JP2021192429A - セリア粒子を表面から除去するための組成物及び方法 - Google Patents
セリア粒子を表面から除去するための組成物及び方法 Download PDFInfo
- Publication number
- JP2021192429A JP2021192429A JP2021126732A JP2021126732A JP2021192429A JP 2021192429 A JP2021192429 A JP 2021192429A JP 2021126732 A JP2021126732 A JP 2021126732A JP 2021126732 A JP2021126732 A JP 2021126732A JP 2021192429 A JP2021192429 A JP 2021192429A
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- Prior art keywords
- removal composition
- aqueous removal
- acid
- contaminants
- aqueous
- Prior art date
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- Granted
Links
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- 229910000422 cerium(IV) oxide Inorganic materials 0.000 title claims abstract description 44
- 238000000034 method Methods 0.000 title claims abstract description 33
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- LVTJOONKWUXEFR-FZRMHRINSA-N protoneodioscin Natural products O(C[C@@H](CC[C@]1(O)[C@H](C)[C@@H]2[C@]3(C)[C@H]([C@H]4[C@@H]([C@]5(C)C(=CC4)C[C@@H](O[C@@H]4[C@H](O[C@H]6[C@@H](O)[C@@H](O)[C@@H](O)[C@H](C)O6)[C@@H](O)[C@H](O[C@H]6[C@@H](O)[C@@H](O)[C@@H](O)[C@H](C)O6)[C@H](CO)O4)CC5)CC3)C[C@@H]2O1)C)[C@H]1[C@H](O)[C@H](O)[C@H](O)[C@@H](CO)O1 LVTJOONKWUXEFR-FZRMHRINSA-N 0.000 description 1
- 150000003212 purines Chemical class 0.000 description 1
- CSNFMBGHUOSBFU-UHFFFAOYSA-N pyrimidine-2,4,5-triamine Chemical compound NC1=NC=C(N)C(N)=N1 CSNFMBGHUOSBFU-UHFFFAOYSA-N 0.000 description 1
- MPNBXFXEMHPGTK-UHFFFAOYSA-N pyrimidine-4,5,6-triamine Chemical compound NC1=NC=NC(N)=C1N MPNBXFXEMHPGTK-UHFFFAOYSA-N 0.000 description 1
- 150000003230 pyrimidines Chemical class 0.000 description 1
- HNJBEVLQSNELDL-UHFFFAOYSA-N pyrrolidin-2-one Chemical compound O=C1CCCN1 HNJBEVLQSNELDL-UHFFFAOYSA-N 0.000 description 1
- 235000005875 quercetin Nutrition 0.000 description 1
- 229960001285 quercetin Drugs 0.000 description 1
- 239000003870 refractory metal Substances 0.000 description 1
- 229910052707 ruthenium Inorganic materials 0.000 description 1
- 238000005201 scrubbing Methods 0.000 description 1
- 239000003352 sequestering agent Substances 0.000 description 1
- 150000004760 silicates Chemical class 0.000 description 1
- 229910021332 silicide Inorganic materials 0.000 description 1
- 235000012239 silicon dioxide Nutrition 0.000 description 1
- 239000001509 sodium citrate Substances 0.000 description 1
- NLJMYIDDQXHKNR-UHFFFAOYSA-K sodium citrate Chemical compound O.O.[Na+].[Na+].[Na+].[O-]C(=O)CC(O)(CC([O-])=O)C([O-])=O NLJMYIDDQXHKNR-UHFFFAOYSA-K 0.000 description 1
- HRZFUMHJMZEROT-UHFFFAOYSA-L sodium disulfite Chemical compound [Na+].[Na+].[O-]S(=O)S([O-])(=O)=O HRZFUMHJMZEROT-UHFFFAOYSA-L 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 239000007921 spray Substances 0.000 description 1
- 150000003890 succinate salts Chemical class 0.000 description 1
