JP2020027872A - 光デバイスウェーハの加工方法 - Google Patents
光デバイスウェーハの加工方法 Download PDFInfo
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- JP2020027872A JP2020027872A JP2018151810A JP2018151810A JP2020027872A JP 2020027872 A JP2020027872 A JP 2020027872A JP 2018151810 A JP2018151810 A JP 2018151810A JP 2018151810 A JP2018151810 A JP 2018151810A JP 2020027872 A JP2020027872 A JP 2020027872A
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- Prior art keywords
- substrate
- optical device
- polishing
- device wafer
- back surface
- Prior art date
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- 230000003287 optical effect Effects 0.000 title claims abstract description 119
- 238000003672 processing method Methods 0.000 title claims abstract description 6
- 238000005498 polishing Methods 0.000 claims abstract description 103
- 239000000758 substrate Substances 0.000 claims abstract description 95
- 238000005520 cutting process Methods 0.000 claims abstract description 87
- 238000000034 method Methods 0.000 claims abstract description 16
- 239000007788 liquid Substances 0.000 claims abstract description 12
- 229920002635 polyurethane Polymers 0.000 claims description 3
- 239000004814 polyurethane Substances 0.000 claims description 3
- 230000015572 biosynthetic process Effects 0.000 abstract description 9
- 238000000605 extraction Methods 0.000 abstract description 7
- 230000035699 permeability Effects 0.000 abstract 1
- 235000012431 wafers Nutrition 0.000 description 67
- 239000006061 abrasive grain Substances 0.000 description 13
- 230000001681 protective effect Effects 0.000 description 7
- 238000003384 imaging method Methods 0.000 description 6
- 238000010586 diagram Methods 0.000 description 4
- 230000002093 peripheral effect Effects 0.000 description 4
- 239000004065 semiconductor Substances 0.000 description 4
- 230000002238 attenuated effect Effects 0.000 description 3
- 230000001678 irradiating effect Effects 0.000 description 3
- 239000000463 material Substances 0.000 description 3
- 239000002245 particle Substances 0.000 description 3
- 229910052594 sapphire Inorganic materials 0.000 description 3
- 239000010980 sapphire Substances 0.000 description 3
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 3
- JMASRVWKEDWRBT-UHFFFAOYSA-N Gallium nitride Chemical compound [Ga]#N JMASRVWKEDWRBT-UHFFFAOYSA-N 0.000 description 2
- 229910003460 diamond Inorganic materials 0.000 description 2
- 239000010432 diamond Substances 0.000 description 2
- 238000000227 grinding Methods 0.000 description 2
- 229910052751 metal Inorganic materials 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 238000003825 pressing Methods 0.000 description 2
- 239000011347 resin Substances 0.000 description 2
- 229920005989 resin Polymers 0.000 description 2
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 description 2
- 229910052582 BN Inorganic materials 0.000 description 1
- PZNSFCLAULLKQX-UHFFFAOYSA-N Boron nitride Chemical compound N#B PZNSFCLAULLKQX-UHFFFAOYSA-N 0.000 description 1
- 238000010521 absorption reaction Methods 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 238000002109 crystal growth method Methods 0.000 description 1
- 230000003028 elevating effect Effects 0.000 description 1
- 238000003754 machining Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000007769 metal material Substances 0.000 description 1
