JP2021132156A - ウエーハの加工方法 - Google Patents
ウエーハの加工方法 Download PDFInfo
- Publication number
- JP2021132156A JP2021132156A JP2020027385A JP2020027385A JP2021132156A JP 2021132156 A JP2021132156 A JP 2021132156A JP 2020027385 A JP2020027385 A JP 2020027385A JP 2020027385 A JP2020027385 A JP 2020027385A JP 2021132156 A JP2021132156 A JP 2021132156A
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- modified layer
- laser beam
- division line
- circuit information
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000003672 processing method Methods 0.000 title claims abstract description 10
- 238000012360 testing method Methods 0.000 claims abstract description 14
- 239000002184 metal Substances 0.000 claims abstract description 13
- 230000001678 irradiating effect Effects 0.000 claims description 13
- 238000000034 method Methods 0.000 claims description 12
- 235000012431 wafers Nutrition 0.000 claims 8
- 230000002542 deteriorative effect Effects 0.000 abstract description 2
- 230000015572 biosynthetic process Effects 0.000 abstract 2
- 230000001681 protective effect Effects 0.000 description 18
- 239000002390 adhesive tape Substances 0.000 description 6
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 3
- 230000006378 damage Effects 0.000 description 3
- 230000003287 optical effect Effects 0.000 description 3
- 229910052710 silicon Inorganic materials 0.000 description 3
- 239000010703 silicon Substances 0.000 description 3
- 238000003384 imaging method Methods 0.000 description 2
- 239000000853 adhesive Substances 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
- 230000004075 alteration Effects 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
Images
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/50—Working by transmitting the laser beam through or within the workpiece
- B23K26/53—Working by transmitting the laser beam through or within the workpiece for modifying or reforming the material inside the workpiece, e.g. for producing break initiation cracks
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/26—Bombardment with radiation
- H01L21/263—Bombardment with radiation with high-energy radiation
- H01L21/268—Bombardment with radiation with high-energy radiation using electromagnetic radiation, e.g. laser radiation
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/0006—Working by laser beam, e.g. welding, cutting or boring taking account of the properties of the material involved
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/08—Devices involving relative movement between laser beam and workpiece
- B23K26/083—Devices involving movement of the workpiece in at least one axial direction
- B23K26/0853—Devices involving movement of the workpiece in at least in two axial directions, e.g. in a plane
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/08—Devices involving relative movement between laser beam and workpiece
- B23K26/083—Devices involving movement of the workpiece in at least one axial direction
- B23K26/0853—Devices involving movement of the workpiece in at least in two axial directions, e.g. in a plane
- B23K26/0861—Devices involving movement of the workpiece in at least in two axial directions, e.g. in a plane in at least in three axial directions
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L21/6835—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using temporarily an auxiliary support
- H01L21/6836—Wafer tapes, e.g. grinding or dicing support tapes
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/77—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate
- H01L21/78—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/544—Marks applied to semiconductor devices or parts, e.g. registration marks, alignment structures, wafer maps
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K2101/00—Articles made by soldering, welding or cutting
