JP2019192905A - 垂直型メモリ装置及びその製造方法 - Google Patents
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10B—ELECTRONIC MEMORY DEVICES
- H10B41/00—Electrically erasable-and-programmable ROM [EEPROM] devices comprising floating gates
- H10B41/50—Electrically erasable-and-programmable ROM [EEPROM] devices comprising floating gates characterised by the boundary region between the core region and the peripheral circuit region
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- H—ELECTRICITY
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- H10B—ELECTRONIC MEMORY DEVICES
- H10B41/00—Electrically erasable-and-programmable ROM [EEPROM] devices comprising floating gates
- H10B41/20—Electrically erasable-and-programmable ROM [EEPROM] devices comprising floating gates characterised by three-dimensional arrangements, e.g. with cells on different height levels
- H10B41/23—Electrically erasable-and-programmable ROM [EEPROM] devices comprising floating gates characterised by three-dimensional arrangements, e.g. with cells on different height levels with source and drain on different levels, e.g. with sloping channels
- H10B41/27—Electrically erasable-and-programmable ROM [EEPROM] devices comprising floating gates characterised by three-dimensional arrangements, e.g. with cells on different height levels with source and drain on different levels, e.g. with sloping channels the channels comprising vertical portions, e.g. U-shaped channels
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/52—Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames
- H01L23/535—Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames including internal interconnections, e.g. cross-under constructions
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10B—ELECTRONIC MEMORY DEVICES
- H10B41/00—Electrically erasable-and-programmable ROM [EEPROM] devices comprising floating gates
- H10B41/30—Electrically erasable-and-programmable ROM [EEPROM] devices comprising floating gates characterised by the memory core region
- H10B41/35—Electrically erasable-and-programmable ROM [EEPROM] devices comprising floating gates characterised by the memory core region with a cell select transistor, e.g. NAND
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- H10B—ELECTRONIC MEMORY DEVICES
- H10B41/00—Electrically erasable-and-programmable ROM [EEPROM] devices comprising floating gates
- H10B41/40—Electrically erasable-and-programmable ROM [EEPROM] devices comprising floating gates characterised by the peripheral circuit region
- H10B41/41—Electrically erasable-and-programmable ROM [EEPROM] devices comprising floating gates characterised by the peripheral circuit region of a memory region comprising a cell select transistor, e.g. NAND
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10B—ELECTRONIC MEMORY DEVICES
- H10B43/00—EEPROM devices comprising charge-trapping gate insulators
- H10B43/20—EEPROM devices comprising charge-trapping gate insulators characterised by three-dimensional arrangements, e.g. with cells on different height levels
- H10B43/23—EEPROM devices comprising charge-trapping gate insulators characterised by three-dimensional arrangements, e.g. with cells on different height levels with source and drain on different levels, e.g. with sloping channels
