JP2019055901A - Iii−v族化合物結晶の製造方法および半導体装置の製造方法 - Google Patents
Iii−v族化合物結晶の製造方法および半導体装置の製造方法 Download PDFInfo
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- JP2019055901A JP2019055901A JP2017181815A JP2017181815A JP2019055901A JP 2019055901 A JP2019055901 A JP 2019055901A JP 2017181815 A JP2017181815 A JP 2017181815A JP 2017181815 A JP2017181815 A JP 2017181815A JP 2019055901 A JP2019055901 A JP 2019055901A
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- 239000013078 crystal Substances 0.000 title claims abstract description 422
- 150000001875 compounds Chemical class 0.000 title claims abstract description 233
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 74
- 238000000034 method Methods 0.000 title claims abstract description 73
- 239000004065 semiconductor Substances 0.000 title claims description 39
- 239000000758 substrate Substances 0.000 claims abstract description 237
- 238000000926 separation method Methods 0.000 claims abstract description 51
- JMASRVWKEDWRBT-UHFFFAOYSA-N Gallium nitride Chemical compound [Ga]#N JMASRVWKEDWRBT-UHFFFAOYSA-N 0.000 claims description 103
- 229910052594 sapphire Inorganic materials 0.000 claims description 52
- 239000010980 sapphire Substances 0.000 claims description 52
- IJGRMHOSHXDMSA-UHFFFAOYSA-N nitrogen Substances N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims description 35
- 239000007789 gas Substances 0.000 claims description 26
- 229910052751 metal Inorganic materials 0.000 claims description 19
- 239000002184 metal Substances 0.000 claims description 19
- 229910052783 alkali metal Inorganic materials 0.000 claims description 17
- 150000001340 alkali metals Chemical group 0.000 claims description 17
- 229910052757 nitrogen Inorganic materials 0.000 claims description 16
- 229910021478 group 5 element Inorganic materials 0.000 claims description 13
- 150000004767 nitrides Chemical class 0.000 claims description 13
- 230000008859 change Effects 0.000 claims description 9
- QJGQUHMNIGDVPM-UHFFFAOYSA-N nitrogen group Chemical group [N] QJGQUHMNIGDVPM-UHFFFAOYSA-N 0.000 claims description 9
- 230000001678 irradiating effect Effects 0.000 claims description 5
- 230000008602 contraction Effects 0.000 claims description 2
- 230000015572 biosynthetic process Effects 0.000 abstract description 7
- 229910002601 GaN Inorganic materials 0.000 description 96
- 238000012545 processing Methods 0.000 description 51
- 239000011734 sodium Substances 0.000 description 20
- 238000001947 vapour-phase growth Methods 0.000 description 20
- GYHNNYVSQQEPJS-UHFFFAOYSA-N Gallium Chemical compound [Ga] GYHNNYVSQQEPJS-UHFFFAOYSA-N 0.000 description 16
- 229910052733 gallium Inorganic materials 0.000 description 16
- 230000008569 process Effects 0.000 description 16
- 239000002585 base Substances 0.000 description 15
- 238000005259 measurement Methods 0.000 description 15
- 239000002994 raw material Substances 0.000 description 15
- 238000001816 cooling Methods 0.000 description 13
- 239000007791 liquid phase Substances 0.000 description 13
- 230000007246 mechanism Effects 0.000 description 13
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 12
- VEXZGXHMUGYJMC-UHFFFAOYSA-N Hydrochloric acid Chemical compound Cl VEXZGXHMUGYJMC-UHFFFAOYSA-N 0.000 description 11
- 229910000041 hydrogen chloride Inorganic materials 0.000 description 11
- IXCSERBJSXMMFS-UHFFFAOYSA-N hydrogen chloride Substances Cl.Cl IXCSERBJSXMMFS-UHFFFAOYSA-N 0.000 description 11
