AU2019263404A1 - Pressure port for ultrasonic transducer on CMOS sensor - Google Patents
Pressure port for ultrasonic transducer on CMOS sensor Download PDFInfo
- Publication number
- AU2019263404A1 AU2019263404A1 AU2019263404A AU2019263404A AU2019263404A1 AU 2019263404 A1 AU2019263404 A1 AU 2019263404A1 AU 2019263404 A AU2019263404 A AU 2019263404A AU 2019263404 A AU2019263404 A AU 2019263404A AU 2019263404 A1 AU2019263404 A1 AU 2019263404A1
- Authority
- AU
- Australia
- Prior art keywords
- ultrasonic transducer
- pressure
- ultrasound device
- pressure ports
- micromachined ultrasonic
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Abandoned
Links
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B06—GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
- B06B—METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
- B06B1/00—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency
- B06B1/02—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy
- B06B1/0292—Electrostatic transducers, e.g. electret-type
-
- A—HUMAN NECESSITIES
- A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
- A61B—DIAGNOSIS; SURGERY; IDENTIFICATION
- A61B8/00—Diagnosis using ultrasonic, sonic or infrasonic waves
- A61B8/12—Diagnosis using ultrasonic, sonic or infrasonic waves in body cavities or body tracts, e.g. by using catheters
-
- A—HUMAN NECESSITIES
- A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
- A61B—DIAGNOSIS; SURGERY; IDENTIFICATION
- A61B8/00—Diagnosis using ultrasonic, sonic or infrasonic waves
- A61B8/44—Constructional features of the ultrasonic, sonic or infrasonic diagnostic device
- A61B8/4444—Constructional features of the ultrasonic, sonic or infrasonic diagnostic device related to the probe
- A61B8/4455—Features of the external shape of the probe, e.g. ergonomic aspects
-
- A—HUMAN NECESSITIES
- A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
- A61B—DIAGNOSIS; SURGERY; IDENTIFICATION
- A61B8/00—Diagnosis using ultrasonic, sonic or infrasonic waves
- A61B8/44—Constructional features of the ultrasonic, sonic or infrasonic diagnostic device
- A61B8/4483—Constructional features of the ultrasonic, sonic or infrasonic diagnostic device characterised by features of the ultrasound transducer
- A61B8/4494—Constructional features of the ultrasonic, sonic or infrasonic diagnostic device characterised by features of the ultrasound transducer characterised by the arrangement of the transducer elements
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B06—GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
- B06B—METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
- B06B1/00—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency
- B06B1/02—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy
- B06B1/0207—Driving circuits
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B06—GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
- B06B—METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
- B06B1/00—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency
- B06B1/02—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy
- B06B1/06—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction
- B06B1/0607—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction using multiple elements
- B06B1/0622—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction using multiple elements on one surface
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
