CN110914634B - 全息干涉度量的方法及系统 - Google Patents

全息干涉度量的方法及系统 Download PDF

Info

Publication number
CN110914634B
CN110914634B CN201880045899.5A CN201880045899A CN110914634B CN 110914634 B CN110914634 B CN 110914634B CN 201880045899 A CN201880045899 A CN 201880045899A CN 110914634 B CN110914634 B CN 110914634B
Authority
CN
China
Prior art keywords
light
beams
holographic interferometer
light beams
holographic
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
CN201880045899.5A
Other languages
English (en)
Chinese (zh)
Other versions
CN110914634A (zh
Inventor
多夫·弗曼
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Rd Sinaki Ltd
Original Assignee
Rd Sinaki Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Rd Sinaki Ltd filed Critical Rd Sinaki Ltd
Publication of CN110914634A publication Critical patent/CN110914634A/zh
Application granted granted Critical
Publication of CN110914634B publication Critical patent/CN110914634B/zh
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03H—HOLOGRAPHIC PROCESSES OR APPARATUS
    • G03H1/00—Holographic processes or apparatus using light, infrared or ultraviolet waves for obtaining holograms or for obtaining an image from them; Details peculiar thereto
    • G03H1/04—Processes or apparatus for producing holograms
    • G03H1/0402—Recording geometries or arrangements
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
    • G01B11/2441—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures using interferometry
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02001—Interferometers characterised by controlling or generating intrinsic radiation properties
    • G01B9/02002—Interferometers characterised by controlling or generating intrinsic radiation properties using two or more frequencies
    • G01B9/02005—Interferometers characterised by controlling or generating intrinsic radiation properties using two or more frequencies using discrete frequency stepping or switching
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02015—Interferometers characterised by the beam path configuration
    • G01B9/02032—Interferometers characterised by the beam path configuration generating a spatial carrier frequency, e.g. by creating lateral or angular offset between reference and object beam
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02097—Self-interferometers
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03H—HOLOGRAPHIC PROCESSES OR APPARATUS
    • G03H1/00—Holographic processes or apparatus using light, infrared or ultraviolet waves for obtaining holograms or for obtaining an image from them; Details peculiar thereto
    • G03H1/04—Processes or apparatus for producing holograms
    • G03H1/0443—Digital holography, i.e. recording holograms with digital recording means
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03H—HOLOGRAPHIC PROCESSES OR APPARATUS
    • G03H1/00—Holographic processes or apparatus using light, infrared or ultraviolet waves for obtaining holograms or for obtaining an image from them; Details peculiar thereto
    • G03H1/26—Processes or apparatus specially adapted to produce multiple sub- holograms or to obtain images from them, e.g. multicolour technique
    • G03H1/2645—Multiplexing processes, e.g. aperture, shift, or wavefront multiplexing
    • G03H1/265—Angle multiplexing; Multichannel holograms
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B2290/00—Aspects of interferometers not specifically covered by any group under G01B9/02
    • G01B2290/45—Multiple detectors for detecting interferometer signals
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03H—HOLOGRAPHIC PROCESSES OR APPARATUS
    • G03H1/00—Holographic processes or apparatus using light, infrared or ultraviolet waves for obtaining holograms or for obtaining an image from them; Details peculiar thereto
    • G03H1/04—Processes or apparatus for producing holograms
    • G03H1/0443—Digital holography, i.e. recording holograms with digital recording means
    • G03H2001/0454—Arrangement for recovering hologram complex amplitude
    • G03H2001/0456—Spatial heterodyne, i.e. filtering a Fourier transform of the off-axis record
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03H—HOLOGRAPHIC PROCESSES OR APPARATUS
    • G03H1/00—Holographic processes or apparatus using light, infrared or ultraviolet waves for obtaining holograms or for obtaining an image from them; Details peculiar thereto
    • G03H1/04—Processes or apparatus for producing holograms
    • G03H1/0443—Digital holography, i.e. recording holograms with digital recording means
    • G03H2001/046—Synthetic aperture
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03H—HOLOGRAPHIC PROCESSES OR APPARATUS
    • G03H1/00—Holographic processes or apparatus using light, infrared or ultraviolet waves for obtaining holograms or for obtaining an image from them; Details peculiar thereto
    • G03H1/26—Processes or apparatus specially adapted to produce multiple sub- holograms or to obtain images from them, e.g. multicolour technique
    • G03H1/2645—Multiplexing processes, e.g. aperture, shift, or wavefront multiplexing
    • G03H2001/266—Wavelength multiplexing
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03H—HOLOGRAPHIC PROCESSES OR APPARATUS
    • G03H2222/00—Light sources or light beam properties
    • G03H2222/10—Spectral composition
    • G03H2222/13—Multi-wavelengths wave with discontinuous wavelength ranges
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03H—HOLOGRAPHIC PROCESSES OR APPARATUS
    • G03H2226/00—Electro-optic or electronic components relating to digital holography
    • G03H2226/11—Electro-optic recording means, e.g. CCD, pyroelectric sensors
    • G03H2226/13—Multiple recording means