- 229910052708 sodium Inorganic materials 0.000 description 11
- DGAQECJNVWCQMB-PUAWFVPOSA-M Ilexoside XXIX Chemical compound C[C@@H]1CC[C@@]2(CC[C@@]3(C(=CC[C@H]4[C@]3(CC[C@@H]5[C@@]4(CC[C@@H](C5(C)C)OS(=O)(=O)[O-])C)C)[C@@H]2[C@]1(C)O)C)C(=O)O[C@H]6[C@@H]([C@H]([C@@H]([C@H](O6)CO)O)O)O.[Na+] DGAQECJNVWCQMB-PUAWFVPOSA-M 0.000 description 10
- 230000004907 flux Effects 0.000 description 10
- QGZKDVFQNNGYKY-UHFFFAOYSA-N Ammonia Chemical compound N QGZKDVFQNNGYKY-UHFFFAOYSA-N 0.000 description 9
- 238000006243 chemical reaction Methods 0.000 description 9
- 239000000126 substance Substances 0.000 description 9
- 229910052799 carbon Inorganic materials 0.000 description 8
- 238000004943 liquid phase epitaxy Methods 0.000 description 8
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 7
- 229910001873 dinitrogen Inorganic materials 0.000 description 7
- 229910001220 stainless steel Inorganic materials 0.000 description 7
- 239000010935 stainless steel Substances 0.000 description 7
- 229910052738 indium Inorganic materials 0.000 description 6
- 238000003754 machining Methods 0.000 description 6
- 239000000155 melt Substances 0.000 description 6
- 229910052782 aluminium Inorganic materials 0.000 description 5
- 239000011575 calcium Substances 0.000 description 5
- 238000010586 diagram Methods 0.000 description 5
- 239000011777 magnesium Substances 0.000 description 5
- 238000002488 metal-organic chemical vapour deposition Methods 0.000 description 5
- 239000000203 mixture Substances 0.000 description 5
- 229910052710 silicon Inorganic materials 0.000 description 5
- 238000007740 vapor deposition Methods 0.000 description 5
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 4
- 239000002390 adhesive tape Substances 0.000 description 4
- 229910052784 alkaline earth metal Inorganic materials 0.000 description 4
- 150000001342 alkaline earth metals Chemical class 0.000 description 4
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 4
- 238000002050 diffraction method Methods 0.000 description 4
- 238000003384 imaging method Methods 0.000 description 4
- APFVFJFRJDLVQX-UHFFFAOYSA-N indium atom Chemical compound [In] APFVFJFRJDLVQX-UHFFFAOYSA-N 0.000 description 4
- 238000002955 isolation Methods 0.000 description 4
- 239000002245 particle Substances 0.000 description 4
- 239000010703 silicon Substances 0.000 description 4
- 229910018072 Al 2 O 3 Inorganic materials 0.000 description 3
- UHOVQNZJYSORNB-UHFFFAOYSA-N Benzene Chemical compound C1=CC=CC=C1 UHOVQNZJYSORNB-UHFFFAOYSA-N 0.000 description 3
- 150000001722 carbon compounds Chemical class 0.000 description 3
- 238000000354 decomposition reaction Methods 0.000 description 3
- 239000002019 doping agent Substances 0.000 description 3
- 238000007716 flux method Methods 0.000 description 3
- 238000005286 illumination Methods 0.000 description 3
- 239000012535 impurity Substances 0.000 description 3
- 229910052744 lithium Inorganic materials 0.000 description 3
- 229910052749 magnesium Inorganic materials 0.000 description 3
- 239000000463 material Substances 0.000 description 3
- 230000003287 optical effect Effects 0.000 description 3
- 238000003756 stirring Methods 0.000 description 3
- 238000002834 transmittance Methods 0.000 description 3
- WHXSMMKQMYFTQS-UHFFFAOYSA-N Lithium Chemical compound [Li] WHXSMMKQMYFTQS-UHFFFAOYSA-N 0.000 description 2
