CN102117850B - 微纳复合结构的太阳能电池及其制备方法 - Google Patents
微纳复合结构的太阳能电池及其制备方法 Download PDFInfo
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- CN102117850B CN102117850B CN201010543460A CN201010543460A CN102117850B CN 102117850 B CN102117850 B CN 102117850B CN 201010543460 A CN201010543460 A CN 201010543460A CN 201010543460 A CN201010543460 A CN 201010543460A CN 102117850 B CN102117850 B CN 102117850B
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- 238000004519 manufacturing process Methods 0.000 title claims abstract description 50
- 239000002114 nanocomposite Substances 0.000 title claims abstract description 31
- 229910021418 black silicon Inorganic materials 0.000 claims abstract description 87
- 238000009792 diffusion process Methods 0.000 claims abstract description 75
- 230000031700 light absorption Effects 0.000 claims abstract description 38
- 239000000758 substrate Substances 0.000 claims abstract description 34
- 238000002310 reflectometry Methods 0.000 claims abstract description 19
- 238000005260 corrosion Methods 0.000 claims abstract description 9
- 230000007797 corrosion Effects 0.000 claims abstract description 9
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 65
- 229910052710 silicon Inorganic materials 0.000 claims description 53
- 239000010703 silicon Substances 0.000 claims description 53
- 238000000034 method Methods 0.000 claims description 33
- 238000000708 deep reactive-ion etching Methods 0.000 claims description 28
- 238000005530 etching Methods 0.000 claims description 26
- 230000008569 process Effects 0.000 claims description 21
- 238000002360 preparation method Methods 0.000 claims description 19
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- 238000007254 oxidation reaction Methods 0.000 claims description 12
- 238000009413 insulation Methods 0.000 claims description 10
- 238000002161 passivation Methods 0.000 claims description 10
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 10
- 238000000151 deposition Methods 0.000 claims description 9
- 229910052751 metal Inorganic materials 0.000 claims description 9
- 239000002184 metal Substances 0.000 claims description 9
- 238000001259 photo etching Methods 0.000 claims description 8
- 230000008021 deposition Effects 0.000 claims description 6
- 238000005468 ion implantation Methods 0.000 claims description 6
- 238000001020 plasma etching Methods 0.000 claims description 6
- 238000004544 sputter deposition Methods 0.000 claims description 6
- 229910052581 Si3N4 Inorganic materials 0.000 claims description 5
- 239000000377 silicon dioxide Substances 0.000 claims description 5
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 claims description 5
- 239000000126 substance Substances 0.000 claims description 5
- 238000007788 roughening Methods 0.000 claims description 4
- 229910021417 amorphous silicon Inorganic materials 0.000 claims description 3
- 229910021421 monocrystalline silicon Inorganic materials 0.000 claims description 3
- 229910021420 polycrystalline silicon Inorganic materials 0.000 claims description 3
- 230000000087 stabilizing effect Effects 0.000 claims description 3
- 238000009740 moulding (composite fabrication) Methods 0.000 claims description 2
- 230000003667 anti-reflective effect Effects 0.000 claims 1
- 238000006243 chemical reaction Methods 0.000 abstract description 16
- 238000001228 spectrum Methods 0.000 abstract description 9
- 239000002210 silicon-based material Substances 0.000 abstract description 7
- 238000010521 absorption reaction Methods 0.000 abstract description 6
- 238000010586 diagram Methods 0.000 description 6
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- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 description 2
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 description 2
- 229910052782 aluminium Inorganic materials 0.000 description 2
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 2
- 229910052787 antimony Inorganic materials 0.000 description 2
- WATWJIUSRGPENY-UHFFFAOYSA-N antimony atom Chemical compound [Sb] WATWJIUSRGPENY-UHFFFAOYSA-N 0.000 description 2
- 229910052796 boron Inorganic materials 0.000 description 2
- 239000000969 carrier Substances 0.000 description 2
- 238000004140 cleaning Methods 0.000 description 2
- 239000007769 metal material Substances 0.000 description 2
- 229910052698 phosphorus Inorganic materials 0.000 description 2
- 239000011574 phosphorus Substances 0.000 description 2
- 239000011148 porous material Substances 0.000 description 2
- 238000010248 power generation Methods 0.000 description 2
- 235000012239 silicon dioxide Nutrition 0.000 description 2
- 229910052709 silver Inorganic materials 0.000 description 2
- 239000004332 silver Substances 0.000 description 2
- 238000012360 testing method Methods 0.000 description 2
- 230000009471 action Effects 0.000 description 1
- 229910052785 arsenic Inorganic materials 0.000 description 1
- RQNWIZPPADIBDY-UHFFFAOYSA-N arsenic atom Chemical compound [As] RQNWIZPPADIBDY-UHFFFAOYSA-N 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 230000005684 electric field Effects 0.000 description 1
- 238000010894 electron beam technology Methods 0.000 description 1
- 238000005286 illumination Methods 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 238000010884 ion-beam technique Methods 0.000 description 1
- 238000010329 laser etching Methods 0.000 description 1
- 238000012423 maintenance Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 239000002077 nanosphere Substances 0.000 description 1
