JP2021034482A - 真空装置 - Google Patents
真空装置 Download PDFInfo
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- JP2021034482A JP2021034482A JP2019151411A JP2019151411A JP2021034482A JP 2021034482 A JP2021034482 A JP 2021034482A JP 2019151411 A JP2019151411 A JP 2019151411A JP 2019151411 A JP2019151411 A JP 2019151411A JP 2021034482 A JP2021034482 A JP 2021034482A
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- plate
- mask
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- end effector
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- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims description 4
- 239000000919 ceramic Substances 0.000 claims description 4
- 229910052802 copper Inorganic materials 0.000 claims description 4
- 239000010949 copper Substances 0.000 claims description 4
- 229910052782 aluminium Inorganic materials 0.000 claims description 2
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims description 2
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 claims description 2
- 229910052737 gold Inorganic materials 0.000 claims description 2
- 239000010931 gold Substances 0.000 claims description 2
- 239000011347 resin Substances 0.000 claims description 2
- 229920005989 resin Polymers 0.000 claims description 2
- 239000004020 conductor Substances 0.000 claims 1
- 239000012636 effector Substances 0.000 description 59
- 230000008859 change Effects 0.000 description 11
- 239000000463 material Substances 0.000 description 11
- 239000002245 particle Substances 0.000 description 11
- 230000007246 mechanism Effects 0.000 description 8
- 230000003028 elevating effect Effects 0.000 description 7
- 238000002791 soaking Methods 0.000 description 6
- 238000010894 electron beam technology Methods 0.000 description 5
- 230000005855 radiation Effects 0.000 description 5
- 239000004696 Poly ether ether ketone Substances 0.000 description 2
- MCMNRKCIXSYSNV-UHFFFAOYSA-N Zirconium dioxide Chemical compound O=[Zr]=O MCMNRKCIXSYSNV-UHFFFAOYSA-N 0.000 description 2
- 230000007423 decrease Effects 0.000 description 2
- 230000006866 deterioration Effects 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 239000007769 metal material Substances 0.000 description 2
- 229920002530 polyetherether ketone Polymers 0.000 description 2
- 229910000838 Al alloy Inorganic materials 0.000 description 1
- 230000002411 adverse Effects 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 229920006351 engineering plastic Polymers 0.000 description 1
- 230000020169 heat generation Effects 0.000 description 1
- 238000010884 ion-beam technique Methods 0.000 description 1
- 230000001678 irradiating effect Effects 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 230000008569 process Effects 0.000 description 1
- 239000010453 quartz Substances 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
- B25J15/00—Gripping heads and other end effectors
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G47/00—Article or material-handling devices associated with conveyors; Methods employing such devices
- B65G47/74—Feeding, transfer, or discharging devices of particular kinds or types
- B65G47/90—Devices for picking-up and depositing articles or materials
- B65G47/904—Devices for picking-up and depositing articles or materials provided with rotary movements only
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/20—Exposure; Apparatus therefor
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
