JP2020149012A - 基板処理装置及び物品の製造方法 - Google Patents
基板処理装置及び物品の製造方法 Download PDFInfo
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Abstract
Description
図3を参照して、露光装置1の動作について説明する。S101では、露光装置1に投入された対象ロット(ロットに含まれる複数の基板)に対するレシピ(プロセス)が過去に処理したことがあるレシピであるかどうかを判定する。対象ロットに対するレシピが過去に処理したことがあるレシピである場合には、S102に移行し、対象ロットに対するレシピが過去に処理したことがあるレシピでない場合には、S103に移行する。
第1実施形態では、各制御情報に対して設定された各閾値を用いて、搬送手順を決定(変更)する場合について説明したが、これに限定されるものではない。例えば、機械学習によって得られた学習モデルを用いて、搬送手順を決定(変更)してもよい。
本発明の実施形態における物品の製造方法は、例えば、デバイス(半導体素子、磁気記憶媒体、液晶表示素子など)などの物品を製造するのに好適である。かかる製造方法は、露光装置1を用いて、基板にパターンを形成する工程と、パターンが形成された基板を処理する工程と、処理された基板から物品を製造する工程とを含む。また、かかる製造方法は、他の周知の工程(酸化、成膜、蒸着、ドーピング、平坦化、エッチング、レジスト剥離、ダイシング、ボンディング、パッケージングなど)を含みうる。本実施形態における物品の製造方法は、従来に比べて、物品の性能、品質、生産性及び生産コストの少なくとも1つにおいて有利である。
Claims (12)
- 基板を処理する基板処理装置であって、
前記基板を保持して移動するステージと、
前記ステージとの間で前記基板を保持して搬送する搬送部と、
前記基板を処理することで生成される前記ステージ及び前記搬送部に関する制御情報を蓄積する蓄積部と、
前記蓄積部に蓄積された制御情報に基づいて、前記ステージと前記搬送部との間で前記基板を搬送する際の搬送手順を決定する決定部と、
を有することを特徴とする基板処理装置。 - 前記ステージ及び前記搬送部に設定可能な複数の搬送手順を記憶する記憶部を更に有し、
前記決定部は、前記蓄積部に蓄積された制御情報に基づいて、前記記憶部に記憶された前記複数の搬送手順から1つの搬送手順を選択することで、前記基板を搬送する際の搬送手順を決定することを特徴とする請求項1に記載の基板処理装置。 - 前記複数の搬送手順は、第1搬送手順と、第2搬送手順とを含み、
前記第1搬送手順は、前記第2搬送手順よりも前記基板の搬送に関する生産性を優先する搬送手順であり、
前記第2搬送手順は、前記第1搬送手順よりも前記基板の搬送に関する安定性を優先する搬送手順であることを特徴とする請求項2に記載の基板処理装置。 - 前記第1搬送手順は、前記搬送部が第1位置で前記基板を前記ステージに渡した後に、前記第1位置から前記搬送部を退避させる手順と、前記第1位置から前記ステージを退避させる手順とを並行して行う手順であり、
前記第2搬送手順は、前記搬送部が前記第1位置で前記基板を前記ステージに渡した後に、前記第1位置から前記搬送部を退避させる手順と、前記第1位置から前記ステージを退避させる手順とを順次行う手順であることを特徴とする請求項3に記載の基板処理装置。 - 前記第1搬送手順は、前記搬送部が第1位置で前記ステージから前記基板を受け取る前に、前記第1位置に前記ステージを移動させる手順と、前記第1位置に前記搬送部を移動させる手順とを並行して行う手順であり、
前記第1搬送手順は、前記搬送部が前記第1位置で前記ステージから前記基板を受け取る前に、前記第1位置に前記ステージを移動させる手順と、前記第1位置に前記搬送部を移動させる手順とを順次行う手順であることを特徴とする請求項3に記載の基板処理装置。 - 前記制御情報は、前記ステージ及び前記搬送部のそれぞれが前記基板を保持したときの保持力、前記ステージ及び前記搬送部のそれぞれが前記基板を予め定められた保持力で保持するまでに要した時間、前記ステージと前記搬送部との間で前記基板を搬送する際に行われた前記基板のアライメントに関する計測値、及び、前記アライメントのエラーの回数のうちの少なくとも1つを含むことを特徴とする請求項1乃至5のうちいずれか1項に記載の基板処理装置。
- 前記決定部は、前記保持力、前記時間、前記計測値及び前記回数のそれぞれについて、前記保持力、前記時間、前記計測値及び前記回数のそれぞれに対して設定された閾値と比較を行い、当該比較の結果に基づいて、前記ステージと前記搬送部との間で前記基板を搬送する際の搬送手順を決定することを特徴とする請求項6に記載の基板処理装置。
- 前記閾値を設定するための設定画面をユーザに提供するユーザインタフェースを更に有することを特徴とする請求項7に記載の基板処理装置。
- 前記基板処理装置は、同一のロットに含まれる複数の基板を連続して処理し、
前記決定部は、前記複数の基板を連続して処理している間において、前記ステージと前記搬送部との間で前記基板を搬送する際の搬送手順を決定することを特徴とする請求項1乃至8のうちいずれか1項に記載の基板処理装置。 - 前記複数の基板を連続して処理している間に前記ステージと前記搬送部との間で前記基板を搬送する際の搬送手順が変更され、当該搬送手順の変更の前後において、前記ステージと前記搬送部との間で前記基板を搬送する際に行われた前記基板のアライメントに関する計測値、及び、前記アライメントのエラーの回数に変化がない場合、その旨を通知する通知部を更に有することを特徴とする請求項9に記載の基板処理装置。
- 前記ステージに保持された前記基板にマスクのパターンの像を投影する投影光学系を更に有することを特徴とする請求項1乃至10のうちいずれか1項に記載の基板処理装置。
- 請求項1乃至11のうちいずれか1項に記載の基板処理装置を用いてパターンを基板に形成する工程と、
前記工程で前記パターンが形成された前記基板を処理する工程と、
処理された前記基板から物品を製造する工程と、
を有することを特徴とする物品の製造方法。
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