JP2019503415A5 - - Google Patents
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- JP2019503415A5 JP2019503415A5 JP2018533664A JP2018533664A JP2019503415A5 JP 2019503415 A5 JP2019503415 A5 JP 2019503415A5 JP 2018533664 A JP2018533664 A JP 2018533664A JP 2018533664 A JP2018533664 A JP 2018533664A JP 2019503415 A5 JP2019503415 A5 JP 2019503415A5
- Authority
- JP
- Japan
- Prior art keywords
- alkyl
- formula
- maleic anhydride
- polymer
- group
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- OKKJLVBELUTLKV-UHFFFAOYSA-N Methanol Chemical compound OC OKKJLVBELUTLKV-UHFFFAOYSA-N 0.000 claims description 90
- 229920000642 polymer Polymers 0.000 claims description 74
- 229910052739 hydrogen Inorganic materials 0.000 claims description 67
- 239000001257 hydrogen Substances 0.000 claims description 67
- FPYJFEHAWHCUMM-UHFFFAOYSA-N maleic anhydride Chemical group O=C1OC(=O)C=C1 FPYJFEHAWHCUMM-UHFFFAOYSA-N 0.000 claims description 63
- 150000002431 hydrogen Chemical class 0.000 claims description 52
- 239000000203 mixture Substances 0.000 claims description 52
- 239000000178 monomer Substances 0.000 claims description 45
- 125000000217 alkyl group Chemical group 0.000 claims description 40
- SJYNFBVQFBRSIB-UHFFFAOYSA-N norbornadiene Chemical group C1=CC2C=CC1C2 SJYNFBVQFBRSIB-UHFFFAOYSA-N 0.000 claims description 38
- 125000006545 (C1-C9) alkyl group Chemical group 0.000 claims description 30
- 125000002496 methyl group Chemical group [H]C([H])([H])* 0.000 claims description 29
- 125000004169 (C1-C6) alkyl group Chemical group 0.000 claims description 24
- 125000001495 ethyl group Chemical group [H]C([H])([H])C([H])([H])* 0.000 claims description 21
- PEEHTFAAVSWFBL-UHFFFAOYSA-N Maleimide Chemical compound O=C1NC(=O)C=C1 PEEHTFAAVSWFBL-UHFFFAOYSA-N 0.000 claims description 20
- HIDBROSJWZYGSZ-UHFFFAOYSA-N 1-phenylpyrrole-2,5-dione Chemical compound O=C1C=CC(=O)N1C1=CC=CC=C1 HIDBROSJWZYGSZ-UHFFFAOYSA-N 0.000 claims description 19
- 229920001897 terpolymer Polymers 0.000 claims description 15
- 125000000041 C6-C10 aryl group Chemical group 0.000 claims description 14
- BQTPKSBXMONSJI-UHFFFAOYSA-N 1-cyclohexylpyrrole-2,5-dione Chemical compound O=C1C=CC(=O)N1C1CCCCC1 BQTPKSBXMONSJI-UHFFFAOYSA-N 0.000 claims description 12
- 125000004178 (C1-C4) alkyl group Chemical group 0.000 claims description 11
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 claims description 10
- 125000003118 aryl group Chemical group 0.000 claims description 10
- 229910052736 halogen Inorganic materials 0.000 claims description 10
- 150000002367 halogens Chemical class 0.000 claims description 10
- -1 perfluoro Chemical group 0.000 claims description 10
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 claims description 9
- 125000001181 organosilyl group Chemical group [SiH3]* 0.000 claims description 9
- 125000004400 (C1-C12) alkyl group Chemical group 0.000 claims description 8
