JP2020053663A5 - - Google Patents

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Publication number
JP2020053663A5
JP2020053663A5 JP2018241424A JP2018241424A JP2020053663A5 JP 2020053663 A5 JP2020053663 A5 JP 2020053663A5 JP 2018241424 A JP2018241424 A JP 2018241424A JP 2018241424 A JP2018241424 A JP 2018241424A JP 2020053663 A5 JP2020053663 A5 JP 2020053663A5
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JP
Japan
Prior art keywords
electrostatic chuck
voltage
adsorbed
adsorbed body
separation
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JP2018241424A
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English (en)
Japanese (ja)
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JP2020053663A (ja
JP7224172B2 (ja
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Priority claimed from KR1020180113922A external-priority patent/KR102085446B1/ko
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Publication of JP2020053663A5 publication Critical patent/JP2020053663A5/ja
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Publication of JP7224172B2 publication Critical patent/JP7224172B2/ja
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JP2018241424A 2018-09-21 2018-12-25 静電チャックシステム、成膜装置、被吸着体分離方法、成膜方法及び電子デバイスの製造方法 Active JP7224172B2 (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
KR10-2018-0113922 2018-09-21
KR1020180113922A KR102085446B1 (ko) 2018-09-21 2018-09-21 정전척 시스템, 성막 장치, 피흡착체 분리방법, 성막 방법 및 전자 디바이스의 제조방법

Publications (3)

Publication Number Publication Date
JP2020053663A JP2020053663A (ja) 2020-04-02
JP2020053663A5 true JP2020053663A5 (https=) 2021-10-28
JP7224172B2 JP7224172B2 (ja) 2023-02-17

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ID=69803912

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2018241424A Active JP7224172B2 (ja) 2018-09-21 2018-12-25 静電チャックシステム、成膜装置、被吸着体分離方法、成膜方法及び電子デバイスの製造方法

Country Status (3)

Country Link
JP (1) JP7224172B2 (https=)
KR (1) KR102085446B1 (https=)
CN (1) CN110938796B (https=)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP7653272B2 (ja) * 2021-02-26 2025-03-28 キヤノントッキ株式会社 成膜装置
JP7390328B2 (ja) * 2021-03-30 2023-12-01 キヤノントッキ株式会社 制御装置、基板吸着方法及び電子デバイスの製造方法

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002026113A (ja) * 2000-07-10 2002-01-25 Toshiba Corp ホットプレート及び半導体装置の製造方法
WO2006049085A1 (ja) 2004-11-04 2006-05-11 Ulvac, Inc. 静電チャック装置
JP4522896B2 (ja) 2005-03-18 2010-08-11 株式会社アルバック 静電吸着装置を用いた吸着方法
JP2006299358A (ja) 2005-04-21 2006-11-02 Sumitomo Heavy Ind Ltd 真空成膜装置及び真空成膜方法
KR101289345B1 (ko) 2005-07-19 2013-07-29 주성엔지니어링(주) 섀도우 마스크와 이를 이용한 정렬장치
CN102089875B (zh) * 2008-07-08 2012-08-08 创意科技股份有限公司 双极型静电吸盘
JP4620766B2 (ja) * 2008-07-31 2011-01-26 東京エレクトロン株式会社 はがし装置及びはがし方法
JP2010040822A (ja) * 2008-08-06 2010-02-18 Tokyo Electron Ltd 静電吸着装置の除電処理方法、基板処理装置、及び記憶媒体
CN103168114B (zh) 2010-10-19 2015-09-23 夏普株式会社 蒸镀装置、蒸镀方法和有机电致发光显示装置的制造方法
JP6013740B2 (ja) * 2012-02-03 2016-10-25 東京エレクトロン株式会社 離脱制御方法及びプラズマ処理装置の制御装置
US10304713B2 (en) * 2013-09-20 2019-05-28 Applied Materials, Inc. Substrate carrier with integrated electrostatic chuck
KR102490641B1 (ko) * 2015-11-25 2023-01-20 삼성디스플레이 주식회사 증착 장치 및 증착 방법

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