JP2019150762A - 振動デバイス及び圧電素子 - Google Patents
振動デバイス及び圧電素子 Download PDFInfo
- Publication number
- JP2019150762A JP2019150762A JP2018037596A JP2018037596A JP2019150762A JP 2019150762 A JP2019150762 A JP 2019150762A JP 2018037596 A JP2018037596 A JP 2018037596A JP 2018037596 A JP2018037596 A JP 2018037596A JP 2019150762 A JP2019150762 A JP 2019150762A
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- active region
- piezoelectric element
- piezoelectric
- main surface
- internal electrode
- Prior art date
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Links
- 230000005684 electric field Effects 0.000 claims description 47
- 238000006073 displacement reaction Methods 0.000 claims description 18
- 238000005304 joining Methods 0.000 claims description 2
- 239000004020 conductor Substances 0.000 description 63
- 230000004048 modification Effects 0.000 description 21
- 238000012986 modification Methods 0.000 description 21
- 230000000452 restraining effect Effects 0.000 description 8
- 239000011347 resin Substances 0.000 description 7
- 229920005989 resin Polymers 0.000 description 7
- 238000004519 manufacturing process Methods 0.000 description 4
- 229910001252 Pd alloy Inorganic materials 0.000 description 3
- 229910010293 ceramic material Inorganic materials 0.000 description 3
- 230000012447 hatching Effects 0.000 description 3
- 239000000463 material Substances 0.000 description 3
- 229910052763 palladium Inorganic materials 0.000 description 3
- 229910052697 platinum Inorganic materials 0.000 description 3
- 230000010287 polarization Effects 0.000 description 3
- 229910052709 silver Inorganic materials 0.000 description 3
- 238000005245 sintering Methods 0.000 description 3
- 239000000919 ceramic Substances 0.000 description 2
- 229910052751 metal Inorganic materials 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 238000003825 pressing Methods 0.000 description 2
- 229910052726 zirconium Inorganic materials 0.000 description 2
- 239000004925 Acrylic resin Substances 0.000 description 1
- 229920000178 Acrylic resin Polymers 0.000 description 1
- 229910003271 Ni-Fe Inorganic materials 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- 229910002113 barium titanate Inorganic materials 0.000 description 1
- JRPBQTZRNDNNOP-UHFFFAOYSA-N barium titanate Chemical compound [Ba+2].[Ba+2].[O-][Ti]([O-])([O-])[O-] JRPBQTZRNDNNOP-UHFFFAOYSA-N 0.000 description 1
- 238000005452 bending Methods 0.000 description 1
- 239000011231 conductive filler Substances 0.000 description 1
- 230000008602 contraction Effects 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000010292 electrical insulation Methods 0.000 description 1
- 239000003822 epoxy resin Substances 0.000 description 1
- 238000010304 firing Methods 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 229910052746 lanthanum Inorganic materials 0.000 description 1
- 229910052745 lead Inorganic materials 0.000 description 1
- 229920000647 polyepoxide Polymers 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B06—GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
- B06B—METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
- B06B1/00—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency
- B06B1/02—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy
- B06B1/06—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction
- B06B1/0603—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction using a piezoelectric bender, e.g. bimorph
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/20—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators
- H10N30/204—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators using bending displacement, e.g. unimorph, bimorph or multimorph cantilever or membrane benders
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/20—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators
- H10N30/204—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators using bending displacement, e.g. unimorph, bimorph or multimorph cantilever or membrane benders
- H10N30/2047—Membrane type
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/50—Piezoelectric or electrostrictive devices having a stacked or multilayer structure
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/80—Constructional details
- H10N30/87—Electrodes or interconnections, e.g. leads or terminals
- H10N30/871—Single-layered electrodes of multilayer piezoelectric or electrostrictive devices, e.g. internal electrodes
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/80—Constructional details
- H10N30/87—Electrodes or interconnections, e.g. leads or terminals
- H10N30/872—Interconnections, e.g. connection electrodes of multilayer piezoelectric or electrostrictive devices