- VCOXSVQMANZZDY-UHFFFAOYSA-N 5-[2-(2-methoxyethoxy)ethoxymethyl]bicyclo[2.2.1]hept-2-ene Chemical compound C1C2C(COCCOCCOC)CC1C=C2 VCOXSVQMANZZDY-UHFFFAOYSA-N 0.000 claims description 8
- 125000003545 alkoxy group Chemical group 0.000 claims description 8
- 125000001449 isopropyl group Chemical group [H]C([H])([H])C([H])(*)C([H])([H])[H] 0.000 claims description 8
- 125000004108 n-butyl group Chemical group [H]C([H])([H])C([H])([H])C([H])([H])C([H])([H])* 0.000 claims description 8
- 125000004123 n-propyl group Chemical group [H]C([H])([H])C([H])([H])C([H])([H])* 0.000 claims description 8
- 150000001875 compounds Chemical class 0.000 claims description 7
- 125000006273 (C1-C3) alkyl group Chemical group 0.000 claims description 6
- 125000001072 heteroaryl group Chemical group 0.000 claims description 6
- 125000004435 hydrogen atom Chemical group [H]* 0.000 claims description 6
- 125000001797 benzyl group Chemical group [H]C1=C([H])C([H])=C(C([H])=C1[H])C([H])([H])* 0.000 claims description 5
- 239000003431 cross linking reagent Substances 0.000 claims description 5
- 125000000113 cyclohexyl group Chemical group [H]C1([H])C([H])([H])C([H])([H])C([H])(*)C([H])([H])C1([H])[H] 0.000 claims description 5
- 125000001997 phenyl group Chemical group [H]C1=C([H])C([H])=C(*)C([H])=C1[H] 0.000 claims description 5
- 239000002904 solvent Substances 0.000 claims description 5
- 125000000008 (C1-C10) alkyl group Chemical group 0.000 claims description 4
- 125000004642 (C1-C12) alkoxy group Chemical group 0.000 claims description 4
- 125000006652 (C3-C12) cycloalkyl group Chemical group 0.000 claims description 4
- 125000006763 (C3-C9) cycloalkyl group Chemical group 0.000 claims description 4
- WXCILQOPRQRIRP-UHFFFAOYSA-N 1-(2-phenylethyl)bicyclo[2.2.1]hepta-2,5-diene Chemical compound C1(=CC=CC=C1)CCC12C=CC(C=C1)C2 WXCILQOPRQRIRP-UHFFFAOYSA-N 0.000 claims description 4
- YDGBGLKCFQULNS-UHFFFAOYSA-N 1-(2-phenylethyl)pyrrole-2,5-dione Chemical compound O=C1C=CC(=O)N1CCC1=CC=CC=C1 YDGBGLKCFQULNS-UHFFFAOYSA-N 0.000 claims description 4
- MKRBAPNEJMFMHU-UHFFFAOYSA-N 1-benzylpyrrole-2,5-dione Chemical compound O=C1C=CC(=O)N1CC1=CC=CC=C1 MKRBAPNEJMFMHU-UHFFFAOYSA-N 0.000 claims description 4
- JNPCNDJVEUEFBO-UHFFFAOYSA-N 1-butylpyrrole-2,5-dione Chemical compound CCCCN1C(=O)C=CC1=O JNPCNDJVEUEFBO-UHFFFAOYSA-N 0.000 claims description 4
- WBBLXRUVUDHWRI-UHFFFAOYSA-N 2-octylbicyclo[2.2.1]hepta-2,5-diene Chemical compound C(CCCCCCC)C=1C2C=CC(C1)C2 WBBLXRUVUDHWRI-UHFFFAOYSA-N 0.000 claims description 4
- 125000000094 2-phenylethyl group Chemical group [H]C1=C([H])C([H])=C(C([H])=C1[H])C([H])([H])C([H])([H])* 0.000 claims description 4
- QCFMSULWFHOYEH-UHFFFAOYSA-N 3-bicyclo[2.2.1]hepta-2,5-dienylmethanol Chemical compound C1C2C(CO)=CC1C=C2 QCFMSULWFHOYEH-UHFFFAOYSA-N 0.000 claims description 4
- RRPMRBRLPCXFBC-UHFFFAOYSA-N 3-butylbicyclo[2.2.1]hepta-2,5-diene Chemical compound C1C2C(CCCC)=CC1C=C2 RRPMRBRLPCXFBC-UHFFFAOYSA-N 0.000 claims description 4
