JP2021521334A5 - - Google Patents
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- Publication number
- JP2021521334A5 JP2021521334A5 JP2020555886A JP2020555886A JP2021521334A5 JP 2021521334 A5 JP2021521334 A5 JP 2021521334A5 JP 2020555886 A JP2020555886 A JP 2020555886A JP 2020555886 A JP2020555886 A JP 2020555886A JP 2021521334 A5 JP2021521334 A5 JP 2021521334A5
- Authority
- JP
- Japan
- Prior art keywords
- boride
- tab
- tantalum
- tungsten
- target
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- XTDAIYZKROTZLD-UHFFFAOYSA-N boranylidynetantalum Chemical compound [Ta]#B XTDAIYZKROTZLD-UHFFFAOYSA-N 0.000 claims description 63
- OFEAOSSMQHGXMM-UHFFFAOYSA-N 12007-10-2 Chemical compound [W].[W]=[B] OFEAOSSMQHGXMM-UHFFFAOYSA-N 0.000 claims description 43
- 239000000203 mixture Substances 0.000 claims description 27
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims description 19
- 229910052799 carbon Inorganic materials 0.000 claims description 19
- 239000000843 powder Substances 0.000 claims description 17
- 238000004519 manufacturing process Methods 0.000 claims description 15
- 238000005240 physical vapour deposition Methods 0.000 claims description 14
- 239000002245 particle Substances 0.000 claims description 11
- 229910052715 tantalum Inorganic materials 0.000 claims description 10
- GUVRBAGPIYLISA-UHFFFAOYSA-N tantalum atom Chemical compound [Ta] GUVRBAGPIYLISA-UHFFFAOYSA-N 0.000 claims description 10
- 238000002490 spark plasma sintering Methods 0.000 claims description 9
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 claims description 8
- 229910052721 tungsten Inorganic materials 0.000 claims description 8
- 239000010937 tungsten Substances 0.000 claims description 8
- 238000000151 deposition Methods 0.000 claims description 7
- 239000000126 substance Substances 0.000 claims description 7
- 229910052751 metal Inorganic materials 0.000 claims description 6
- 239000002184 metal Substances 0.000 claims description 6
- 238000005259 measurement Methods 0.000 claims description 5
- 238000007731 hot pressing Methods 0.000 claims description 4
- 239000012535 impurity Substances 0.000 claims description 4
- 239000000758 substrate Substances 0.000 claims description 4
- 229910002804 graphite Inorganic materials 0.000 claims description 3
- 239000010439 graphite Substances 0.000 claims description 3
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 claims description 2
- 229910052796 boron Inorganic materials 0.000 claims description 2
- 229910052729 chemical element Inorganic materials 0.000 claims description 2
- 150000001875 compounds Chemical class 0.000 claims description 2
- 238000000465 moulding Methods 0.000 claims description 2
- 230000001681 protective effect Effects 0.000 claims description 2
- 238000002601 radiography Methods 0.000 claims description 2
- KXTVFSDQZZXLDA-UHFFFAOYSA-N B([O-])([O-])[O-].[W+4].B([O-])([O-])[O-].B([O-])([O-])[O-].B([O-])([O-])[O-].[W+4].[W+4] Chemical compound B([O-])([O-])[O-].[W+4].B([O-])([O-])[O-].B([O-])([O-])[O-].B([O-])([O-])[O-].[W+4].[W+4] KXTVFSDQZZXLDA-UHFFFAOYSA-N 0.000 claims 4
- JEUVAEBWTRCMTB-UHFFFAOYSA-N boron;tantalum Chemical compound B#[Ta]#B JEUVAEBWTRCMTB-UHFFFAOYSA-N 0.000 claims 1
- -1 diboride Inorganic materials 0.000 claims 1
- 238000007689 inspection Methods 0.000 claims 1
- 238000000034 method Methods 0.000 description 12