- FYYHWMGAXLPEAU-UHFFFAOYSA-N Magnesium Chemical compound [Mg] FYYHWMGAXLPEAU-UHFFFAOYSA-N 0.000 description 2
- ATUOYWHBWRKTHZ-UHFFFAOYSA-N Propane Chemical compound CCC ATUOYWHBWRKTHZ-UHFFFAOYSA-N 0.000 description 2
- 229910052581 Si3N4 Inorganic materials 0.000 description 2
- 238000004458 analytical method Methods 0.000 description 2
- 229910052785 arsenic Inorganic materials 0.000 description 2
- RQNWIZPPADIBDY-UHFFFAOYSA-N arsenic atom Chemical compound [As] RQNWIZPPADIBDY-UHFFFAOYSA-N 0.000 description 2
- NWAIGJYBQQYSPW-UHFFFAOYSA-N azanylidyneindigane Chemical compound [In]#N NWAIGJYBQQYSPW-UHFFFAOYSA-N 0.000 description 2
- 229910052791 calcium Inorganic materials 0.000 description 2
- 238000005229 chemical vapour deposition Methods 0.000 description 2
- XOYLJNJLGBYDTH-UHFFFAOYSA-M chlorogallium Chemical compound [Ga]Cl XOYLJNJLGBYDTH-UHFFFAOYSA-M 0.000 description 2
- 230000000052 comparative effect Effects 0.000 description 2
- 238000002425 crystallisation Methods 0.000 description 2
- 230000008025 crystallization Effects 0.000 description 2
- 230000007547 defect Effects 0.000 description 2
- 238000005530 etching Methods 0.000 description 2
- 239000010408 film Substances 0.000 description 2
- 238000002248 hydride vapour-phase epitaxy Methods 0.000 description 2
- 239000004973 liquid crystal related substance Substances 0.000 description 2
- 239000000395 magnesium oxide Substances 0.000 description 2
- CPLXHLVBOLITMK-UHFFFAOYSA-N magnesium oxide Inorganic materials [Mg]=O CPLXHLVBOLITMK-UHFFFAOYSA-N 0.000 description 2
- AXZKOIWUVFPNLO-UHFFFAOYSA-N magnesium;oxygen(2-) Chemical compound [O-2].[Mg+2] AXZKOIWUVFPNLO-UHFFFAOYSA-N 0.000 description 2
- VNWKTOKETHGBQD-UHFFFAOYSA-N methane Chemical compound C VNWKTOKETHGBQD-UHFFFAOYSA-N 0.000 description 2
- 230000035699 permeability Effects 0.000 description 2
- 238000005424 photoluminescence Methods 0.000 description 2
- 230000035484 reaction time Effects 0.000 description 2
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 2
- 239000010409 thin film Substances 0.000 description 2
- 239000012808 vapor phase Substances 0.000 description 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 2
- 229910002704 AlGaN Inorganic materials 0.000 description 1
- FOXXZZGDIAQPQI-XKNYDFJKSA-N Asp-Pro-Ser-Ser Chemical compound OC(=O)C[C@H](N)C(=O)N1CCC[C@H]1C(=O)N[C@@H](CO)C(=O)N[C@@H](CO)C(O)=O FOXXZZGDIAQPQI-XKNYDFJKSA-N 0.000 description 1
- XMWRBQBLMFGWIX-UHFFFAOYSA-N C60 fullerene Chemical compound C12=C3C(C4=C56)=C7C8=C5C5=C9C%10=C6C6=C4C1=C1C4=C6C6=C%10C%10=C9C9=C%11C5=C8C5=C8C7=C3C3=C7C2=C1C1=C2C4=C6C4=C%10C6=C9C9=C%11C5=C5C8=C3C3=C7C1=C1C2=C4C6=C2C9=C5C3=C12 XMWRBQBLMFGWIX-UHFFFAOYSA-N 0.000 description 1
- OYPRJOBELJOOCE-UHFFFAOYSA-N Calcium Chemical compound [Ca] OYPRJOBELJOOCE-UHFFFAOYSA-N 0.000 description 1
- XFXPMWWXUTWYJX-UHFFFAOYSA-N Cyanide Chemical compound N#[C-] XFXPMWWXUTWYJX-UHFFFAOYSA-N 0.000 description 1
- 241001050985 Disco Species 0.000 description 1
- OTMSDBZUPAUEDD-UHFFFAOYSA-N Ethane Chemical compound CC OTMSDBZUPAUEDD-UHFFFAOYSA-N 0.000 description 1
- 229910001218 Gallium arsenide Inorganic materials 0.000 description 1
- 229910010093 LiAlO Inorganic materials 0.000 description 1
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 description 1
- ZLMJMSJWJFRBEC-UHFFFAOYSA-N Potassium Chemical compound [K] ZLMJMSJWJFRBEC-UHFFFAOYSA-N 0.000 description 1