- 235000000346 sugar Nutrition 0.000 description 1
- 150000008163 sugars Chemical class 0.000 description 1
- 239000011885 synergistic combination Substances 0.000 description 1
- 229910052715 tantalum Inorganic materials 0.000 description 1
- GUVRBAGPIYLISA-UHFFFAOYSA-N tantalum atom Chemical compound [Ta] GUVRBAGPIYLISA-UHFFFAOYSA-N 0.000 description 1
- 239000011975 tartaric acid Substances 0.000 description 1
- 235000002906 tartaric acid Nutrition 0.000 description 1
- 125000005207 tetraalkylammonium group Chemical group 0.000 description 1
- ZOMVKCHODRHQEV-UHFFFAOYSA-M tetraethylphosphanium;hydroxide Chemical compound [OH-].CC[P+](CC)(CC)CC ZOMVKCHODRHQEV-UHFFFAOYSA-M 0.000 description 1
- CRUVUWATNULHFA-UHFFFAOYSA-M tetramethylphosphanium;hydroxide Chemical compound [OH-].C[P+](C)(C)C CRUVUWATNULHFA-UHFFFAOYSA-M 0.000 description 1
- OORMKVJAUGZYKP-UHFFFAOYSA-M tetrapropylphosphanium;hydroxide Chemical compound [OH-].CCC[P+](CCC)(CCC)CCC OORMKVJAUGZYKP-UHFFFAOYSA-M 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
- 229910052719 titanium Inorganic materials 0.000 description 1
- 239000010936 titanium Substances 0.000 description 1
- YWYZEGXAUVWDED-UHFFFAOYSA-N triammonium citrate Chemical compound [NH4+].[NH4+].[NH4+].[O-]C(=O)CC(O)(CC([O-])=O)C([O-])=O YWYZEGXAUVWDED-UHFFFAOYSA-N 0.000 description 1
- JLGLQAWTXXGVEM-UHFFFAOYSA-N triethylene glycol monomethyl ether Chemical compound COCCOCCOCCO JLGLQAWTXXGVEM-UHFFFAOYSA-N 0.000 description 1
- ITMCEJHCFYSIIV-UHFFFAOYSA-N triflic acid Chemical compound OS(=O)(=O)C(F)(F)F ITMCEJHCFYSIIV-UHFFFAOYSA-N 0.000 description 1
- IJGSGCGKAAXRSC-UHFFFAOYSA-M tris(2-hydroxyethyl)-methylazanium;hydroxide Chemical compound [OH-].OCC[N+](C)(CCO)CCO IJGSGCGKAAXRSC-UHFFFAOYSA-M 0.000 description 1
- OUYCCCASQSFEME-UHFFFAOYSA-N tyrosine Natural products OC(=O)C(N)CC1=CC=C(O)C=C1 OUYCCCASQSFEME-UHFFFAOYSA-N 0.000 description 1
- 238000011144 upstream manufacturing Methods 0.000 description 1
- 150000003672 ureas Chemical class 0.000 description 1
- 229940116269 uric acid Drugs 0.000 description 1
- 239000004474 valine Substances 0.000 description 1
- 229920002554 vinyl polymer Polymers 0.000 description 1
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- C01F17/00—Compounds of rare earth metals
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- C01F17/206—Compounds containing only rare earth metals as the metal element oxide or hydroxide being the only anion
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- C08L33/00—Compositions of homopolymers or copolymers of compounds having one or more unsaturated aliphatic radicals, each having only one carbon-to-carbon double bond, and only one being terminated by only one carboxyl radical, or of salts, anhydrides, esters, amides, imides or nitriles thereof; Compositions of derivatives of such polymers
