JP2019512045A5 - - Google Patents
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- Publication number
- JP2019512045A5 JP2019512045A5 JP2018515212A JP2018515212A JP2019512045A5 JP 2019512045 A5 JP2019512045 A5 JP 2019512045A5 JP 2018515212 A JP2018515212 A JP 2018515212A JP 2018515212 A JP2018515212 A JP 2018515212A JP 2019512045 A5 JP2019512045 A5 JP 2019512045A5
- Authority
- JP
- Japan
- Prior art keywords
- vacuum chamber
- permanent magnets
- opening
- magnetic
- processing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000012423 maintenance Methods 0.000 claims description 8
- 238000007789 sealing Methods 0.000 claims description 8
- 230000008021 deposition Effects 0.000 claims description 7
- 239000000463 material Substances 0.000 claims description 7
- 239000000758 substrate Substances 0.000 claims description 3
- 239000000696 magnetic material Substances 0.000 claims 3
- 230000008020 evaporation Effects 0.000 claims 2
- 238000001704 evaporation Methods 0.000 claims 2
- 230000005415 magnetization Effects 0.000 claims 2
- 238000000034 method Methods 0.000 claims 2
- 238000004519 manufacturing process Methods 0.000 claims 1
- 239000011368 organic material Substances 0.000 claims 1
- 238000004804 winding Methods 0.000 claims 1
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| PCT/EP2017/056372 WO2018166618A1 (en) | 2017-03-17 | 2017-03-17 | Apparatus for vacuum processing of a substrate, system for the manufacture of devices having organic materials, and method for sealing a processing vacuum chamber and a maintenance vacuum chamber from each other |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2019512045A JP2019512045A (ja) | 2019-05-09 |
| JP2019512045A5 true JP2019512045A5 (https=) | 2019-10-31 |
Family
ID=58347393
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2018515212A Pending JP2019512045A (ja) | 2017-03-17 | 2017-03-17 | 基板の真空処理のための装置、有機材料を有するデバイスの製造のためのシステム、及び処理真空チャンバと保守真空チャンバを互いから密封するための方法 |
Country Status (6)
| Country | Link |
|---|---|
| US (1) | US20200240008A1 (https=) |
| JP (1) | JP2019512045A (https=) |
| KR (1) | KR102069665B1 (https=) |
| CN (1) | CN109072412A (https=) |
| TW (1) | TW201839886A (https=) |
| WO (1) | WO2018166618A1 (https=) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US11127610B2 (en) * | 2019-01-04 | 2021-09-21 | Lam Research Corporation | Split chamber assembly |
| CN110016647B (zh) * | 2019-05-29 | 2020-09-08 | 昆山国显光电有限公司 | 蒸镀源清洁设备及蒸镀系统 |
| CN111676454B (zh) * | 2020-08-04 | 2023-09-05 | 光驰科技(上海)有限公司 | 一种节省真空镀膜室内空间的蒸发源配置结构及其设计方法 |
| US20220112594A1 (en) * | 2020-10-14 | 2022-04-14 | Applied Materials, Inc. | Device for sealing a vacuum chamber, vacuum processing system, and method of monitoring a load lock seal |
Family Cites Families (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TW201107639A (en) * | 2007-04-27 | 2011-03-01 | Edwards Japan Ltd | Plate rotating device, exhaust path opening degree changing device, exhausted device, transfer device, beam device, and gate valve |
| WO2009118888A1 (ja) * | 2008-03-28 | 2009-10-01 | キヤノンアネルバ株式会社 | 真空処理装置、当該真空処理装置を用いた画像表示装置の製造方法及び当該真空処理装置により製造される電子装置 |
| JP6328766B2 (ja) * | 2013-12-10 | 2018-05-23 | アプライド マテリアルズ インコーポレイテッドＡｐｐｌｉｅｄ Ｍａｔｅｒｉａｌｓ，Ｉｎｃｏｒｐｏｒａｔｅｄ | 有機材料用の蒸発源、真空チャンバの中で有機材料を堆積させるための堆積装置、及び有機材料を蒸発させるための方法 |
| DE102014008170A1 (de) * | 2014-06-10 | 2015-12-17 | Mecatronix Ag | Verschluss- oder Schleusenvorrichtung für eine Vakuumkammer |
-
2017
- 2017-03-17 KR KR1020187010582A patent/KR102069665B1/ko not_active Expired - Fee Related
- 2017-03-17 JP JP2018515212A patent/JP2019512045A/ja active Pending
- 2017-03-17 US US15/759,801 patent/US20200240008A1/en not_active Abandoned
- 2017-03-17 WO PCT/EP2017/056372 patent/WO2018166618A1/en not_active Ceased
- 2017-03-17 CN CN201780006507.XA patent/CN109072412A/zh active Pending
-
2018
- 2018-03-16 TW TW107109172A patent/TW201839886A/zh unknown
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