JP2019186475A - 基板処理装置および基板保持装置 - Google Patents
基板処理装置および基板保持装置 Download PDFInfo
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Abstract
Description
好ましい態様は、前記基板保持装置は、前記保持チャックの前記基板との接触面を洗浄する洗浄機構を備えていることを特徴とする。
好ましい態様は、前記基板ホルダは、前記保持チャックを前記基板に近接する方向に移動させるプッシャと、前記保持チャックを前記基板から離間する方向に移動させるリリーサとを備えていることを特徴とする。
好ましい態様は、前記基板保持装置は、前記基板を前記基板ホルダの上方まで押し上げる基板押し上げ機構を備えていることを特徴とする。
好ましい態様は、前記基板回転機構は、前記基板ホルダを支持するホルダ支持部材と、前記ホルダ支持部材に連結され、前記ホルダ支持部材を前記基板の軸心を中心として回転させる回転装置とを備えていることを特徴とする。
好ましい態様は、前記基板保持装置は、前記保持チャックの前記基板との接触面を洗浄する洗浄機構を備えていることを特徴とする。
好ましい態様は、前記基板ホルダは、前記保持チャックを前記基板に近接する方向に移動させるプッシャと、前記保持チャックを前記基板から離間する方向に移動させるリリーサとを備えていることを特徴とする。
好ましい態様は、前記基板保持装置は、前記基板を前記基板ホルダの上方まで押し上げる基板押し上げ機構を備えていることを特徴とする。
好ましい態様は、前記基板回転機構は、前記基板ホルダを支持するホルダ支持部材と、前記ホルダ支持部材に連結され、前記ホルダ支持部材を前記基板の軸心を中心として回転させる回転装置とを備えていることを特徴とする。
5 基板ホルダ
10 基板回転機構
11 ホルダ支持部材
12 回転装置
12a モータ
12b モータプーリ
15 ホルダ連結部
15a 装着穴
15b 貫通穴
15c 上面
15d 内周面
15e 外周面
16 回転基台
17 駆動歯車
18 従動歯車
19 固定基台
20 タイミングベルト
27 液体供給ノズル
30 保持チャック
30a チャック部材
32 プッシャ
34 リリーサ
35 シリンダ本体
35a 第1圧力室
35b 第2圧力室
36 ピストンロッド
37 エアシリンダ
38 ヘッド(ボールヘッド)
40 付勢力受け部
40a 受け止め部材
41 湾曲溝
42 連結部材
45 接触面
46 上面
47 内側湾曲面
48 外側湾曲面
49 平坦部
49a 吸引穴
49b 連通部
50 スクラバー
51 スクラバーシャフト
53 揺動アーム
54 揺動軸
55 軸回転機構
56 スクラバー昇降機構
58 スクラバー回転機構
60 テープカートリッジ
61 テープ
62 押圧部材
63 付勢機構
64 テープ繰り出しリール
65 テープ巻き取りリール
67 テープ巻き取り軸
69,70 かさ歯車
71 エンドマーク検知センサ
80 ヘッド(カムフォロアヘッド)
80a ローラー
90 ヘッド(幅広ヘッド)
90a 内側湾曲面
91 押圧ボール
92,93 磁石
100 基板吸引機構
101 吸引ライン
102 吸引装置
110 洗浄機構
111 噴射ノズル
111a 噴射口
112 昇降装置
113 水平移動装置
130 基板押し上げ機構
131 プッシャピン
131a 棒体
131b 支持体
132 筒部材
132a 挿入穴
133 押し上げ装置
134 シリンダ本体
134a 第1圧力室
134b 第2圧力室
135 ピストンロッド
136 押し下げ部材
190 静圧支持機構
191 支持ステージ
193 支持軸
198 ステージ昇降機構
199 ステージ回転機構
200 制御装置
210 ペンシル洗浄部材
210a ペンスポンジ
210b アーム
212 二流体ジェットノズル
213 洗浄アーム
Claims (14)
- 基板保持装置と、基板の上面をスクラブする処理ヘッドとを備えた基板処理装置であって、
前記基板保持装置は、
前記基板を保持する基板ホルダと、
前記基板ホルダに保持された前記基板を回転させる基板回転機構とを備え、
前記基板ホルダは、前記基板が前記基板ホルダに保持された状態において、前記基板の上面よりも上方に突出しないように、前記基板の上面よりも下方に配置されていることを特徴とする基板処理装置。 - 前記基板ホルダは、前記基板の最外周面を保持する保持チャックを備えており、
前記保持チャックは、前記基板の周方向に沿って等間隔に配置された複数のチャック部材を備えていることを特徴とする請求項1に記載の基板処理装置。 - 前記基板保持装置は、前記保持チャックの前記基板との接触面を洗浄する洗浄機構を備えていることを特徴とする請求項2に記載の基板処理装置。
- 前記基板ホルダは、
前記保持チャックを前記基板に近接する方向に移動させるプッシャと、
前記保持チャックを前記基板から離間する方向に移動させるリリーサとを備えていることを特徴とする請求項2または3に記載の基板処理装置。 - 前記基板保持装置は、前記基板を吸引保持する基板吸引機構を備えていることを特徴とする請求項1乃至4のいずれか一項に記載の基板処理装置。
- 前記基板保持装置は、前記基板を前記基板ホルダの上方まで押し上げる基板押し上げ機構を備えていることを特徴とする請求項1乃至5のいずれか一項に記載の基板処理装置。
- 前記基板回転機構は、
前記基板ホルダを支持するホルダ支持部材と、
前記ホルダ支持部材に連結され、前記ホルダ支持部材を前記基板の軸心を中心として回転させる回転装置とを備えていることを特徴とする請求項1乃至6のいずれか一項に記載の基板処理装置。 - 基板を保持する基板ホルダと、
前記基板ホルダに保持された前記基板を回転させる基板回転機構とを備え、
前記基板ホルダは、前記基板が前記基板ホルダに保持された状態において、前記基板の上面よりも上方に突出しないように、前記基板の上面よりも下方に配置されていることを特徴とする基板保持装置。 - 前記基板ホルダは、前記基板の最外周面を保持する保持チャックを備えており、
