JP2020522716A5 - - Google Patents
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- JP2020522716A5 JP2020522716A5 JP2019568108A JP2019568108A JP2020522716A5 JP 2020522716 A5 JP2020522716 A5 JP 2020522716A5 JP 2019568108 A JP2019568108 A JP 2019568108A JP 2019568108 A JP2019568108 A JP 2019568108A JP 2020522716 A5 JP2020522716 A5 JP 2020522716A5
- Authority
- JP
- Japan
- Prior art keywords
- interference pattern
- holographic
- rays
- imaging device
- holographic interferometer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US15/614,687 US10725428B2 (en) | 2017-06-06 | 2017-06-06 | Methods and systems of holographic interferometry |
| US15/614,687 | 2017-06-06 | ||
| PCT/IL2018/050617 WO2018225068A1 (en) | 2017-06-06 | 2018-06-06 | Methods and systems of holographic interferometry |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2020522716A JP2020522716A (ja) | 2020-07-30 |
| JP2020522716A5 true JP2020522716A5 (enExample) | 2021-07-26 |
| JP7276987B2 JP7276987B2 (ja) | 2023-05-18 |
Family
ID=64460237
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2019568108A Active JP7276987B2 (ja) | 2017-06-06 | 2018-06-06 | ホログラフィ干渉測定分野の方法およびシステム |
Country Status (7)
| Country | Link |
|---|---|
| US (1) | US10725428B2 (enExample) |
| EP (1) | EP3635328B1 (enExample) |
| JP (1) | JP7276987B2 (enExample) |
| KR (1) | KR102604960B1 (enExample) |
| CN (1) | CN110914634B (enExample) |
| IL (1) | IL271219B2 (enExample) |
| WO (1) | WO2018225068A1 (enExample) |
Families Citing this family (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US10725428B2 (en) | 2017-06-06 | 2020-07-28 | RD Synergy Ltd. | Methods and systems of holographic interferometry |
| US11892292B2 (en) | 2017-06-06 | 2024-02-06 | RD Synergy Ltd. | Methods and systems of holographic interferometry |
| CN112969899B (zh) | 2018-10-30 | 2023-03-10 | Rd 辛纳基有限公司 | 全息干涉法的系统和方法 |
| JP7227604B2 (ja) * | 2019-03-20 | 2023-02-22 | 株式会社日立ハイテクサイエンス | 三次元形状測定方法および三次元形状測定装置 |
| CN111459004B (zh) * | 2020-04-14 | 2021-09-14 | 清华大学 | 双光路合成孔径全息图拼接方法 |
| US11499815B2 (en) | 2020-12-08 | 2022-11-15 | International Business Machines Corporation | Visual quality assessment augmentation employing holographic interferometry |
| CN113472985B (zh) * | 2021-06-28 | 2023-03-24 | 平湖莱顿光学仪器制造有限公司 | 一种基于微分干涉显微镜采集图像的视频处理方法和装置 |
| KR102780556B1 (ko) * | 2022-10-12 | 2025-03-12 | (주)힉스컴퍼니 | 디지털 홀로그래픽 현미경의 빔 세기와 빔 경로 길이를 조절하는 방법 및 장치 |
| US12467737B1 (en) * | 2025-03-06 | 2025-11-11 | Camtek Ltd. | Self-referencing interferometric microscope |
Family Cites Families (26)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4478481A (en) | 1982-02-12 | 1984-10-23 | University Of Dayton | Production of diffraction limited holographic images |
| JPH04204032A (ja) * | 1990-11-30 | 1992-07-24 | Hitachi Ltd | レンズ光学性能測定装置 |
| US5515183A (en) * | 1991-08-08 | 1996-05-07 | Citizen Watch Co., Ltd. | Real-time holography system |
| JPH08219718A (ja) * | 1995-02-08 | 1996-08-30 | Nikon Corp | 面位置検出装置 |