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- C08L33/00—Compositions of homopolymers or copolymers of compounds having one or more unsaturated aliphatic radicals, each having only one carbon-to-carbon double bond, and only one being terminated by only one carboxyl radical, or of salts, anhydrides, esters, amides, imides or nitriles thereof; Compositions of derivatives of such polymers
- C08L33/04—Homopolymers or copolymers of esters
- C08L33/06—Homopolymers or copolymers of esters of esters containing only carbon, hydrogen and oxygen, which oxygen atoms are present only as part of the carboxyl radical
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- C09G1/00—Polishing compositions
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- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09G—POLISHING COMPOSITIONS; SKI WAXES
- C09G1/00—Polishing compositions
- C09G1/06—Other polishing compositions
- C09G1/14—Other polishing compositions based on non-waxy substances
- C09G1/16—Other polishing compositions based on non-waxy substances on natural or synthetic resins
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02041—Cleaning
- H01L21/02043—Cleaning before device manufacture, i.e. Begin-Of-Line process
- H01L21/02052—Wet cleaning only
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02041—Cleaning
- H01L21/02057—Cleaning during device manufacture
- H01L21/0206—Cleaning during device manufacture during, before or after processing of insulating layers
- H01L21/02065—Cleaning during device manufacture during, before or after processing of insulating layers the processing being a planarization of insulating layers
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/31—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to form insulating layers thereon, e.g. for masking or by using photolithographic techniques; After treatment of these layers; Selection of materials for these layers
- H01L21/3205—Deposition of non-insulating-, e.g. conductive- or resistive-, layers on insulating layers; After-treatment of these layers
- H01L21/321—After treatment
- H01L21/32115—Planarisation
- H01L21/3212—Planarisation by chemical mechanical polishing [CMP]
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Abstract
Description
本出願は、その開示全体が出典明示により本明細書に援用される、2017年1月18日に出願された米国特許仮出願第62/447729号の利益を主張するものである。
洗浄効果={(洗浄前の物体の数−洗浄後の物体の数)/洗浄前の物体の数}×100
注目すべきことに、洗浄効果の測定法は、単なる例として記載されており、それに限定されるものではない。あるいは、洗浄効果は、粒子状物質によって覆われた全表面の割合と考えてもよい。例えば、z平面走査を実施するようAFMをプログラムして一定の高さの閾値を上回る対象のトポグラフィー領域を特定し、次いで、対象の前記領域によって覆われた全表面の領域を計算してもよい。洗浄後に対象の前記領域によって覆われた面積が小さいほど、除去組成物がより効果的であることを当業者なら容易に理解するであろう。好ましくは、本明細書に記載の組成物を使用して、粒子/汚染物質の少なくとも75%がマイクロ電子デバイスから除去され、より好ましくは粒子/汚染物質の少なくとも90%、さらにより好ましくは少なくとも95%、最も好ましくは少なくとも99%が除去される。
