JP2021521335A5 - - Google Patents
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- Publication number
- JP2021521335A5 JP2021521335A5 JP2020555911A JP2020555911A JP2021521335A5 JP 2021521335 A5 JP2021521335 A5 JP 2021521335A5 JP 2020555911 A JP2020555911 A JP 2020555911A JP 2020555911 A JP2020555911 A JP 2020555911A JP 2021521335 A5 JP2021521335 A5 JP 2021521335A5
- Authority
- JP
- Japan
- Prior art keywords
- diboride
- tib
- vanadium
- titanium
- titanium diboride
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 229910033181 TiB2 Inorganic materials 0.000 claims description 60
- QYEXBYZXHDUPRC-UHFFFAOYSA-N B#[Ti]#B Chemical compound B#[Ti]#B QYEXBYZXHDUPRC-UHFFFAOYSA-N 0.000 claims description 58
- 229910052720 vanadium Inorganic materials 0.000 claims description 46
- LEONUFNNVUYDNQ-UHFFFAOYSA-N vanadium atom Chemical compound [V] LEONUFNNVUYDNQ-UHFFFAOYSA-N 0.000 claims description 36
- 239000000203 mixture Substances 0.000 claims description 19
- 239000010936 titanium Substances 0.000 claims description 18
- 229910052799 carbon Inorganic materials 0.000 claims description 15
- 229910052719 titanium Inorganic materials 0.000 claims description 15
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims description 14
- 239000000843 powder Substances 0.000 claims description 11
- 238000004519 manufacturing process Methods 0.000 claims description 10
- 239000002245 particle Substances 0.000 claims description 7
- 238000005240 physical vapour deposition Methods 0.000 claims description 7
- 238000002490 spark plasma sintering Methods 0.000 claims description 7
- 239000000126 substance Substances 0.000 claims description 5
- 229910052751 metal Inorganic materials 0.000 claims description 4
- 239000002184 metal Substances 0.000 claims description 4
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 claims description 3
- 238000007731 hot pressing Methods 0.000 claims description 3
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 claims description 2
- 229910052796 boron Inorganic materials 0.000 claims description 2
- LAROCDZIZGIQGR-UHFFFAOYSA-N boron;vanadium Chemical group B#[V]#B LAROCDZIZGIQGR-UHFFFAOYSA-N 0.000 claims description 2
- 229910052729 chemical element Inorganic materials 0.000 claims description 2
- 150000001875 compounds Chemical class 0.000 claims description 2
- 239000012535 impurity Substances 0.000 claims description 2
- 238000007689 inspection Methods 0.000 claims description 2
- 238000000034 method Methods 0.000 claims description 2
- 238000000465 moulding Methods 0.000 claims description 2
- 239000012071 phase Substances 0.000 claims 13
- 238000005259 measurement Methods 0.000 claims 2
- 238000000151 deposition Methods 0.000 claims 1
- 229910002804 graphite Inorganic materials 0.000 claims 1
- 239000010439 graphite Substances 0.000 claims 1
- 230000001681 protective effect Effects 0.000 claims 1
- 239000000758 substrate Substances 0.000 claims 1
- 238000001947 vapour-phase growth Methods 0.000 claims 1
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 238000010304 firing Methods 0.000 description 1
- 229910052739 hydrogen Inorganic materials 0.000 description 1
- 239000001257 hydrogen Substances 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- 238000002601 radiography Methods 0.000 description 1
