搬送路と、
前記第1搬送区間に配置される第1搬送ロボットと、
前記第2搬送区間に配置される第2搬送ロボットと、
前記第1搬送区間の両側に配置され、基板に反射防止膜を塗布する第1液処理モジュールと、反射防止膜塗布と関連して基板を熱処理する第1熱処理モジュールを含む第1処理グループと、
前記第2搬送区間の両側に配置され、反射防止膜が塗布された基板にフォトレジスト膜を塗布する第2液処理モジュールと、フォトレジスト塗布と関連して基板を熱処理する第2熱処理モジュールを含む第2処理グループと、
前記第1搬送区間と前記第2搬送区間が互いに接する境界に隣接するように配置されるように前記第1熱処理モジュールと前記第2熱処理モジュールとの間に提供され、前記第1搬送ロボットと前記第2搬送ロボットとの間の基板伝達及び基板クーリングのためのクーリング搬送モジュールを含む基板処理装置。 - 前記クーリング搬送モジュールは、
前記搬送路の長さ方向に沿って提供され、前記第1搬送ロボットが接近可能な第1領域及び前記第2搬送ロボットが接近可能な第2領域を有するハウジングと、
前記ハウジング内に提供され、前記第1領域で前記第2領域に基板を搬送する搬送プレートと、
前記搬送プレート、前記第1領域、そして前記第2領域の中でいずれか1つに提供され、基板をクーリングする冷却ユニットと、を含む請求項15に記載の基板処理装置。 - 前記第2領域には
前記搬送プレートによって搬送された基板が置かれる、そして前記第2搬送ロボットによって搬送される基板が待機する第1プレートが提供される請求項16に記載の基板処理装置。 - 基板を処理する方法において、
第1処理グループで基板に反射防止膜を形成する反射防止膜塗布段階と、
第2処理グループで前記基板に形成された反射防止膜上にフォトレジスト膜を形成するフォトレジスト膜塗布段階と、
前記フォトレジスト膜塗布段階の前に、前記第1処理グループと前記第2処理グループとの間に提供されるクーリング搬送モジュールで反射防止膜が形成された基板をクーリングするクーリング段階と、を含み、
前記クーリング段階は、
前記第1処理グループで基板を搬送する第1搬送ロボットがクーリングする前に、基板を前記クーリング搬送モジュールに搬入し、前記第2処理グループで基板を搬送する第2搬送ロボットがクーリングした後に基板を前記クーリング搬送モジュールから搬出する基板処理方法。 - 前記クーリング段階で、
基板は、前記第1搬送ロボットが接近可能な第1領域、前記第2搬送ロボットが接近可能な第2領域、前記第1領域から前記第2領域に基板を搬送する搬送プレートの中でいずれか1つでクーリングされる請求項18に記載の基板処理方法。 - 前記第1液は、基板上に反射防止膜を形成するための液であり、
前記第2液は前記基板上に形成された前記反射防止膜上にフォトレジスト膜を形成するための液である請求項18に記載の基板処理方法。
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