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Computing Systems (AREA)
  • Theoretical Computer Science (AREA)
  • Instruments For Measurement Of Length By Optical Means (AREA)
  • Length Measuring Devices By Optical Means (AREA)
CN201880045899.5A 2017-06-06 2018-06-06 全息干涉度量的方法及系统 Active CN110914634B (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US15/614,687 US10725428B2 (en) 2017-06-06 2017-06-06 Methods and systems of holographic interferometry
US15/614,687 2017-06-06
PCT/IL2018/050617 WO2018225068A1 (en) 2017-06-06 2018-06-06 Methods and systems of holographic interferometry

Publications (2)

Publication Number Publication Date
CN110914634A CN110914634A (zh) 2020-03-24
CN110914634B true CN110914634B (zh) 2022-02-18

Family

ID=64460237

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201880045899.5A Active CN110914634B (zh) 2017-06-06 2018-06-06 全息干涉度量的方法及系统

Country Status (7)

Country Link
US (1) US10725428B2 (enExample)
EP (1) EP3635328B1 (enExample)
JP (1) JP7276987B2 (enExample)
KR (1) KR102604960B1 (enExample)
CN (1) CN110914634B (enExample)
IL (1) IL271219B2 (enExample)
WO (1) WO2018225068A1 (enExample)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US11892292B2 (en) 2017-06-06 2024-02-06 RD Synergy Ltd. Methods and systems of holographic interferometry
US10725428B2 (en) 2017-06-06 2020-07-28 RD Synergy Ltd. Methods and systems of holographic interferometry
EP3887757A4 (en) 2018-10-30 2022-10-19 RD Synergy Ltd. METHODS AND SYSTEMS FOR HOLOGRAPHIC INTERFEROMETRY
JP7227604B2 (ja) * 2019-03-20 2023-02-22 株式会社日立ハイテクサイエンス 三次元形状測定方法および三次元形状測定装置
CN111459004B (zh) * 2020-04-14 2021-09-14 清华大学 双光路合成孔径全息图拼接方法
US11499815B2 (en) 2020-12-08 2022-11-15 International Business Machines Corporation Visual quality assessment augmentation employing holographic interferometry
CN113472985B (zh) * 2021-06-28 2023-03-24 平湖莱顿光学仪器制造有限公司 一种基于微分干涉显微镜采集图像的视频处理方法和装置
KR102780556B1 (ko) * 2022-10-12 2025-03-12 (주)힉스컴퍼니 디지털 홀로그래픽 현미경의 빔 세기와 빔 경로 길이를 조절하는 방법 및 장치
US12467737B1 (en) * 2025-03-06 2025-11-11 Camtek Ltd. Self-referencing interferometric microscope

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4478481A (en) * 1982-02-12 1984-10-23 University Of Dayton Production of diffraction limited holographic images
JPH04204032A (ja) * 1990-11-30 1992-07-24 Hitachi Ltd レンズ光学性能測定装置
US5515183A (en) * 1991-08-08 1996-05-07 Citizen Watch Co., Ltd. Real-time holography system
CN1589422A (zh) * 2001-11-30 2005-03-02 浜松光子学株式会社 全息图制作方法
CN106164784A (zh) * 2014-02-06 2016-11-23 林瑟科技公司 数字全息设备
CN107615005A (zh) * 2015-05-28 2018-01-19 赛莱特私人有限公司 高分辨率3‑d谱域光学成像设备和方法

Family Cites Families (20)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH08219718A (ja) * 1995-02-08 1996-08-30 Nikon Corp 面位置検出装置
US7471430B1 (en) 1997-12-15 2008-12-30 The United States Of America As Represented By The Secretary Of The Air Force Holographic image corrector
JP2000346612A (ja) 1999-06-04 2000-12-15 Sony Corp 干渉計および干渉測定方法
US6512385B1 (en) 1999-07-26 2003-01-28 Paul Pfaff Method for testing a device under test including the interference of two beams
JP2001227907A (ja) 2000-02-16 2001-08-24 Fuji Photo Optical Co Ltd フーリエ変換を用いた縞解析方法
JP4583611B2 (ja) 2001-01-11 2010-11-17 富士フイルム株式会社 斜入射干渉計装置
JP2003302205A (ja) * 2002-02-07 2003-10-24 Nikon Corp シアリング干渉測定方法及びシアリング干渉計、投影光学系の製造方法、投影光学系、及び投影露光装置
EP1411321B1 (en) 2002-10-15 2017-04-19 Mitutoyo Corporation Interferometer using an integrated imaging array, a high-density polarizer and a phase-shifting array
FR2852409B1 (fr) 2003-03-11 2005-06-17 Dispositif pour la generation d'une porteuse dans un interferogramme
JP2004309402A (ja) 2003-04-10 2004-11-04 Mitsutoyo Corp 干渉測定装置及び位相シフト縞解析装置
US7362449B2 (en) 2003-05-16 2008-04-22 Universite Libre De Bruxelles Digital holographic microscope for 3D imaging and process using it
TW200510690A (en) 2003-06-11 2005-03-16 Solvision Inc 3D and 2D measurement system and method with increased sensitivity and dynamic range
JP2005233772A (ja) 2004-02-19 2005-09-02 Mitsutoyo Corp 干渉計
DE102006049612A1 (de) * 2006-10-20 2008-04-30 Carl Zeiss Smt Ag Beleuchtungseinrichtung und Maske für eine Mikrolithographie-Projektionsbelichtungsanlage sowie Verfahren zur lithographischen Belichtung eines Gegenstandes
JP2008304567A (ja) * 2007-06-05 2008-12-18 Tdk Corp ホログラム記録媒体及びその製造方法
US20110255097A1 (en) 2010-03-18 2011-10-20 Gilad Golan Method and system for evaluating a height of structures
US9360423B2 (en) 2011-07-01 2016-06-07 Canon Kabushiki Kaisha Optical system for a holographic microscope including a spatial filter
JP5954979B2 (ja) * 2011-12-15 2016-07-20 キヤノン株式会社 多波長干渉計を有する計測装置
WO2014050141A1 (ja) 2012-09-27 2014-04-03 国立大学法人北海道大学 光位相測定方法、光位相測定装置および光通信装置
US10725428B2 (en) 2017-06-06 2020-07-28 RD Synergy Ltd. Methods and systems of holographic interferometry

