JP7471170B2 - 基板処理方法、及び基板処理装置 - Google Patents
基板処理方法、及び基板処理装置 Download PDFInfo
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- H01L21/68714—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support
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- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/302—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting
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- H01L21/67028—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like
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- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67017—Apparatus for fluid treatment
- H01L21/67028—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like
- H01L21/6704—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like for wet cleaning or washing
- H01L21/67051—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like for wet cleaning or washing using mainly spraying means, e.g. nozzles
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- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67017—Apparatus for fluid treatment
- H01L21/67063—Apparatus for fluid treatment for etching
- H01L21/67075—Apparatus for fluid treatment for etching for wet etching
- H01L21/6708—Apparatus for fluid treatment for etching for wet etching using mainly spraying means, e.g. nozzles
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- H01—ELECTRIC ELEMENTS
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- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L21/687—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches
- H01L21/68714—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support
- H01L21/6875—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support characterised by a plurality of individual support members, e.g. support posts or protrusions
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L21/687—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches
- H01L21/68714—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support
- H01L21/68764—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support characterised by a movable susceptor, stage or support, others than those only rotating on their own vertical axis, e.g. susceptors on a rotating caroussel
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- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
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- Computer Hardware Design (AREA)
- Physics & Mathematics (AREA)
- Power Engineering (AREA)
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- General Chemical & Material Sciences (AREA)
- Cleaning Or Drying Semiconductors (AREA)
- Weting (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Description
20 保持部
21 回転盤
22A 第1把持部
22B 第2把持部
23A 第1駆動部(駆動部)
40 回転部
50 第1液供給部
60 第2液供給部
70 第3液供給部
90 制御部
Claims (10)
- 基板を水平に保持する保持部と、前記保持部を回転させる回転部と、前記保持部で水平に保持されている前記基板に対して液体を供給する液供給部と、前記保持部と前記回転部と前記液供給部とを制御する制御部と、を備える、基板処理装置であって、
