JP2020040249A - 液体吐出ヘッドおよび液体吐出ヘッドの製造方法 - Google Patents
液体吐出ヘッドおよび液体吐出ヘッドの製造方法 Download PDFInfo
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- 239000007788 liquid Substances 0.000 title claims abstract description 41
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 13
- 238000000034 method Methods 0.000 title claims abstract description 13
- 239000000758 substrate Substances 0.000 claims abstract description 72
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 35
- 229910052710 silicon Inorganic materials 0.000 claims description 35
- 239000010703 silicon Substances 0.000 claims description 35
- 239000011347 resin Substances 0.000 claims description 7
- 229920005989 resin Polymers 0.000 claims description 7
- 238000000347 anisotropic wet etching Methods 0.000 claims description 2
- 239000000463 material Substances 0.000 description 15
- 239000004372 Polyvinyl alcohol Substances 0.000 description 6
- 238000010586 diagram Methods 0.000 description 6
- 229920002451 polyvinyl alcohol Polymers 0.000 description 6
- 239000007864 aqueous solution Substances 0.000 description 4
- WGTYBPLFGIVFAS-UHFFFAOYSA-M tetramethylammonium hydroxide Chemical compound [OH-].C[N+](C)(C)C WGTYBPLFGIVFAS-UHFFFAOYSA-M 0.000 description 4
- 238000010438 heat treatment Methods 0.000 description 3
- 238000001746 injection moulding Methods 0.000 description 3
- 238000000059 patterning Methods 0.000 description 3
- 239000002904 solvent Substances 0.000 description 3
- 230000000994 depressogenic effect Effects 0.000 description 2
- 238000007599 discharging Methods 0.000 description 2
- 238000006073 displacement reaction Methods 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 238000005459 micromachining Methods 0.000 description 2
- 230000001681 protective effect Effects 0.000 description 2
- 239000007787 solid Substances 0.000 description 2
- 239000000243 solution Substances 0.000 description 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 2
- 239000000853 adhesive Substances 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 230000001678 irradiating effect Effects 0.000 description 1
- 239000003960 organic solvent Substances 0.000 description 1
- 230000000149 penetrating effect Effects 0.000 description 1
- 238000000206 photolithography Methods 0.000 description 1
- 238000004528 spin coating Methods 0.000 description 1
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/14—Structure thereof only for on-demand ink jet heads
- B41J2/1433—Structure of nozzle plates
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1601—Production of bubble jet print heads
- B41J2/1603—Production of bubble jet print heads of the front shooter type
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/14—Structure thereof only for on-demand ink jet heads
- B41J2/14016—Structure of bubble jet print heads
- B41J2/14145—Structure of the manifold
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/162—Manufacturing of the nozzle plates
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/1623—Manufacturing processes bonding and adhesion
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/1626—Manufacturing processes etching
- B41J2/1629—Manufacturing processes etching wet etching
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/1631—Manufacturing processes photolithography
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/1632—Manufacturing processes machining
- B41J2/1634—Manufacturing processes machining laser machining
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/1637—Manufacturing processes molding
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/164—Manufacturing processes thin film formation
- B41J2/1645—Manufacturing processes thin film formation thin film formation by spincoating
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/14—Structure thereof only for on-demand ink jet heads
- B41J2002/14419—Manifold
