JP2021052086A - 基板処理装置、及び半導体の製造方法 - Google Patents
基板処理装置、及び半導体の製造方法 Download PDFInfo
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- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
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- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/50—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges
- C23C16/505—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges using radio frequency discharges
- C23C16/509—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges using radio frequency discharges using internal electrodes
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Abstract
Description
本開示の主な目的は、プラズマを利用して基板を処理する際に反応管や電極に与えるダメージを小さくでき、安定なプラズマ生成が可能な技術を提供することにある。
の元素を含む複数種類のガス等を同時に供給し、また、ALD法の場合、形成する膜を構
成する複数の元素を含む複数種類のガス等を交互に供給する。そして、供給時の供給流量
、供給時間、プラズマパワーなどの処理条件を制御することにより酸化シリコン膜(Si
O膜)や特許文献2に開示されている窒化シリコン膜(Si3N4)を形成する。それらの技術では、例えばSiO膜を形成する場合、膜の組成比が化学量論組成であるO/Si≒2となるように、また例えばSi3N4膜を形成する場合、膜の組成比が化学量論組成であるN/Si≒1.33となるようにすることを目的として、供給条件を制御する。
とを目的として、供給条件を制御することも可能である。すなわち、形成する膜を構成す
る複数の元素のうち少なくとも一つの元素が他の元素よりも化学量論組成に対し過剰とな
るようにすることを目的として、供給条件を制御する。このように形成する膜を構成する
複数の元素の比率、すなわち、膜の組成比を制御しつつ成膜を行うことも可能である。
ステップS204では、ガス供給系301のガス供給管310、ノズル410よりBTBASを処理室201内に供給する。バルブ313を閉じておき、バルブ314、612を開ける。BTBASは常温で液体であり、液体のBTBASが液体マスフローコントローラ312で流量調整されて気化器315に供給され気化器315で気化される。BTBASを処理室201に供給する前は、バルブ313を閉じ、バルブ612を開けて、バルブ612を介してBTBASをベントライン610に流しておく。
ステップS205では、残留BTBAS等の残留ガスを処理室201内から除去する。ガス供給管310のバルブ313を閉めて処理室201へのBTBASの供給を停止し、バルブ612を開けてベントライン610へBTBASを流す。このとき排気管231のAPCバルブ243を全開として、真空ポンプ246により処理室201内を20Pa以下となるまで排気し、処理室201内に残留する残留BTBAS等の残留ガスを処理室201内から排除する。このときN2等の不活性ガスを、BTBAS供給ラインであるガス供給管310から、さらには、ガス供給管320、330から、処理室201内へ供給すると、さらに残留BTBAS等の残留ガスを排除する効果が高まる。
ステップS206では、NH3をガス供給系302のガス供給管320よりノズル420のガス供給孔421を介してバッファ室423内に供給し、NH3をガス供給系303のガス供給管330よりノズル430のガス供給孔431を介してバッファ室433内に供給する。このとき、棒状電極471および棒状電極472間に高周波電源270から整合器271を介して高周波電力を印加することで、バッファ室423内に供給されたNH3ガスはプラズマ励起され、活性種としてガス供給孔425から処理室201内に供給されつつガス排気管231から排気される。バッファ室433についても同様である。
ステップS207では、未反応もしくは窒化に寄与した後の残留NH3等の残留ガスを処理室201内から除去する。ガス供給管320のバルブ323及びガス供給管330のバルブ333を閉めて処理室201へのNH3の供給を停止する。このとき排気管231のAPCバルブ243を全開として、真空ポンプ246により処理室201内を20Pa以下となるまで排気し、処理室201内に残留する残留NH3等の残留ガスを処理室201内から排除する。
2 被処理基板
4 放電電極端部
5、30 放電電極
6 バッファ室
8 発振器
9 整合器
10 小穴
11 プラズマ
12 ボート
13 ガス導入口
14 鞘管
15 ガスノズル
16 スリーブ
17、31 コイル状の構造体
18、32 外側の編組
33 キャップ
101 基板処理装置
200 ウエハ
202 処理炉
280 コントローラ
281 CPU
471、472、481、482 棒状電極
Claims (5)
- 基板を処理する処理室と、
前記基板に供給される前のガスを流通させるバッファ室と、
前記バッファ室内を略平行に伸びる少なくとも1対の放電電極と、
前記1対の放電電極が前記ガスに曝露しないように前記1対の放電電極にそれぞれ被せられる絶縁体製の1対の鞘管と、を備え、
前記1対の放電電極の少なくとも一方には、給電される端とは別の端において、前記放電電極と略等しい外径を有し、先端部分が丸く形成された金属製のキャップが設けられる基板処理装置。 - 前記1対の放電電極のそれぞれは、芯材と、前記芯材の外側に設けられる高融点金属製の編組とで構成され、前記キャップは、高融点金属製であり、前記芯材と前記編組とを圧接するよう構成する請求項1記載の基板処理装置。
- 内部に複数の基板を配列させて収容する反応管を更に備え、
前記バッファ室は、前記反応管の内部と隣接する面を有するように前記反応管と一体に設けられ、前記隣接する面に前記基板が配列される領域に亘って設けられる1乃至複数の貫通孔と、前記バッファ室の内部と連通するガス導入部と、を有し、
前記放電電極は、前記基板の配列方向にそって配置され、
前記鞘管は、一部が屈曲して構成される請求項1又は2に記載の基板処理装置。 - 前記反応管内に、前記基板の配列方向と平行に設けられるガスノズルを更に備え、
前記ガスノズルからの第1のガスの供給と、前記バッファ室からの電気的に中性な活性種を含むガスと、を交互に前記反応管内に供給して、前記複数の基板に所定の膜を形成する、請求項3に記載の基板処理装置。 - 内部を略平行に伸びる1対の放電電極を有するバッファ室に、基板に供給される前のガスを流通させる工程と、
前記1対の放電電極に供給された高周波電力が、前記1対の放電電極が前記ガスに曝露しないように前記1対の放電電極にそれぞれ被せられる絶縁体製の1対の鞘管を介在させて、前記バッファ室内の前記ガスを励起し、少なくとも一部をプラズマ化若しくは活性化する工程と、 プラズマ化若しくは活性化された前記ガスで前記基板を処理する工程と、を有し、
前記活性化する工程では、前記1対の放電電極の少なくとも一方は、給電される端とは別の端において、前記放電電極と略等しい外径を有し、先端部分が丸く形成された金属製のキャップが設けられた状態で給電される半導体装置の製造方法。
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JP2019173903A JP6937806B2 (ja) | 2019-09-25 | 2019-09-25 | 基板処理装置、及び半導体の製造方法 |
CN202010874983.7A CN112563109A (zh) | 2019-09-25 | 2020-08-27 | 基板处理装置、以及半导体器件的制造方法 |
TW109129523A TWI754364B (zh) | 2019-09-25 | 2020-08-28 | 基板處理裝置、以及半導體器件的製造方法 |
US17/025,471 US20210090861A1 (en) | 2019-09-25 | 2020-09-18 | Substrate processing apparatus and method of manufacturing semiconductor device |
KR1020200120270A KR102393868B1 (ko) | 2019-09-25 | 2020-09-18 | 기판 처리 장치, 반도체 장치의 제조 방법 및 프로그램 |
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TW202123336A (zh) | 2021-06-16 |
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