| US7471430B1 (en) | 1997-12-15 | 2008-12-30 | The United States Of America As Represented By The Secretary Of The Air Force | Holographic image corrector |
| JP2000346612A (ja) | 1999-06-04 | 2000-12-15 | Sony Corp | 干渉計および干渉測定方法 |
| US6512385B1 (en) | 1999-07-26 | 2003-01-28 | Paul Pfaff | Method for testing a device under test including the interference of two beams |
| JP2001227907A (ja) | 2000-02-16 | 2001-08-24 | Fuji Photo Optical Co Ltd | フーリエ変換を用いた縞解析方法 |
| JP4583611B2 (ja) | 2001-01-11 | 2010-11-17 | 富士フイルム株式会社 | 斜入射干渉計装置 |
| JP2003167500A (ja) * | 2001-11-30 | 2003-06-13 | Art Nau:Kk | ホログラム作成方法 |
| JP2003302205A (ja) | 2002-02-07 | 2003-10-24 | Nikon Corp | シアリング干渉測定方法及びシアリング干渉計、投影光学系の製造方法、投影光学系、及び投影露光装置 |
| EP1411321B1 (en) | 2002-10-15 | 2017-04-19 | Mitutoyo Corporation | Interferometer using an integrated imaging array, a high-density polarizer and a phase-shifting array |
| FR2852409B1 (fr) | 2003-03-11 | 2005-06-17 | Dispositif pour la generation d'une porteuse dans un interferogramme | |
| JP2004309402A (ja) | 2003-04-10 | 2004-11-04 | Mitsutoyo Corp | 干渉測定装置及び位相シフト縞解析装置 |
| PL1631788T3 (pl) | 2003-05-16 | 2007-08-31 | Univ Bruxelles | Cyfrowy mikroskop holograficzny do trójwymiarowego obrazowania i sposób jego stosowania |
| KR20060052699A (ko) | 2003-06-11 | 2006-05-19 | 솔비젼 인코포레이티드 | 감도 및 다이내믹 레인지가 증가된 3ｄ 및 2ｄ 측정장치 및방법 |
| JP2005233772A (ja) | 2004-02-19 | 2005-09-02 | Mitsutoyo Corp | 干渉計 |
| DE102006049612A1 (de) * | 2006-10-20 | 2008-04-30 | Carl Zeiss Smt Ag | Beleuchtungseinrichtung und Maske für eine Mikrolithographie-Projektionsbelichtungsanlage sowie Verfahren zur lithographischen Belichtung eines Gegenstandes |
| JP2008304567A (ja) * | 2007-06-05 | 2008-12-18 | Tdk Corp | ホログラム記録媒体及びその製造方法 |
| US20110255097A1 (en) | 2010-03-18 | 2011-10-20 | Gilad Golan | Method and system for evaluating a height of structures |
| US9360423B2 (en) * | 2011-07-01 | 2016-06-07 | Canon Kabushiki Kaisha | Optical system for a holographic microscope including a spatial filter |
| JP5954979B2 (ja) * | 2011-12-15 | 2016-07-20 | キヤノン株式会社 | 多波長干渉計を有する計測装置 |
| JP6202499B2 (ja) | 2012-09-27 | 2017-09-27 | 国立大学法人北海道大学 | 光位相測定方法、光位相測定装置および光通信装置 |
| CN106164784B (zh) * | 2014-02-06 | 2019-07-12 | 林瑟科技公司 | 数字全息设备 |
| EP3303985A4 (en) * | 2015-05-28 | 2018-06-27 | Cylite Pty Ltd | High resolution 3-d spectral domain optical imaging apparatus and method |
| US10725428B2 (en) | 2017-06-06 | 2020-07-28 | RD Synergy Ltd. | Methods and systems of holographic interferometry |
-
2017
- 2017-06-06 US US15/614,687 patent/US10725428B2/en active Active
-
2018
- 2018-06-06 IL IL271219A patent/IL271219B2/en unknown
- 2018-06-06 CN CN201880045899.5A patent/CN110914634B/zh active Active
- 2018-06-06 JP JP2019568108A patent/JP7276987B2/ja active Active
- 2018-06-06 WO PCT/IL2018/050617 patent/WO2018225068A1/en not_active Ceased
- 2018-06-06 EP EP18813728.5A patent/EP3635328B1/en active Active
- 2018-06-06 KR KR1020207000327A patent/KR102604960B1/ko active Active
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