- G01N29/22—Details, e.g. general constructional or apparatus details
- G01N29/24—Probes
- G01N29/2406—Electrostatic or capacitive probes, e.g. electret or cMUT-probes
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/20—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators
- H10N30/204—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators using bending displacement, e.g. unimorph, bimorph or multimorph cantilever or membrane benders
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/20—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators
- H10N30/204—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators using bending displacement, e.g. unimorph, bimorph or multimorph cantilever or membrane benders
- H10N30/2047—Membrane type
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B06—GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
- B06B—METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
- B06B2201/00—Indexing scheme associated with B06B1/0207 for details covered by B06B1/0207 but not provided for in any of its subgroups
- B06B2201/20—Application to multi-element transducer
Landscapes
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Health & Medical Sciences (AREA)
- Physics & Mathematics (AREA)
- Pathology (AREA)
- Molecular Biology (AREA)
- Heart & Thoracic Surgery (AREA)
- Veterinary Medicine (AREA)
- Public Health (AREA)
- Animal Behavior & Ethology (AREA)
- Biophysics (AREA)
- Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
- Radiology & Medical Imaging (AREA)
- Biomedical Technology (AREA)
- Surgery (AREA)
- Medical Informatics (AREA)
- Chemical & Material Sciences (AREA)
- Biochemistry (AREA)
- Analytical Chemistry (AREA)
- Immunology (AREA)
- General Physics & Mathematics (AREA)
- Gynecology & Obstetrics (AREA)
- Micromachines (AREA)
- Transducers For Ultrasonic Waves (AREA)
Applications Claiming Priority (5)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US201862666556P | 2018-05-03 | 2018-05-03 | |
| US62/666,556 | 2018-05-03 | ||
| US201862696305P | 2018-07-10 | 2018-07-10 | |
| US62/696,305 | 2018-07-10 | ||
| PCT/US2019/030388 WO2019213388A1 (en) | 2018-05-03 | 2019-05-02 | Pressure port for ultrasonic transducer on cmos sensor |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| AU2019263404A1 true AU2019263404A1 (en) | 2020-11-19 |
Family
ID=68384340
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| AU2019263404A Abandoned AU2019263404A1 (en) | 2018-05-03 | 2019-05-02 | Pressure port for ultrasonic transducer on CMOS sensor |
Country Status (9)
| Country | Link |
|---|---|
| US (2) | US12053323B2 (cg-RX-API-DMAC7.html) |
| EP (1) | EP3788798B1 (cg-RX-API-DMAC7.html) |
| JP (1) | JP2021522734A (cg-RX-API-DMAC7.html) |
| KR (1) | KR20210005208A (cg-RX-API-DMAC7.html) |
| CN (1) | CN112075090B (cg-RX-API-DMAC7.html) |
| AU (1) | AU2019263404A1 (cg-RX-API-DMAC7.html) |
| CA (1) | CA3098911A1 (cg-RX-API-DMAC7.html) |
| TW (1) | TW202000137A (cg-RX-API-DMAC7.html) |
| WO (1) | WO2019213388A1 (cg-RX-API-DMAC7.html) |
Families Citing this family (18)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2016106153A1 (en) * | 2014-12-21 | 2016-06-30 | Chirp Microsystems, Inc. | Piezoelectric micromachined ultrasonic transducers with low stress sensitivity and methods of fabrication |
| US11655141B2 (en) | 2018-09-28 | 2023-05-23 | Bfly Operations, Inc. | Fabrication techniques and structures for gettering materials in ultrasonic transducer cavities |