- 238000002156 mixing Methods 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 238000007517 polishing process Methods 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
- 229920002803 thermoplastic polyurethane Polymers 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L21/6835—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using temporarily an auxiliary support
- H01L21/6836—Wafer tapes, e.g. grinding or dicing support tapes
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/36—Removing material
- B23K26/38—Removing material by boring or cutting
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B37/00—Lapping machines or devices; Accessories
- B24B37/11—Lapping tools
- B24B37/20—Lapping pads for working plane surfaces
- B24B37/24—Lapping pads for working plane surfaces characterised by the composition or properties of the pad materials
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/302—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting
- H01L21/304—Mechanical treatment, e.g. grinding, polishing, cutting
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
- H01L21/76—Making of isolation regions between components
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/77—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate
- H01L21/78—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L33/00—Semiconductor devices with at least one potential-jump barrier or surface barrier specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2221/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof covered by H01L21/00
- H01L2221/67—Apparatus for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components; Apparatus not specifically provided for elsewhere
- H01L2221/683—Apparatus for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L2221/68304—Apparatus for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components; Apparatus not specifically provided for elsewhere for supporting or gripping using temporarily an auxiliary support
- H01L2221/68354—Apparatus for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components; Apparatus not specifically provided for elsewhere for supporting or gripping using temporarily an auxiliary support used to support diced chips prior to mounting
Abstract
Description
11a 表面
11b 裏面
13 分割予定ライン(ストリート)
13a 改質層
13b クラック
15 光デバイス
17 切削溝
17a 角部
17b 底部
19 光デバイスウェーハ
19a 表面
21 保護部材
23 エキスパンドテープ
25 フレーム
27 フレームユニット
29 光デバイスチップ
30 切削装置
32 チャックテーブル
34 切削手段(切削ユニット)
34a スピンドルハウジング
34b 基台
34c 切り刃
34d マウントナット
36 切削ブレード
38 カメラ(撮像手段)
50 研磨装置
52 チャックテーブル
52a ポーラス板
52b 保持面
52c,52d 吸引路
54 研磨手段(研磨ユニット)
54a スピンドル
54b ホイールマウント
54c 支持プレート
54d 研磨パッド
56 研磨液供給路
56a 開口
58 研磨液
60 レーザー加工装置
62 チャックテーブル
64 レーザー加工ユニット
66 カメラ(撮像手段)
70 分割装置
72 ドラム
74 フレーム支持台
76 クランプ
78 フレーム保持ユニット
80 駆動手段(駆動ユニット)
82 ピストンロッド
84 エアシリンダ
L レーザービーム
Claims (2)
- 基板の表面に格子状に形成された分割予定ラインによって区画された複数の領域の各々に光デバイスが形成された光デバイスウェーハを該分割予定ラインに沿って分割する光デバイスウェーハの加工方法であって、
該基板の裏面における該分割予定ラインに対応する領域に切削ブレードで所定深さの切削溝を形成する切削溝形成工程と、
該基板の該裏面に研磨液を供給しながら、研磨パッドによって該基板の該裏面を研磨する研磨工程と、
該基板の該裏面側から該切削溝に沿って、該基板に対して透過性を有する波長のレーザービームの集光点を該基板の内部に位置付けて改質層を形成する改質層形成工程と、
該基板に外力を付与して該光デバイスウェーハを個々の光デバイスチップに分割する分割工程と、
を備え、
該研磨工程では、該基板の該裏面に対して該研磨パッドを所定の力で押すことにより該研磨パッドを該切削溝に食い込ませながら研磨することで、該切削溝における該基板の該裏面側の角部に傾斜面又は曲面を形成することを特徴とする光デバイスウェーハの加工方法。 - 該研磨パッドは、ショア硬度(タイプA)が50以上90以下であるポリウレタンによって構成されている軟質の研磨パッドであることを特徴とする、請求項1記載の光デバイスウェーハの加工方法。
Priority Applications (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2018151810A JP7098238B2 (ja) | 2018-08-10 | 2018-08-10 | 光デバイスウェーハの加工方法 |