- JEOYYXQQAYFMQR-UHFFFAOYSA-N 3-hexylbicyclo[2.2.1]hepta-2,5-diene Chemical compound C1C2C(CCCCCC)=CC1C=C2 JEOYYXQQAYFMQR-UHFFFAOYSA-N 0.000 claims description 4
- OGJJVYFQXFXJKU-UHFFFAOYSA-N 3-methylbicyclo[2.2.1]hepta-2,5-diene Chemical compound C1C2C(C)=CC1C=C2 OGJJVYFQXFXJKU-UHFFFAOYSA-N 0.000 claims description 4
- BEHBBKCBARHMJQ-UHFFFAOYSA-N 5-(2-phenylethyl)bicyclo[2.2.1]hept-2-ene Chemical compound C1C(C=C2)CC2C1CCC1=CC=CC=C1 BEHBBKCBARHMJQ-UHFFFAOYSA-N 0.000 claims description 4
- AAVXIUYWYBDQHZ-UHFFFAOYSA-N 5-[2-[2-(2-methoxyethoxy)ethoxy]ethoxymethyl]bicyclo[2.2.1]hept-2-ene Chemical compound C1C2C(COCCOCCOCCOC)CC1C=C2 AAVXIUYWYBDQHZ-UHFFFAOYSA-N 0.000 claims description 4
- UDOJACSDSIHAAT-UHFFFAOYSA-N 5-benzylbicyclo[2.2.1]hept-2-ene Chemical compound C1C(C=C2)CC2C1CC1=CC=CC=C1 UDOJACSDSIHAAT-UHFFFAOYSA-N 0.000 claims description 4
- VTWPBVSOSWNXAX-UHFFFAOYSA-N 5-decylbicyclo[2.2.1]hept-2-ene Chemical compound C1C2C(CCCCCCCCCC)CC1C=C2 VTWPBVSOSWNXAX-UHFFFAOYSA-N 0.000 claims description 4
- WMWDGZLDLRCDRG-UHFFFAOYSA-N 5-hexylbicyclo[2.2.1]hept-2-ene Chemical compound C1C2C(CCCCCC)CC1C=C2 WMWDGZLDLRCDRG-UHFFFAOYSA-N 0.000 claims description 4
- GOLQZWYZZWIBCA-UHFFFAOYSA-N 5-octylbicyclo[2.2.1]hept-2-ene Chemical compound C1C2C(CCCCCCCC)CC1C=C2 GOLQZWYZZWIBCA-UHFFFAOYSA-N 0.000 claims description 4
- FWBBSFIFLBYIPZ-UHFFFAOYSA-N C(C)C=1C(OC(C1)=O)=O.C(C)/C=1/C(=O)OC(C1)=O Chemical compound C(C)C=1C(OC(C1)=O)=O.C(C)/C=1/C(=O)OC(C1)=O FWBBSFIFLBYIPZ-UHFFFAOYSA-N 0.000 claims description 4
- VVSFXIWGCFLLNE-UHFFFAOYSA-N C(C)C=1C(OC(C1CC)=O)=O.C(C)/C=1/C(=O)OC(C1CC)=O Chemical compound C(C)C=1C(OC(C1CC)=O)=O.C(C)/C=1/C(=O)OC(C1CC)=O VVSFXIWGCFLLNE-UHFFFAOYSA-N 0.000 claims description 4
- PZWXTAVCHFHUSD-UHFFFAOYSA-N CC1C(NC(C1)=O)=O.CC1=CC(=O)NC1=O Chemical compound CC1C(NC(C1)=O)=O.CC1=CC(=O)NC1=O PZWXTAVCHFHUSD-UHFFFAOYSA-N 0.000 claims description 4
- KYLPQLWKHHJEAR-UHFFFAOYSA-N CC=1C(OC(C1)=O)=O.C/C=1/C(=O)OC(C1)=O Chemical compound CC=1C(OC(C1)=O)=O.C/C=1/C(=O)OC(C1)=O KYLPQLWKHHJEAR-UHFFFAOYSA-N 0.000 claims description 4
- LHBCABZGFKFGJD-UHFFFAOYSA-N CC=1C(OC(C1C(F)(F)F)=O)=O.C/C=1/C(=O)OC(C1C(F)(F)F)=O Chemical compound CC=1C(OC(C1C(F)(F)F)=O)=O.C/C=1/C(=O)OC(C1C(F)(F)F)=O LHBCABZGFKFGJD-UHFFFAOYSA-N 0.000 claims description 4
- WLWGMIVKTGHSKH-UHFFFAOYSA-N CC=1C(OC(C1C)=O)=O.C/C=1/C(=O)OC(C1C)=O Chemical compound CC=1C(OC(C1C)=O)=O.C/C=1/C(=O)OC(C1C)=O WLWGMIVKTGHSKH-UHFFFAOYSA-N 0.000 claims description 4
- MXUBCJXBVAVUJK-UHFFFAOYSA-N FC(C=1C(OC(C1)=O)=O)(F)F.FC(/C=1/C(=O)OC(C1)=O)(F)F Chemical compound FC(C=1C(OC(C1)=O)=O)(F)F.FC(/C=1/C(=O)OC(C1)=O)(F)F MXUBCJXBVAVUJK-UHFFFAOYSA-N 0.000 claims description 4
- RJFCRUYLEJTOIA-UHFFFAOYSA-N FC(C=1C(OC(C1C(F)(F)F)=O)=O)(F)F.FC(/C=1/C(=O)OC(C1C(F)(F)F)=O)(F)F Chemical compound FC(C=1C(OC(C1C(F)(F)F)=O)=O)(F)F.FC(/C=1/C(=O)OC(C1C(F)(F)F)=O)(F)F RJFCRUYLEJTOIA-UHFFFAOYSA-N 0.000 claims description 4