| CN113039024A (zh) | 2018-11-13 | 2021-06-25 | 蝴蝶网络有限公司 | 用于微机械超声换能器腔的吸气剂技术 |
| JP2022507193A (ja) | 2018-11-15 | 2022-01-18 | バタフライ ネットワーク,インコーポレイテッド | 微細加工超音波トランスデューサ装置のためのアンチスティクションキャビティ底面 |
| TW202045099A (zh) | 2019-02-07 | 2020-12-16 | 美商蝴蝶網路公司 | 用於微加工超音波傳感器裝置的雙層金屬電極 |
| CN115367696A (zh) | 2019-02-25 | 2022-11-22 | 蝴蝶网络有限公司 | 微加工超声换能器器件的自适应腔体厚度控制 |
| WO2020210483A1 (en) | 2019-04-12 | 2020-10-15 | Butterfly Network, Inc. | Segmented getter openings for micromachined ultrasound transducer devices |
| WO2020210470A1 (en) | 2019-04-12 | 2020-10-15 | Butterfly Network, Inc. | Bottom electrode via structures for micromachined ultrasonic transducer devices |
| US11501562B2 (en) | 2019-04-30 | 2022-11-15 | Bfly Operations, Inc. | Ultrasound face scanning and identification apparatuses and methods |
| FR3097091B1 (fr) * | 2019-06-07 | 2021-07-23 | Commissariat Energie Atomique | dispositif pourvu d’une pluralité de résonateurs présentant collectivement un facteur de qualité amélioré |
| US11684951B2 (en) | 2019-08-08 | 2023-06-27 | Bfly Operations, Inc. | Micromachined ultrasonic transducer devices having truncated circle shaped cavities |
| US11988640B2 (en) | 2020-03-11 | 2024-05-21 | Bfly Operations, Inc. | Bottom electrode material stack for micromachined ultrasonic transducer devices |
| TWI742603B (zh) | 2020-04-09 | 2021-10-11 | 伊諾司生技股份有限公司 | 一種具有空腔的感測器 |
| TW202210830A (zh) | 2020-04-16 | 2022-03-16 | 美商蝴蝶網路公司 | 用於超音波裝置中之電路系統及/或換能器之內建自測試的方法和電路系統 |
| US20210403321A1 (en) * | 2020-06-30 | 2021-12-30 | Butterfly Network, Inc. | Formation of self-assembled monolayer for ultrasonic transducers |
| CA3199196A1 (en) | 2020-11-19 | 2022-05-27 | Michael Kraft | Ultrasonic transducer array device |
| US12246348B2 (en) | 2021-03-04 | 2025-03-11 | BFLY Operations, Inc | Capacitive Micromachined ultrasonic transducers (CMUTs) having non-uniform pedestals |
| WO2022187467A2 (en) | 2021-03-04 | 2022-09-09 | Butterfly Network, Inc. | Micromachined ultrasound transducer with pedestal |
Family Cites Families (113)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4262399A (en) * | 1978-11-08 | 1981-04-21 | General Electric Co. | Ultrasonic transducer fabricated as an integral park of a monolithic integrated circuit |
| JPH01296122A (ja) * | 1988-05-24 | 1989-11-29 | Matsushita Electric Ind Co Ltd | 圧力センサ |
| US4996627A (en) * | 1989-01-30 | 1991-02-26 | Dresser Industries, Inc. | High sensitivity miniature pressure transducer |
| US5311095A (en) * | 1992-05-14 | 1994-05-10 | Duke University | Ultrasonic transducer array |
| US5744898A (en) * | 1992-05-14 | 1998-04-28 | Duke University | Ultrasound transducer array with transmitter/receiver integrated circuitry |
| US5639423A (en) * | 1992-08-31 | 1997-06-17 | The Regents Of The University Of Calfornia | Microfabricated reactor |
| US5894452A (en) * | 1994-10-21 | 1999-04-13 | The Board Of Trustees Of The Leland Stanford Junior University | Microfabricated ultrasonic immersion transducer |
| US5619476A (en) * | 1994-10-21 | 1997-04-08 | The Board Of Trustees Of The Leland Stanford Jr. Univ. | Electrostatic ultrasonic transducer |
| US5982709A (en) * | 1998-03-31 | 1999-11-09 | The Board Of Trustees Of The Leland Stanford Junior University | Acoustic transducers and method of microfabrication |
| JP2000050391A (ja) * | 1998-07-31 | 2000-02-18 | Olympus Optical Co Ltd | 超音波トランスデューサーおよびその製造方法 |
| US6323580B1 (en) * | 1999-04-28 | 2001-11-27 | The Charles Stark Draper Laboratory, Inc. | Ferroic transducer |