CN201910653290.2A CN110828361B (zh) | 2018-08-10 | 2019-07-19 | 光器件晶片的加工方法 |
KR1020190093082A KR20200018271A (ko) | 2018-08-10 | 2019-07-31 | 광디바이스 웨이퍼의 가공 방법 |
TW108127729A TWI791121B (zh) | 2018-08-10 | 2019-08-05 | 光元件晶圓的加工方法 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2018151810A JP7098238B2 (ja) | 2018-08-10 | 2018-08-10 | 光デバイスウェーハの加工方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2020027872A true JP2020027872A (ja) | 2020-02-20 |
JP7098238B2 JP7098238B2 (ja) | 2022-07-11 |
Family
ID=69547632
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2018151810A Active JP7098238B2 (ja) | 2018-08-10 | 2018-08-10 | 光デバイスウェーハの加工方法 |
Country Status (4)
Country | Link |
---|---|
JP (1) | JP7098238B2 (ja) |
KR (1) | KR20200018271A (ja) |
CN (1) | CN110828361B (ja) |
TW (1) | TWI791121B (ja) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US11189530B2 (en) | 2019-04-19 | 2021-11-30 | Disco Corporation | Manufacturing method of chips |
WO2022138580A1 (ja) * | 2020-12-25 | 2022-06-30 | 浜松ホトニクス株式会社 | レーザ加工方法 |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN111755578B (zh) * | 2020-07-13 | 2021-11-02 | 福建晶安光电有限公司 | 一种衬底及其加工方法以及发光二极管及其制造方法 |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2012079800A (ja) * | 2010-09-30 | 2012-04-19 | Disco Abrasive Syst Ltd | 分割方法 |
JP2013258234A (ja) * | 2012-06-12 | 2013-12-26 | Disco Abrasive Syst Ltd | 光デバイスの加工方法 |
JP2016164908A (ja) * | 2015-03-06 | 2016-09-08 | 株式会社ディスコ | 光デバイスチップの製造方法 |
Family Cites Families (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP4398686B2 (ja) | 2003-09-11 | 2010-01-13 | 株式会社ディスコ | ウエーハの加工方法 |
US20060166608A1 (en) * | 2004-04-01 | 2006-07-27 | Chalmers Scott A | Spectral imaging of substrates |
JP4688456B2 (ja) * | 2004-09-10 | 2011-05-25 | 株式会社ディスコ | 化学的機械的研磨装置 |
US20060084271A1 (en) * | 2004-10-20 | 2006-04-20 | Yang Andy C | Systems, methods and slurries for chemical mechanical polishing |
JP2010182753A (ja) * | 2009-02-03 | 2010-08-19 | Disco Abrasive Syst Ltd | ウエーハの分割方法 |
JP5927129B2 (ja) * | 2013-01-31 | 2016-05-25 | 株式会社荏原製作所 | 研磨装置 |
JP6399961B2 (ja) * | 2015-04-06 | 2018-10-03 | 株式会社ディスコ | 光デバイスチップの製造方法 |
KR102628333B1 (ko) * | 2015-09-09 | 2024-01-22 | 가부시끼가이샤 레조낙 | 연마액, 연마액 세트 및 기체의 연마 방법 |
-
2018
- 2018-08-10 JP JP2018151810A patent/JP7098238B2/ja active Active
-
2019
- 2019-07-19 CN CN201910653290.2A patent/CN110828361B/zh active Active
- 2019-07-31 KR KR1020190093082A patent/KR20200018271A/ko unknown
- 2019-08-05 TW TW108127729A patent/TWI791121B/zh active
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2012079800A (ja) * | 2010-09-30 | 2012-04-19 | Disco Abrasive Syst Ltd | 分割方法 |
JP2013258234A (ja) * | 2012-06-12 | 2013-12-26 | Disco Abrasive Syst Ltd | 光デバイスの加工方法 |
JP2016164908A (ja) * | 2015-03-06 | 2016-09-08 | 株式会社ディスコ | 光デバイスチップの製造方法 |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US11189530B2 (en) | 2019-04-19 | 2021-11-30 | Disco Corporation | Manufacturing method of chips |
WO2022138580A1 (ja) * | 2020-12-25 | 2022-06-30 | 浜松ホトニクス株式会社 | レーザ加工方法 |
Also Published As
Publication number | Publication date |
---|---|
TW202010004A (zh) | 2020-03-01 |
CN110828361B (zh) | 2024-02-20 |
CN110828361A (zh) | 2020-02-21 |
KR20200018271A (ko) | 2020-02-19 |
JP7098238B2 (ja) | 2022-07-11 |
TWI791121B (zh) | 2023-02-01 |
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