WO2009066633A1 - アークイオンプレーティング装置用の蒸発源及びアークイオンプレーティング装置 - Google Patents

アークイオンプレーティング装置用の蒸発源及びアークイオンプレーティング装置 Download PDF

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Publication number
WO2009066633A1
WO2009066633A1 PCT/JP2008/070861 JP2008070861W WO2009066633A1 WO 2009066633 A1 WO2009066633 A1 WO 2009066633A1 JP 2008070861 W JP2008070861 W JP 2008070861W WO 2009066633 A1 WO2009066633 A1 WO 2009066633A1
Authority
WO
WIPO (PCT)
Prior art keywords
ion plating
arc ion
plating device
cathode
magnetic field
Prior art date
Application number
PCT/JP2008/070861
Other languages
English (en)
French (fr)
Inventor
Shohei Nakakubo
Kenji Yamamoto
Hirofumi Fujii
Yoshinori Kurokawa
Original Assignee
Kabushiki Kaisha Kobe Seiko Sho
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP2008109148A external-priority patent/JP2009144236A/ja
Application filed by Kabushiki Kaisha Kobe Seiko Sho filed Critical Kabushiki Kaisha Kobe Seiko Sho
Publication of WO2009066633A1 publication Critical patent/WO2009066633A1/ja

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Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C23C14/32—Vacuum evaporation by explosion; by evaporation and subsequent ionisation of the vapours, e.g. ion-plating
    • C23C14/325—Electric arc evaporation
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C23C14/243—Crucibles for source material

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)

Abstract

　アークイオンプレーティング装置用の蒸発源において、陰極の利用効率を飛躍的に向上させ、かつ表面平滑性が高く、残留応力が小さい薄膜を形成する。 　陰極２の外周に配置されたリング状の磁石３と、陰極２の背面に配置されたソレノイドコイル４とを有する磁界形成手段５を備えたアークイオンプレーティング装置用の蒸発源１において、磁界形成手段５は、リング状の磁石３の極性の向きとソレノイドコイル４の極性の向きとが反対となるように構成され、陰極２を構成する物質を蒸発させる蒸発面の中心部から周縁に向かって延びた任意の線分上における磁束密度の最小値が４５Ｇａｕｓｓ（ガウス）以上、その平均値が８０Ｇａｕｓｓ以上である磁界を形成する。
PCT/JP2008/070861 2007-11-21 2008-11-17 アークイオンプレーティング装置用の蒸発源及びアークイオンプレーティング装置 WO2009066633A1 (ja)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
JP2007-301792 2007-11-21
JP2007301792 2007-11-21
JP2008109148A JP2009144236A (ja) 2007-11-21 2008-04-18 アークイオンプレーティング装置用の蒸発源及びアークイオンプレーティング装置
JP2008-109148 2008-04-18

Publications (1)

Publication Number Publication Date
WO2009066633A1 true WO2009066633A1 (ja) 2009-05-28

Family

ID=40667455

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2008/070861 WO2009066633A1 (ja) 2007-11-21 2008-11-17 アークイオンプレーティング装置用の蒸発源及びアークイオンプレーティング装置

Country Status (1)

Country Link
WO (1) WO2009066633A1 (ja)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2012115203A1 (ja) * 2011-02-23 2012-08-30 株式会社神戸製鋼所 アーク式蒸発源

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH11269634A (ja) * 1998-03-20 1999-10-05 Kobe Steel Ltd 真空アーク蒸発源
JP2000328236A (ja) * 1999-05-21 2000-11-28 Kobe Steel Ltd アーク蒸発源及び真空蒸着装置
JP2002212711A (ja) * 2001-01-16 2002-07-31 Kobe Steel Ltd 真空アーク蒸発源
JP2005307288A (ja) * 2004-04-22 2005-11-04 Nissin Electric Co Ltd 炭素系膜及び炭素系膜形成装置
JP2006104512A (ja) * 2004-10-04 2006-04-20 Nissin Electric Co Ltd 成膜方法及び成膜装置
JP2007056347A (ja) * 2005-08-26 2007-03-08 Nachi Fujikoshi Corp アーク式イオンプレーティング装置用蒸発源

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH11269634A (ja) * 1998-03-20 1999-10-05 Kobe Steel Ltd 真空アーク蒸発源
JP2000328236A (ja) * 1999-05-21 2000-11-28 Kobe Steel Ltd アーク蒸発源及び真空蒸着装置
JP2002212711A (ja) * 2001-01-16 2002-07-31 Kobe Steel Ltd 真空アーク蒸発源
JP2005307288A (ja) * 2004-04-22 2005-11-04 Nissin Electric Co Ltd 炭素系膜及び炭素系膜形成装置
JP2006104512A (ja) * 2004-10-04 2006-04-20 Nissin Electric Co Ltd 成膜方法及び成膜装置
JP2007056347A (ja) * 2005-08-26 2007-03-08 Nachi Fujikoshi Corp アーク式イオンプレーティング装置用蒸発源

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2012115203A1 (ja) * 2011-02-23 2012-08-30 株式会社神戸製鋼所 アーク式蒸発源
US10982318B2 (en) 2011-02-23 2021-04-20 Kobe Steel, Ltd. Arc evaporation source

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