| US6271620B1 (en) * | 1999-05-20 | 2001-08-07 | Sen Corporation | Acoustic transducer and method of making the same |
| US6262946B1 (en) * | 1999-09-29 | 2001-07-17 | The Board Of Trustees Of The Leland Stanford Junior University | Capacitive micromachined ultrasonic transducer arrays with reduced cross-coupling |
| US6430109B1 (en) * | 1999-09-30 | 2002-08-06 | The Board Of Trustees Of The Leland Stanford Junior University | Array of capacitive micromachined ultrasonic transducer elements with through wafer via connections |
| US6443901B1 (en) * | 2000-06-15 | 2002-09-03 | Koninklijke Philips Electronics N.V. | Capacitive micromachined ultrasonic transducers |
| US6854338B2 (en) * | 2000-07-14 | 2005-02-15 | The Board Of Trustees Of The Leland Stanford Junior University | Fluidic device with integrated capacitive micromachined ultrasonic transducers |
| US6891711B1 (en) * | 2004-04-08 | 2005-05-10 | Kulite Semiconductor Products, Inc. | Ultra-miniature, high temperature, capacitive inductive pressure transducer |
| WO2005114820A2 (en) * | 2004-05-14 | 2005-12-01 | The University Of Georgia Research Foundation, Inc. | Implantable ultrasonic transducer systems and methods |
| EP1761104A4 (en) * | 2004-06-03 | 2016-12-28 | Olympus Corp | ULTRASONIC VIBRATOR OF THE ELECTROSTATIC CAPABILITY TYPE, METHOD OF MANUFACTURE, AND ELECTROSTATIC CAPACITY-TYPE ULTRASONIC PROBE |
| US8454513B2 (en) * | 2004-12-30 | 2013-06-04 | Stc.Unm | Micro-machined medical devices, methods of fabricating microdevices, and methods of medical diagnosis, imaging, stimulation, and treatment |
| GB0605576D0 (en) * | 2006-03-20 | 2006-04-26 | Oligon Ltd | MEMS device |
| JP4271253B2 (ja) * | 2006-10-11 | 2009-06-03 | オリンパスメディカルシステムズ株式会社 | 超音波トランスデューサ、超音波トランスデューサの製造方法、及び超音波内視鏡 |
| JP4271252B2 (ja) | 2006-10-12 | 2009-06-03 | オリンパスメディカルシステムズ株式会社 | 超音波振動子セル、超音波振動子エレメント、超音波振動子アレイ及び超音波診断装置 |
| CN101662989B (zh) * | 2006-11-03 | 2013-10-30 | 研究三角协会 | 使用挠曲模式压电换能器的增强的超声成像探头 |
| US7616077B1 (en) * | 2007-03-22 | 2009-11-10 | Sandia Corporation | Microelectromechanical resonator and method for fabrication |
| JP5408935B2 (ja) * | 2007-09-25 | 2014-02-05 | キヤノン株式会社 | 電気機械変換素子及びその製造方法 |
| JP5408937B2 (ja) * | 2007-09-25 | 2014-02-05 | キヤノン株式会社 | 電気機械変換素子及びその製造方法 |
| NZ589503A (en) | 2008-05-07 | 2013-07-26 | Signostics Ltd | Docking system for medical diagnostic scanning using a handheld device |
| JP5376982B2 (ja) * | 2008-06-30 | 2013-12-25 | キヤノン株式会社 | 機械電気変換素子と機械電気変換装置および機械電気変換装置の作製方法 |
| JP5851238B6 (ja) * | 2009-03-05 | 2023-12-15 | 株式会社日立メディコ | 超音波トランスデューサ、その製造方法、および、それを用いた超音波探触子 |
| DK2411163T3 (da) * | 2009-03-26 | 2013-06-10 | Norwegian Univ Sci & Tech Ntnu | Waferbundet cmut-array med ledende kontakthuller |
| US9327316B2 (en) * | 2009-06-30 | 2016-05-03 | Avago Technologies General Ip (Singapore) Pte. Ltd. | Multi-frequency acoustic array |
| US8324006B1 (en) * | 2009-10-28 | 2012-12-04 | National Semiconductor Corporation | Method of forming a capacitive micromachined ultrasonic transducer (CMUT) |
| JP5671876B2 (ja) * | 2009-11-16 | 2015-02-18 | セイコーエプソン株式会社 | 超音波トランスデューサー、超音波センサー、超音波トランスデューサーの製造方法、および超音波センサーの製造方法 |
| US8329053B2 (en) * | 2009-11-23 | 2012-12-11 | Avago Technologies Wireless Ip (Singapore) Pte. Ltd. | Micromachined transducers and method of fabrication |
| JP5529577B2 (ja) * | 2010-02-14 | 2014-06-25 | キヤノン株式会社 | 電気機械変換装置及びその作製方法 |