前記保持チャックは、前記基板の周方向に沿って等間隔に配置された複数のチャック部材を備えていることを特徴とする請求項8に記載の基板保持装置。 - 前記基板保持装置は、前記保持チャックの前記基板との接触面を洗浄する洗浄機構を備えていることを特徴とする請求項9に記載の基板保持装置。
- 前記基板ホルダは、
前記保持チャックを前記基板に近接する方向に移動させるプッシャと、
前記保持チャックを前記基板から離間する方向に移動させるリリーサとを備えていることを特徴とする請求項9または10に記載の基板保持装置。 - 前記基板保持装置は、前記基板を吸引保持する基板吸引機構を備えていることを特徴とする請求項8乃至11のいずれか一項に記載の基板保持装置。
- 前記基板保持装置は、前記基板を前記基板ホルダの上方まで押し上げる基板押し上げ機構を備えていることを特徴とする請求項8乃至12のいずれか一項に記載の基板保持装置。
- 前記基板回転機構は、
前記基板ホルダを支持するホルダ支持部材と、
前記ホルダ支持部材に連結され、前記ホルダ支持部材を前記基板の軸心を中心として回転させる回転装置とを備えていることを特徴とする請求項8乃至13のいずれか一項に記載の基板保持装置。
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Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH06273919A (ja) * | 1993-03-19 | 1994-09-30 | Sharp Corp | 洗浄装置 |
JPH08117701A (ja) * | 1994-10-26 | 1996-05-14 | M Setetsuku Kk | 基板のスクラビング装置 |
JPH08148453A (ja) * | 1994-11-24 | 1996-06-07 | Sumitomo Metal Ind Ltd | ウエハ保持具 |
JP2007258274A (ja) * | 2006-03-20 | 2007-10-04 | Ebara Corp | 基板処理方法、及び基板処理装置 |
Family Cites Families (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR100798437B1 (ko) * | 2000-12-04 | 2008-01-28 | 가부시키가이샤 에바라 세이사꾸쇼 | 기판처리방법 |
JP3895651B2 (ja) * | 2002-08-12 | 2007-03-22 | Hoya株式会社 | 不要膜除去装置および不要膜除去方法、並びにフォトマスクブランク製造方法 |
EP1719161B1 (en) * | 2004-02-25 | 2014-05-07 | Ebara Corporation | Polishing apparatus |
JP2005305586A (ja) * | 2004-04-20 | 2005-11-04 | Nihon Micro Coating Co Ltd | 研磨装置 |
KR20100059549A (ko) * | 2008-11-26 | 2010-06-04 | 세메스 주식회사 | 기판 지지부재, 이를 갖는 기판 처리 장치 및 이를 이용한 기판 처리 방법 |
JP5301505B2 (ja) | 2009-08-27 | 2013-09-25 | 東京エレクトロン株式会社 | 液処理装置および液処理方法 |
JP6113960B2 (ja) * | 2012-02-21 | 2017-04-12 | 株式会社荏原製作所 | 基板処理装置および基板処理方法 |
JP6140439B2 (ja) * | 2012-12-27 | 2017-05-31 | 株式会社荏原製作所 | 研磨装置、及び研磨方法 |
JP6100002B2 (ja) | 2013-02-01 | 2017-03-22 | 株式会社荏原製作所 | 基板裏面の研磨方法および基板処理装置 |
JP6777985B2 (ja) * | 2015-11-19 | 2020-10-28 | 株式会社荏原製作所 | 基板保持装置 |
JP2017157746A (ja) * | 2016-03-03 | 2017-09-07 | 東京エレクトロン株式会社 | 基板処理装置、基板処理方法および記憶媒体 |
JP6691836B2 (ja) * | 2016-06-20 | 2020-05-13 | 株式会社Screenホールディングス | 基板処理装置 |
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Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH06273919A (ja) * | 1993-03-19 | 1994-09-30 | Sharp Corp | 洗浄装置 |
JPH08117701A (ja) * | 1994-10-26 | 1996-05-14 | M Setetsuku Kk | 基板のスクラビング装置 |
JPH08148453A (ja) * | 1994-11-24 | 1996-06-07 | Sumitomo Metal Ind Ltd | ウエハ保持具 |
JP2007258274A (ja) * | 2006-03-20 | 2007-10-04 | Ebara Corp | 基板処理方法、及び基板処理装置 |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP7491774B2 (ja) | 2020-08-24 | 2024-05-28 | 株式会社荏原製作所 | 基板保持回転機構、基板処理装置 |
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