JP7276987B2 - ホログラフィ干渉測定分野の方法およびシステム - Google Patents

ホログラフィ干渉測定分野の方法およびシステム Download PDF

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JP7276987B2
JP7276987B2 JP2019568108A JP2019568108A JP7276987B2 JP 7276987 B2 JP7276987 B2 JP 7276987B2 JP 2019568108 A JP2019568108 A JP 2019568108A JP 2019568108 A JP2019568108 A JP 2019568108A JP 7276987 B2 JP7276987 B2 JP 7276987B2
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light
holographic interferometer
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light beams
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JP2020522716A (ja
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ドヴ ファーマン
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アールディー シナジー リミテッド
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    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03H—HOLOGRAPHIC PROCESSES OR APPARATUS
    • G03H1/00—Holographic processes or apparatus using light, infrared or ultraviolet waves for obtaining holograms or for obtaining an image from them; Details peculiar thereto
    • G03H1/04—Processes or apparatus for producing holograms
    • G03H1/0402—Recording geometries or arrangements
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
    • G01B11/2441—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures using interferometry
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02001—Interferometers characterised by controlling or generating intrinsic radiation properties
    • G01B9/02002—Interferometers characterised by controlling or generating intrinsic radiation properties using two or more frequencies
    • G01B9/02005—Interferometers characterised by controlling or generating intrinsic radiation properties using two or more frequencies using discrete frequency stepping or switching
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02015—Interferometers characterised by the beam path configuration
    • G01B9/02032—Interferometers characterised by the beam path configuration generating a spatial carrier frequency, e.g. by creating lateral or angular offset between reference and object beam
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02097—Self-interferometers
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03H—HOLOGRAPHIC PROCESSES OR APPARATUS
    • G03H1/00—Holographic processes or apparatus using light, infrared or ultraviolet waves for obtaining holograms or for obtaining an image from them; Details peculiar thereto
    • G03H1/04—Processes or apparatus for producing holograms
    • G03H1/0443—Digital holography, i.e. recording holograms with digital recording means
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03H—HOLOGRAPHIC PROCESSES OR APPARATUS
    • G03H1/00—Holographic processes or apparatus using light, infrared or ultraviolet waves for obtaining holograms or for obtaining an image from them; Details peculiar thereto
    • G03H1/26—Processes or apparatus specially adapted to produce multiple sub- holograms or to obtain images from them, e.g. multicolour technique
    • G03H1/2645—Multiplexing processes, e.g. aperture, shift, or wavefront multiplexing
    • G03H1/265—Angle multiplexing; Multichannel holograms
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B2290/00—Aspects of interferometers not specifically covered by any group under G01B9/02
    • G01B2290/45—Multiple detectors for detecting interferometer signals
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03H—HOLOGRAPHIC PROCESSES OR APPARATUS
    • G03H1/00—Holographic processes or apparatus using light, infrared or ultraviolet waves for obtaining holograms or for obtaining an image from them; Details peculiar thereto
    • G03H1/04—Processes or apparatus for producing holograms
    • G03H1/0443—Digital holography, i.e. recording holograms with digital recording means
    • G03H2001/0454—Arrangement for recovering hologram complex amplitude
    • G03H2001/0456—Spatial heterodyne, i.e. filtering a Fourier transform of the off-axis record
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03H—HOLOGRAPHIC PROCESSES OR APPARATUS
    • G03H1/00—Holographic processes or apparatus using light, infrared or ultraviolet waves for obtaining holograms or for obtaining an image from them; Details peculiar thereto
    • G03H1/04—Processes or apparatus for producing holograms
    • G03H1/0443—Digital holography, i.e. recording holograms with digital recording means
    • G03H2001/046—Synthetic aperture
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03H—HOLOGRAPHIC PROCESSES OR APPARATUS
    • G03H1/00—Holographic processes or apparatus using light, infrared or ultraviolet waves for obtaining holograms or for obtaining an image from them; Details peculiar thereto
    • G03H1/26—Processes or apparatus specially adapted to produce multiple sub- holograms or to obtain images from them, e.g. multicolour technique
    • G03H1/2645—Multiplexing processes, e.g. aperture, shift, or wavefront multiplexing
    • G03H2001/266—Wavelength multiplexing
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03H—HOLOGRAPHIC PROCESSES OR APPARATUS
    • G03H2222/00—Light sources or light beam properties
    • G03H2222/10—Spectral composition
    • G03H2222/13—Multi-wavelengths wave with discontinuous wavelength ranges
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03H—HOLOGRAPHIC PROCESSES OR APPARATUS
    • G03H2226/00—Electro-optic or electronic components relating to digital holography
    • G03H2226/11—Electro-optic recording means, e.g. CCD, pyroelectric sensors
    • G03H2226/13—Multiple recording means

