JP2021522734A5 - - Google Patents

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Publication number
JP2021522734A5
JP2021522734A5 JP2020560488A JP2020560488A JP2021522734A5 JP 2021522734 A5 JP2021522734 A5 JP 2021522734A5 JP 2020560488 A JP2020560488 A JP 2020560488A JP 2020560488 A JP2020560488 A JP 2020560488A JP 2021522734 A5 JP2021522734 A5 JP 2021522734A5
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JP
Japan
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ultrasonic device
access holes
ultrasonic
access
array
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JP2020560488A
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English (en)
Japanese (ja)
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JP2021522734A (ja
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Priority claimed from PCT/US2019/030388 external-priority patent/WO2019213388A1/en
Publication of JP2021522734A publication Critical patent/JP2021522734A/ja
Publication of JP2021522734A5 publication Critical patent/JP2021522734A5/ja
Pending legal-status Critical Current

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JP2020560488A 2018-05-03 2019-05-02 Cmosセンサ上の超音波トランスデューサ用の圧力ポート Pending JP2021522734A (ja)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
US201862666556P 2018-05-03 2018-05-03
US62/666,556 2018-05-03
US201862696305P 2018-07-10 2018-07-10
US62/696,305 2018-07-10
PCT/US2019/030388 WO2019213388A1 (en) 2018-05-03 2019-05-02 Pressure port for ultrasonic transducer on cmos sensor

Publications (2)

Publication Number Publication Date
JP2021522734A JP2021522734A (ja) 2021-08-30
JP2021522734A5 true JP2021522734A5 (cg-RX-API-DMAC7.html) 2022-05-13

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JP2020560488A Pending JP2021522734A (ja) 2018-05-03 2019-05-02 Cmosセンサ上の超音波トランスデューサ用の圧力ポート

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US (2) US12053323B2 (cg-RX-API-DMAC7.html)
EP (1) EP3788798B1 (cg-RX-API-DMAC7.html)
JP (1) JP2021522734A (cg-RX-API-DMAC7.html)
KR (1) KR20210005208A (cg-RX-API-DMAC7.html)
CN (1) CN112075090B (cg-RX-API-DMAC7.html)
AU (1) AU2019263404A1 (cg-RX-API-DMAC7.html)
CA (1) CA3098911A1 (cg-RX-API-DMAC7.html)
TW (1) TW202000137A (cg-RX-API-DMAC7.html)
WO (1) WO2019213388A1 (cg-RX-API-DMAC7.html)

Families Citing this family (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2016106153A1 (en) * 2014-12-21 2016-06-30 Chirp Microsystems, Inc. Piezoelectric micromachined ultrasonic transducers with low stress sensitivity and methods of fabrication
US11655141B2 (en) 2018-09-28 2023-05-23 Bfly Operations, Inc. Fabrication techniques and structures for gettering materials in ultrasonic transducer cavities
CN113039024A (zh) 2018-11-13 2021-06-25 蝴蝶网络有限公司 用于微机械超声换能器腔的吸气剂技术
JP2022507193A (ja) 2018-11-15 2022-01-18 バタフライ ネットワーク,インコーポレイテッド 微細加工超音波トランスデューサ装置のためのアンチスティクションキャビティ底面
TW202045099A (zh) 2019-02-07 2020-12-16 美商蝴蝶網路公司 用於微加工超音波傳感器裝置的雙層金屬電極