| JP2011244425A (ja) * | 2010-04-23 | 2011-12-01 | Canon Inc | 電気機械変換装置及びその作製方法 |
| US8471304B2 (en) | 2010-06-04 | 2013-06-25 | Carnegie Mellon University | Method, apparatus, and system for micromechanical gas chemical sensing capacitor |
| US9420378B1 (en) * | 2010-07-12 | 2016-08-16 | Amkor Technology, Inc. | Top port MEMS microphone package and method |
| CA2814123A1 (en) | 2010-10-12 | 2012-04-19 | Micralyne Inc. | Soi-based cmut device with buried electrodes |
| JP5778914B2 (ja) * | 2010-11-04 | 2015-09-16 | キヤノン株式会社 | 電気機械変換装置の製造方法 |
| JP5875244B2 (ja) * | 2011-04-06 | 2016-03-02 | キヤノン株式会社 | 電気機械変換装置及びその作製方法 |
| JP5921079B2 (ja) * | 2011-04-06 | 2016-05-24 | キヤノン株式会社 | 電気機械変換装置及びその作製方法 |
| JP5875243B2 (ja) * | 2011-04-06 | 2016-03-02 | キヤノン株式会社 | 電気機械変換装置及びその作製方法 |
| CN104066520A (zh) * | 2012-01-27 | 2014-09-24 | 皇家飞利浦有限公司 | 电容式微机械换能器及其制造方法 |
| JP6209537B2 (ja) * | 2012-01-27 | 2017-10-04 | コーニンクレッカ フィリップス エヌ ヴェKoninklijke Philips N.V. | 容量性マイクロマシン・トランスデューサ及びこれを製造する方法 |
| CN104812504B (zh) * | 2012-11-20 | 2018-01-26 | 皇家飞利浦有限公司 | 电容性微加工换能器和制造所述电容性微加工换能器的方法 |
| WO2014123922A1 (en) | 2013-02-05 | 2014-08-14 | Butterfly Network, Inc. | Cmos ultrasonic transducers and related apparatus and methods |
| KR20220097541A (ko) | 2013-03-15 | 2022-07-07 | 버터플라이 네트워크, 인크. | 모놀리식 초음파 이미징 디바이스, 시스템 및 방법 |
| EP2969914B1 (en) | 2013-03-15 | 2020-01-01 | Butterfly Network Inc. | Complementary metal oxide semiconductor (cmos) ultrasonic transducers and methods for forming the same |
| JP5901566B2 (ja) | 2013-04-18 | 2016-04-13 | キヤノン株式会社 | トランスデューサ、トランスデューサの製造方法、及び被検体情報取得装置 |
| EP2796209B1 (en) * | 2013-04-25 | 2020-06-17 | Canon Kabushiki Kaisha | Capacitive transducer and method of manufacturing the same |
| EP2796210B1 (en) * | 2013-04-25 | 2016-11-30 | Canon Kabushiki Kaisha | Capacitive transducer and method of manufacturing the same |
| AU2014293274B2 (en) | 2013-07-23 | 2018-11-01 | Butterfly Network, Inc. | Interconnectable ultrasound transducer probes and related methods and apparatus |
| JP6381195B2 (ja) * | 2013-10-22 | 2018-08-29 | キヤノン株式会社 | 静電容量型トランスデューサ及びその作製方法 |
| US9834434B2 (en) * | 2013-11-19 | 2017-12-05 | Canon Kabushiki Kaisha | Capacitive transducer and method of manufacturing the same |
| JP2015103821A (ja) * | 2013-11-20 | 2015-06-04 | キヤノン株式会社 | 静電容量型トランスデューサ及びその作製方法 |
| US10478858B2 (en) * | 2013-12-12 | 2019-11-19 | Qualcomm Incorporated | Piezoelectric ultrasonic transducer and process |
| WO2015112452A1 (en) * | 2014-01-24 | 2015-07-30 | The Regents Of The University Of California | Curved piezoelectric transducers |
| US9439000B1 (en) * | 2014-02-28 | 2016-09-06 | Google Inc. | Systems and methods for improved audio output in electronic devices |
| TWI661534B (zh) * | 2014-04-18 | 2019-06-01 | 美商蝴蝶網路公司 | 在互補式金屬氧化物半導體晶圓中的超音波轉換器及相關設備和方法 |
| WO2015190429A1 (ja) * | 2014-06-13 | 2015-12-17 | 株式会社村田製作所 | 圧電デバイスおよび圧電デバイスの製造方法 |
| JP6599968B2 (ja) * | 2014-07-08 | 2019-10-30 | クアルコム,インコーポレイテッド | 圧電超音波トランスデューサおよびプロセス |
| US9067779B1 (en) | 2014-07-14 | 2015-06-30 | Butterfly Network, Inc. | Microfabricated ultrasonic transducers and related apparatus and methods |
| US9821340B2 (en) | 2014-07-28 | 2017-11-21 | Kolo Medical Ltd. | High displacement ultrasonic transducer |
| US9995821B2 (en) | 2014-10-15 | 2018-06-12 | Qualcomm Incorporated | Active beam-forming technique for piezoelectric ultrasonic transducer array |
| JP2016101417A (ja) * | 2014-11-28 | 2016-06-02 | キヤノン株式会社 | 静電容量型音響波トランスデューサ及びこれを備えた被検体情報取得装置 |
