JP2019091928A - 磁気トンネル接合 - Google Patents
磁気トンネル接合 Download PDFInfo
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- JP2019091928A JP2019091928A JP2019024788A JP2019024788A JP2019091928A JP 2019091928 A JP2019091928 A JP 2019091928A JP 2019024788 A JP2019024788 A JP 2019024788A JP 2019024788 A JP2019024788 A JP 2019024788A JP 2019091928 A JP2019091928 A JP 2019091928A
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N50/00—Galvanomagnetic devices
- H10N50/80—Constructional details
- H10N50/85—Magnetic active materials
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- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B5/127—Structure or manufacture of heads, e.g. inductive
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11C—STATIC STORES
- G11C11/00—Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor
- G11C11/02—Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using magnetic elements
- G11C11/16—Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using magnetic elements using elements in which the storage effect is based on magnetic spin effect
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11C—STATIC STORES
- G11C11/00—Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor
- G11C11/02—Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using magnetic elements
- G11C11/16—Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using magnetic elements using elements in which the storage effect is based on magnetic spin effect
- G11C11/161—Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using magnetic elements using elements in which the storage effect is based on magnetic spin effect details concerning the memory cell structure, e.g. the layers of the ferromagnetic memory cell
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N50/00—Galvanomagnetic devices
- H10N50/10—Magnetoresistive devices
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N50/00—Galvanomagnetic devices
- H10N50/80—Constructional details
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- Engineering & Computer Science (AREA)
- Computer Hardware Design (AREA)
- Manufacturing & Machinery (AREA)
- Hall/Mr Elements (AREA)
- Thin Magnetic Films (AREA)
- Mram Or Spin Memory Techniques (AREA)
Abstract
Description
ただし、Msは飽和磁化、tは厚さ、Hkは磁気記録材料の垂直磁気異方性である。図3および図4の例示的実施形態について先に説明したように、Co、Fe、およびNを含む領域を磁気トンネル接合内で使用することで、高速切替え、良好な記憶保持、および低い切替え電流を実現する際に、低いMstと高いHkとの間の良好なバランスを可能にすることもできる。
いくつかの実施形態では、磁気トンネル接合が、磁気記録材料を含む導電性の第1の磁性電極を含む。導電性の第2の磁性電極が、第1の電極から離隔されており、磁気参照材料を含む。第1の電極と第2の電極との間に、非磁性トンネル絶縁体材料が存在する。第1の電極の磁気記録材料が、CoおよびFeを含む第1の結晶磁性領域を含む。第1の電極が、アモルファスXNを含む第2のアモルファス領域を含み、ただし、Xは、W、Mo、Cr、V、Nb、Ta、AlおよびTiのうちの1つまたは複数である。
11 基板
12 非磁性金属領域
14 第3の結晶領域
15、15a、15b、15c 磁気トンネル接合
16 MgO含有領域
17 アモルファス金属領域
18、18a 第2のアモルファス領域
19 第2の領域
20 第1の結晶磁性領域
21 第1の結晶磁性領域
22 非磁性トンネル絶縁体材料
25、25a、25b、25c 第1の磁性電極
27 第2の磁性電極
Claims (6)
- 磁気記録材料を含む導電性の第1の磁性電極と、
前記第1の磁性電極から離隔されており、磁気参照材料を含む導電性の第2の磁性電極と、
前記第1及び第2の磁性電極間にある非磁性トンネル絶縁体材料と、
を備え、
前記第1の磁性電極の前記磁気記録材料が、第1の結晶磁性領域を含み、前記第1の磁性電極が、Co、Fe及びNを含む第2の領域を含む、磁気トンネル接合。 - 前記第1の結晶磁性領域が、前記第2の領域の前記Co、Fe及びNに直接触れているCo及びFeを含む、請求項1に記載の磁気トンネル接合。
- 前記第1の磁性電極がアモルファス金属領域を含み、前記第2の領域の前記Co、Fe及びNが、前記アモルファス金属領域のアモルファス金属に直接触れている、請求項1に記載の磁気トンネル接合。
- 前記第2の領域が結晶質である、請求項1に記載の磁気トンネル接合。
- 前記第2の領域がアモルファスである、請求項1に記載の磁気トンネル接合。
- 磁気記録材料を含む導電性の第1の磁性電極と、
前記第1の磁性電極から離隔されており、磁気参照材料を含む導電性の第2の磁性電極と、
前記第1及び第2の磁性電極間にある非磁性トンネル絶縁体材料と、
を備え、
前記第1の磁性電極の前記磁気記録材料が、Co、Fe及びBを含む第1の結晶磁性領域を含み、前記第1の磁性電極が、Co、Fe及びNを含む第2の領域を含み、前記磁気記録材料の前記Co、Fe及びBが、前記第2の領域の前記Co、Fe及びNに直接触れている、磁気トンネル接合。
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US14/704,023 US9257136B1 (en) | 2015-05-05 | 2015-05-05 | Magnetic tunnel junctions |
US14/704,023 | 2015-05-05 | ||
JP2017557161A JP6599478B2 (ja) | 2015-05-05 | 2016-01-21 | 磁気トンネル接合 |
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JP2017557161A Division JP6599478B2 (ja) | 2015-05-05 | 2016-01-21 | 磁気トンネル接合 |
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JP2019091928A true JP2019091928A (ja) | 2019-06-13 |
JP6908639B2 JP6908639B2 (ja) | 2021-07-28 |
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JP2019024788A Active JP6908639B2 (ja) | 2015-05-05 | 2019-02-14 | 磁気トンネル接合 |
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US (2) | US9257136B1 (ja) |
EP (1) | EP3292571B1 (ja) |
JP (2) | JP6599478B2 (ja) |
KR (1) | KR102076400B1 (ja) |
CN (1) | CN107690718B (ja) |
TW (1) | TWI590501B (ja) |
WO (1) | WO2016178721A1 (ja) |
Families Citing this family (5)
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US9680089B1 (en) * | 2016-05-13 | 2017-06-13 | Micron Technology, Inc. | Magnetic tunnel junctions |
JP6857421B2 (ja) * | 2017-06-14 | 2021-04-14 | 国立研究開発法人物質・材料研究機構 | 強磁性トンネル接合体、それを用いたスピントロニクスデバイス、及び強磁性トンネル接合体の製造方法 |
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