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Computing Systems (AREA)
  • Theoretical Computer Science (AREA)
  • Instruments For Measurement Of Length By Optical Means (AREA)
  • Length Measuring Devices By Optical Means (AREA)
JP2019568108A 2017-06-06 2018-06-06 ホログラフィ干渉測定分野の方法およびシステム Active JP7276987B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US15/614,687 2017-06-06
US15/614,687 US10725428B2 (en) 2017-06-06 2017-06-06 Methods and systems of holographic interferometry
PCT/IL2018/050617 WO2018225068A1 (en) 2017-06-06 2018-06-06 Methods and systems of holographic interferometry

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JP2020522716A JP2020522716A (ja) 2020-07-30
JP2020522716A5 JP2020522716A5 (enExample) 2021-07-26
JP7276987B2 true JP7276987B2 (ja) 2023-05-18

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US (1) US10725428B2 (enExample)
EP (1) EP3635328B1 (enExample)
JP (1) JP7276987B2 (enExample)
KR (1) KR102604960B1 (enExample)
CN (1) CN110914634B (enExample)
IL (1) IL271219B2 (enExample)
WO (1) WO2018225068A1 (enExample)

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* Cited by examiner, † Cited by third party
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US11892292B2 (en) 2017-06-06 2024-02-06 RD Synergy Ltd. Methods and systems of holographic interferometry
US10725428B2 (en) 2017-06-06 2020-07-28 RD Synergy Ltd. Methods and systems of holographic interferometry
EP3887757A4 (en) 2018-10-30 2022-10-19 RD Synergy Ltd. METHODS AND SYSTEMS FOR HOLOGRAPHIC INTERFEROMETRY
JP7227604B2 (ja) * 2019-03-20 2023-02-22 株式会社日立ハイテクサイエンス 三次元形状測定方法および三次元形状測定装置
CN111459004B (zh) * 2020-04-14 2021-09-14 清华大学 双光路合成孔径全息图拼接方法
US11499815B2 (en) 2020-12-08 2022-11-15 International Business Machines Corporation Visual quality assessment augmentation employing holographic interferometry
CN113472985B (zh) * 2021-06-28 2023-03-24 平湖莱顿光学仪器制造有限公司 一种基于微分干涉显微镜采集图像的视频处理方法和装置
KR102780556B1 (ko) * 2022-10-12 2025-03-12 (주)힉스컴퍼니 디지털 홀로그래픽 현미경의 빔 세기와 빔 경로 길이를 조절하는 방법 및 장치
US12467737B1 (en) * 2025-03-06 2025-11-11 Camtek Ltd. Self-referencing interferometric microscope