| WO2016106153A1 (en) | 2014-12-21 | 2016-06-30 | Chirp Microsystems, Inc. | Piezoelectric micromachined ultrasonic transducers with low stress sensitivity and methods of fabrication |
| US20160219375A1 (en) * | 2015-01-23 | 2016-07-28 | Silicon Audio Directional, Llc | Multi-mode Microphones |
| US10497748B2 (en) * | 2015-10-14 | 2019-12-03 | Qualcomm Incorporated | Integrated piezoelectric micromechanical ultrasonic transducer pixel and array |
| WO2017065691A1 (en) * | 2015-10-14 | 2017-04-20 | Agency For Science, Technology And Research | Device arrangement |
| US10175347B2 (en) | 2015-12-02 | 2019-01-08 | Butterfly Network, Inc. | Ultrasound receiver circuitry and related apparatus and methods |
| US10187020B2 (en) | 2015-12-02 | 2019-01-22 | Butterfly Network, Inc. | Trans-impedance amplifier for ultrasound device and related apparatus and methods |
| JP6632431B2 (ja) * | 2016-03-08 | 2020-01-22 | キヤノン株式会社 | 超音波トランスデューサユニット及びそれを備える情報取得装置 |
| US10082565B2 (en) | 2016-03-31 | 2018-09-25 | Butterfly Network, Inc. | Multilevel bipolar pulser |
| US9778348B1 (en) | 2016-03-31 | 2017-10-03 | Butterfly Network, Inc. | Symmetric receiver switch for bipolar pulser |
| EP3472829B1 (en) * | 2016-06-17 | 2023-08-16 | InvenSense, Inc. | Piezoelectric micromachined ultrasonic transducers having stress relief features |
| US10856840B2 (en) | 2016-06-20 | 2020-12-08 | Butterfly Network, Inc. | Universal ultrasound device and related apparatus and methods |
| AU2017281280B2 (en) | 2016-06-20 | 2022-01-06 | Butterfly Network, Inc. | Electrical contact arrangement for microfabricated ultrasonic transducer |
| US10231713B2 (en) | 2016-09-13 | 2019-03-19 | Butterfly Network, Inc. | Analog-to-digital drive circuitry having built-in time gain compensation functionality for ultrasound applications |
| JP6833544B2 (ja) * | 2017-02-09 | 2021-02-24 | キヤノン株式会社 | 静電容量型トランスデューサおよびその製造方法 |
| WO2018157050A1 (en) | 2017-02-27 | 2018-08-30 | Butterfly Network, Inc. | Capacitive micromachined ultrasonic transducers (cmuts) and related apparatus and methods |
| US10196261B2 (en) | 2017-03-08 | 2019-02-05 | Butterfly Network, Inc. | Microfabricated ultrasonic transducers and related apparatus and methods |
| EP3642611B1 (en) | 2017-06-21 | 2024-02-14 | Butterfly Network, Inc. | Microfabricated ultrasonic transducer having individual cells with electrically isolated electrode sections |
| US10972842B2 (en) | 2017-06-23 | 2021-04-06 | Butterfly Network, Inc. | Differential ultrasonic transducer element for ultrasound devices |
| JP6904814B2 (ja) * | 2017-06-30 | 2021-07-21 | キヤノン株式会社 | 中空構造体の製造方法、及び中空構造体 |
| EP3678555A4 (en) | 2017-09-07 | 2021-05-19 | Butterfly Network, Inc. | WRIST-ATTACHED ULTRASONIC-ON-CHIP DEVICE |
| WO2019099681A1 (en) | 2017-11-15 | 2019-05-23 | Butterfly Network, Inc. | Ultrasound device with piezoelectric micromachined ultrasonic transducers |
| EP3709894B1 (en) | 2017-11-15 | 2026-02-25 | BFLY Operations, Inc. | Ultrasound apparatuses and methods for fabricating ultrasound devices |
| US20190299251A1 (en) | 2017-11-15 | 2019-10-03 | Butterfly Network, Inc. | Apparatuses including a capacitive micromachined ultrasonic transducer directly coupled to an analog-to-digital converter |
| WO2019152340A1 (en) | 2018-01-30 | 2019-08-08 | Butterfly Network, Inc. | Methods and apparatuses for packaging an ultrasound-on-a-chip |
| CN112004611A (zh) | 2018-03-09 | 2020-11-27 | 蝴蝶网络有限公司 | 超声换能器装置以及制造超声换能器装置的方法 |