- 229910004298 SiO 2 Inorganic materials 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- XLOMVQKBTHCTTD-UHFFFAOYSA-N Zinc monoxide Chemical compound [Zn]=O XLOMVQKBTHCTTD-UHFFFAOYSA-N 0.000 description 1
- 238000010521 absorption reaction Methods 0.000 description 1
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 1
- 229910052787 antimony Inorganic materials 0.000 description 1
- WATWJIUSRGPENY-UHFFFAOYSA-N antimony atom Chemical compound [Sb] WATWJIUSRGPENY-UHFFFAOYSA-N 0.000 description 1
- 229910052788 barium Inorganic materials 0.000 description 1
- DSAJWYNOEDNPEQ-UHFFFAOYSA-N barium atom Chemical compound [Ba] DSAJWYNOEDNPEQ-UHFFFAOYSA-N 0.000 description 1
- 230000008901 benefit Effects 0.000 description 1
- 238000005422 blasting Methods 0.000 description 1
- 239000001273 butane Substances 0.000 description 1
- 229910052792 caesium Inorganic materials 0.000 description 1
- TVFDJXOCXUVLDH-UHFFFAOYSA-N caesium atom Chemical compound [Cs] TVFDJXOCXUVLDH-UHFFFAOYSA-N 0.000 description 1
- 239000002041 carbon nanotube Substances 0.000 description 1
- 229910021393 carbon nanotube Inorganic materials 0.000 description 1
- 238000002109 crystal growth method Methods 0.000 description 1
- 238000005520 cutting process Methods 0.000 description 1
- 229910003460 diamond Inorganic materials 0.000 description 1
- 239000010432 diamond Substances 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- AJNVQOSZGJRYEI-UHFFFAOYSA-N digallium;oxygen(2-) Chemical compound [O-2].[O-2].[O-2].[Ga+3].[Ga+3] AJNVQOSZGJRYEI-UHFFFAOYSA-N 0.000 description 1
- 238000004821 distillation Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000000835 fiber Substances 0.000 description 1
- -1 for example Inorganic materials 0.000 description 1
- 229910052730 francium Inorganic materials 0.000 description 1
- KLMCZVJOEAUDNE-UHFFFAOYSA-N francium atom Chemical compound [Fr] KLMCZVJOEAUDNE-UHFFFAOYSA-N 0.000 description 1
- 229910003472 fullerene Inorganic materials 0.000 description 1
- 238000007429 general method Methods 0.000 description 1
- 229910052732 germanium Inorganic materials 0.000 description 1
- GNPVGFCGXDBREM-UHFFFAOYSA-N germanium atom Chemical compound [Ge] GNPVGFCGXDBREM-UHFFFAOYSA-N 0.000 description 1
- 229910002804 graphite Inorganic materials 0.000 description 1
- 239000010439 graphite Substances 0.000 description 1
- 150000004820 halides Chemical class 0.000 description 1
- 229910003437 indium oxide Inorganic materials 0.000 description 1
- PJXISJQVUVHSOJ-UHFFFAOYSA-N indium(iii) oxide Chemical compound [O-2].[O-2].[O-2].[In+3].[In+3] PJXISJQVUVHSOJ-UHFFFAOYSA-N 0.000 description 1
- 150000002500 ions Chemical class 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- YQNQTEBHHUSESQ-UHFFFAOYSA-N lithium aluminate Chemical compound [Li+].[O-][Al]=O YQNQTEBHHUSESQ-UHFFFAOYSA-N 0.000 description 1
- 238000002844 melting Methods 0.000 description 1
- 230000008018 melting Effects 0.000 description 1
- QSHDDOUJBYECFT-UHFFFAOYSA-N mercury Chemical compound [Hg] QSHDDOUJBYECFT-UHFFFAOYSA-N 0.000 description 1
- 229910052753 mercury Inorganic materials 0.000 description 1
- 238000003801 milling Methods 0.000 description 1
- 238000002156 mixing Methods 0.000 description 1
- IJDNQMDRQITEOD-UHFFFAOYSA-N n-butane Chemical compound CCCC IJDNQMDRQITEOD-UHFFFAOYSA-N 0.000 description 1
- OFBQJSOFQDEBGM-UHFFFAOYSA-N n-pentane Natural products CCCCC OFBQJSOFQDEBGM-UHFFFAOYSA-N 0.000 description 1