- 230000035515 penetration Effects 0.000 description 1
- 229920002120 photoresistant polymer Polymers 0.000 description 1
- 229920006254 polymer film Polymers 0.000 description 1
- 229910021426 porous silicon Inorganic materials 0.000 description 1
- 239000002994 raw material Substances 0.000 description 1
- 230000004044 response Effects 0.000 description 1
- 238000005096 rolling process Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
Images
Classifications
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E10/00—Energy generation through renewable energy sources
- Y02E10/50—Photovoltaic [PV] energy
- Y02E10/547—Monocrystalline silicon PV cells
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
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- Photovoltaic Devices (AREA)
Abstract
Description
Claims (7)
Priority Applications (1)
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CN201010543460A CN102117850B (zh) | 2010-11-12 | 2010-11-12 | 微纳复合结构的太阳能电池及其制备方法 |
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CN201010543460A CN102117850B (zh) | 2010-11-12 | 2010-11-12 | 微纳复合结构的太阳能电池及其制备方法 |
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CN102117850A CN102117850A (zh) | 2011-07-06 |
CN102117850B true CN102117850B (zh) | 2012-09-19 |
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CN201010543460A Expired - Fee Related CN102117850B (zh) | 2010-11-12 | 2010-11-12 | 微纳复合结构的太阳能电池及其制备方法 |
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Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
TWI623109B (zh) * | 2014-12-31 | 2018-05-01 | 具有低光澤率與低反射率結晶矽太陽能矽晶片 | |
WO2018177747A1 (de) * | 2017-03-28 | 2018-10-04 | Carl Zeiss Smt Gmbh | Verfahren zum detektieren von partikeln an der oberfläche eines objekts, wafer und maskenblank |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN106449803A (zh) * | 2016-12-16 | 2017-02-22 | 浙江晶科能源有限公司 | 一种硅片正面电极的制作方法 |
CN108321243B (zh) * | 2018-03-20 | 2020-07-07 | 中国科学院微电子研究所 | 黑硅纳米pin光电探测器结构及其制备方法 |
CN110323285B (zh) * | 2019-04-30 | 2020-12-25 | 山东大学 | 一种基于微纳复合结构和涂层的多功能薄膜及其制备方法与应用 |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN101734611A (zh) * | 2009-12-16 | 2010-06-16 | 北京大学 | 基于无掩膜深反应离子刻蚀制备黑硅的方法 |
CN101789466A (zh) * | 2010-02-10 | 2010-07-28 | 上海理工大学 | 太阳能电池制作方法 |
CN101789462A (zh) * | 2010-02-24 | 2010-07-28 | 中国科学院半导体研究所 | 一种广谱吸收的黑硅太阳能电池结构及其制作方法 |
Family Cites Families (2)
Publication number | Priority date | Publication date | Assignee | Title |
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US20100147383A1 (en) * | 2008-12-17 | 2010-06-17 | Carey James E | Method and apparatus for laser-processing a semiconductor photovoltaic apparatus |
US20100224229A1 (en) * | 2009-03-09 | 2010-09-09 | Pralle Martin U | Multi-junction semiconductor photovoltaic apparatus and methods |
-
2010
- 2010-11-12 CN CN201010543460A patent/CN102117850B/zh not_active Expired - Fee Related
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN101734611A (zh) * | 2009-12-16 | 2010-06-16 | 北京大学 | 基于无掩膜深反应离子刻蚀制备黑硅的方法 |
CN101789466A (zh) * | 2010-02-10 | 2010-07-28 | 上海理工大学 | 太阳能电池制作方法 |
CN101789462A (zh) * | 2010-02-24 | 2010-07-28 | 中国科学院半导体研究所 | 一种广谱吸收的黑硅太阳能电池结构及其制作方法 |
Non-Patent Citations (9)
Title |
---|
Hao-Chih Yuan et al..《Efficient black silicon solar cell with a density-graded nanoporous surface: Optical properties, performance limitations, and design rules》.《APPLIED PHYSICS LETTERS》.2009,第95卷(第12期), * |
J. S. Yoo et al..《Black silicon layer formation for application in solar cells》.《Solar Energy Materials & Solar Cells》.2006,第90卷(第18-19期), |
J. S. Yoo et al..《Black silicon layer formation for application in solar cells》.《Solar Energy Materials & * |
M. Halbwax et al..《Micro and nano-structuration of silicon by femtosecond laser: Application to silicon photovoltaic cells fabrication》.《Thin Solid Films》.2007,第516卷(第20期), * |
Sanjay K.Srivastava et al..《Excellent antireflection properties of vertical silicon nanowire arrays》.《Solar Energy Materials & Solar Cells》.2010,第94卷(第9期), |
Sanjay K.Srivastava et al..《Excellent antireflection properties of vertical silicon nanowire arrays》.《Solar Energy Materials & * |
Solar Cells》.2006,第90卷(第18-19期), * |
Solar Cells》.2010,第94卷(第9期), * |
姜晶 等.《革命性的新材料——黑硅》.《材料导报:综述篇》.2010,第24卷(第4期), * |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
TWI623109B (zh) * | 2014-12-31 | 2018-05-01 | 具有低光澤率與低反射率結晶矽太陽能矽晶片 | |
WO2018177747A1 (de) * | 2017-03-28 | 2018-10-04 | Carl Zeiss Smt Gmbh | Verfahren zum detektieren von partikeln an der oberfläche eines objekts, wafer und maskenblank |
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CN102117850A (zh) | 2011-07-06 |
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Effective date of registration: 20160214 Address after: 100871 Beijing, Haidian District, Peking University, red 3rd floor, 105 Patentee after: Science & Technology Development Deparatment, Peking University Address before: 100871 Zhongguancun the Summer Palace Road, Beijing, No. 5, No. Patentee before: Peking University |
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Effective date of registration: 20190708 Address after: 100871 No. 5 Summer Palace Road, Zhongguancun, Haidian District, Beijing Patentee after: Peking University Address before: 100871 Red Third Floor 105, Peking University Patentee before: Science & Technology Development Deparatment, Peking University |
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Granted publication date: 20120919 Termination date: 20191112 |