CN115367696A (zh) 2019-02-25 2022-11-22 蝴蝶网络有限公司 微加工超声换能器器件的自适应腔体厚度控制
WO2020210483A1 (en) 2019-04-12 2020-10-15 Butterfly Network, Inc. Segmented getter openings for micromachined ultrasound transducer devices
WO2020210470A1 (en) 2019-04-12 2020-10-15 Butterfly Network, Inc. Bottom electrode via structures for micromachined ultrasonic transducer devices
US11501562B2 (en) 2019-04-30 2022-11-15 Bfly Operations, Inc. Ultrasound face scanning and identification apparatuses and methods
FR3097091B1 (fr) * 2019-06-07 2021-07-23 Commissariat Energie Atomique dispositif pourvu d’une pluralité de résonateurs présentant collectivement un facteur de qualité amélioré
US11684951B2 (en) 2019-08-08 2023-06-27 Bfly Operations, Inc. Micromachined ultrasonic transducer devices having truncated circle shaped cavities
US11988640B2 (en) 2020-03-11 2024-05-21 Bfly Operations, Inc. Bottom electrode material stack for micromachined ultrasonic transducer devices
TWI742603B (zh) 2020-04-09 2021-10-11 伊諾司生技股份有限公司 一種具有空腔的感測器
TW202210830A (zh) 2020-04-16 2022-03-16 美商蝴蝶網路公司 用於超音波裝置中之電路系統及/或換能器之內建自測試的方法和電路系統
US20210403321A1 (en) * 2020-06-30 2021-12-30 Butterfly Network, Inc. Formation of self-assembled monolayer for ultrasonic transducers
CA3199196A1 (en) 2020-11-19 2022-05-27 Michael Kraft Ultrasonic transducer array device
US12246348B2 (en) 2021-03-04 2025-03-11 BFLY Operations, Inc Capacitive Micromachined ultrasonic transducers (CMUTs) having non-uniform pedestals
WO2022187467A2 (en) 2021-03-04 2022-09-09 Butterfly Network, Inc. Micromachined ultrasound transducer with pedestal

Family Cites Families (113)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4262399A (en) * 1978-11-08 1981-04-21 General Electric Co. Ultrasonic transducer fabricated as an integral park of a monolithic integrated circuit
JPH01296122A (ja) * 1988-05-24 1989-11-29 Matsushita Electric Ind Co Ltd 圧力センサ
US4996627A (en) * 1989-01-30 1991-02-26 Dresser Industries, Inc. High sensitivity miniature pressure transducer
US5311095A (en) * 1992-05-14 1994-05-10 Duke University Ultrasonic transducer array
US5744898A (en) * 1992-05-14 1998-04-28 Duke University Ultrasound transducer array with transmitter/receiver integrated circuitry
US5639423A (en) * 1992-08-31 1997-06-17 The Regents Of The University Of Calfornia Microfabricated reactor
US5894452A (en) * 1994-10-21 1999-04-13 The Board Of Trustees Of The Leland Stanford Junior University Microfabricated ultrasonic immersion transducer
US5619476A (en) * 1994-10-21 1997-04-08 The Board Of Trustees Of The Leland Stanford Jr. Univ. Electrostatic ultrasonic transducer
US5982709A (en) * 1998-03-31 1999-11-09 The Board Of Trustees Of The Leland Stanford Junior University Acoustic transducers and method of microfabrication
JP2000050391A (ja) * 1998-07-31 2000-02-18 Olympus Optical Co Ltd 超音波トランスデューサーおよびその製造方法
US6323580B1 (en) * 1999-04-28 2001-11-27 The Charles Stark Draper Laboratory, Inc. Ferroic transducer