- 125000004423 acyloxy group Chemical group 0.000 claims description 4
- 125000004104 aryloxy group Chemical group 0.000 claims description 4
- 150000001602 bicycloalkyls Chemical group 0.000 claims description 4
- 239000011248 coating agent Substances 0.000 claims description 4
- 238000000576 coating method Methods 0.000 claims description 4
- 125000000000 cycloalkoxy group Chemical group 0.000 claims description 4
- 125000000582 cycloheptyl group Chemical group [H]C1([H])C([H])([H])C([H])([H])C([H])([H])C([H])(*)C([H])([H])C1([H])[H] 0.000 claims description 4
- 125000001511 cyclopentyl group Chemical group [H]C1([H])C([H])([H])C([H])([H])C([H])(*)C1([H])[H] 0.000 claims description 4
- 125000005553 heteroaryloxy group Chemical group 0.000 claims description 4
- 125000002887 hydroxy group Chemical group [H]O* 0.000 claims description 4
- SEEYREPSKCQBBF-UHFFFAOYSA-N n-methylmaleimide Chemical compound CN1C(=O)C=CC1=O SEEYREPSKCQBBF-UHFFFAOYSA-N 0.000 claims description 4
- OBRQPLUPQGLJLH-UHFFFAOYSA-N tert-butyl bicyclo[2.2.1]hepta-2,5-diene-3-carboxylate Chemical compound C1C2C(C(=O)OC(C)(C)C)=CC1C=C2 OBRQPLUPQGLJLH-UHFFFAOYSA-N 0.000 claims description 4
- WWQJGCNAASZVOR-UHFFFAOYSA-N trimethylsilyl bicyclo[2.2.1]hepta-2,5-diene-3-carboxylate Chemical compound C1C2C(C(=O)O[Si](C)(C)C)=CC1C=C2 WWQJGCNAASZVOR-UHFFFAOYSA-N 0.000 claims description 4
- SECXISVLQFMRJM-UHFFFAOYSA-N N-Methylpyrrolidone Chemical compound CN1CCCC1=O SECXISVLQFMRJM-UHFFFAOYSA-N 0.000 claims description 3
- JFNLZVQOOSMTJK-KNVOCYPGSA-N norbornene Chemical compound C1[C@@H]2CC[C@H]1C=C2 JFNLZVQOOSMTJK-KNVOCYPGSA-N 0.000 claims description 3
- LLHKCFNBLRBOGN-UHFFFAOYSA-N propylene glycol methyl ether acetate Chemical group COCC(C)OC(C)=O LLHKCFNBLRBOGN-UHFFFAOYSA-N 0.000 claims description 3
- KVMGTLWDHXMQCT-UHFFFAOYSA-N [N-]=[N+]=[N-].[N-]=[N+]=[N-].S(=O)(=O)=C1C(C=CC(C1)=O)=O Chemical group [N-]=[N+]=[N-].[N-]=[N+]=[N-].S(=O)(=O)=C1C(C=CC(C1)=O)=O KVMGTLWDHXMQCT-UHFFFAOYSA-N 0.000 claims description 2
- 239000000654 additive Substances 0.000 claims description 2
- 239000002318 adhesion promoter Substances 0.000 claims description 2
- 239000003513 alkali Substances 0.000 claims description 2
- 239000003963 antioxidant agent Substances 0.000 claims description 2
- 239000002585 base Substances 0.000 claims description 2
- 238000010438 heat treatment Methods 0.000 claims description 2
- 238000007142 ring opening reaction Methods 0.000 claims description 2
- 239000000758 substrate Substances 0.000 claims description 2
- 239000004094 surface-active agent Substances 0.000 claims description 2
- 229920006029 tetra-polymer Polymers 0.000 claims 3
- OFOBLEOULBTSOW-UHFFFAOYSA-N Propanedioic acid Natural products OC(=O)CC(O)=O OFOBLEOULBTSOW-UHFFFAOYSA-N 0.000 claims 1
- 125000000753 cycloalkyl group Chemical group 0.000 claims 1