- B23K2101/36—Electric or electronic devices
- B23K2101/40—Semiconductor devices
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K2101/00—Articles made by soldering, welding or cutting
- B23K2101/36—Electric or electronic devices
- B23K2101/42—Printed circuits
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K2103/00—Materials to be soldered, welded or cut
- B23K2103/50—Inorganic material, e.g. metals, not provided for in B23K2103/02 – B23K2103/26
- B23K2103/56—Inorganic material, e.g. metals, not provided for in B23K2103/02 – B23K2103/26 semiconducting
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2221/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof covered by H01L21/00
- H01L2221/67—Apparatus for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components; Apparatus not specifically provided for elsewhere
- H01L2221/683—Apparatus for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L2221/68304—Apparatus for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components; Apparatus not specifically provided for elsewhere for supporting or gripping using temporarily an auxiliary support
- H01L2221/68327—Apparatus for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components; Apparatus not specifically provided for elsewhere for supporting or gripping using temporarily an auxiliary support used during dicing or grinding
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2221/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof covered by H01L21/00
- H01L2221/67—Apparatus for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components; Apparatus not specifically provided for elsewhere
- H01L2221/683—Apparatus for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L2221/68304—Apparatus for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components; Apparatus not specifically provided for elsewhere for supporting or gripping using temporarily an auxiliary support
- H01L2221/6834—Apparatus for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components; Apparatus not specifically provided for elsewhere for supporting or gripping using temporarily an auxiliary support used to protect an active side of a device or wafer
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2223/00—Details relating to semiconductor or other solid state devices covered by the group H01L23/00
- H01L2223/544—Marks applied to semiconductor devices or parts
- H01L2223/54453—Marks applied to semiconductor devices or parts for use prior to dicing
- H01L2223/5446—Located in scribe lines
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Plasma & Fusion (AREA)
- Mechanical Engineering (AREA)
- Manufacturing & Machinery (AREA)
- High Energy & Nuclear Physics (AREA)
- Toxicology (AREA)
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- General Chemical & Material Sciences (AREA)
- Oil, Petroleum & Natural Gas (AREA)
- Health & Medical Sciences (AREA)
- Electromagnetism (AREA)
- Dicing (AREA)
- Laser Beam Processing (AREA)
Abstract
Description
波長 :1342nm
繰り返し周波数 :60kHz
平均出力 :1.6W
加工送り速度 :300mm/秒
集光点位置(深さ) :700μm(P1)、500μm(P2)、300μm(P3)
10a:表面
10b:裏面
12:デバイス
14:分割予定ライン
16:TEG
20:保護テープ
30:レーザー加工装置
32:チャックテーブル
34:レーザー光線照射手段
100:改質層
100a:第一の改質層
100b:第二の改質層
100c:第三の改質層
LB:レーザー光線
LB1、LB2:散乱光
Q1、Q2:回路情報
Claims (2)
- テスト用金属パターンが形成された分割予定ラインによって複数のデバイスが区画され表面に形成されたウエーハを個々のデバイスチップに分割するウエーハの加工方法であって、
ウエーハに対して透過性を有する波長のレーザー光線の集光点をウエーハの裏面から所定の深さに位置付けて照射して改質層を分割予定ラインに沿って形成する改質層形成工程と、
ウエーハに外力を付与し分割予定ラインの内部に形成された改質層を起点として個々のデバイスチップに分割する分割工程と、
を少なくとも含み、
該改質層形成工程において、先に形成された改質層で後に照射されるレーザー光線が散乱して該テスト用金属パターンの回路情報を破壊するように、後に照射するレーザー光線を先に形成した改質層に一部重ねて位置付け照射するウエーハの加工方法。 - 該集光点のスポット形状を楕円形に形成し該楕円形の長軸を分割予定ラインに沿って位置付ける請求項1に記載のウエーハの加工方法。
Priority Applications (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2020027385A JP7486973B2 (ja) | 2020-02-20 | 2020-02-20 | ウエーハの加工方法 |