- 239000012071 phase Substances 0.000 description 11
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 4
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 4
- 230000008021 deposition Effects 0.000 description 4
- 238000005245 sintering Methods 0.000 description 4
- 239000000463 material Substances 0.000 description 3
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
- 239000011230 binding agent Substances 0.000 description 2
- 238000000576 coating method Methods 0.000 description 2
- 239000010941 cobalt Substances 0.000 description 2
- 229910017052 cobalt Inorganic materials 0.000 description 2
- GUTLYIVDDKVIGB-UHFFFAOYSA-N cobalt atom Chemical compound [Co] GUTLYIVDDKVIGB-UHFFFAOYSA-N 0.000 description 2
- 229910052742 iron Inorganic materials 0.000 description 2
- 150000002739 metals Chemical class 0.000 description 2
- 229910052759 nickel Inorganic materials 0.000 description 2
- 238000004663 powder metallurgy Methods 0.000 description 2
- 238000004544 sputter deposition Methods 0.000 description 2
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 1
- 239000000654 additive Substances 0.000 description 1
- 230000000996 additive effect Effects 0.000 description 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 230000006835 compression Effects 0.000 description 1
- 238000007906 compression Methods 0.000 description 1
- 230000001419 dependent effect Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000005242 forging Methods 0.000 description 1
- 239000007789 gas Substances 0.000 description 1
- 239000001257 hydrogen Substances 0.000 description 1
- 229910052739 hydrogen Inorganic materials 0.000 description 1
- 230000002706 hydrostatic effect Effects 0.000 description 1
- 230000001771 impaired effect Effects 0.000 description 1
- 239000006115 industrial coating Substances 0.000 description 1
- 239000000155 melt Substances 0.000 description 1
- 238000005272 metallurgy Methods 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
- 238000005096 rolling process Methods 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
- 238000001947 vapour-phase growth Methods 0.000 description 1
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| ATGM50074/2018U AT16480U1 (de) | 2018-04-20 | 2018-04-20 | Target und Verfahren zur Herstellung eines Targets |
| ATGM50074/2018 | 2018-04-20 | ||
| PCT/EP2019/059515 WO2019201795A1 (de) | 2018-04-20 | 2019-04-12 | Target und verfahren zur herstellung eines targets |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2021521334A JP2021521334A (ja) | 2021-08-26 |
| JP2021521334A5 true JP2021521334A5 (enExample) | 2021-10-07 |
| JP7394781B2 JP7394781B2 (ja) | 2023-12-08 |
Family
ID=68159833
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2020555886A Active JP7394781B2 (ja) | 2018-04-20 | 2019-04-12 | ターゲット及びターゲットの製造方法 |
Country Status (6)
| Country | Link |
|---|---|
| EP (1) | EP3781720B1 (enExample) |
| JP (1) | JP7394781B2 (enExample) |
| CN (1) | CN112236541A (enExample) |
| AT (1) | AT16480U1 (enExample) |
| TW (1) | TWI694980B (enExample) |
| WO (1) | WO2019201795A1 (enExample) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN115385695B (zh) * | 2022-07-28 | 2023-07-28 | 广东工业大学 | 一种含缺陷的片状二硼化钨粉体及其制备方法和应用 |
Family Cites Families (24)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS55128560A (en) * | 1979-03-27 | 1980-10-04 | Agency Of Ind Science & Technol | Boride based ultrahard heat resistant material |