- 239000011976 maleic acid Substances 0.000 claims 1
- VZCYOOQTPOCHFL-UPHRSURJSA-N maleic acid group Chemical group C(\C=C/C(=O)O)(=O)O VZCYOOQTPOCHFL-UPHRSURJSA-N 0.000 claims 1
- 125000005439 maleimidyl group Chemical group C1(C=CC(N1*)=O)=O 0.000 claims 1
- 125000003518 norbornenyl group Chemical group C12(C=CC(CC1)C2)* 0.000 claims 1
- VZCYOOQTPOCHFL-UHFFFAOYSA-N trans-butenedioic acid Natural products OC(=O)C=CC(O)=O VZCYOOQTPOCHFL-UHFFFAOYSA-N 0.000 claims 1
- 0 C*(*1)C1(C(CC1C23*)[C@@]2(*)[Te])C13O Chemical compound C*(*1)C1(C(CC1C23*)[C@@]2(*)[Te])C13O 0.000 description 5
- 238000004377 microelectronic Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 230000005693 optoelectronics Effects 0.000 description 1
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US201562273553P | 2015-12-31 | 2015-12-31 | |
| US62/273,553 | 2015-12-31 | ||
| PCT/US2016/069375 WO2017117483A1 (en) | 2015-12-31 | 2016-12-30 | Polymers derived from norbornadiene and maleic anhydride and use thereof |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2019503415A JP2019503415A (ja) | 2019-02-07 |
| JP2019503415A5 true JP2019503415A5 (https=) | 2020-02-20 |
| JP6726281B2 JP6726281B2 (ja) | 2020-07-22 |
Family
ID=57985011
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2018533664A Active JP6726281B2 (ja) | 2015-12-31 | 2016-12-30 | ノルボルナジエン及び無水マレイン酸由来の重合体並びにその利用 |
Country Status (6)
| Country | Link |
|---|---|
| US (2) | US9834627B2 (https=) |
| JP (1) | JP6726281B2 (https=) |
| KR (1) | KR101930045B1 (https=) |
| CN (1) | CN108473749B (https=) |
| TW (1) | TWI692674B (https=) |
| WO (1) | WO2017117483A1 (https=) |
Families Citing this family (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TWI692674B (zh) * | 2015-12-31 | 2020-05-01 | 日商住友電木股份有限公司 | 衍生自降莰二烯和馬來酸酐之聚合物及其用途 |
| EP3837266A1 (en) | 2018-08-17 | 2021-06-23 | Massachusetts Institute of Technology | Degradable polymers of a cyclic silyl ether and uses thereof |
| JP7322372B2 (ja) * | 2018-09-28 | 2023-08-08 | 住友ベークライト株式会社 | ポリマー、樹脂組成物、及び、樹脂膜 |
| CN114450318A (zh) * | 2019-09-26 | 2022-05-06 | 住友电木株式会社 | 聚合物、感光性树脂组合物、树脂膜和电子装置 |
| EP4058501A1 (en) | 2019-11-15 | 2022-09-21 | Massachusetts Institute of Technology | Functional oligomers and functional polymers including hydroxylated polymers and conjugates thereof and uses thereof |
| DE102020130523B4 (de) | 2019-12-31 | 2023-08-10 | Taiwan Semiconductor Manufacturing Co., Ltd. | Verfahren zur bildung einer fotolackstruktur |
| US12547075B2 (en) * | 2019-12-31 | 2026-02-10 | Taiwan Semiconductor Manufacturing Company, Ltd. | Method of forming photoresist pattern |
| CN117062852A (zh) | 2021-02-01 | 2023-11-14 | 麻省理工学院 | 可再加工的组合物 |
| US20240270898A1 (en) * | 2021-06-01 | 2024-08-15 | Massachusetts Institute Of Technology | Latent-fluoride containing polymers for triggered degradation |
Family Cites Families (23)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH02146045A (ja) * | 1988-02-17 | 1990-06-05 | Tosoh Corp | フォトレジスト組成物 |