- H10B43/27—EEPROM devices comprising charge-trapping gate insulators characterised by three-dimensional arrangements, e.g. with cells on different height levels with source and drain on different levels, e.g. with sloping channels the channels comprising vertical portions, e.g. U-shaped channels
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10B—ELECTRONIC MEMORY DEVICES
- H10B43/00—EEPROM devices comprising charge-trapping gate insulators
- H10B43/30—EEPROM devices comprising charge-trapping gate insulators characterised by the memory core region
- H10B43/35—EEPROM devices comprising charge-trapping gate insulators characterised by the memory core region with cell select transistors, e.g. NAND
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10B—ELECTRONIC MEMORY DEVICES
- H10B43/00—EEPROM devices comprising charge-trapping gate insulators
- H10B43/40—EEPROM devices comprising charge-trapping gate insulators characterised by the peripheral circuit region
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10B—ELECTRONIC MEMORY DEVICES
- H10B43/00—EEPROM devices comprising charge-trapping gate insulators
- H10B43/50—EEPROM devices comprising charge-trapping gate insulators characterised by the boundary region between the core and peripheral circuit regions
Abstract
Description
230、330 層間絶縁膜
240 ベースパターン
315 絶縁パターン
325 犠牲パターン
350 チャンネルホール
410 チャンネル
452、454、456 開口
462、464、466 ギャップ
485、700、710、720 ゲート電極
485a 導電パターン
485b パッド
510、515 コンタクトプラグ
510a コンタクトプラグ510の第1延在部
510b コンタクトプラグ510の第2延在部
520 共通ソースライン(CSL)
I セルアレイ領域
II パッド領域
III 周辺領域
Claims (20)
- 基板の上面に垂直な第1方向に沿って前記基板上に積層されて上層に行くほど前記基板の上面に平行な第2方向への延在長さが徐々に減る階段形状に配置され、各々の前記第2方向の端部に形成されたパッドが他の部分に比べて大きい厚さを有する複数のゲート電極と、
前記複数のゲート電極を貫通して前記第1方向に延在されたチャンネルと、
前記複数のゲート電極を貫通して前記第1方向に延在され、かつ前記複数のゲート電極のうち、第1ゲート電極のパッドと接触して、これに電気的に連結され、前記複数のゲート電極のうち、第2ゲート電極とは電気的に絶縁されたコンタクトプラグと、
を含む垂直型メモリ装置。 - 前記第2ゲート電極は前記第1ゲート電極より下に配置され、前記コンタクトプラグは前記第2ゲート電極の各々のパッドでない部分を貫通する、請求項1に記載の垂直型メモリ装置。
- 前記コンタクトプラグと前記第2ゲート電極の各々との間に形成されて前記コンタクトプラグの側壁を囲む第1絶縁パターンをさらに含む、請求項1に記載の垂直型メモリ装置。
- 前記基板上に形成されて前記複数のゲート電極を貫通し、前記第2方向に延在される共通ソースライン(CSL)をさらに含む、請求項1に記載の垂直型メモリ装置。
- 前記コンタクトプラグ及び前記CSLは実質的に互いに同一な物質を含む、請求項4に記載の垂直型メモリ装置。
- 前記ゲート電極は前記コンタクトプラグ及び前記CSLと実質的に互いに同一な物質を含む、請求項5に記載の垂直型メモリ装置。
- 前記CSLと前記複数のゲート電極の各々との間に形成されて前記CSLの側壁を囲む第2絶縁パターンをさらに含む、請求項4に記載の垂直型メモリ装置。
- 前記基板上に形成された回路パターンと、
前記基板上に形成されて前記回路パターンをカバーする層間絶縁膜と、
前記層間絶縁膜上に形成されたベースパターンをさらに含み、
前記ゲート電極及び前記チャンネルは前記ベースパターン上に形成され、前記コンタクトプラグは前記層間絶縁膜を少なくとも部分的に貫通して前記回路パターンに電気的に連結される、請求項4に記載の垂直型メモリ装置。 - 前記ベースパターンはシリコンを含む、請求項8に記載の垂直型メモリ装置。
- 前記基板は、
前記第2方向への中央に形成されたセルアレイ領域と、
前記第2方向に両端に形成されたパッド領域を含み、
前記チャンネル及び前記CSLは前記基板のセルアレイ領域上に形成され、前記ゲート電極のパッド及び前記コンタクトプラグは前記基板のパッド領域上に形成される、請求項8に記載の垂直型メモリ装置。 - 前記ベースパターンは、前記基板のセルアレイ領域上のみに形成される、請求項10に記載の垂直型メモリ装置。
- セルアレイ領域及びパッド領域を含む基板上に形成された回路パターンと、
前記回路パターンをカバーする層間絶縁膜と、
前記基板のセルアレイ領域上で前記層間絶縁膜上に形成されたベースパターンと、
前記ベースパターン及び前記層間絶縁膜上に前記基板の上面に垂直な第1方向に互いに離隔するように複数の層に各々配置された複数のゲート電極と、
前記基板のセルアレイ領域上で前記複数のゲート電極を貫通するチャンネルと、
前記基板のパッド領域上で前記複数のゲート電極及び前記層間絶縁膜を貫通して前記回路パターンに電気的に連結されたコンタクトプラグと、
を含み、
前記コンタクトプラグは前記複数のゲート電極のうちの1のみに電気的に連結される、
垂直型メモリ装置。 - 前記複数のゲート電極の各々は前記基板のパッド領域上に形成されたパッドを含み、
前記複数のゲート電極のうちの少なくとも一部は前記パッドの厚さが他の部分の厚さより厚い、請求項12に記載の垂直型メモリ装置。 - 前記複数のゲート電極のうちの少なくとも一部の前記パッドは、他の部分より上面の高さが高い、請求項13に記載の垂直型メモリ装置。
- 前記コンタクトプラグは、前記パッドを通じて前記複数のゲート電極のうちの1つに電気的に連結される、請求項13に記載の垂直型メモリ装置。
- 前記コンタクトプラグは、
前記第1方向に延在される第1延在部と、
前記第1延在部に連結されて、前記第1延在部の一部の側壁を囲み、前記基板の上面に平行な第2方向に延在される第2延在部を含む、請求項12に記載の垂直型メモリ装置。 - 前記コンタクトプラグは、電気的に連結されたゲート電極より下層に配置されたゲート電極とは、これらの間に形成された絶縁パターンにより電気的に絶縁される、請求項12に記載の垂直型メモリ装置。
- 基板の上面に垂直な第1方向に沿って前記基板上に積層され、各々の第1部分が残りの部分に比べて大きい厚さを有する複数のゲート電極と、