- H10N30/874—Interconnections, e.g. connection electrodes of multilayer piezoelectric or electrostrictive devices embedded within piezoelectric or electrostrictive material, e.g. via connections
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/80—Constructional details
- H10N30/85—Piezoelectric or electrostrictive active materials
- H10N30/853—Ceramic compositions
- H10N30/8536—Alkaline earth metal based oxides, e.g. barium titanates
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/80—Constructional details
- H10N30/85—Piezoelectric or electrostrictive active materials
- H10N30/853—Ceramic compositions
- H10N30/8548—Lead-based oxides
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/80—Constructional details
- H10N30/85—Piezoelectric or electrostrictive active materials
- H10N30/853—Ceramic compositions
- H10N30/8548—Lead-based oxides
- H10N30/8554—Lead-zirconium titanate [PZT] based
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
- Apparatuses For Generation Of Mechanical Vibrations (AREA)
- Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
Abstract
Description
Claims (6)
- 互いに対向する第1主面及び第2主面を有すると共に、当該第1及び第2主面の間において前記第1主面側に配置された第1活性領域と、当該第1及び第2主面の間において前記第1活性領域よりも前記第2主面側に配置された第2活性領域とを有するバイモルフ型の圧電素子と、
前記圧電素子の前記第2主面に接合された振動部材と、を備え、
前記第1活性領域で発生する力をF1とし、前記第2活性領域で発生する力をF2とし、前記振動部材が前記第2活性領域を拘束する力をFrとした場合、
F2−F1≧Fr
が満たされる、振動デバイス。 - 互いに対向する第1主面及び第2主面を有すると共に、前記第2主面が振動部材に接合されることで振動デバイスを構成するバイモルフ型の圧電素子であって、
前記第1及び第2主面の間において前記第1主面側に配置された第1活性領域と、
前記第1及び第2主面の間において前記第1活性領域よりも前記第2主面側に配置された第2活性領域と、
前記第1活性領域に電界を印加する第1内部電極と、
前記第2活性領域に電界を印加する第2内部電極と、を備え、
前記第1活性領域及び前記第2活性領域は、それぞれ少なくとも1つの圧電体層によって構成され、
前記第1活性領域の変位量をX1とし、前記第2活性領域の変位量をX2とした場合、
X1<X2
が満たされる、圧電素子。 - 前記第1活性領域を構成する前記圧電体層の層数をN1とし、前記第2活性領域を構成する前記圧電体層の層数をN2としたとき、
N1<N2
が満たされている、請求項2に記載の圧電素子。 - 前記第1活性領域を構成する前記圧電体層の各々の厚さをT1とし、前記第2活性領域を構成する前記圧電体層の各々の厚さをT2としたとき、
T1>T2
が満されている、請求項2又は3に記載の圧電素子。 - 前記第2内部電極の被覆率は、前記第1内部電極の被覆率よりも小さい、請求項2〜4のいずれか一項に記載の圧電素子。
- 前記第1内部電極の厚さをL1とし、前記第2内部電極の厚さをL2としたとき、
L1>L2
が満たされている、請求項2〜5のいずれか一項に記載の圧電素子。
Priority Applications (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2018037596A JP7003741B2 (ja) | 2018-03-02 | 2018-03-02 | 振動デバイス及び圧電素子 |
CN201980015429.9A CN111770797B (zh) | 2018-03-02 | 2019-02-21 | 振动器件及压电元件 |
US16/977,122 US11944999B2 (en) | 2018-03-02 | 2019-02-21 | Vibration device and piezoelectric element |
PCT/JP2019/006628 WO2019167805A1 (ja) | 2018-03-02 | 2019-02-21 | 振動デバイス及び圧電素子 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2018037596A JP7003741B2 (ja) | 2018-03-02 | 2018-03-02 | 振動デバイス及び圧電素子 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2019150762A true JP2019150762A (ja) | 2019-09-12 |
JP7003741B2 JP7003741B2 (ja) | 2022-01-21 |
Family
ID=67805756
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
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JP2018037596A Active JP7003741B2 (ja) | 2018-03-02 | 2018-03-02 | 振動デバイス及び圧電素子 |
Country Status (4)
Country | Link |
---|---|
US (1) | US11944999B2 (ja) |
JP (1) | JP7003741B2 (ja) |
CN (1) | CN111770797B (ja) |
WO (1) | WO2019167805A1 (ja) |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2006068245A1 (ja) * | 2004-12-24 | 2006-06-29 | Murata Manufacturing Co., Ltd | 積層型圧電セラミック部品、及び積層型圧電セラミック部品の製造方法 |
JP2015185819A (ja) * | 2014-03-26 | 2015-10-22 | 京セラ株式会社 | バイモルフ型圧電素子の駆動装置およびこれを備えた携帯端末、音響発生器、音響発生装置、電子機器 |
JP2015216373A (ja) * | 2014-05-07 | 2015-12-03 | サムソン エレクトロ−メカニックス カンパニーリミテッド. | 圧電素子及びこれを含む圧電振動モジュール |
Family Cites Families (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH02138781A (ja) | 1988-11-18 | 1990-05-28 | Matsushita Electric Ind Co Ltd | バイモルフ型圧電素子とその製造法 |
JP5429140B2 (ja) * | 2010-01-19 | 2014-02-26 | Tdk株式会社 | 圧電アクチュエータ |
JP2016046407A (ja) * | 2014-08-25 | 2016-04-04 | 新シコー科技株式会社 | 圧電アクチュエータ、リニア駆動装置及び電子機器 |
WO2016175013A1 (ja) * | 2015-04-30 | 2016-11-03 | 株式会社村田製作所 | 圧電デバイス、圧電トランスおよび圧電デバイスの製造方法 |
JP6822380B2 (ja) * | 2017-11-02 | 2021-01-27 | Tdk株式会社 | 振動デバイス |
-
2018
- 2018-03-02 JP JP2018037596A patent/JP7003741B2/ja active Active
-
2019
- 2019-02-21 US US16/977,122 patent/US11944999B2/en active Active
- 2019-02-21 CN CN201980015429.9A patent/CN111770797B/zh active Active
- 2019-02-21 WO PCT/JP2019/006628 patent/WO2019167805A1/ja active Application Filing
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2006068245A1 (ja) * | 2004-12-24 | 2006-06-29 | Murata Manufacturing Co., Ltd | 積層型圧電セラミック部品、及び積層型圧電セラミック部品の製造方法 |
JP2015185819A (ja) * | 2014-03-26 | 2015-10-22 | 京セラ株式会社 | バイモルフ型圧電素子の駆動装置およびこれを備えた携帯端末、音響発生器、音響発生装置、電子機器 |
JP2015216373A (ja) * | 2014-05-07 | 2015-12-03 | サムソン エレクトロ−メカニックス カンパニーリミテッド. | 圧電素子及びこれを含む圧電振動モジュール |
Also Published As
Publication number | Publication date |
---|---|
US11944999B2 (en) | 2024-04-02 |
CN111770797A (zh) | 2020-10-13 |
WO2019167805A1 (ja) | 2019-09-06 |
JP7003741B2 (ja) | 2022-01-21 |
US20200406297A1 (en) | 2020-12-31 |
CN111770797B (zh) | 2022-06-14 |
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