- 229910017464 nitrogen compound Inorganic materials 0.000 description 1
- 150000002830 nitrogen compounds Chemical class 0.000 description 1
- 238000000879 optical micrograph Methods 0.000 description 1
- 230000010355 oscillation Effects 0.000 description 1
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 description 1
- 239000012071 phase Substances 0.000 description 1
- 229910052698 phosphorus Inorganic materials 0.000 description 1
- 239000011574 phosphorus Substances 0.000 description 1
- 238000005498 polishing Methods 0.000 description 1
- 239000004800 polyvinyl chloride Substances 0.000 description 1
- 229910052700 potassium Inorganic materials 0.000 description 1
- 239000011591 potassium Substances 0.000 description 1
- 238000010248 power generation Methods 0.000 description 1
- 238000003672 processing method Methods 0.000 description 1
- 239000001294 propane Substances 0.000 description 1
- 229910052705 radium Inorganic materials 0.000 description 1
- HCWPIIXVSYCSAN-UHFFFAOYSA-N radium atom Chemical compound [Ra] HCWPIIXVSYCSAN-UHFFFAOYSA-N 0.000 description 1
- 239000011347 resin Substances 0.000 description 1
- 229920005989 resin Polymers 0.000 description 1
- 229910052701 rubidium Inorganic materials 0.000 description 1
- IGLNJRXAVVLDKE-UHFFFAOYSA-N rubidium atom Chemical compound [Rb] IGLNJRXAVVLDKE-UHFFFAOYSA-N 0.000 description 1
- 229910052711 selenium Inorganic materials 0.000 description 1
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 description 1
- 229910010271 silicon carbide Inorganic materials 0.000 description 1
- 229910052814 silicon oxide Inorganic materials 0.000 description 1
- 241000894007 species Species 0.000 description 1
- 238000003860 storage Methods 0.000 description 1
- 229910052712 strontium Inorganic materials 0.000 description 1
- CIOAGBVUUVVLOB-UHFFFAOYSA-N strontium atom Chemical compound [Sr] CIOAGBVUUVVLOB-UHFFFAOYSA-N 0.000 description 1
- 229910052717 sulfur Inorganic materials 0.000 description 1
- JBQYATWDVHIOAR-UHFFFAOYSA-N tellanylidenegermanium Chemical compound [Te]=[Ge] JBQYATWDVHIOAR-UHFFFAOYSA-N 0.000 description 1
- 229910052716 thallium Inorganic materials 0.000 description 1
- BKVIYDNLLOSFOA-UHFFFAOYSA-N thallium Chemical compound [Tl] BKVIYDNLLOSFOA-UHFFFAOYSA-N 0.000 description 1
- 229910052718 tin Inorganic materials 0.000 description 1
- 238000000927 vapour-phase epitaxy Methods 0.000 description 1
- 229910052725 zinc Inorganic materials 0.000 description 1
- 239000011701 zinc Substances 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B29/00—Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
- C30B29/10—Inorganic compounds or compositions
- C30B29/40—AIIIBV compounds wherein A is B, Al, Ga, In or Tl and B is N, P, As, Sb or Bi
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L33/00—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L33/005—Processes
- H01L33/0062—Processes for devices with an active region comprising only III-V compounds
- H01L33/0066—Processes for devices with an active region comprising only III-V compounds with a substrate not being a III-V compound
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B19/00—Liquid-phase epitaxial-layer growth
- C30B19/02—Liquid-phase epitaxial-layer growth using molten solvents, e.g. flux
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B25/00—Single-crystal growth by chemical reaction of reactive gases, e.g. chemical vapour-deposition growth