US17/168,333 US11367656B2 (en) | 2020-02-20 | 2021-02-05 | Wafer processing method |
CN202110177865.5A CN113284796A (zh) | 2020-02-20 | 2021-02-09 | 晶片的加工方法 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2020027385A JP7486973B2 (ja) | 2020-02-20 | 2020-02-20 | ウエーハの加工方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2021132156A true JP2021132156A (ja) | 2021-09-09 |
JP7486973B2 JP7486973B2 (ja) | 2024-05-20 |
Family
ID=77275842
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2020027385A Active JP7486973B2 (ja) | 2020-02-20 | 2020-02-20 | ウエーハの加工方法 |
Country Status (3)
Country | Link |
---|---|
US (1) | US11367656B2 (ja) |
JP (1) | JP7486973B2 (ja) |
CN (1) | CN113284796A (ja) |
Family Cites Families (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP4231349B2 (ja) | 2003-07-02 | 2009-02-25 | 株式会社ディスコ | レーザー加工方法およびレーザー加工装置 |
JP2006289388A (ja) | 2005-04-06 | 2006-10-26 | Disco Abrasive Syst Ltd | レーザー加工装置 |
US7838331B2 (en) * | 2005-11-16 | 2010-11-23 | Denso Corporation | Method for dicing semiconductor substrate |
JP6180876B2 (ja) | 2013-10-02 | 2017-08-16 | 株式会社ディスコ | 切削装置及びウエーハの切削方法 |
JP2017107921A (ja) | 2015-12-07 | 2017-06-15 | 株式会社ディスコ | ウエーハの加工方法 |
JP2019160971A (ja) | 2018-03-12 | 2019-09-19 | 株式会社東京精密 | ウェーハ加工方法 |
JP2019160970A (ja) | 2018-03-12 | 2019-09-19 | 株式会社東京精密 | ウェーハ加工方法 |
JP2019176079A (ja) | 2018-03-29 | 2019-10-10 | 株式会社東京精密 | ウェーハ加工方法及びウェーハ加工装置 |
JP7049941B2 (ja) | 2018-06-22 | 2022-04-07 | 株式会社ディスコ | ウエーハの加工方法 |
-
2020
- 2020-02-20 JP JP2020027385A patent/JP7486973B2/ja active Active
-
2021
- 2021-02-05 US US17/168,333 patent/US11367656B2/en active Active
- 2021-02-09 CN CN202110177865.5A patent/CN113284796A/zh active Pending
Also Published As
Publication number | Publication date |
---|---|
US20210265209A1 (en) | 2021-08-26 |
CN113284796A (zh) | 2021-08-20 |
JP7486973B2 (ja) | 2024-05-20 |
US11367656B2 (en) | 2022-06-21 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JP4694845B2 (ja) | ウエーハの分割方法 | |
JP2016129202A (ja) | ウエーハの加工方法 | |
JP6320261B2 (ja) | ウエーハの加工方法 | |
JP6308919B2 (ja) | ウエーハの加工方法 | |
JP2004179302A (ja) | 半導体ウエーハの分割方法 | |
JP2016134413A (ja) | ウエーハの加工方法 | |
JP2006318966A (ja) | 半導体ウエーハ | |
JP2016054205A (ja) | ウエーハの加工方法 | |
JP6347714B2 (ja) | ウエーハの加工方法 | |
JP2006073690A (ja) | ウエーハの分割方法 | |
JP2019021743A (ja) | ウエーハの加工方法 | |
JP2016076520A (ja) | ウエーハの加工方法 | |
US9455149B2 (en) | Plate-like object processing method | |
JP2021132156A (ja) | ウエーハの加工方法 | |
JP2005123329A (ja) | 板状物の分割方法 | |
JP2013175499A (ja) | ウエーハの分割方法 | |
JP2007207871A (ja) | 複数の半導体装置を備えた半導体ウェハ | |
JP7473414B2 (ja) | ウエーハの加工方法 | |
JP7420508B2 (ja) | レーザー加工方法 | |
JP7453013B2 (ja) | ウエーハの加工方法 | |
JP7370902B2 (ja) | クラック検出方法 | |
US11328956B2 (en) | Wafer processing method | |
JP2021174801A (ja) | ウエーハの加工方法 | |
JP2016058430A (ja) | ウエーハの加工方法 | |
JP2016058431A (ja) | ウエーハの加工方法 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20221216 |
|
RD03 | Notification of appointment of power of attorney |
Free format text: JAPANESE INTERMEDIATE CODE: A7423 Effective date: 20230824 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20230926 |
|
A977 | Report on retrieval |
Free format text: JAPANESE INTERMEDIATE CODE: A971007 Effective date: 20230929 |
|
A601 | Written request for extension of time |
Free format text: JAPANESE INTERMEDIATE CODE: A601 Effective date: 20231120 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20240124 |
|
TRDD | Decision of grant or rejection written | ||
A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20240416 |
|
A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20240508 |
|
R150 | Certificate of patent or registration of utility model |
Ref document number: 7486973 Country of ref document: JP Free format text: JAPANESE INTERMEDIATE CODE: R150 |