| KR900700923A (ko) | 1988-02-17 | 1990-08-17 | 야마구찌 도시아끼 | 포토레지스트 조성물 |
| JP2638887B2 (ja) * | 1988-02-26 | 1997-08-06 | 東ソー株式会社 | 感光性組成物 |
| JP2961722B2 (ja) | 1991-12-11 | 1999-10-12 | ジェイエスアール株式会社 | 感放射線性樹脂組成物 |
| KR960009295B1 (ko) * | 1991-09-12 | 1996-07-18 | 미쓰이세끼유 가가꾸고오교오 가부시끼가이샤 | 환상올레핀 수지 조성물 |
| JPH0570639A (ja) * | 1991-09-12 | 1993-03-23 | Mitsui Petrochem Ind Ltd | 環状オレフイン樹脂組成物 |
| US6013413A (en) * | 1997-02-28 | 2000-01-11 | Cornell Research Foundation, Inc. | Alicyclic nortricyclene polymers and co-polymers |
| KR100254472B1 (ko) * | 1997-11-01 | 2000-05-01 | 김영환 | 신규한 말레이미드계 또는 지방족 환형 올레핀계 단량체와 이들 단량체들의 공중합체수지 및 이수지를 이용한 포토레지스트 |
| JP3262108B2 (ja) | 1998-09-09 | 2002-03-04 | 東レ株式会社 | ポジ型感光性樹脂組成物 |
| JP2002201226A (ja) | 2000-12-28 | 2002-07-19 | Jsr Corp | 共重合体およびそれを用いた感放射線性樹脂組成物 |
| JP3952756B2 (ja) | 2001-11-29 | 2007-08-01 | 日本ゼオン株式会社 | 感放射線性樹脂組成物及びその利用 |
| US7799883B2 (en) | 2005-02-22 | 2010-09-21 | Promerus Llc | Norbornene-type polymers, compositions thereof and lithographic process using such compositions |
| JP4684139B2 (ja) * | 2005-10-17 | 2011-05-18 | 信越化学工業株式会社 | レジスト保護膜材料及びパターン形成方法 |
| JP4666166B2 (ja) * | 2005-11-28 | 2011-04-06 | 信越化学工業株式会社 | レジスト下層膜材料及びパターン形成方法 |
| US7745104B2 (en) * | 2006-08-10 | 2010-06-29 | Shin-Etsu Chemical Co., Ltd. | Bottom resist layer composition and patterning process using the same |
| US8541523B2 (en) | 2010-04-05 | 2013-09-24 | Promerus, Llc | Norbornene-type polymers, compositions thereof and lithographic process using such compositions |
| JP5579553B2 (ja) | 2010-09-17 | 2014-08-27 | 信越化学工業株式会社 | レジスト下層膜材料、レジスト下層膜形成方法、パターン形成方法 |
| JP5728790B2 (ja) * | 2011-07-14 | 2015-06-03 | 住友ベークライト株式会社 | 自己現像層形成ポリマーおよびその組成物 |
| KR101572049B1 (ko) | 2012-09-25 | 2015-11-26 | 프로메러스, 엘엘씨 | 사이클로올레핀성 중합체를 함유하는 말레이미드 및 그의 용도 |
| WO2015038412A2 (en) | 2013-09-16 | 2015-03-19 | Promerus, Llc | Amine treated maleic anhydride polymers with pendent silyl group, compositions and applications thereof |
| WO2015038411A2 (en) * | 2013-09-16 | 2015-03-19 | Promerus, Llc | Amine treated maleic anhydride polymers, compositions and applications thereof |
| CN106068288B (zh) * | 2014-03-06 | 2018-05-01 | 住友电木株式会社 | 聚合物、光敏性树脂组合物和电子装置 |
| TWI692674B (zh) * | 2015-12-31 | 2020-05-01 | 日商住友電木股份有限公司 | 衍生自降莰二烯和馬來酸酐之聚合物及其用途 |
-
2016
- 2016-12-29 TW TW105143893A patent/TWI692674B/zh not_active IP Right Cessation
- 2016-12-30 JP JP2018533664A patent/JP6726281B2/ja active Active
- 2016-12-30 KR KR1020187018753A patent/KR101930045B1/ko active Active
- 2016-12-30 US US15/394,970 patent/US9834627B2/en active Active
- 2016-12-30 WO PCT/US2016/069375 patent/WO2017117483A1/en not_active Ceased
- 2016-12-30 CN CN201680076530.1A patent/CN108473749B/zh active Active
-
2017
- 2017-10-12 US US15/782,103 patent/US9944730B2/en active Active
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