前記保持部は、前記回転部によって回転させられる回転盤と、前記回転盤と共に回転させられ且つ前記基板の周縁を把持する把持位置と前記基板を解放する解放位置との間で移動させられる第1把持部と、前記回転盤と共に回転させられ且つ前記第1把持部とは独立に前記把持位置と前記解放位置との間で移動させられる第2把持部とを含み、
前記制御部は、前記回転部によって前記保持部を回転させると共に前記保持部に保持されている前記基板に対して前記液体を供給する間に、前記第1把持部と前記第2把持部とで交互に前記基板の周縁を把持し、
前記保持部は、前記第1把持部を前記把持位置と前記解放位置との間で移動させる駆動部と、前記駆動部の駆動力を前記第1把持部に伝達する伝達部とを含み、
前記駆動部と前記伝達部とは、前記回転盤と共に回転させられ、
前記駆動部は、前記回転盤と共に回転させられ且つ前記基板の径方向に移動自在なスライダを含み、
前記スライダが前記基板の前記径方向外方に移動させられることで、前記第1把持部が前記解放位置から前記把持位置まで移動し、
前記駆動部は、前記スライダを前記基板の前記径方向外方に付勢するバネを含む、基板処理装置。 - 前記駆動部は、前記スライダを前記基板の前記径方向に移動自在に収容するシリンダを含み、
前記シリンダは、前記回転盤に対して固定され、
前記スライダは、前記シリンダの内部空間を第1室と第2室とに区画し、
前記シリンダの前記第1室の圧力を調整する圧力調整機構が設けられる、請求項1に記載の基板処理装置。 - 基板を水平に保持する保持部と、前記保持部を回転させる回転部と、前記保持部で水平に保持されている前記基板に対して液体を供給する液供給部と、前記保持部と前記回転部と前記液供給部とを制御する制御部と、を備える、基板処理装置であって、
前記保持部は、前記回転部によって回転させられる回転盤と、前記回転盤と共に回転させられ且つ前記基板の周縁を把持する把持位置と前記基板を解放する解放位置との間で移動させられる第1把持部と、前記回転盤と共に回転させられ且つ前記第1把持部とは独立に前記把持位置と前記解放位置との間で移動させられる第2把持部とを含み、
前記制御部は、前記回転部によって前記保持部を回転させると共に前記保持部に保持されている前記基板に対して前記液体を供給する間に、前記第1把持部と前記第2把持部とで交互に前記基板の周縁を把持し、
前記保持部は、前記第1把持部を前記把持位置と前記解放位置との間で移動させる駆動部と、前記駆動部の駆動力を前記第1把持部に伝達する伝達部とを含み、
前記駆動部と前記伝達部とは、前記回転盤と共に回転させられ、
前記駆動部は、前記回転盤と共に回転させられ且つ前記基板の径方向に移動自在なスライダを含み、
前記スライダが前記基板の前記径方向外方に移動させられることで、前記第1把持部が前記解放位置から前記把持位置まで移動し、
前記駆動部は、前記スライダと共に移動させられるロッドを含み、
前記伝達部は、一端が前記ロッドに対して回転可能に連結され且つ他端が前記第1把持部に対して回転可能に連結されるリンクを含み、
前記駆動部は、前記第1把持部と前記リンクとの連結部が載置される昇降ロッドと、前記昇降ロッドの下端を支持する弾性膜と、前記弾性膜が区画する上室と下室とを内部に含むシリンダとを含み、
前記シリンダは、前記回転盤に対して固定され、
前記シリンダの前記下室の圧力を調整する圧力調整機構が設けられる、基板処理装置。 - 前記制御部は、前記駆動部の駆動力、又は駆動速度を制御する、請求項1~3のいずれか1項に記載の基板処理装置。
- 基板を水平に保持する保持部と、前記保持部を回転させる回転部と、前記保持部で水平に保持されている前記基板に対して液体を供給する液供給部と、前記保持部と前記回転部と前記液供給部とを制御する制御部と、を備える、基板処理装置であって、
前記保持部は、前記回転部によって回転させられる回転盤と、前記回転盤と共に回転させられ且つ前記基板の周縁を把持する把持位置と前記基板を解放する解放位置との間で移動させられる第1把持部と、前記回転盤と共に回転させられ且つ前記第1把持部とは独立に前記把持位置と前記解放位置との間で移動させられる第2把持部とを含み、
前記制御部は、前記回転部によって前記保持部を回転させると共に前記保持部に保持されている前記基板に対して前記液体を供給する間に、前記第1把持部と前記第2把持部とで交互に前記基板の周縁を把持し、
前記第1把持部は、前記回転盤に保持される水平なピンを中心に揺動させられることで、前記解放位置と前記把持位置との間で移動させられ、
前記制御部は、前記回転部によって前記保持部を回転させると共に前記保持部に保持されている前記基板に対して前記液体を供給する間に、前記第2把持部で前記基板を把持した状態で、前記解放位置と前記把持位置との間の中間位置と、前記解放位置の両方にて前記第1把持部を一時停止させる、基板処理装置。 - 基板を水平に保持する保持部と、前記保持部を回転させる回転部と、前記保持部で水平に保持されている前記基板に対して液体を供給する液供給部と、前記保持部と前記回転部と前記液供給部とを制御する制御部と、を備える、基板処理装置であって、
前記保持部は、前記回転部によって回転させられる回転盤と、前記回転盤と共に回転させられ且つ前記基板の周縁を把持する把持位置と前記基板を解放する解放位置との間で移動させられる第1把持部と、前記回転盤と共に回転させられ且つ前記第1把持部とは独立に前記把持位置と前記解放位置との間で移動させられる第2把持部とを含み、
前記制御部は、前記回転部によって前記保持部を回転させると共に前記保持部に保持されている前記基板に対して前記液体を供給する間に、前記第1把持部と前記第2把持部とで交互に前記基板の周縁を把持し、
前記第1把持部と、前記第2把持部とは、前記基板の周縁に沿って、交互に3つ以上ずつ配置され、
前記制御部は、3つ以上の前記第2把持部で前記基板を保持した状態で、3つ以上の前記第1把持部を予め定めた順番で前記解放位置から前記把持位置まで移動させる、基板処理装置。 - 基板を水平に保持する保持部と、前記保持部を回転させる回転部と、前記保持部で水平に保持されている前記基板に対して液体を供給する液供給部と、前記保持部と前記回転部と前記液供給部とを制御する制御部と、を備える、基板処理装置であって、
前記保持部は、前記回転部によって回転させられる回転盤と、前記回転盤と共に回転させられ且つ前記基板の周縁を把持する把持位置と前記基板を解放する解放位置との間で移動させられる第1把持部と、前記回転盤と共に回転させられ且つ前記第1把持部とは独立に前記把持位置と前記解放位置との間で移動させられる第2把持部とを含み、
前記制御部は、前記回転部によって前記保持部を回転させると共に前記保持部に保持されている前記基板に対して前記液体を供給する間に、前記第1把持部と前記第2把持部とで交互に前記基板の周縁を把持し、
前記第1把持部と、前記第2把持部とは、前記基板の周縁に沿って、交互に3つ以上ずつ配置され、
