JP2022038478A5 - - Google Patents
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- Publication number
- JP2022038478A5 JP2022038478A5 JP2020143009A JP2020143009A JP2022038478A5 JP 2022038478 A5 JP2022038478 A5 JP 2022038478A5 JP 2020143009 A JP2020143009 A JP 2020143009A JP 2020143009 A JP2020143009 A JP 2020143009A JP 2022038478 A5 JP2022038478 A5 JP 2022038478A5
- Authority
- JP
- Japan
- Prior art keywords
- film
- ruthenium film
- plane
- ruthenium
- diamond
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- KJTLSVCANCCWHF-UHFFFAOYSA-N Ruthenium Chemical compound [Ru] KJTLSVCANCCWHF-UHFFFAOYSA-N 0.000 claims 18
- 229910052707 ruthenium Inorganic materials 0.000 claims 18
- 229910003460 diamond Inorganic materials 0.000 claims 14
- 239000010432 diamond Substances 0.000 claims 14
- 239000013078 crystal Substances 0.000 claims 6
- 239000000758 substrate Substances 0.000 claims 6
- 238000004519 manufacturing process Methods 0.000 claims 4
- CPLXHLVBOLITMK-UHFFFAOYSA-N magnesium oxide Inorganic materials [Mg]=O CPLXHLVBOLITMK-UHFFFAOYSA-N 0.000 claims 2
- 239000000395 magnesium oxide Substances 0.000 claims 2
- AXZKOIWUVFPNLO-UHFFFAOYSA-N magnesium;oxygen(2-) Chemical compound [O-2].[Mg+2] AXZKOIWUVFPNLO-UHFFFAOYSA-N 0.000 claims 2
- 229910052594 sapphire Inorganic materials 0.000 claims 2
- 239000010980 sapphire Substances 0.000 claims 2
- VEALVRVVWBQVSL-UHFFFAOYSA-N strontium titanate Chemical compound [Sr+2].[O-][Ti]([O-])=O VEALVRVVWBQVSL-UHFFFAOYSA-N 0.000 claims 2
Priority Applications (4)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2020143009A JP7569527B2 (ja) | 2020-08-26 | 2020-08-26 | 積層体、単結晶ダイヤモンド基板及びその製造方法 |
| US18/042,725 US12378691B2 (en) | 2020-08-26 | 2021-08-19 | Laminate, single crystal diamond substrate and method of producing same |
| PCT/JP2021/030346 WO2022044946A1 (ja) | 2020-08-26 | 2021-08-19 | 積層体、単結晶ダイヤモンド基板及びその製造方法 |
| TW110131420A TWI905253B (zh) | 2020-08-26 | 2021-08-25 | 積層體、單晶鑽石基板及其製造方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2020143009A JP7569527B2 (ja) | 2020-08-26 | 2020-08-26 | 積層体、単結晶ダイヤモンド基板及びその製造方法 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2022038478A JP2022038478A (ja) | 2022-03-10 |
| JP2022038478A5 true JP2022038478A5 (enExample) | 2023-07-28 |
| JP7569527B2 JP7569527B2 (ja) | 2024-10-18 |
Family
ID=80355162
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2020143009A Active JP7569527B2 (ja) | 2020-08-26 | 2020-08-26 | 積層体、単結晶ダイヤモンド基板及びその製造方法 |
Country Status (4)
| Country | Link |
|---|---|
| US (1) | US12378691B2 (enExample) |
| JP (1) | JP7569527B2 (enExample) |
| TW (1) | TWI905253B (enExample) |
| WO (1) | WO2022044946A1 (enExample) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20260132542A1 (en) * | 2024-06-03 | 2026-05-14 | Tech University Of Korea Industry Academic Cooperation Foundation | Single-crystal diamond substrate with twin defects removed and method for manufacturing the same |
Family Cites Families (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH06212428A (ja) * | 1993-01-20 | 1994-08-02 | Matsufumi Takatani | 金属表面へのダイヤモンド被覆の形成方法 |
| US6201342B1 (en) * | 1997-06-30 | 2001-03-13 | The United States Of America As Represented By The Secretary Of The Navy | Automatically sharp field emission cathodes |
| TW522504B (en) * | 2001-02-15 | 2003-03-01 | Ngk Insulators Ltd | Diamond-coated member |
| DE10320133B4 (de) * | 2003-05-06 | 2011-02-10 | Universität Augsburg | Verfahren zur Herstellung von einkristallinen oder quasi-einkristallinen Diamantschichten und auf einem Körper angeordnete einkristalline oder quasi-einkristalline Diamantschicht |
| JP2005219962A (ja) * | 2004-02-05 | 2005-08-18 | Sumitomo Electric Ind Ltd | ダイヤモンド単結晶基板及びその製造方法 |
| EP2801551A1 (en) * | 2013-05-08 | 2014-11-12 | Max-Planck-Gesellschaft zur Förderung der Wissenschaften e.V. | Graphene with very high charge carrier mobility and preparation thereof |
| DE102015200692B4 (de) * | 2015-01-19 | 2018-10-11 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | Epitaktische Diamantschicht und Verfahren zu ihrer Herstellung |
| US20160218183A1 (en) * | 2015-01-28 | 2016-07-28 | Panasonic Intellectual Property Management Co., Ltd. | Diamond multilayer structure |
| JP7256635B2 (ja) * | 2018-12-04 | 2023-04-12 | 信越化学工業株式会社 | 積層基板、積層基板の製造方法及び自立基板の製造方法 |
-
2020
- 2020-08-26 JP JP2020143009A patent/JP7569527B2/ja active Active
-
2021
- 2021-08-19 WO PCT/JP2021/030346 patent/WO2022044946A1/ja not_active Ceased
- 2021-08-19 US US18/042,725 patent/US12378691B2/en active Active
- 2021-08-25 TW TW110131420A patent/TWI905253B/zh active
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