JP2019173151A5 - - Google Patents
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- Publication number
- JP2019173151A5 JP2019173151A5 JP2018225361A JP2018225361A JP2019173151A5 JP 2019173151 A5 JP2019173151 A5 JP 2019173151A5 JP 2018225361 A JP2018225361 A JP 2018225361A JP 2018225361 A JP2018225361 A JP 2018225361A JP 2019173151 A5 JP2019173151 A5 JP 2019173151A5
- Authority
- JP
- Japan
- Prior art keywords
- container
- coil
- power semiconductor
- power
- vacuum chamber
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000010438 heat treatment Methods 0.000 claims description 3
- 239000004065 semiconductor Substances 0.000 claims 8
- 238000007740 vapor deposition Methods 0.000 claims 5
- 239000011368 organic material Substances 0.000 claims 4
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims 2
- 239000004020 conductor Substances 0.000 claims 2
- 229910052710 silicon Inorganic materials 0.000 claims 2
- 239000010703 silicon Substances 0.000 claims 2
- 239000000758 substrate Substances 0.000 claims 2
- 238000006243 chemical reaction Methods 0.000 claims 1
- 230000008020 evaporation Effects 0.000 claims 1
- 238000001704 evaporation Methods 0.000 claims 1
- 238000004519 manufacturing process Methods 0.000 claims 1
Priority Applications (6)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| KR1020227013143A KR20220053700A (ko) | 2018-03-28 | 2019-02-26 | 증착 장치 및 유기 전자 장치의 생산 방법 |
| US17/042,267 US20210013457A1 (en) | 2018-03-28 | 2019-02-26 | Vapor deposition apparatus and organic electronic device production method |
| EP19774731.4A EP3822388A4 (en) | 2018-03-28 | 2019-02-26 | VAPORIZATION DEVICE AND METHOD OF MANUFACTURE OF ORGANIC ELECTRONIC DEVICE |
| PCT/JP2019/007301 WO2019187902A1 (ja) | 2018-03-28 | 2019-02-26 | 蒸着装置及び有機電子デバイスの生産方法 |
| CN201980023277.7A CN111971411A (zh) | 2018-03-28 | 2019-02-26 | 蒸镀装置及有机电子器件的生产方法 |
| KR1020207030373A KR102391901B1 (ko) | 2018-03-28 | 2019-02-26 | 증착 장치 및 유기 전자 장치의 생산 방법 |
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2018063368 | 2018-03-28 | ||
| JP2018063368 | 2018-03-28 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2019173151A JP2019173151A (ja) | 2019-10-10 |
| JP2019173151A5 true JP2019173151A5 (enExample) | 2020-04-02 |
| JP6709271B2 JP6709271B2 (ja) | 2020-06-10 |
Family
ID=68166510
Family Applications (4)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2018225361A Active JP6709271B2 (ja) | 2018-03-28 | 2018-11-30 | 蒸着装置及び有機電子デバイスの生産方法 |
| JP2018225362A Active JP6709272B2 (ja) | 2018-03-28 | 2018-11-30 | 蒸着装置及び有機電子デバイスの生産方法 |
| JP2018225364A Active JP6709273B2 (ja) | 2018-03-28 | 2018-11-30 | 蒸着装置 |
| JP2018225363A Active JP6734909B2 (ja) | 2018-03-28 | 2018-11-30 | 蒸着装置及び有機電子デバイスの生産方法 |
Family Applications After (3)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2018225362A Active JP6709272B2 (ja) | 2018-03-28 | 2018-11-30 | 蒸着装置及び有機電子デバイスの生産方法 |
| JP2018225364A Active JP6709273B2 (ja) | 2018-03-28 | 2018-11-30 | 蒸着装置 |