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 1
- 229910052721 tungsten Inorganic materials 0.000 description 1
- 239000010937 tungsten Substances 0.000 description 1
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| ATGM50075/2018U AT16481U1 (de) | 2018-04-20 | 2018-04-20 | Target und Verfahren zur Herstellung eines Targets |
| ATGM50075/2018 | 2018-04-20 | ||
| PCT/EP2019/059517 WO2019201796A1 (de) | 2018-04-20 | 2019-04-12 | Target und verfahren zur herstellung eines targets |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2021521335A JP2021521335A (ja) | 2021-08-26 |
| JP2021521335A5 true JP2021521335A5 (enExample) | 2021-10-07 |
| JP7425741B2 JP7425741B2 (ja) | 2024-01-31 |
Family
ID=68159857
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2020555911A Active JP7425741B2 (ja) | 2018-04-20 | 2019-04-12 | ターゲット及びターゲットの製造方法 |
Country Status (6)
| Country | Link |
|---|---|
| EP (1) | EP3781538B1 (enExample) |
| JP (1) | JP7425741B2 (enExample) |
| CN (1) | CN112236403B (enExample) |
| AT (1) | AT16481U1 (enExample) |
| TW (1) | TWI750469B (enExample) |
| WO (1) | WO2019201796A1 (enExample) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN115057709B (zh) * | 2022-06-21 | 2023-07-18 | 山东大学 | 一种高熵过渡金属二硼化物及其制备方法 |
Family Cites Families (13)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS55128560A (en) * | 1979-03-27 | 1980-10-04 | Agency Of Ind Science & Technol | Boride based ultrahard heat resistant material |
| US4546089A (en) * | 1982-12-30 | 1985-10-08 | Corning Glass Works | Group 4b boride and VB2 /YB2 |
| DE3512986A1 (de) * | 1985-04-11 | 1986-10-16 | Kernforschungszentrum Karlsruhe Gmbh, 7500 Karlsruhe | Viellagige, hochverschleissfeste hartstoffschutzschicht fuer metallische, stark beanspruchte oberflaechen oder substrate |
| JPH05294739A (ja) * | 1992-04-13 | 1993-11-09 | Central Glass Co Ltd | 二ホウ化チタン系焼結体およびその製造法 |
| JPH09202966A (ja) * | 1996-01-23 | 1997-08-05 | Nippon Seimitsu Kk | 薄膜形成方法 |
| DE10005612A1 (de) * | 2000-02-09 | 2001-08-16 | Hauzer Techno Coating Europ B | Verfahren zur Herstellung eines Gegenstandes und Gegenstand |
| CN1680215A (zh) * | 2005-01-14 | 2005-10-12 | 李根法 | 生产结构陶瓷的共晶复合粉末烧结助剂及其制备方法 |
| US7857948B2 (en) * | 2006-07-19 | 2010-12-28 | Oerlikon Trading Ag, Trubbach | Method for manufacturing poorly conductive layers |
| JP2008179853A (ja) * | 2007-01-24 | 2008-08-07 | Hitachi Tool Engineering Ltd | ホウ化物含有ターゲット材 |
| AT11884U1 (de) * | 2010-05-04 | 2011-06-15 | Plansee Se | Target |
| US8821701B2 (en) * | 2010-06-02 | 2014-09-02 | Clifton Higdon | Ion beam sputter target and method of manufacture |
| CN106756849B (zh) * | 2016-12-21 | 2019-06-25 | 深圳先进技术研究院 | 一种具有过渡金属硼化物涂层的pcb用微钻及其制备方法 |
| CN108251803B (zh) * | 2016-12-29 | 2020-06-02 | 深圳先进技术研究院 | TiB2自润滑涂层及其制备方法和耐磨构件 |
-
2018
- 2018-04-20 AT ATGM50075/2018U patent/AT16481U1/de not_active IP Right Cessation
-
2019
- 2019-04-12 EP EP19717489.9A patent/EP3781538B1/de active Active
- 2019-04-12 CN CN201980026614.8A patent/CN112236403B/zh active Active
- 2019-04-12 WO PCT/EP2019/059517 patent/WO2019201796A1/de not_active Ceased
- 2019-04-12 JP JP2020555911A patent/JP7425741B2/ja active Active
- 2019-04-16 TW TW108113201A patent/TWI750469B/zh active
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