JP2020017569A - エッチング方法及びエッチング装置 - Google Patents
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Abstract
Description
図1は、一実施形態に係るエッチング装置10の概略の一例を示す断面図である。エッチング装置10は、例えば図1に示すように、チャンバ12を備える。チャンバ12は、被処理体の一例であるウエハWを収容するための処理空間Sを提供する。チャンバ12は、側壁12a、底部12b、および天部12cを有する。側壁12aは、Z軸を軸線とする略円筒形状を有する。Z軸は、例えば、後述する載置台の中心を鉛直方向に通る。
図6は、一実施形態におけるウエハWの構造の一例を示す断面図である。図6に示すように、ウエハWは、基板201上に形成された処理対象膜202と、処理対象膜202上に形成された複数の凸部203aからなるマンドレル層203とを有する。また、ウエハWは、複数の凸部203aの間において露出する処理対象膜202及び各凸部203aを覆うスペーサ膜205を有する。
図7は、一実施形態に係るエッチング方法の処理の流れの一例を示すフローチャートである。図8A及び図8Bは、一実施形態に係るエッチング方法の処理の流れの一例を説明するための図である。
以上、一実施形態に係るエッチング方法及びエッチング装置について説明したが、開示技術はこれに限定されるものではない。以下では、他の実施形態について説明する。
12 チャンバ
20 載置台
30 排気装置
32 マイクロ波発生器
201 基板
202 処理対象膜
203 マンドレル層
203a 凸部
205 スペーサ膜
206 ライナー膜
FCG1、FCG2 流量制御ユニット群
GSG1、GSG2 ガスソース群
Claims (6)
- 処理対象膜と、前記処理対象膜上に形成された複数の凸部を有する層と、前記複数の凸部の間において露出する前記処理対象膜及び各前記凸部を覆う第1の膜とを有する被処理体に対して、第2の膜を成膜する成膜工程と、
前記第2の膜を前記第1の膜のうち各前記凸部の側面を覆う部分に残存させた状態で前記第2の膜をエッチングする第1のエッチング工程と、
前記第2の膜を前記第1の膜のうち各前記凸部の側面を覆う部分に残存させた状態で前記第1の膜をエッチングすることで、各前記凸部の頂部及び前記複数の凸部間の前記処理対象膜を露出させる第2のエッチング工程と、
を含むことを特徴とするエッチング方法。 - 前記第2のエッチング工程は、
前記第1の膜のうち各前記凸部の側面を覆う部分において残存する前記第2の膜の高さが各前記凸部の高さ以上となるように、前記第1の膜をエッチングすることを特徴とする請求項1に記載のエッチング方法。 - 前記第2の膜がエッチングされた後に前記第1の膜のうち各前記凸部の頂部を覆う部分の膜厚がA1であり、前記第2の膜がエッチングされた後に前記第1の膜のうち各前記凸部の側面を覆う部分において残存する前記第2の膜の、前記第1の膜の当該部分に沿う仮想面における膜厚がB1であるとすると、
前記第2のエッチング工程において、前記第2の膜に対する前記第1の膜の選択比は、A1/B1以上であることを特徴とする請求項1又は2に記載のエッチング方法。 - 前記第1の膜がエッチングされた後に露出した各前記凸部、及び残存する前記第2の膜を選択的に除去する除去工程と、
残存する前記第1の膜をマスクとして前記処理対象膜をエッチングする第3のエッチング工程と、
をさらに含むことを特徴とする請求項1〜3のいずれか一つに記載のエッチング方法。 - 前記第1の膜がエッチングされた後に露出した各前記凸部、並びに、残存する前記第1の膜及び前記第2の膜をマスクとして前記処理対象膜をエッチングする第4のエッチング工程をさらに含むことを特徴とする請求項1〜3のいずれか一つに記載のエッチング方法。
- 処理対象膜と、前記処理対象膜上に形成された複数の凸部を有する層と、前記複数の凸部の間において露出する前記処理対象膜及び各前記凸部を覆う第1の膜とを有する被処理体が搬入されるチャンバと、
前記チャンバ内を減圧するための排気部と、
前記チャンバ内に処理ガスを供給するためのガス供給部と、
前記被処理体に対して、第2の膜を成膜する成膜工程と、前記第2の膜を前記第1の膜のうち各前記凸部の側面を覆う部分に残存させた状態で前記第2の膜をエッチングする第1のエッチング工程と、前記第2の膜を前記第1の膜のうち各前記凸部の側面を覆う部分に残存させた状態で前記第1の膜をエッチングすることで、各前記凸部の頂部及び前記複数の凸部間の前記処理対象膜を露出させる第2のエッチング工程と、を実行する制御部と、
を有することを特徴とするエッチング装置。
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Application Number | Priority Date | Filing Date | Title |
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JP2018137841A JP2020017569A (ja) | 2018-07-23 | 2018-07-23 | エッチング方法及びエッチング装置 |
US16/979,063 US11462407B2 (en) | 2018-07-23 | 2019-07-09 | Etching method and etching apparatus |
KR1020207025089A KR20210033442A (ko) | 2018-07-23 | 2019-07-09 | 에칭 방법 및 에칭 장치 |
CN201980017815.1A CN111819665A (zh) | 2018-07-23 | 2019-07-09 | 蚀刻方法和蚀刻装置 |