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- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Particle Formation And Scattering Control In Inkjet Printers (AREA)
Abstract
Description
図4は、その他の実施形態の基板を示した図である。上記実施形態では、3つの供給口は、線対称に配置されていたが、図4のように、吐出口の列方向のシリコン基板1の中心線に対して、供給口9が非対称に設けられていてもよい。このように、供給口9をずれて配置しても、拡張部10を設けることで、流路17と供給口9とを連通させることができる。
9 供給口
10 拡張部
14 吐出口形成部材
15 吐出口
17 流路
19 圧力室
20 吐出口基板
Claims (10)
- 液体を吐出可能に設けられた吐出口と、前記吐出口と連通する圧力室とを有する吐出口形成部材と、前記圧力室に液体を供給可能に設けられた供給口を有するシリコン基板と、前記供給口と接続される流路を備え、樹脂で形成され、前記シリコン基板と接合された流路部材と、を備えた液体吐出ヘッドにおいて、
前記シリコン基板は、前記供給口の前記流路が接続される開口部に、前記開口部を形成する部材が周囲外方の少なくとも一方に拡張され、前記開口部から前記供給口が延在する方向に窪む拡張部を有することを特徴とする液体吐出ヘッド。 - 前記拡張部は、前記基板の前記流路部材との接合面に沿って延在する面を備えている請求項1に記載の液体吐出ヘッド。
- 前記拡張部の前記供給口の延在方向の高さをA、前記供給口の幅をBとしたとき、
0.9B≦A≦1.1B
が満たされる請求項1または請求項2に記載の液体吐出ヘッド。 - 複数の前記供給口と、複数の前記流路と、を備え、
前記拡張部は、前記基板の側面に近い前記供給口ほど、開口面積の大きな前記拡張部を備えている請求項1ないし請求項3のいずれか1項に記載の液体吐出ヘッド。 - 複数の前記吐出口が列を成して設けられており、
前記供給口は、前記吐出口の列に沿って設けられている請求項1ないし請求項4のいずれか1項に記載の液体吐出ヘッド。 - 前記吐出口の列の方向の前記基板の中心線に対して、前記供給口は非対称に設けられている請求項5に記載の液体吐出ヘッド。
- 前記シリコン基板に設けられた前記供給口のピッチよりも、前記流路部材に設けられた前記流路のピッチの方が広い請求項1ないし請求項6のいずれか1項に記載の液体吐出ヘッド。
- 液体を吐出可能に設けられた吐出口と、前記吐出口と連通する圧力室とを有する吐出口形成部材と、前記圧力室に液体を供給可能に設けられた供給口を有するシリコン基板と、前記供給口と接続される流路を備え、樹脂で形成され、前記シリコン基板と接合された流路部材と、を備えた液体吐出ヘッドの製造方法において、
前記シリコン基板の前記供給口の前記流路が接続される開口部に、前記開口部を形成する部材が周囲外方の少なくとも一方に拡張され、前記開口部から前記供給口が延在する方向に窪む拡張部を形成する拡張部形成工程を有することを特徴とする液体吐出ヘッドの製造方法。 - 前記拡張部はウェットの異方性エッチングで形成する請求項8に記載の液体吐出ヘッドの製造方法。
- 前記拡張部は前記供給口と一括して形成される請求項8または請求項9に記載の液体吐出ヘッドの製造方法。
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JP2018168181A JP7166851B2 (ja) | 2018-09-07 | 2018-09-07 | 液体吐出ヘッドおよび液体吐出ヘッドの製造方法 |
US16/560,467 US11123987B2 (en) | 2018-09-07 | 2019-09-04 | Liquid ejection head and method of manufacturing liquid ejection head |
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JP2018168181A JP7166851B2 (ja) | 2018-09-07 | 2018-09-07 | 液体吐出ヘッドおよび液体吐出ヘッドの製造方法 |
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Citations (3)
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JP2012000978A (ja) * | 2010-05-19 | 2012-01-05 | Canon Inc | 液体吐出ヘッド |
JP2015212057A (ja) * | 2014-05-07 | 2015-11-26 | キヤノン株式会社 | インクジェット記録ヘッド |
JP2017213860A (ja) * | 2016-05-27 | 2017-12-07 | キヤノン株式会社 | 液体吐出ヘッドおよびその製造方法、並びに記録方法 |
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US6648454B1 (en) | 2002-10-30 | 2003-11-18 | Hewlett-Packard Development Company, L.P. | Slotted substrate and method of making |
JP4865309B2 (ja) | 2005-11-29 | 2012-02-01 | キヤノン株式会社 | インクジェット記録ヘッド用基板の製造方法 |
US8267503B2 (en) | 2006-10-16 | 2012-09-18 | Canon Kabushiki Kaisha | Ink jet recording head and manufacturing method therefor |
JP5031492B2 (ja) * | 2007-09-06 | 2012-09-19 | キヤノン株式会社 | インクジェットヘッド基板の製造方法 |
JP5031493B2 (ja) | 2007-09-06 | 2012-09-19 | キヤノン株式会社 | インクジェットヘッド用基板の製造方法 |
JP5393423B2 (ja) | 2009-12-10 | 2014-01-22 | キヤノン株式会社 | インク吐出ヘッド及びその製造方法 |
JP5578859B2 (ja) | 2010-01-14 | 2014-08-27 | キヤノン株式会社 | 液体吐出ヘッド及び液体吐出ヘッドの製造方法 |
JP6202869B2 (ja) | 2013-04-17 | 2017-09-27 | キヤノン株式会社 | 液体吐出ヘッド |
JP6312507B2 (ja) * | 2013-05-13 | 2018-04-18 | キヤノン株式会社 | 液体吐出装置および液体吐出ヘッド |
JP6192438B2 (ja) | 2013-08-28 | 2017-09-06 | キヤノン株式会社 | 液体吐出ヘッドおよび記録装置 |
JP2015080918A (ja) | 2013-10-23 | 2015-04-27 | キヤノン株式会社 | 液体吐出ヘッドおよび該液体吐出ヘッドの製造方法 |
JP6362406B2 (ja) * | 2014-05-14 | 2018-07-25 | キヤノン株式会社 | 記録ヘッド |
JP2016049735A (ja) * | 2014-09-01 | 2016-04-11 | キヤノン株式会社 | 液体吐出ヘッド及び液体吐出装置 |
JP6700977B2 (ja) * | 2016-05-27 | 2020-05-27 | キヤノン株式会社 | 構造体の製造方法 |
JP6800613B2 (ja) * | 2016-05-30 | 2020-12-16 | キヤノン株式会社 | 液体吐出装置および液体吐出ヘッド |
JP6602337B2 (ja) | 2017-05-09 | 2019-11-06 | キヤノン株式会社 | 液体吐出ヘッド |
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JP2012000978A (ja) * | 2010-05-19 | 2012-01-05 | Canon Inc | 液体吐出ヘッド |
JP2015212057A (ja) * | 2014-05-07 | 2015-11-26 | キヤノン株式会社 | インクジェット記録ヘッド |
JP2017213860A (ja) * | 2016-05-27 | 2017-12-07 | キヤノン株式会社 | 液体吐出ヘッドおよびその製造方法、並びに記録方法 |
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