| JP3154735B2 (ja) * | 1991-03-07 | 2001-04-09 | 住友大阪セメント株式会社 | スパッタリング用ターゲットおよびその製造方法 |
| JPH05195199A (ja) * | 1991-10-04 | 1993-08-03 | Toyo Kohan Co Ltd | 耐摩耗性、耐食性に優れた硼化物系超硬質コーティン グ薄膜の製造方法 |
| JPH0681124A (ja) * | 1992-09-02 | 1994-03-22 | Mitsubishi Materials Corp | 表面被覆材 |
| JPH0681125A (ja) * | 1992-09-02 | 1994-03-22 | Mitsubishi Materials Corp | 表面被覆材 |
| JP3160387B2 (ja) * | 1992-10-01 | 2001-04-25 | トーカロ株式会社 | 耐溶融金属性に優れる複合溶射材料および複合溶射皮膜 |
| JPH06248446A (ja) * | 1993-02-26 | 1994-09-06 | Mitsubishi Materials Corp | スパッタリング用ターゲット及びその製造方法 |
| DE19516883A1 (de) * | 1994-05-13 | 1995-11-16 | Merck Patent Gmbh | Tiefdruckform |
| US7736582B2 (en) * | 2004-06-10 | 2010-06-15 | Allomet Corporation | Method for consolidating tough coated hard powders |
| JP4725770B2 (ja) * | 2004-11-25 | 2011-07-13 | 三菱マテリアル株式会社 | 高反応性被削材の高速切削加工で硬質被覆層がすぐれた耐摩耗性を発揮する表面被覆超硬合金製切削工具 |
| DE102005014617B4 (de) * | 2005-03-23 | 2016-06-16 | Carl Zeiss Ag | Formwerkzeug zum Gießen von Linsen aus Kunststoff |
| US20080110746A1 (en) * | 2006-11-09 | 2008-05-15 | Kardokus Janine K | Novel manufacturing design and processing methods and apparatus for sputtering targets |
| US8702919B2 (en) * | 2007-08-13 | 2014-04-22 | Honeywell International Inc. | Target designs and related methods for coupled target assemblies, methods of production and uses thereof |
| JP5676429B2 (ja) * | 2008-04-21 | 2015-02-25 | ハネウェル・インターナショナル・インコーポレーテッド | Ｄｃマグネトロンスパッタリングシステムの設計および使用 |
| JP5434583B2 (ja) * | 2009-12-28 | 2014-03-05 | 住友大阪セメント株式会社 | 金属ホウ化物焼結体の製造方法 |
| KR101814228B1 (ko) * | 2010-05-04 | 2018-01-04 | 오를리콘 서피스 솔루션스 아크티엔게젤샤프트, 페피콘 | 세라믹 타겟을 사용한 스파크 증착 방법 |
| WO2013143624A2 (en) * | 2012-03-30 | 2013-10-03 | Siemens Aktiengesellschaft | Target material with a boron compound for a thin film depostition technique, method for manufacturing a thin film on a substrate, heat receiver tube, parabolic trough collector with the heat receiver tube and use of the parabolic tough collector |
| EP2852552A4 (en) * | 2012-05-01 | 2016-03-09 | Government Of The U S A As Represented By The Secretary Of The Navy | FORMATION OF BORCARBIDE BORONITRIDE CARBON COMPOSITIONS |
| CN104513954A (zh) * | 2013-09-26 | 2015-04-15 | 中国科学院金属研究所 | 一种AlB2型WB2硬质涂层及其制备工艺 |
| CN103771859B (zh) * | 2014-03-03 | 2015-05-27 | 中国科学院金属研究所 | 一种碳化硅/硼化钨复合材料及其制备方法 |
| EP3155080B1 (en) * | 2014-06-11 | 2022-05-18 | Nanomech Inc. | Nano-tribology compositions and related methods including hard particles |
| CN105693252B (zh) * | 2016-01-22 | 2018-06-19 | 基迈克材料科技（苏州）有限公司 | 热压工艺制备硼化物溅射靶材 |
| CN106756849B (zh) * | 2016-12-21 | 2019-06-25 | 深圳先进技术研究院 | 一种具有过渡金属硼化物涂层的pcb用微钻及其制备方法 |
| EP3692182B1 (en) * | 2017-10-06 | 2024-12-18 | Oerlikon Surface Solutions AG, Pfäffikon | A coated substrate with a coating comprising a ternary tm-diboride coating film, a method for producing the coated substrate |
-
2018
- 2018-04-20 AT ATGM50074/2018U patent/AT16480U1/de not_active IP Right Cessation
-
2019
- 2019-04-12 CN CN201980026624.1A patent/CN112236541A/zh active Pending
- 2019-04-12 EP EP19717488.1A patent/EP3781720B1/de active Active
- 2019-04-12 JP JP2020555886A patent/JP7394781B2/ja active Active
- 2019-04-12 WO PCT/EP2019/059515 patent/WO2019201795A1/de not_active Ceased
- 2019-04-16 TW TW108113200A patent/TWI694980B/zh active
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