前記複数のゲート電極を貫通して前記第1方向に各々延在された複数のチャンネルと、
各々が前記複数のゲート電極のうちの複数個の一部を貫通して前記第1方向に延在され、かつ各々が前記貫通するゲート電極のうちの1つの前記第1部分を貫通してこれに電気的に連結され、前記貫通するゲート電極のうちの残りのものとは電気的に絶縁された、複数のコンタクトプラグと、
を含む垂直型メモリ装置。 - 前記複数のゲート電極の各々の前記第1部分は該ゲート電極の縁部に形成され、前記第1部分の上面は残り部分の上面より高い、請求項18に記載の垂直型メモリ装置。
- 前記複数のコンタクトプラグの各々が電気的に連結される前記複数のゲート電極のうちの1つは前記貫通するゲート電極のうちの最上層に配置される、請求項19に記載の垂直型メモリ装置。
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KR102649568B1 (ko) * | 2019-05-03 | 2024-03-21 | 에스케이하이닉스 주식회사 | 반도체 장치 및 그 제조 방법과, 상기 반도체 장치를 포함하는 메모리 장치 및 시스템 |
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JP2021150463A (ja) | 2020-03-18 | 2021-09-27 | キオクシア株式会社 | 半導体装置 |
CN111370416B (zh) * | 2020-03-23 | 2022-09-23 | 长江存储科技有限责任公司 | 三维存储器及三维存储器制作方法 |
KR20210150175A (ko) * | 2020-06-03 | 2021-12-10 | 삼성전자주식회사 | 수직형 메모리 장치 |
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Citations (13)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2010093269A (ja) * | 2008-10-09 | 2010-04-22 | Samsung Electronics Co Ltd | 垂直型半導体装置及びその形成方法 |
JP2013131580A (ja) * | 2011-12-20 | 2013-07-04 | Toshiba Corp | 半導体装置及びその製造方法 |
JP2015526910A (ja) * | 2012-08-30 | 2015-09-10 | マイクロン テクノロジー, インク. | コントロールゲートに挿通する接続部を有するメモリアレイ |
US20150287710A1 (en) * | 2014-04-08 | 2015-10-08 | Tae-Hwan YUN | Semiconductor devices having conductive pads and methods of fabricating the same |
US20150372000A1 (en) * | 2014-06-24 | 2015-12-24 | Jung Geun Jee | Memory device |
US20160064281A1 (en) * | 2014-08-26 | 2016-03-03 | Sandisk Technologies Inc. | Multiheight contact via structures for a multilevel interconnect structure |
US20160172296A1 (en) * | 2014-12-10 | 2016-06-16 | Tae-Wan Lim | Semiconductor device and method for manufacturing the same |
US20160268264A1 (en) * | 2015-03-10 | 2016-09-15 | Sung-Min Hwang | Vertical memory devices |
US20160307632A1 (en) * | 2015-04-16 | 2016-10-20 | Samsung Electronics Co., Ltd. | Semiconductor device including cell region stacked on peripheral region and method of fabricating the same |
US20170256588A1 (en) * | 2016-03-01 | 2017-09-07 | Kabushiki Kaisha Toshiba | Semiconductor device and method of manufacturing the same |
US20170287926A1 (en) * | 2016-04-01 | 2017-10-05 | Sandisk Technologies Llc | Multilevel memory stack structure employing stacks of a support pedestal structure and a support pillar structure |
US20170323900A1 (en) * | 2016-05-09 | 2017-11-09 | Kohji Kanamori | Vertical memory devices |
US9853038B1 (en) * | 2017-01-20 | 2017-12-26 | Sandisk Technologies Llc | Three-dimensional memory device having integrated support and contact structures and method of making thereof |
Family Cites Families (18)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2009016400A (ja) * | 2007-06-29 | 2009-01-22 | Toshiba Corp | 積層配線構造体及びその製造方法並びに半導体装置及びその製造方法 |
TWI447851B (zh) * | 2011-01-19 | 2014-08-01 | Macronix Int Co Ltd | 多層連線結構及製造方法 |
US8765598B2 (en) * | 2011-06-02 | 2014-07-01 | Micron Technology, Inc. | Conductive structures, systems and devices including conductive structures and related methods |
KR101933116B1 (ko) | 2012-09-13 | 2018-12-27 | 삼성전자주식회사 | 수직형 메모리 장치 및 그 제조 방법 |
JP2015056452A (ja) | 2013-09-10 | 2015-03-23 | 株式会社東芝 | 半導体記憶装置及びその製造方法 |
KR20150089138A (ko) * | 2014-01-27 | 2015-08-05 | 삼성전자주식회사 | 수직형 불휘발성 메모리 장치 및 그 제조 방법 |
KR20150104817A (ko) | 2014-03-06 | 2015-09-16 | 에스케이하이닉스 주식회사 | 반도체 장치 및 그 제조 방법 |