以下に示す除去組成物を調製し(各配合物中の残部はDI水であった。)、水で100:1に希釈した。プロセスは、TEOS基板をセリア含有スラリーに5分間浸漬し、基板をDI水中で30秒間すすぎ、基板を除去組成物に60秒間浸漬し、次いで、第2のDI水リンスで30秒間すすぐものであった。浸漬中の温度は室温であった。洗浄の程度を、走査型電子顕微鏡法(SEM)、誘導結合プラズマ質量分析法(ICP−MS)及び暗視野顕微鏡法(DFM)を使用して決定し、比較例の配合物1と比較した。
配合物A:2wt%クエン酸、2wt%プロピレングリコールフェニルエーテル、残部の水。調整及び1:100希釈後のpH=2.5
配合物B:2wt%クエン酸、2wt%亜硫酸ナトリウム、残部の水。調整及び1:100希釈後のpH=2.6
配合物C:2wt%クエン酸、2wt%プロピレングリコールフェニルエーテル、2wt%亜硫酸ナトリウム、残部の水。調整及び1:100希釈後のpH=2.6
比較例の配合物1:NH4OH:H2O2:H2O=1:1:5
以下に示す除去組成物を調製し(各配合物中の残部はDI水であった。)、水で100:1に希釈した。プロセスは、TEOS基板をセリア含有スラリーに5分間浸漬し、基板をDI水中で30秒間すすぎ、基板を除去組成物に60秒間浸漬し、次いで、第2のDI水リンスで30秒間すすぐものであった。浸漬中の温度は室温であった。洗浄の程度を、走査型電子顕微鏡法(SEM)、誘導結合プラズマ質量分析法(ICP−MS)及び暗視野顕微鏡法(DFM)を使用して決定した。特に、表2は、各除去組成物のDMFデータを示す。
Claims (20)
- 少なくとも1つのpH調整剤と、少なくとも1つの還元剤と、少なくとも1つの有機添加剤と、水とを含む水性除去組成物であって、セリア粒子と化学機械研磨(CMP)汚染物質とを、前記粒子とCMP汚染物質とをその上に有するマイクロ電子デバイスから除去するのに適している水性除去組成物。
- セリア粒子が、式Ce2O3及びCeO2を有する酸化セリウムである、請求項1に記載の水性除去組成物。
- 少なくとも1つのpH調整剤が、アルカリ金属水酸化物、水酸化アンモニウム、水酸化コリン又は水酸化テトラアルキルアンモニウムである、請求項1に記載の水性除去組成物。
- 少なくとも1つのpH調整剤が、硫酸、クエン酸又はそれらの組合せである、請求項1に記載の水性除去組成物。
- 少なくとも1つの有機添加剤がグリコールエーテルを含む、請求項1に記載の水性除去組成物。
- 少なくとも1つの有機添加剤がプロピレングリコールフェニルエーテルである、請求項1に記載の水性除去組成物。
- 少なくとも1つの還元剤が、少なくとも1つの亜硫酸イオンを含む、請求項1に記載の水性除去組成物。
- 亜硫酸、亜硫酸カリウム、亜硫酸アンモニウム、ホスフィン酸又はそれらの組合せをさらに含む、請求項7に記載の水性除去組成物。
- 少なくとも1つの酸素捕捉剤をさらに含む、請求項1に記載の水性除去組成物。
- 少なくとも1つの酸素捕捉剤が、カルボヒドラジド、2−アミノエチルピペラジン(AEP)、メチルエチルケトキシム、ヒドロキノン、ヒドラジン又は1,3−、1,4−若しくは2,5−シクロヘキサンジオンである、請求項9に記載の水性除去組成物。
- 少なくとも1つの錯化剤をさらに含む、請求項1に記載の水性除去組成物。
- 少なくとも1つの錯化剤がアルカノールアミンである、請求項11に記載の水性除去組成物。
- 少なくとも1つのポリマーをさらに含む、請求項1に記載の水性除去組成物。
- 少なくとも1つのポリマーが、ポリ(メタクリル酸)又はポリ(アクリル酸)である、請求項13に記載の水性除去組成物。
- マイクロ電子デバイスが、窒化シリコン層と低誘電率層とを含む、請求項1に記載の水性除去組成物。
- セリア粒子とCMP汚染物質とを、前記粒子と汚染物質とをその上に有するマイクロ電子デバイスから除去する方法であって、
マイクロ電子デバイスを、少なくとも1つのpH調整剤と、少なくとも1つの還元剤と、少なくとも1つの有機添加剤と、水とを含む水性除去組成物と接触させることと、
窒化シリコン層と低誘電率層とを含むマイクロ電子デバイスから、前記粒子と汚染物質とを少なくとも部分的に洗浄することと
を含む方法。 - 水性除去組成物が、少なくとも1つの酸素捕捉剤、少なくとも1つの錯化剤又は少なくとも1つのポリマーをさらに含む、請求項16に記載の方法。
- 水性除去組成物が、窒化シリコン層又は低誘電率層を実質的に損傷しない、請求項16に記載の方法。
- 使用ポイントで、又は使用ポイント前に、水を含む溶媒で水性除去組成物を希釈することをさらに含む、請求項16に記載の方法。
- セリア粒子と化学機械研磨(CMP)汚染物質とを、前記粒子とCMP汚染物質とをその上に有するマイクロ電子デバイスから除去するのに適した成分をその中に有する一又は複数の容器を含むキットであって、キットの一又は複数の容器は、少なくとも1つのpH調整剤と、少なくとも1つの還元剤と、少なくとも1つの有機添加剤と、水とを含むキット。
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US11085011B2 (en) * | 2018-08-28 | 2021-08-10 | Entegris, Inc. | Post CMP cleaning compositions for ceria particles |
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US11124741B2 (en) | 2019-02-08 | 2021-09-21 | Entegris, Inc. | Ceria removal compositions |
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US11603512B2 (en) | 2020-03-19 | 2023-03-14 | Fujifilm Electronic Materials U.S.A., Inc. | Cleaning compositions and methods of use thereof |
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US11164738B2 (en) | 2021-11-02 |
KR20210090294A (ko) | 2021-07-19 |
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