JP2020515844A - 物体、ウェハ、及びマスクブランクの表面上の粒子を検出する方法 - Google Patents
物体、ウェハ、及びマスクブランクの表面上の粒子を検出する方法 Download PDFInfo
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Abstract
Description
本願は、2018年3月28日の独国特許出願第10 2017 205 212.0号の優先権を主張し、その全開示内容を参照により本願の文脈に援用する。
sin(αE)−sin(αS)=λM/G
Claims (17)
- 物体(2、3、14)の表面(11)上の堆積粒子(P)を検出する方法であって、
前記物体(2、3、14)の前記表面(11)の部分領域(T)に測定放射線(9)を照射するステップと、
前記照射された部分領域(T)で散乱した測定放射線(9)を検出するステップと、
前記検出された測定放射線(9)に基づき前記物体(2、3、14)の前記表面(11)上の前記粒子(P)を検出するステップと
を含み、前記照射するステップ及び前記測定放射線(9)を検出するステップ中に、前記物体(2、3、14)の前記表面(11)に、前記測定放射線に関する前記表面(11)の反射率(R)を低下させる反射防止コーティング(13)及び/又は表面構造(15)を設け、前記反射防止コーティング(13)及び/又は前記表面構造(15)により粒子検出限界を下げることを特徴とする方法。 - 請求項1に記載の方法において、前記粒子(P)を、マイクロリソグラフィ用のウェハ(3)又はマスクブランク(2)の形態の物体の前記表面(11)上で検出する方法。
- 請求項1又は2に記載の方法において、前記測定放射線(9)は所定の測定波長(λM)を有する方法。
- 請求項1〜3のいずれか1項に記載の方法において、前記散乱した測定放射線(9)を、入射した測定放射線(9)に対して第1散乱角(α1)〜第2散乱角(α2)の検出角度範囲で検出する方法。
- 請求項1〜4のいずれか1項に記載の方法において、前記反射防止コーティング(13)を多層コーティングとして形成する方法。
- 請求項4又は5のいずれか1項に記載の方法において、前記反射防止コーティング(13)は、前記第1散乱角(α1)〜前記第2散乱角(α2)の前記検出角度範囲で、前記反射率(R)の最大値(RMAX)と前記反射率(R)の最小値(RMIN)との間の差が5%未満、好ましくは2%未満、より好ましくは1%未満である前記測定放射線(9)に関する角度依存反射率(R)を有する方法。
- 請求項1〜6のいずれか1項に記載の方法において、前記測定放射線(9)に関する前記反射防止コーティング(13)の前記反射率(R)は、15%未満、好ましくは5%未満、特に1%未満である方法。
- 請求項1〜7のいずれか1項に記載の方法において、前記表面構造(15)を針状微細構造として形成する方法。
- 請求項1〜8のいずれか1項に記載の方法にのいて、前記物体(3)はシリコンからできている方法。
- 請求項9に記載の方法において、前記表面構造(15)をブラックシリコンとして形成する方法。
- 請求項1〜8のいずれか1項に記載の方法において、前記物体(14)を、前記測定放射線(9)をフィルタリングする光学フィルタガラスから、特にロングパスフィルタガラスから形成する方法。
- 請求項1〜11のいずれか1項に記載の方法において、前記物体(2、3、14)は、前記測定放射線(9)に関して1×1041/cmを超える吸収係数を有する材料からできている方法。
- 請求項1〜12のいずれか1項に記載の方法において、前記物体(2、3、14)は、厚さ(d1、d2)が500μm以上、好ましくは1mm以上である方法。
- 請求項1〜13のいずれか1項に記載の方法において、前記部分領域(T)で散乱した前記測定放射線(9)の散乱光強度(I)が強度閾値(IS)を上回る場合に粒子(P)を前記照射された部分領域(T)で検出する方法。
- 請求項1〜14のいずれか1項に記載の方法において、少なくとも前記物体(2、3、14)を前記測定放射線(9)で照射するステップ及び前記散乱した測定放射線(9)を検出するステップを、マイクロリソグラフィ用のマスクブランク(2)又はウェハ(3)を測定する測定装置(1)で実行する方法。
- マイクロリソグラフィ用のウェハであって、可視波長域又はUV波長域の少なくとも1つの測定波長(λM)の測定放射線(9)に関する該ウェハ(3)の表面(11)の反射率(R)を低下させる反射防止コーティング(13)及び/又は表面構造(15)が前記表面(11)に設けられることを特徴とするマイクロリソグラフィ用のウェハ。
- マイクロリソグラフィ用の、特にEUVリソグラフィ用のマスクブランク(2)であって、可視波長域又はUV波長域の少なくとも1つの測定波長(λM)の測定放射線(9)に関する該マスクブランク(2)の表面(11)の反射率(R)を低下させる反射防止コーティング(13)及び/又は表面構造(15)が前記表面(11)に設けられることを特徴とするマイクロリソグラフィ用のマスクブランク。
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DE102017205212.0A DE102017205212A1 (de) | 2017-03-28 | 2017-03-28 | Verfahren zum Detektieren von Partikeln an der Oberfläche eines Objekts, Wafer und Maskenblank |
PCT/EP2018/056352 WO2018177747A1 (de) | 2017-03-28 | 2018-03-14 | Verfahren zum detektieren von partikeln an der oberfläche eines objekts, wafer und maskenblank |
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KR20190129990A (ko) | 2019-11-20 |
EP3602198C0 (de) | 2023-10-04 |
JP7300998B2 (ja) | 2023-06-30 |
US11555783B2 (en) | 2023-01-17 |
KR102563712B1 (ko) | 2023-08-07 |
DE102017205212A1 (de) | 2018-10-04 |
US20200026198A1 (en) | 2020-01-23 |
EP3602198A1 (de) | 2020-02-05 |
EP3602198B1 (de) | 2023-10-04 |
WO2018177747A1 (de) | 2018-10-04 |
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