- H01J37/317—Electron-beam or ion-beam tubes for localised treatment of objects for changing properties of the objects or for applying thin layers thereon, e.g. for ion implantation
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/027—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67739—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber
- H01L21/67742—Mechanical parts of transfer devices
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67739—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber
- H01L21/67748—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber horizontal transfer of a single workpiece
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L21/687—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches
- H01L21/68707—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a robot blade, or gripped by a gripper for conveyance
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L21/687—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches
- H01L21/68714—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support
- H01L21/68757—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support characterised by a coating or a hardness or a material
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70691—Handling of masks or workpieces
- G03F7/70733—Handling masks and workpieces, e.g. exchange of workpiece or mask, transport of workpiece or mask
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/20—Positioning, supporting, modifying or maintaining the physical state of objects being observed or treated
- H01J2237/2001—Maintaining constant desired temperature
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/20—Positioning, supporting, modifying or maintaining the physical state of objects being observed or treated
- H01J2237/204—Means for introducing and/or outputting objects
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/18—Vacuum locks ; Means for obtaining or maintaining the desired pressure within the vessel
- H01J37/185—Means for transferring objects between different enclosures of different pressure or atmosphere
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/20—Means for supporting or positioning the objects or the material; Means for adjusting diaphragms or lenses associated with the support
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
- H01J37/317—Electron-beam or ion-beam tubes for localised treatment of objects for changing properties of the objects or for applying thin layers thereon, e.g. for ion implantation
- H01J37/3174—Particle-beam lithography, e.g. electron beam lithography
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Power Engineering (AREA)
- Robotics (AREA)
- Mechanical Engineering (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
- Electron Beam Exposure (AREA)
- Manipulator (AREA)
- Health & Medical Sciences (AREA)
- Toxicology (AREA)
Abstract
Description
図1は、第1実施形態による荷電粒子ビーム描画装置10の構成の一例を示す図である。図1に示す荷電粒子ビーム描画装置10は、例えば、処理対象(マスクW)に電子ビームを照射して所定のパターンを描画する。尚、本実施形態は、描画装置の他、露光装置、電子顕微鏡、光学顕微鏡等の電子ビームや光を処理対象に照射する装置であってもよい。従って、処理対象は、マスクの他、半導体基板等であってもよい。荷電粒子ビームは、例えば、電子ビーム、光、イオンビーム等でよい。
図5(A)および図5(B)は、第2実施形態による搬送ロボット4の先端部の構成例を示す平面図および側面図である。第2実施形態では、鉛直方向から見たときに、プレート45の大きさはマスクWよりも小さい。即ち、鉛直方向から見たときに、プレート45の外縁は、マスクWの外縁よりも内側にある。プレート45は、支持パッド46に接触しておらず離間している。第2実施形態のその他の構成は、第1実施形態の対応する構成と同様でよい。