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JP2000346612A (ja) 1999-06-04 2000-12-15 Sony Corp 干渉計および干渉測定方法
JP2001227907A (ja) 2000-02-16 2001-08-24 Fuji Photo Optical Co Ltd フーリエ変換を用いた縞解析方法
JP2002206914A (ja) 2001-01-11 2002-07-26 Fuji Photo Optical Co Ltd 斜入射干渉計装置
JP2003302205A (ja) 2002-02-07 2003-10-24 Nikon Corp シアリング干渉測定方法及びシアリング干渉計、投影光学系の製造方法、投影光学系、及び投影露光装置
JP2004309402A (ja) 2003-04-10 2004-11-04 Mitsutoyo Corp 干渉測定装置及び位相シフト縞解析装置
JP2005233772A (ja) 2004-02-19 2005-09-02 Mitsutoyo Corp 干渉計
US20130003073A1 (en) 2011-07-01 2013-01-03 Canon Kabushiki Kaisha Optical system for a holographic microscope

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JPH04204032A (ja) * 1990-11-30 1992-07-24 Hitachi Ltd レンズ光学性能測定装置
US5515183A (en) * 1991-08-08 1996-05-07 Citizen Watch Co., Ltd. Real-time holography system
JPH08219718A (ja) * 1995-02-08 1996-08-30 Nikon Corp 面位置検出装置
US7471430B1 (en) 1997-12-15 2008-12-30 The United States Of America As Represented By The Secretary Of The Air Force Holographic image corrector
US6512385B1 (en) 1999-07-26 2003-01-28 Paul Pfaff Method for testing a device under test including the interference of two beams
JP2003167500A (ja) * 2001-11-30 2003-06-13 Art Nau:Kk ホログラム作成方法
EP1411321B1 (en) 2002-10-15 2017-04-19 Mitutoyo Corporation Interferometer using an integrated imaging array, a high-density polarizer and a phase-shifting array
FR2852409B1 (fr) 2003-03-11 2005-06-17 Dispositif pour la generation d'une porteuse dans un interferogramme
PL1631788T3 (pl) 2003-05-16 2007-08-31 Univ Bruxelles Cyfrowy mikroskop holograficzny do trójwymiarowego obrazowania i sposób jego stosowania
KR20060052699A (ko) 2003-06-11 2006-05-19 솔비젼 인코포레이티드 감도 및 다이내믹 레인지가 증가된 3ｄ 및 2ｄ 측정장치 및방법
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Publication number Priority date Publication date Assignee Title
JP2000346612A (ja) 1999-06-04 2000-12-15 Sony Corp 干渉計および干渉測定方法
JP2001227907A (ja) 2000-02-16 2001-08-24 Fuji Photo Optical Co Ltd フーリエ変換を用いた縞解析方法
JP2002206914A (ja) 2001-01-11 2002-07-26 Fuji Photo Optical Co Ltd 斜入射干渉計装置
JP2003302205A (ja) 2002-02-07 2003-10-24 Nikon Corp シアリング干渉測定方法及びシアリング干渉計、投影光学系の製造方法、投影光学系、及び投影露光装置
JP2004309402A (ja) 2003-04-10 2004-11-04 Mitsutoyo Corp 干渉測定装置及び位相シフト縞解析装置
JP2005233772A (ja) 2004-02-19 2005-09-02 Mitsutoyo Corp 干渉計
US20130003073A1 (en) 2011-07-01 2013-01-03 Canon Kabushiki Kaisha Optical system for a holographic microscope

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Publication number Publication date
JP2020522716A (ja) 2020-07-30
EP3635328B1 (en) 2025-08-06
KR20200015938A (ko) 2020-02-13
KR102604960B1 (ko) 2023-11-23
IL271219B2 (en) 2024-12-01
US10725428B2 (en) 2020-07-28
EP3635328A4 (en) 2021-03-17
EP3635328C0 (en) 2025-08-06
CN110914634A (zh) 2020-03-24
IL271219A (en) 2020-01-30
WO2018225068A1 (en) 2018-12-13
CN110914634B (zh) 2022-02-18
EP3635328A1 (en) 2020-04-15
US20180348703A1 (en) 2018-12-06
IL271219B1 (en) 2024-08-01

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