PCT/JP2019/027078 WO2020022045A1 (ja) | 2018-07-23 | 2019-07-09 | エッチング方法及びエッチング装置 |
TW108125539A TW202015115A (zh) | 2018-07-23 | 2019-07-19 | 蝕刻方法及蝕刻裝置 |
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JP2018137841A JP2020017569A (ja) | 2018-07-23 | 2018-07-23 | エッチング方法及びエッチング装置 |
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JP (1) | JP2020017569A (ja) |
KR (1) | KR20210033442A (ja) |
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JP2009130035A (ja) * | 2007-11-21 | 2009-06-11 | Toshiba Corp | 半導体装置の製造方法 |
JP2009152243A (ja) * | 2007-12-18 | 2009-07-09 | Toshiba Corp | 半導体装置の製造方法 |
WO2010134176A1 (ja) * | 2009-05-20 | 2010-11-25 | 株式会社 東芝 | 凹凸パターン形成方法 |
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KR20030018134A (ko) * | 2001-08-27 | 2003-03-06 | 한국전자통신연구원 | 조성과 도핑 농도의 제어를 위한 반도체 소자의 절연막형성 방법 |
JP5236983B2 (ja) | 2007-09-28 | 2013-07-17 | 東京エレクトロン株式会社 | 半導体装置の製造方法、半導体装置の製造装置、制御プログラム及びプログラム記憶媒体 |
JP2012178378A (ja) | 2011-02-25 | 2012-09-13 | Tokyo Electron Ltd | 半導体装置の製造方法 |
US9218983B2 (en) * | 2011-07-13 | 2015-12-22 | Tokyo Electron Limited | Etching method and device |
US8431461B1 (en) * | 2011-12-16 | 2013-04-30 | Lam Research Corporation | Silicon nitride dry trim without top pulldown |
US9269590B2 (en) * | 2014-04-07 | 2016-02-23 | Applied Materials, Inc. | Spacer formation |
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2018
- 2018-07-23 JP JP2018137841A patent/JP2020017569A/ja active Pending
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2019
- 2019-07-09 KR KR1020207025089A patent/KR20210033442A/ko not_active Application Discontinuation
- 2019-07-09 CN CN201980017815.1A patent/CN111819665A/zh active Pending
- 2019-07-09 WO PCT/JP2019/027078 patent/WO2020022045A1/ja active Application Filing
- 2019-07-09 US US16/979,063 patent/US11462407B2/en active Active
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JP2009130035A (ja) * | 2007-11-21 | 2009-06-11 | Toshiba Corp | 半導体装置の製造方法 |
JP2009152243A (ja) * | 2007-12-18 | 2009-07-09 | Toshiba Corp | 半導体装置の製造方法 |
WO2010134176A1 (ja) * | 2009-05-20 | 2010-11-25 | 株式会社 東芝 | 凹凸パターン形成方法 |
JP2012054343A (ja) * | 2010-08-31 | 2012-03-15 | Tokyo Electron Ltd | 微細パターンの形成方法 |
JP2014045077A (ja) * | 2012-08-27 | 2014-03-13 | Tokyo Electron Ltd | プラズマエッチング方法及びプラズマエッチング装置 |
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US20210057220A1 (en) | 2021-02-25 |
CN111819665A (zh) | 2020-10-23 |
TW202015115A (zh) | 2020-04-16 |
US11462407B2 (en) | 2022-10-04 |
KR20210033442A (ko) | 2021-03-26 |
WO2020022045A1 (ja) | 2020-01-30 |
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