前記制御部は、3つ以上の前記第2把持部で前記基板を保持した状態で、3つ以上の前記第1把持部を予め定めた順番で前記把持位置から前記解放位置まで移動させる、基板処理装置。 - 基板を水平に保持する保持部を回転させながら、前記基板に対して液体を供給することを含む、基板処理方法であって、
前記保持部は、回転盤と、前記回転盤と共に回転させられ且つ前記基板の周縁を把持する把持位置と前記基板を解放する解放位置との間で移動させられる第1把持部と、前記回転盤と共に回転させられ且つ前記第1把持部とは独立に前記把持位置と前記解放位置との間で移動させられる第2把持部とを含み、
前記基板に対して前記液体を供給する間に、前記第1把持部と前記第2把持部とで交互に前記基板の周縁を把持することを含み、
前記第1把持部は、前記回転盤に保持される水平なピンを中心に揺動させられることで、前記解放位置と前記把持位置との間で移動させられ、
前記基板に対して前記液体を供給する間に、前記第2把持部で前記基板を把持した状態で、前記第1把持部は、前記解放位置と前記把持位置との間の中間位置と、前記解放位置の両方にて一時停止させられる、基板処理方法。 - 基板を水平に保持する保持部を回転させながら、前記基板に対して液体を供給することを含む、基板処理方法であって、
前記保持部は、回転盤と、前記回転盤と共に回転させられ且つ前記基板の周縁を把持する把持位置と前記基板を解放する解放位置との間で移動させられる第1把持部と、前記回転盤と共に回転させられ且つ前記第1把持部とは独立に前記把持位置と前記解放位置との間で移動させられる第2把持部とを含み、
前記基板に対して前記液体を供給する間に、前記第1把持部と前記第2把持部とで交互に前記基板の周縁を把持することを含み、
前記第1把持部と、前記第2把持部とは、前記基板の周縁に沿って、交互に3つ以上ずつ配置され、
3つ以上の前記第2把持部で前記基板を保持した状態で、3つ以上の前記第1把持部を予め定めた順番で前記解放位置から前記把持位置まで移動させることを含む、基板処理方法。 - 基板を水平に保持する保持部を回転させながら、前記基板に対して液体を供給することを含む、基板処理方法であって、
前記保持部は、回転盤と、前記回転盤と共に回転させられ且つ前記基板の周縁を把持する把持位置と前記基板を解放する解放位置との間で移動させられる第1把持部と、前記回転盤と共に回転させられ且つ前記第1把持部とは独立に前記把持位置と前記解放位置との間で移動させられる第2把持部とを含み、
前記基板に対して前記液体を供給する間に、前記第1把持部と前記第2把持部とで交互に前記基板の周縁を把持することを含み、
前記第1把持部と、前記第2把持部とは、前記基板の周縁に沿って、交互に3つ以上ずつ配置され、
3つ以上の前記第2把持部で前記基板を保持した状態で、3つ以上の前記第1把持部を予め定めた順番で前記把持位置から前記解放位置まで移動させることを含む、基板処理方法。
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Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2004111902A (ja) | 2002-07-26 | 2004-04-08 | Dainippon Screen Mfg Co Ltd | 基板処理方法および基板処理装置 |
JP2005285927A (ja) | 2004-03-29 | 2005-10-13 | Hitachi Kokusai Electric Inc | 基板処理装置 |
JP2007103730A (ja) | 2005-10-05 | 2007-04-19 | Tokyo Seimitsu Co Ltd | スピン処理装置 |
JP2008060277A (ja) | 2006-08-30 | 2008-03-13 | Hitachi High-Technologies Corp | 基板保持装置および検査または処理の装置 |
JP2013118279A (ja) | 2011-12-02 | 2013-06-13 | Shibaura Mechatronics Corp | スピン処理装置及びスピン処理方法 |
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US6827092B1 (en) * | 2000-12-22 | 2004-12-07 | Lam Research Corporation | Wafer backside plate for use in a spin, rinse, and dry module and methods for making and implementing the same |
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US10770335B2 (en) * | 2016-07-06 | 2020-09-08 | Acm Research (Shanghai) Inc. | Substrate supporting apparatus |
US10559488B2 (en) * | 2016-08-10 | 2020-02-11 | Veeco Precision Surface Processing Llc | Two-level tape frame rinse assembly |
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JP7370270B2 (ja) * | 2020-02-07 | 2023-10-27 | 東京エレクトロン株式会社 | 基板保持機構及び基板処理装置 |
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Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2004111902A (ja) | 2002-07-26 | 2004-04-08 | Dainippon Screen Mfg Co Ltd | 基板処理方法および基板処理装置 |
JP2005285927A (ja) | 2004-03-29 | 2005-10-13 | Hitachi Kokusai Electric Inc | 基板処理装置 |
JP2007103730A (ja) | 2005-10-05 | 2007-04-19 | Tokyo Seimitsu Co Ltd | スピン処理装置 |
JP2008060277A (ja) | 2006-08-30 | 2008-03-13 | Hitachi High-Technologies Corp | 基板保持装置および検査または処理の装置 |
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