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4478481A (en) * 1982-02-12 1984-10-23 University Of Dayton Production of diffraction limited holographic images
JPH04204032A (ja) * 1990-11-30 1992-07-24 Hitachi Ltd レンズ光学性能測定装置
US5515183A (en) * 1991-08-08 1996-05-07 Citizen Watch Co., Ltd. Real-time holography system
CN1589422A (zh) * 2001-11-30 2005-03-02 浜松光子学株式会社 全息图制作方法
CN106164784A (zh) * 2014-02-06 2016-11-23 林瑟科技公司 数字全息设备
CN107615005A (zh) * 2015-05-28 2018-01-19 赛莱特私人有限公司 高分辨率3‑d谱域光学成像设备和方法

Also Published As

Publication number Publication date
US10725428B2 (en) 2020-07-28
IL271219B1 (en) 2024-08-01
JP2020522716A (ja) 2020-07-30
EP3635328B1 (en) 2025-08-06
EP3635328A4 (en) 2021-03-17
IL271219B2 (en) 2024-12-01
KR20200015938A (ko) 2020-02-13
US20180348703A1 (en) 2018-12-06
CN110914634A (zh) 2020-03-24
EP3635328C0 (en) 2025-08-06
KR102604960B1 (ko) 2023-11-23
EP3635328A1 (en) 2020-04-15
JP7276987B2 (ja) 2023-05-18
IL271219A (en) 2020-01-30
WO2018225068A1 (en) 2018-12-13

Similar Documents

Publication Publication Date Title
CN110914634B (zh) 全息干涉度量的方法及系统
TWI671501B (zh) 用於特徵化一樣本之方法及白光干涉測量計、用於處理來自具有一圖案化結構之一樣本之白光干涉測量資料之方法及用於量測具有一圖案化結構之一樣本之白光干涉測量計
KR102760925B1 (ko) Hsi 기반 검사 장치
CN114502912B (zh) 混合式3d检验系统
CN100485312C (zh) 用于波前控制和改进的3d测量的方法和装置
CN114746713B (zh) 用于成像和干涉测量的设备和方法
CN113196003B (zh) 分别用于确定输入光场的输入相位和/或输入振幅的方法，干涉仪和信号处理设备
US11892292B2 (en) Methods and systems of holographic interferometry
JP6766995B2 (ja) 位相シフト干渉計
EP3118571A1 (en) Instantaneous phase-shift interferometer and measurement method
CN104006763A (zh) 一种基于多波长的数字全息三维形貌检测装置
CN106768890B (zh) 用于调制传递函数检测的灰度余弦分布光学目标模拟装置
CN109470173B (zh) 一种双通道同时相移干涉显微系统
CN104823029A (zh) 振动测量的方法以及干涉仪
CN107923735B (zh) 用于推导物体表面的形貌的方法和设备
US20160021305A1 (en) Method and apparatus for measuring optical systems and surfaces with optical ray metrology
JP5412959B2 (ja) 光応用計測装置
KR102382055B1 (ko) 간섭계용 에지 등록
TWI833042B (zh) 混合式3d檢測系統
JP5518187B2 (ja) 変形計測方法
Wang et al. High-resolution microscopic fringe projection profilometry using Nyquist frequency fringe
JP2020153992A (ja) 白色干渉計による形状測定装置
JP2017026494A (ja) 白色干渉計による形状測定装置
CN109709037A (zh) 光源分段的三步移相去除光学相干层析复共轭镜像系统
CN108020174A (zh) 基于结构光照明的面形测量装置和方法

Legal Events

Date Code Title Description
PB01 Publication
PB01 Publication
SE01 Entry into force of request for substantive examination
SE01 Entry into force of request for substantive examination
GR01 Patent grant
GR01 Patent grant