KR20150134934A (ko) * | 2014-05-23 | 2015-12-02 | 에스케이하이닉스 주식회사 | 3차원 불휘발성 메모리 장치와, 이를 포함하는 반도체 시스템과, 그 제조방법 |
KR20160013756A (ko) | 2014-07-28 | 2016-02-05 | 에스케이하이닉스 주식회사 | 연결구조물, 반도체 장치 및 그 제조 방법 |
US9478561B2 (en) * | 2015-01-30 | 2016-10-25 | Samsung Electronics Co., Ltd. | Semiconductor memory device and method of fabricating the same |
KR102392685B1 (ko) | 2015-07-06 | 2022-04-29 | 삼성전자주식회사 | 배선 구조체를 갖는 반도체 소자 |
KR102422087B1 (ko) | 2015-09-23 | 2022-07-18 | 삼성전자주식회사 | 수직형 메모리 장치 및 이의 제조 방법 |
KR102581038B1 (ko) | 2016-03-15 | 2023-09-22 | 에스케이하이닉스 주식회사 | 반도체 장치 |
KR102613511B1 (ko) * | 2016-06-09 | 2023-12-13 | 삼성전자주식회사 | 수직형 메모리 소자를 구비한 집적회로 소자 및 그 제조 방법 |
KR102634947B1 (ko) * | 2016-08-18 | 2024-02-07 | 삼성전자주식회사 | 수직형 메모리 장치 및 그 제조 방법 |
US9876031B1 (en) | 2016-11-30 | 2018-01-23 | Sandisk Technologies Llc | Three-dimensional memory device having passive devices at a buried source line level and method of making thereof |
KR102399462B1 (ko) * | 2017-07-25 | 2022-05-18 | 삼성전자주식회사 | 수직형 메모리 장치 |
KR20210047717A (ko) * | 2019-10-22 | 2021-04-30 | 삼성전자주식회사 | 수직형 메모리 장치 |
-
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-
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Patent Citations (13)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2010093269A (ja) * | 2008-10-09 | 2010-04-22 | Samsung Electronics Co Ltd | 垂直型半導体装置及びその形成方法 |
JP2013131580A (ja) * | 2011-12-20 | 2013-07-04 | Toshiba Corp | 半導体装置及びその製造方法 |
JP2015526910A (ja) * | 2012-08-30 | 2015-09-10 | マイクロン テクノロジー, インク. | コントロールゲートに挿通する接続部を有するメモリアレイ |
US20150287710A1 (en) * | 2014-04-08 | 2015-10-08 | Tae-Hwan YUN | Semiconductor devices having conductive pads and methods of fabricating the same |
US20150372000A1 (en) * | 2014-06-24 | 2015-12-24 | Jung Geun Jee | Memory device |
US20160064281A1 (en) * | 2014-08-26 | 2016-03-03 | Sandisk Technologies Inc. | Multiheight contact via structures for a multilevel interconnect structure |
US20160172296A1 (en) * | 2014-12-10 | 2016-06-16 | Tae-Wan Lim | Semiconductor device and method for manufacturing the same |
US20160268264A1 (en) * | 2015-03-10 | 2016-09-15 | Sung-Min Hwang | Vertical memory devices |
US20160307632A1 (en) * | 2015-04-16 | 2016-10-20 | Samsung Electronics Co., Ltd. | Semiconductor device including cell region stacked on peripheral region and method of fabricating the same |
US20170256588A1 (en) * | 2016-03-01 | 2017-09-07 | Kabushiki Kaisha Toshiba | Semiconductor device and method of manufacturing the same |
US20170287926A1 (en) * | 2016-04-01 | 2017-10-05 | Sandisk Technologies Llc | Multilevel memory stack structure employing stacks of a support pedestal structure and a support pillar structure |
US20170323900A1 (en) * | 2016-05-09 | 2017-11-09 | Kohji Kanamori | Vertical memory devices |
US9853038B1 (en) * | 2017-01-20 | 2017-12-26 | Sandisk Technologies Llc | Three-dimensional memory device having integrated support and contact structures and method of making thereof |
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SG10201900586VA (en) | 2019-11-28 |
JP7478512B2 (ja) | 2024-05-07 |
EP3557622B1 (en) | 2020-05-13 |
US10748923B2 (en) | 2020-08-18 |
US20230292515A1 (en) | 2023-09-14 |
US11696442B2 (en) | 2023-07-04 |
US20200411546A1 (en) | 2020-12-31 |
EP3557622A3 (en) | 2019-11-20 |
US20190326316A1 (en) | 2019-10-24 |
CN110391248A (zh) | 2019-10-29 |
KR102624625B1 (ko) | 2024-01-12 |
EP3557622A2 (en) | 2019-10-23 |
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