JP2019518981A5 - - Google Patents
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- Publication number
- JP2019518981A5 JP2019518981A5 JP2018554768A JP2018554768A JP2019518981A5 JP 2019518981 A5 JP2019518981 A5 JP 2019518981A5 JP 2018554768 A JP2018554768 A JP 2018554768A JP 2018554768 A JP2018554768 A JP 2018554768A JP 2019518981 A5 JP2019518981 A5 JP 2019518981A5
- Authority
- JP
- Japan
- Prior art keywords
- dry film
- coating
- applying
- substrate
- heat
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000011248 coating agent Substances 0.000 claims 2
- 238000000576 coating method Methods 0.000 claims 2
- 238000010438 heat treatment Methods 0.000 claims 1
- 239000000758 substrate Substances 0.000 claims 1
Claims (1)
- 再分布層を形成する方法において：
ａ．基板を提供するステップと、
ｂ．熱及び圧力を用いて請求項２０に記載の光像形成性ドライフィルムを塗布するステップと、
ｃ．前記ドライフィルムを化学線に像様暴露するステップと、
ｄ．前記ドライフィルムのカバーシートを除去するステップと、
ｅ．前記コーティングの未露光領域を除去するステップと、
ｆ．選択的に、残りのコーティングを加熱するステップと、
を具えることを特徴とする方法。
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US201662335115P | 2016-05-12 | 2016-05-12 | |
| US62/335,115 | 2016-05-12 | ||
| PCT/US2017/031918 WO2017196953A1 (en) | 2016-05-12 | 2017-05-10 | Polysulfonamide redistribution compositions and methods of their use |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2019518981A JP2019518981A (ja) | 2019-07-04 |
| JP2019518981A5 true JP2019518981A5 (ja) | 2020-06-18 |
Family
ID=60267753
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2018554768A Pending JP2019518981A (ja) | 2016-05-12 | 2017-05-10 | ポリスルホンアミド再分布組成物及びその使用方法 |
Country Status (7)
| Country | Link |
|---|---|
| US (1) | US10509316B2 (ja) |
| JP (1) | JP2019518981A (ja) |
| KR (1) | KR102328686B1 (ja) |
| CN (1) | CN109312158B (ja) |
| DE (1) | DE112017002428T5 (ja) |
| SG (1) | SG11201810202UA (ja) |
| WO (1) | WO2017196953A1 (ja) |
Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP3360915A4 (en) | 2015-10-08 | 2019-05-15 | Nippon Kayaku Kabushiki Kaisha | NOVEL POLYSULFONE AMIDE COMPOUND AND RESIN COMPOSITION CONTAINING SAME |
| CN115551923A (zh) * | 2020-05-19 | 2022-12-30 | 崔国英 | 聚磺酰胺聚合物、含有聚磺酰胺聚合物的正型光敏性组合物及其应用 |
| WO2021232248A1 (zh) * | 2020-05-19 | 2021-11-25 | 崔国英 | 聚磺酰胺聚合物、含有聚磺酰胺聚合物的负型光敏性组合物及其应用 |
| US20220137509A1 (en) * | 2020-10-31 | 2022-05-05 | Rohm And Haas Electronic Materials Llc | Photoresist compositions and pattern formation methods |
| CN112920408B (zh) * | 2021-02-26 | 2022-08-02 | 广东工业大学 | 一种聚磺酰胺聚合物及其制备方法 |
Family Cites Families (18)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB1335095A (en) * | 1971-01-14 | 1973-10-24 | Kodak Ltd | Polycondensation copolymers |
| US4107155A (en) * | 1977-06-29 | 1978-08-15 | Eastman Kodak Company | Polysulfonamides |
| US4865950A (en) * | 1988-01-21 | 1989-09-12 | Eastman Kodak Co. | Laminate for the formation of beam leads for IC chip bonding featuring improved positive-working resist |
| US4968586A (en) * | 1988-12-23 | 1990-11-06 | Eastman Kodak Company | Photoresist compositions containing cobalt (III) compound and redox transfer ligand |
| US5656412A (en) * | 1995-03-07 | 1997-08-12 | Lucent Technologies Inc. | Energy-sensitive resist material and a process for device fabrication using an energy-sensitive resist material |
| JP2000331713A (ja) * | 1999-05-21 | 2000-11-30 | Hitachi Chem Co Ltd | 高分子固体電解質の製造法、高分子固体電解質及びこれを用いた電気化学的デバイス |
| JP2003241375A (ja) * | 2002-02-18 | 2003-08-27 | Toray Ind Inc | 感光性耐熱性樹脂前駆体組成物 |
| US6949325B2 (en) * | 2003-09-16 | 2005-09-27 | International Business Machines Corporation | Negative resist composition with fluorosulfonamide-containing polymer |
| JP4167160B2 (ja) | 2003-09-29 | 2008-10-15 | 富士フイルム株式会社 | 平版印刷版原版 |
| JP5035960B2 (ja) * | 2004-12-02 | 2012-09-26 | 学校法人日本大学 | ポリスルホンアミド誘導体とその使用 |
| JP5061703B2 (ja) | 2007-04-25 | 2012-10-31 | 東レ株式会社 | 感光性樹脂組成物 |
| JP6016918B2 (ja) * | 2012-06-28 | 2016-10-26 | 富士フイルム株式会社 | 感光性樹脂組成物、硬化物の製造方法、樹脂パターン製造方法、硬化膜、液晶表示装置、有機ｅｌ表示装置、並びに、タッチパネル表示装置 |
| US9223214B2 (en) * | 2012-11-19 | 2015-12-29 | The Texas A&M University System | Self-assembled structures, method of manufacture thereof and articles comprising the same |
| JP6123302B2 (ja) * | 2013-01-15 | 2017-05-10 | 住友ベークライト株式会社 | 化学増幅型のネガ型フォトレジスト用樹脂組成物、硬化物および電子装置 |
| JP6518767B2 (ja) * | 2015-07-31 | 2019-05-22 | 富士フイルム株式会社 | 平版印刷版原版及び製版方法 |
| JP6396601B2 (ja) * | 2015-09-28 | 2018-09-26 | 富士フイルム株式会社 | ネガ型感光性樹脂組成物、ネガ型平版印刷版原版、及び、平版印刷版の作製方法 |
| EP3360915A4 (en) * | 2015-10-08 | 2019-05-15 | Nippon Kayaku Kabushiki Kaisha | NOVEL POLYSULFONE AMIDE COMPOUND AND RESIN COMPOSITION CONTAINING SAME |
| JP2017185462A (ja) * | 2016-04-07 | 2017-10-12 | 富士フイルム株式会社 | ガス分離膜、ガス分離モジュール、ガス分離装置、及びガス分離方法 |
-
2017
- 2017-05-10 JP JP2018554768A patent/JP2019518981A/ja active Pending
- 2017-05-10 WO PCT/US2017/031918 patent/WO2017196953A1/en active Application Filing
- 2017-05-10 CN CN201780028345.XA patent/CN109312158B/zh active Active
- 2017-05-10 SG SG11201810202UA patent/SG11201810202UA/en unknown
- 2017-05-10 US US15/591,399 patent/US10509316B2/en active Active
- 2017-05-10 KR KR1020187035841A patent/KR102328686B1/ko active IP Right Grant
- 2017-05-10 DE DE112017002428.5T patent/DE112017002428T5/de active Pending
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