US6271620B1 (en) * 1999-05-20 2001-08-07 Sen Corporation Acoustic transducer and method of making the same
US6262946B1 (en) * 1999-09-29 2001-07-17 The Board Of Trustees Of The Leland Stanford Junior University Capacitive micromachined ultrasonic transducer arrays with reduced cross-coupling
US6430109B1 (en) * 1999-09-30 2002-08-06 The Board Of Trustees Of The Leland Stanford Junior University Array of capacitive micromachined ultrasonic transducer elements with through wafer via connections
US6443901B1 (en) * 2000-06-15 2002-09-03 Koninklijke Philips Electronics N.V. Capacitive micromachined ultrasonic transducers
US6854338B2 (en) * 2000-07-14 2005-02-15 The Board Of Trustees Of The Leland Stanford Junior University Fluidic device with integrated capacitive micromachined ultrasonic transducers
US6891711B1 (en) * 2004-04-08 2005-05-10 Kulite Semiconductor Products, Inc. Ultra-miniature, high temperature, capacitive inductive pressure transducer
WO2005114820A2 (en) * 2004-05-14 2005-12-01 The University Of Georgia Research Foundation, Inc. Implantable ultrasonic transducer systems and methods
EP1761104A4 (en) * 2004-06-03 2016-12-28 Olympus Corp ULTRASONIC VIBRATOR OF THE ELECTROSTATIC CAPABILITY TYPE, METHOD OF MANUFACTURE, AND ELECTROSTATIC CAPACITY-TYPE ULTRASONIC PROBE
US8454513B2 (en) * 2004-12-30 2013-06-04 Stc.Unm Micro-machined medical devices, methods of fabricating microdevices, and methods of medical diagnosis, imaging, stimulation, and treatment
GB0605576D0 (en) * 2006-03-20 2006-04-26 Oligon Ltd MEMS device
JP4271253B2 (ja) * 2006-10-11 2009-06-03 オリンパスメディカルシステムズ株式会社 超音波トランスデューサ、超音波トランスデューサの製造方法、及び超音波内視鏡
JP4271252B2 (ja) 2006-10-12 2009-06-03 オリンパスメディカルシステムズ株式会社 超音波振動子セル、超音波振動子エレメント、超音波振動子アレイ及び超音波診断装置
CN101662989B (zh) * 2006-11-03 2013-10-30 研究三角协会 使用挠曲模式压电换能器的增强的超声成像探头
US7616077B1 (en) * 2007-03-22 2009-11-10 Sandia Corporation Microelectromechanical resonator and method for fabrication
JP5408935B2 (ja) * 2007-09-25 2014-02-05 キヤノン株式会社 電気機械変換素子及びその製造方法
JP5408937B2 (ja) * 2007-09-25 2014-02-05 キヤノン株式会社 電気機械変換素子及びその製造方法
NZ589503A (en) 2008-05-07 2013-07-26 Signostics Ltd Docking system for medical diagnostic scanning using a handheld device
JP5376982B2 (ja) * 2008-06-30 2013-12-25 キヤノン株式会社 機械電気変換素子と機械電気変換装置および機械電気変換装置の作製方法
JP5851238B6 (ja) * 2009-03-05 2023-12-15 株式会社日立メディコ 超音波トランスデューサ、その製造方法、および、それを用いた超音波探触子
DK2411163T3 (da) * 2009-03-26 2013-06-10 Norwegian Univ Sci & Tech Ntnu Waferbundet cmut-array med ledende kontakthuller
US9327316B2 (en) * 2009-06-30 2016-05-03 Avago Technologies General Ip (Singapore) Pte. Ltd. Multi-frequency acoustic array
US8324006B1 (en) * 2009-10-28 2012-12-04 National Semiconductor Corporation Method of forming a capacitive micromachined ultrasonic transducer (CMUT)
JP5671876B2 (ja) * 2009-11-16 2015-02-18 セイコーエプソン株式会社 超音波トランスデューサー、超音波センサー、超音波トランスデューサーの製造方法、および超音波センサーの製造方法
US8329053B2 (en) * 2009-11-23 2012-12-11 Avago Technologies Wireless Ip (Singapore) Pte. Ltd. Micromachined transducers and method of fabrication