図6は、第3実施形態による搬送ロボット4の先端部の構成例を示す側面図である。第3実施形態の平面図は、図3(A)と同様でよい。第3実施形態では、複数の脚部47が設けられている。互いに隣接する脚部47間には、スペース領域SPが設けられている。支持パッド46は、プレート45とマスクWとの間には設けられているが、プレート45とエンドエフェクタ44との間には設けられていない。複数の脚部47は、プレート45よりも熱伝導率の低い材料から構成されており、プレート45を支持し、プレート45をエンドエフェクタ44から離間している。第3実施形態のその他の構成は、第1実施形態の対応する構成と同様でよい。
図7は、第4実施形態による搬送ロボット4の先端部の構成例を示す側面図である。第4実施形態の平面図は、図5(A)と同様でよい。第4実施形態は、第2および第3実施形態の組み合わせである。即ち、鉛直方向から見たときに、プレート45の大きさはマスクWよりも小さい。尚且つ、複数の脚部47がプレート45の下に設けられている。互いに隣接する脚部47間には、スペース領域SPが設けられている。第4実施形態のその他の構成は、第2実施形態の対応する構成と同様でよい。従って、第4実施形態は、第2および第3実施形態と同様の効果を得ることができる。
Claims (8)
- 内部を減圧されたチャンバと、
前記チャンバ内へ処理対象を搬送する搬送ロボットとを備え、
前記搬送ロボットは、
アーム部と、
前記アーム部の先端部に設けられ、該アーム部よりも熱伝導率の低い支持部と、
前記支持部と前記処理対象との間に設けられ、前記支持部よりも熱伝導率の高いプレートと、
前記支持部上に設けられ、前記処理対象に接触して該処理対象を支持する支持パッドとを備え、
前記支持部と前記プレートとの間には、前記支持部と前記プレートとを接触させる接触領域と、該支持部と該プレートとの間を離間させるスペース領域とがある、真空装置。 - 前記プレートは、前記支持部と前記処理対象との間の前記支持パッド中に介在している、請求項1に記載の真空装置。
- 前記プレートの輻射率は、前記処理対象の輻射率よりも低い、請求項1または請求項2に記載の真空装置。
- 前記支持部には、セラミックが用いられ、
前記プレートには、銅、アルミニウムまたは金が用いられ、
前記支持パッドには、樹脂が用いられている、請求項1から請求項3のいずれか一項に記載の真空装置。 - 前記プレートの外縁は、略鉛直方向から見たときに前記処理対象の外縁よりも外側にある、請求項1から請求項4のいずれか一項に記載の真空装置。
- 前記支持部の表面には、導電性材料がコーティングされている、請求項1から請求項5のいずれか一項に記載の真空装置。
- 前記プレートは、前記接触領域において前記支持部に接触する突出部を有する、請求項1から請求項5のいずれか一項に記載の真空装置。
- 前記支持パッドの熱伝導率は、前記アーム部の熱伝導率よりも低い、請求項1から請求項5のいずれか一項に記載の真空装置。
Priority Applications (6)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2019151411A JP7325260B2 (ja) | 2019-08-21 | 2019-08-21 | 真空装置 |
CN202080053171.4A CN114144288B (zh) | 2019-08-21 | 2020-08-03 | 真空装置 |
KR1020227000292A KR102649869B1 (ko) | 2019-08-21 | 2020-08-03 | 진공 장치 |
PCT/JP2020/029722 WO2021033528A1 (ja) | 2019-08-21 | 2020-08-03 | 真空装置 |
TW109127135A TWI754347B (zh) | 2019-08-21 | 2020-08-11 | 真空裝置 |
US17/651,283 US20220172922A1 (en) | 2019-08-21 | 2022-02-16 | Vacuum apparatus |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2019151411A JP7325260B2 (ja) | 2019-08-21 | 2019-08-21 | 真空装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2021034482A true JP2021034482A (ja) | 2021-03-01 |
JP7325260B2 JP7325260B2 (ja) | 2023-08-14 |
Family
ID=74660975
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2019151411A Active JP7325260B2 (ja) | 2019-08-21 | 2019-08-21 | 真空装置 |
Country Status (6)
Country | Link |
---|---|
US (1) | US20220172922A1 (ja) |
JP (1) | JP7325260B2 (ja) |
KR (1) | KR102649869B1 (ja) |
CN (1) | CN114144288B (ja) |
TW (1) | TWI754347B (ja) |
WO (1) | WO2021033528A1 (ja) |
Citations (7)
Publication number | Priority date | Publication date | Assignee | Title |
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JPH06204316A (ja) * | 1992-12-28 | 1994-07-22 | Mitsubishi Electric Corp | 耐熱ロボットハンド |
JPH07147311A (ja) * | 1993-11-24 | 1995-06-06 | Tokyo Electron Ltd | 搬送アーム |
JP2007048984A (ja) * | 2005-08-10 | 2007-02-22 | Nishiyama:Kk | ワーク搬送用ハンドプレート及びその製造方法 |
JP2009141091A (ja) * | 2007-12-06 | 2009-06-25 | Tokyo Electron Ltd | 基板保持具、基板搬送装置および基板処理システム |
JP2010064231A (ja) * | 2008-09-12 | 2010-03-25 | Yaskawa Electric Corp | 基板搬送ロボット |
WO2013073379A1 (ja) * | 2011-11-16 | 2013-05-23 | 日本電産サンキョー株式会社 | 産業用ロボット |
JP2018078265A (ja) * | 2016-10-31 | 2018-05-17 | 日新イオン機器株式会社 | 加熱装置、半導体製造装置 |
Family Cites Families (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2002110761A (ja) * | 2000-05-04 | 2002-04-12 | Applied Materials Inc | 温度感知用途を有するロボット用装置及び方法 |
US6794662B1 (en) * | 2003-10-07 | 2004-09-21 | Ibis Technology Corporation | Thermosetting resin wafer-holding pin |
JP2006237256A (ja) * | 2005-02-24 | 2006-09-07 | Ulvac Japan Ltd | 基板搬送ハンド |
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