JP2020153724A5 - - Google Patents

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Publication number
JP2020153724A5
JP2020153724A5 JP2019050689A JP2019050689A JP2020153724A5 JP 2020153724 A5 JP2020153724 A5 JP 2020153724A5 JP 2019050689 A JP2019050689 A JP 2019050689A JP 2019050689 A JP2019050689 A JP 2019050689A JP 2020153724 A5 JP2020153724 A5 JP 2020153724A5
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JP
Japan
Prior art keywords
ray
side arm
disposed
ray analyzer
sample
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JP2019050689A
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English (en)
Japanese (ja)
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JP7165400B2 (ja
JP2020153724A (ja
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Priority to JP2019050689A priority Critical patent/JP7165400B2/ja
Priority claimed from JP2019050689A external-priority patent/JP7165400B2/ja
Priority to EP20156330.1A priority patent/EP3712901A1/en
Priority to CN202010190202.2A priority patent/CN111735828B/zh
Priority to US16/823,929 priority patent/US11215571B2/en
Publication of JP2020153724A publication Critical patent/JP2020153724A/ja
Publication of JP2020153724A5 publication Critical patent/JP2020153724A5/ja
Application granted granted Critical
Publication of JP7165400B2 publication Critical patent/JP7165400B2/ja
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JP2019050689A 2019-03-19 2019-03-19 Ｘ線分析装置 Active JP7165400B2 (ja)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP2019050689A JP7165400B2 (ja) 2019-03-19 2019-03-19 Ｘ線分析装置
EP20156330.1A EP3712901A1 (en) 2019-03-19 2020-02-10 X-ray analysis apparatus
CN202010190202.2A CN111735828B (zh) 2019-03-19 2020-03-18 X射线分析装置
US16/823,929 US11215571B2 (en) 2019-03-19 2020-03-19 X-ray analysis apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2019050689A JP7165400B2 (ja) 2019-03-19 2019-03-19 Ｘ線分析装置

Publications (3)

Publication Number Publication Date
JP2020153724A JP2020153724A (ja) 2020-09-24
JP2020153724A5 true JP2020153724A5 (enExample) 2021-05-20
JP7165400B2 JP7165400B2 (ja) 2022-11-04

Family

ID=69570515

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2019050689A Active JP7165400B2 (ja) 2019-03-19 2019-03-19 Ｘ線分析装置

Country Status (4)

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US (1) US11215571B2 (enExample)
EP (1) EP3712901A1 (enExample)
JP (1) JP7165400B2 (enExample)
CN (1) CN111735828B (enExample)

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Publication number Priority date Publication date Assignee Title
US10295485B2 (en) 2013-12-05 2019-05-21 Sigray, Inc. X-ray transmission spectrometer system
JP7195341B2 (ja) 2018-06-04 2022-12-23 シグレイ、インコーポレイテッド 波長分散型ｘ線分光計
JP7117452B2 (ja) 2018-07-26 2022-08-12 シグレイ、インコーポレイテッド 高輝度反射型ｘ線源
WO2020051221A2 (en) 2018-09-07 2020-03-12 Sigray, Inc. System and method for depth-selectable x-ray analysis
JP7182749B2 (ja) 2019-09-03 2022-12-02 シグレイ、インコーポレイテッド コンピュータ断層撮影蛍光ｘ線撮像のためのシステムおよび方法
US11175243B1 (en) 2020-02-06 2021-11-16 Sigray, Inc. X-ray dark-field in-line inspection for semiconductor samples
DE112021002841T5 (de) 2020-05-18 2023-03-23 Sigray, Inc. System und Verfahren für Röntgenabsorptionsspektroskopie unter Verwendung eines Kristallanalysators und mehrerer Detektorelemente
JP7640682B2 (ja) 2020-09-17 2025-03-05 シグレイ、インコーポレイテッド Ｘ線を用いた深さ分解計測および分析のためのシステムおよび方法
DE112021006348T5 (de) 2020-12-07 2023-09-21 Sigray, Inc. 3d-röntgenbildgebungssystem mit hohem durchsatz, das eine transmissionsröntgenquelle verwendet
US12480892B2 (en) 2020-12-07 2025-11-25 Sigray, Inc. High throughput 3D x-ray imaging system using a transmission x-ray source
JP7687689B2 (ja) 2022-02-14 2025-06-03 株式会社リガク Ｘ線回折装置及び計測方法
US12360067B2 (en) 2022-03-02 2025-07-15 Sigray, Inc. X-ray fluorescence system and x-ray source with electrically insulative target material
WO2023177981A1 (en) 2022-03-15 2023-09-21 Sigray, Inc. System and method for compact laminography utilizing microfocus transmission x-ray source and variable magnification x-ray detector
JP2025515085A (ja) 2022-05-02 2025-05-13 シグレイ、インコーポレイテッド Ｘ線シーケンシャルアレイ波長分散型分光計
WO2024173256A1 (en) 2023-02-16 2024-08-22 Sigray, Inc. X-ray detector system with at least two stacked flat bragg diffractors
US12181423B1 (en) 2023-09-07 2024-12-31 Sigray, Inc. Secondary image removal using high resolution x-ray transmission sources
US12429437B2 (en) 2023-11-07 2025-09-30 Sigray, Inc. System and method for x-ray absorption spectroscopy using spectral information from two orthogonal planes
US12429436B2 (en) 2024-01-08 2025-09-30 Sigray, Inc. X-ray analysis system with focused x-ray beam and non-x-ray microscope
WO2025155719A1 (en) 2024-01-18 2025-07-24 Sigray, Inc. Sequential array of x-ray imaging detectors
US12431256B2 (en) 2024-02-15 2025-09-30 Sigray, Inc. System and method for generating a focused x-ray beam

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DE2933047C2 (de) * 1979-08-16 1982-12-30 Stoe & Cie. GmbH, 6100 Darmstadt Verfahren und Vorrichtung der Röntgendiffraktion
JPH0584850U (ja) * 1992-04-15 1993-11-16 理学電機株式会社 Ｘ線回折装置のゴニオメータ光軸調整治具
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