JP5529577B2 (ja) * 2010-02-14 2014-06-25 キヤノン株式会社 電気機械変換装置及びその作製方法
JP2011244425A (ja) * 2010-04-23 2011-12-01 Canon Inc 電気機械変換装置及びその作製方法
US8471304B2 (en) 2010-06-04 2013-06-25 Carnegie Mellon University Method, apparatus, and system for micromechanical gas chemical sensing capacitor
US9420378B1 (en) * 2010-07-12 2016-08-16 Amkor Technology, Inc. Top port MEMS microphone package and method
CA2814123A1 (en) 2010-10-12 2012-04-19 Micralyne Inc. Soi-based cmut device with buried electrodes
JP5778914B2 (ja) * 2010-11-04 2015-09-16 キヤノン株式会社 電気機械変換装置の製造方法
JP5875244B2 (ja) * 2011-04-06 2016-03-02 キヤノン株式会社 電気機械変換装置及びその作製方法
JP5921079B2 (ja) * 2011-04-06 2016-05-24 キヤノン株式会社 電気機械変換装置及びその作製方法
JP5875243B2 (ja) * 2011-04-06 2016-03-02 キヤノン株式会社 電気機械変換装置及びその作製方法
CN104066520A (zh) * 2012-01-27 2014-09-24 皇家飞利浦有限公司 电容式微机械换能器及其制造方法
JP6209537B2 (ja) * 2012-01-27 2017-10-04 コーニンクレッカ フィリップス エヌ ヴェKoninklijke Philips N.V. 容量性マイクロマシン・トランスデューサ及びこれを製造する方法
CN104812504B (zh) * 2012-11-20 2018-01-26 皇家飞利浦有限公司 电容性微加工换能器和制造所述电容性微加工换能器的方法
WO2014123922A1 (en) 2013-02-05 2014-08-14 Butterfly Network, Inc. Cmos ultrasonic transducers and related apparatus and methods
KR20220097541A (ko) 2013-03-15 2022-07-07 버터플라이 네트워크, 인크. 모놀리식 초음파 이미징 디바이스, 시스템 및 방법
EP2969914B1 (en) 2013-03-15 2020-01-01 Butterfly Network Inc. Complementary metal oxide semiconductor (cmos) ultrasonic transducers and methods for forming the same
JP5901566B2 (ja) 2013-04-18 2016-04-13 キヤノン株式会社 トランスデューサ、トランスデューサの製造方法、及び被検体情報取得装置
EP2796209B1 (en) * 2013-04-25 2020-06-17 Canon Kabushiki Kaisha Capacitive transducer and method of manufacturing the same
EP2796210B1 (en) * 2013-04-25 2016-11-30 Canon Kabushiki Kaisha Capacitive transducer and method of manufacturing the same
AU2014293274B2 (en) 2013-07-23 2018-11-01 Butterfly Network, Inc. Interconnectable ultrasound transducer probes and related methods and apparatus
JP6381195B2 (ja) * 2013-10-22 2018-08-29 キヤノン株式会社 静電容量型トランスデューサ及びその作製方法
US9834434B2 (en) * 2013-11-19 2017-12-05 Canon Kabushiki Kaisha Capacitive transducer and method of manufacturing the same
JP2015103821A (ja) * 2013-11-20 2015-06-04 キヤノン株式会社 静電容量型トランスデューサ及びその作製方法
US10478858B2 (en) * 2013-12-12 2019-11-19 Qualcomm Incorporated Piezoelectric ultrasonic transducer and process
WO2015112452A1 (en) * 2014-01-24 2015-07-30 The Regents Of The University Of California Curved piezoelectric transducers
US9439000B1 (en) * 2014-02-28 2016-09-06 Google Inc. Systems and methods for improved audio output in electronic devices
TWI661534B (zh) * 2014-04-18 2019-06-01 美商蝴蝶網路公司 在互補式金屬氧化物半導體晶圓中的超音波轉換器及相關設備和方法
WO2015190429A1 (ja) * 2014-06-13 2015-12-17 株式会社村田製作所 圧電デバイスおよび圧電デバイスの製造方法
JP6599968B2 (ja) * 2014-07-08 2019-10-30 クアルコム,インコーポレイテッド 圧電超音波トランスデューサおよびプロセス
US9067779B1 (en) 2014-07-14 2015-06-30 Butterfly Network, Inc. Microfabricated ultrasonic transducers and related apparatus and methods