| US11986349B2 (en) | 2018-05-03 | 2024-05-21 | Bfly Operations, Inc. | Ultrasound devices |
| US10856844B2 (en) | 2018-05-03 | 2020-12-08 | Butterfly Network, Inc. | Vertical packaging for ultrasound-on-a-chip and related methods |
| TW202011897A (zh) | 2018-07-06 | 2020-04-01 | 美商蝴蝶網路公司 | 用於封裝超音波晶片的方法和設備 |
| JP2020018469A (ja) * | 2018-07-31 | 2020-02-06 | キヤノン株式会社 | 静電容量型トランスデューサ、及びそれを用いた超音波プローブ |
| US11655141B2 (en) | 2018-09-28 | 2023-05-23 | Bfly Operations, Inc. | Fabrication techniques and structures for gettering materials in ultrasonic transducer cavities |
| WO2020097419A1 (en) | 2018-11-09 | 2020-05-14 | Butterfly Network, Inc. | Trans-impedance amplifier (tia) for ultrasound devices |
| CN113039024A (zh) | 2018-11-13 | 2021-06-25 | 蝴蝶网络有限公司 | 用于微机械超声换能器腔的吸气剂技术 |
| JP2022507193A (ja) | 2018-11-15 | 2022-01-18 | バタフライ ネットワーク,インコーポレイテッド | 微細加工超音波トランスデューサ装置のためのアンチスティクションキャビティ底面 |
| KR20210125476A (ko) | 2018-12-07 | 2021-10-18 | 옥탄트, 인크. | 단백질-단백질 상호작용 스크리닝을 위한 시스템 |
| WO2020118137A1 (en) | 2018-12-07 | 2020-06-11 | Butterfly Network, Inc. | Ultrasound fingerprint detection and related apparatus and methods |
| US20200239299A1 (en) | 2019-01-29 | 2020-07-30 | Butterfly Network, Inc. | Packaging structures and packaging methods for ultrasound-on-chip devices |
| TW202045099A (zh) | 2019-02-07 | 2020-12-16 | 美商蝴蝶網路公司 | 用於微加工超音波傳感器裝置的雙層金屬電極 |
| CN115367696A (zh) | 2019-02-25 | 2022-11-22 | 蝴蝶网络有限公司 | 微加工超声换能器器件的自适应腔体厚度控制 |
| WO2020210470A1 (en) | 2019-04-12 | 2020-10-15 | Butterfly Network, Inc. | Bottom electrode via structures for micromachined ultrasonic transducer devices |
| WO2020210483A1 (en) | 2019-04-12 | 2020-10-15 | Butterfly Network, Inc. | Segmented getter openings for micromachined ultrasound transducer devices |
| US11501562B2 (en) | 2019-04-30 | 2022-11-15 | Bfly Operations, Inc. | Ultrasound face scanning and identification apparatuses and methods |
| US20200348794A1 (en) | 2019-04-30 | 2020-11-05 | Butterfly Network, Inc. | Ultrasound touch detection and related apparatuses and methods |
| EP4003179A4 (en) | 2019-07-25 | 2023-08-09 | BFLY Operations, Inc. | METHODS AND DEVICES FOR SWITCHING ON AND OFF AND ADC DRIVERS IN AN ULTRASOUND DEVICE |
| US11684951B2 (en) | 2019-08-08 | 2023-06-27 | Bfly Operations, Inc. | Micromachined ultrasonic transducer devices having truncated circle shaped cavities |
| EP4031903B1 (en) | 2019-09-19 | 2025-11-05 | BFLY Operations, Inc. | Symmetric receiver switch for ultrasound devices |
| EP4078224A4 (en) | 2019-12-17 | 2023-12-27 | BFLY Operations, Inc. | METHOD AND APPARATUS FOR PACKAGING ULTRASONIC-ON-CHIP DEVICES |
-
2019
- 2019-05-02 TW TW108115250A patent/TW202000137A/zh unknown
- 2019-05-02 CN CN201980029781.8A patent/CN112075090B/zh active Active
- 2019-05-02 WO PCT/US2019/030388 patent/WO2019213388A1/en not_active Ceased
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2024
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| EP3788798C0 (en) | 2023-07-05 |
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| CN112075090A (zh) | 2020-12-11 |
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| US20250090138A1 (en) | 2025-03-20 |
| EP3788798A1 (en) | 2021-03-10 |
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| US20190336099A1 (en) | 2019-11-07 |
| US12053323B2 (en) | 2024-08-06 |
| WO2019213388A1 (en) | 2019-11-07 |
| CA3098911A1 (en) | 2019-11-07 |
| CN112075090B (zh) | 2022-10-14 |
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