| JP2018225363A Active JP6734909B2 (ja) | 2018-03-28 | 2018-11-30 | 蒸着装置及び有機電子デバイスの生産方法 |
Country Status (3)
| Country | Link |
|---|---|
| US (1) | US20210013457A1 (enExample) |
| JP (4) | JP6709271B2 (enExample) |
| CN (1) | CN111971411A (enExample) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPWO2021112019A1 (enExample) * | 2019-12-02 | 2021-06-10 | ||
| JP2024022701A (ja) * | 2020-12-24 | 2024-02-21 | 公益財団法人福岡県産業・科学技術振興財団 | 誘導加熱装置、真空蒸着装置、局所加熱装置、局所計測装置、誘導加熱方法及び局所計測方法 |
Family Cites Families (18)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP3570083B2 (ja) * | 1996-05-27 | 2004-09-29 | 富士電機システムズ株式会社 | 底穴出湯式浮揚溶解装置 |
| KR20030038689A (ko) * | 2000-08-10 | 2003-05-16 | 신닛테츠가가쿠 가부시키가이샤 | 유기 ｅｌ 소자의 제조방법 및 장치 |
| JP2005307354A (ja) * | 2000-08-10 | 2005-11-04 | Nippon Steel Chem Co Ltd | 有機ｅｌ素子の製造方法及び装置 |
| JP3932830B2 (ja) * | 2001-05-21 | 2007-06-20 | 富士ゼロックス株式会社 | 電磁誘導加熱用制御装置、電磁誘導加熱装置および画像形成装置 |
| GB0213186D0 (en) * | 2002-06-08 | 2002-07-17 | Univ Dundee | Methods |
| JP2004059992A (ja) * | 2002-07-29 | 2004-02-26 | Sony Corp | 有機薄膜形成装置 |
| JP4558375B2 (ja) * | 2004-05-17 | 2010-10-06 | 株式会社アルバック | 有機材料用蒸発源及び有機蒸着装置 |
| JP4476019B2 (ja) * | 2004-05-20 | 2010-06-09 | 東北パイオニア株式会社 | 成膜源、真空成膜装置、有機ｅｌ素子の製造方法 |
| JP4001296B2 (ja) * | 2005-08-25 | 2007-10-31 | トッキ株式会社 | 有機材料の真空蒸着方法およびその装置 |
| WO2007057925A1 (en) * | 2005-11-15 | 2007-05-24 | Galileo Vacuum Systems S.P.A. | Device and method for controlling the power supplied to vacuum vaporization sources of metals and other |
| CN101658066B (zh) * | 2007-04-07 | 2012-09-05 | 应达公司 | 用于电感应加热、熔化和搅拌的具有脉冲调节器的电流反馈逆变器 |
| TWI352494B (en) * | 2007-04-07 | 2011-11-11 | Inductotherm Corp | Current fed inverter with pulse regulator for elec |
| CN201144277Y (zh) * | 2007-12-29 | 2008-11-05 | 杭州晶鑫镀膜包装有限公司 | 一种真空镀铝膜设备 |
| US20130106374A1 (en) * | 2011-11-02 | 2013-05-02 | Alan R. Ball | Power supply controller and method therefor |
| JP2013182966A (ja) * | 2012-03-01 | 2013-09-12 | Hitachi High-Technologies Corp | プラズマ処理装置及びプラズマ処理方法 |
| ZA201305605B (en) * | 2012-07-26 | 2014-05-28 | Oss Man Services (Pty) Ltd | Reactor vessel,system and method for removing and recovering volatilizing contaminants from contaminated materials |
| JP6070846B2 (ja) * | 2013-07-31 | 2017-02-01 | 富士電機株式会社 | 半導体装置の製造方法および半導体装置 |
| DE102014112456B4 (de) * | 2014-08-29 | 2020-09-24 | Schott Ag | Vorrichtung und Verfahren zur Beheizung einer Schmelze |
-
2018
- 2018-11-30 JP JP2018225361A patent/JP6709271B2/ja active Active
- 2018-11-30 JP JP2018225362A patent/JP6709272B2/ja active Active
- 2018-11-30 JP JP2018225364A patent/JP6709273B2/ja active Active
- 2018-11-30 JP JP2018225363A patent/JP6734909B2/ja active Active
-
2019
- 2019-02-26 US US17/042,267 patent/US20210013457A1/en not_active Abandoned
- 2019-02-26 CN CN201980023277.7A patent/CN111971411A/zh active Pending
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