US9821340B2 (en) 2014-07-28 2017-11-21 Kolo Medical Ltd. High displacement ultrasonic transducer
US9995821B2 (en) 2014-10-15 2018-06-12 Qualcomm Incorporated Active beam-forming technique for piezoelectric ultrasonic transducer array
JP2016101417A (ja) * 2014-11-28 2016-06-02 キヤノン株式会社 静電容量型音響波トランスデューサ及びこれを備えた被検体情報取得装置
WO2016106153A1 (en) 2014-12-21 2016-06-30 Chirp Microsystems, Inc. Piezoelectric micromachined ultrasonic transducers with low stress sensitivity and methods of fabrication
US20160219375A1 (en) * 2015-01-23 2016-07-28 Silicon Audio Directional, Llc Multi-mode Microphones
US10497748B2 (en) * 2015-10-14 2019-12-03 Qualcomm Incorporated Integrated piezoelectric micromechanical ultrasonic transducer pixel and array
WO2017065691A1 (en) * 2015-10-14 2017-04-20 Agency For Science, Technology And Research Device arrangement
US10175347B2 (en) 2015-12-02 2019-01-08 Butterfly Network, Inc. Ultrasound receiver circuitry and related apparatus and methods
US10187020B2 (en) 2015-12-02 2019-01-22 Butterfly Network, Inc. Trans-impedance amplifier for ultrasound device and related apparatus and methods
JP6632431B2 (ja) * 2016-03-08 2020-01-22 キヤノン株式会社 超音波トランスデューサユニット及びそれを備える情報取得装置
US10082565B2 (en) 2016-03-31 2018-09-25 Butterfly Network, Inc. Multilevel bipolar pulser
US9778348B1 (en) 2016-03-31 2017-10-03 Butterfly Network, Inc. Symmetric receiver switch for bipolar pulser
EP3472829B1 (en) * 2016-06-17 2023-08-16 InvenSense, Inc. Piezoelectric micromachined ultrasonic transducers having stress relief features
US10856840B2 (en) 2016-06-20 2020-12-08 Butterfly Network, Inc. Universal ultrasound device and related apparatus and methods
AU2017281280B2 (en) 2016-06-20 2022-01-06 Butterfly Network, Inc. Electrical contact arrangement for microfabricated ultrasonic transducer
US10231713B2 (en) 2016-09-13 2019-03-19 Butterfly Network, Inc. Analog-to-digital drive circuitry having built-in time gain compensation functionality for ultrasound applications
JP6833544B2 (ja) * 2017-02-09 2021-02-24 キヤノン株式会社 静電容量型トランスデューサおよびその製造方法
WO2018157050A1 (en) 2017-02-27 2018-08-30 Butterfly Network, Inc. Capacitive micromachined ultrasonic transducers (cmuts) and related apparatus and methods
US10196261B2 (en) 2017-03-08 2019-02-05 Butterfly Network, Inc. Microfabricated ultrasonic transducers and related apparatus and methods
EP3642611B1 (en) 2017-06-21 2024-02-14 Butterfly Network, Inc. Microfabricated ultrasonic transducer having individual cells with electrically isolated electrode sections
US10972842B2 (en) 2017-06-23 2021-04-06 Butterfly Network, Inc. Differential ultrasonic transducer element for ultrasound devices
JP6904814B2 (ja) * 2017-06-30 2021-07-21 キヤノン株式会社 中空構造体の製造方法、及び中空構造体
EP3678555A4 (en) 2017-09-07 2021-05-19 Butterfly Network, Inc. WRIST-ATTACHED ULTRASONIC-ON-CHIP DEVICE
WO2019099681A1 (en) 2017-11-15 2019-05-23 Butterfly Network, Inc. Ultrasound device with piezoelectric micromachined ultrasonic transducers
EP3709894B1 (en) 2017-11-15 2026-02-25 BFLY Operations, Inc. Ultrasound apparatuses and methods for fabricating ultrasound devices
US20190299251A1 (en) 2017-11-15 2019-10-03 Butterfly Network, Inc. Apparatuses including a capacitive micromachined ultrasonic transducer directly coupled to an analog-to-digital converter
WO2019152340A1 (en) 2018-01-30 2019-08-08 Butterfly Network, Inc. Methods and apparatuses for packaging an ultrasound-on-a-chip
CN112004611A (zh) 2018-03-09 2020-11-27 蝴蝶网络有限公司 超声换能器装置以及制造超声换能器装置的方法
US11986349B2 (en) 2018-05-03 2024-05-21 Bfly Operations, Inc. Ultrasound devices
US10856844B2 (en) 2018-05-03 2020-12-08 Butterfly Network, Inc. Vertical packaging for ultrasound-on-a-chip and related methods
TW202011897A (zh) 2018-07-06 2020-04-01 美商蝴蝶網路公司 用於封裝超音波晶片的方法和設備
JP2020018469A (ja) * 2018-07-31 2020-02-06 キヤノン株式会社 静電容量型トランスデューサ、及びそれを用いた超音波プローブ
US11655141B2 (en) 2018-09-28 2023-05-23 Bfly Operations, Inc. Fabrication techniques and structures for gettering materials in ultrasonic transducer cavities
WO2020097419A1 (en) 2018-11-09 2020-05-14 Butterfly Network, Inc. Trans-impedance amplifier (tia) for ultrasound devices
CN113039024A (zh) 2018-11-13 2021-06-25 蝴蝶网络有限公司 用于微机械超声换能器腔的吸气剂技术
JP2022507193A (ja) 2018-11-15 2022-01-18 バタフライ ネットワーク,インコーポレイテッド 微細加工超音波トランスデューサ装置のためのアンチスティクションキャビティ底面
KR20210125476A (ko) 2018-12-07 2021-10-18 옥탄트, 인크. 단백질-단백질 상호작용 스크리닝을 위한 시스템
WO2020118137A1 (en) 2018-12-07 2020-06-11 Butterfly Network, Inc. Ultrasound fingerprint detection and related apparatus and methods
US20200239299A1 (en) 2019-01-29 2020-07-30 Butterfly Network, Inc. Packaging structures and packaging methods for ultrasound-on-chip devices
TW202045099A (zh) 2019-02-07 2020-12-16 美商蝴蝶網路公司 用於微加工超音波傳感器裝置的雙層金屬電極
CN115367696A (zh) 2019-02-25 2022-11-22 蝴蝶网络有限公司 微加工超声换能器器件的自适应腔体厚度控制
WO2020210470A1 (en) 2019-04-12 2020-10-15 Butterfly Network, Inc. Bottom electrode via structures for micromachined ultrasonic transducer devices
WO2020210483A1 (en) 2019-04-12 2020-10-15 Butterfly Network, Inc. Segmented getter openings for micromachined ultrasound transducer devices
US11501562B2 (en) 2019-04-30 2022-11-15 Bfly Operations, Inc. Ultrasound face scanning and identification apparatuses and methods
US20200348794A1 (en) 2019-04-30 2020-11-05 Butterfly Network, Inc. Ultrasound touch detection and related apparatuses and methods
EP4003179A4 (en) 2019-07-25 2023-08-09 BFLY Operations, Inc. METHODS AND DEVICES FOR SWITCHING ON AND OFF AND ADC DRIVERS IN AN ULTRASOUND DEVICE
US11684951B2 (en) 2019-08-08 2023-06-27 Bfly Operations, Inc. Micromachined ultrasonic transducer devices having truncated circle shaped cavities
EP4031903B1 (en) 2019-09-19 2025-11-05 BFLY Operations, Inc. Symmetric receiver switch for ultrasound devices
EP4078224A4 (en) 2019-12-17 2023-12-27 BFLY Operations, Inc. METHOD AND APPARATUS FOR PACKAGING ULTRASONIC-ON-CHIP DEVICES

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