- C30B25/02—Epitaxial-layer growth
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B29/00—Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
- C30B29/10—Inorganic compounds or compositions
- C30B29/40—AIIIBV compounds wherein A is B, Al, Ga, In or Tl and B is N, P, As, Sb or Bi
- C30B29/403—AIII-nitrides
- C30B29/406—Gallium nitride
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B33/00—After-treatment of single crystals or homogeneous polycrystalline material with defined structure
- C30B33/06—Joining of crystals
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L33/00—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L33/005—Processes
- H01L33/0062—Processes for devices with an active region comprising only III-V compounds
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L33/00—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L33/005—Processes
- H01L33/0062—Processes for devices with an active region comprising only III-V compounds
- H01L33/0066—Processes for devices with an active region comprising only III-V compounds with a substrate not being a III-V compound
- H01L33/007—Processes for devices with an active region comprising only III-V compounds with a substrate not being a III-V compound comprising nitride compounds
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L33/00—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L33/005—Processes
- H01L33/0062—Processes for devices with an active region comprising only III-V compounds
- H01L33/0075—Processes for devices with an active region comprising only III-V compounds comprising nitride compounds
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L33/00—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L33/005—Processes
- H01L33/0093—Wafer bonding; Removal of the growth substrate
-
- H—ELECTRICITY
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Abstract
Description
基板上にIII−V族化合物種結晶が形成された種結晶形成基板を提供する種結晶形成基板提供工程と、
前記III−V族化合物種結晶の、前記基板と接触している部分の一部を前記基板から分離させる種結晶一部分離工程と、
前記種結晶一部分離工程後に、前記III−V族化合物種結晶を核としてIII族元素とV族元素とを反応させることによって、III−V族化合物結晶を生成させ成長させる結晶成長工程と、
を含むことを特徴とする。
本発明のIII−V族化合物結晶の製造方法は、例えば、以下のようにして行うことができる。
まず、図1(a)に示すとおり、基板11を準備する。基板11は、特に限定されないが、例えば、サファイア基板、炭化珪素基板、酸化ガリウム(Ga2O3)基板、シリコン(Si)基板、窒化シリコン(Si3N4、窒化珪素ともいう)基板、ガリウムヒ素(GaAs)基板、リチウムアルミネート(LiAlO2)、ScAlMgO4基板等が挙げられる。基板11の形状およびサイズは、特に限定されず、例えば、製造しようとするIII−V族化合物結晶の形状およびサイズ等に応じて適宜設定可能である。基板の形状は、例えば、矩形でもよいし、円形、多角形、正方形、六角形、八角形等でもよい。基板11のサイズは、例えば、長径が5〜20cm等であってもよい。基板11の厚みも特に限定されないが、例えば、0.01〜2mm、0.05〜1.5mm、または0.1〜1mmであってもよい。
つぎに、図1(c)および(d)に示すとおり、III−V族化合物種結晶12aの、基板11と接触している部分の一部を基板11から分離させる(種結晶一部分離工程)。
つぎに、図1(e)に示すとおり、前記種結晶一部分離工程後に、III−V族化合物種結晶12aを核としてIII族元素とV族元素とを反応させることによって、III−V族化合物結晶12を生成させ成長させる(結晶成長工程)。この方法は、特に限定されず、前述のとおり、液相成長法でも気相成長法でもよいが、図1(e)では、気相成長法の例を示している。この方法は、図1(e)に示すとおり、気相成長炉1000内のテーブル1001に、種結晶形成基板(III−V族化合物種結晶12aが形成された基板11)を載置して行うことができる。気相成長炉1000は、図2で説明したものを用いることができる。
Ga+HCl→GaCl+1/2H2 (I)
GaCl+2NH3→GaN+H2+NH4Cl (II)
さらに、図1(f)および(g)に示すとおり、前記結晶成長工程後に、III−V族化合物結晶12から基板11を分離する(基板分離工程)。
前記本発明のIII−V族化合物結晶製造方法により製造されるIII−V族化合物結晶は、特に限定されないが、例えば、前述のとおりである。前記III−V族化合物結晶の転位密度は、特に限定されないが、低いことが好ましく、例えば、1×108cm−2以下、1×107cm−2以下、1×106cm−2以下、または1×105cm−2以下である。前記転位密度の下限値は特に限定されないが、理想的には、0または測定機器による測定限界値以下の値である。なお、前記転位密度の値は、例えば、結晶全体の平均値であってもよいが、結晶中の最大値が前記値以下であれば、より好ましい。また、本発明のIII族窒化物結晶において、XRC(X線ロッキングカーブ回折法)による半値幅の、対照反射成分(002)および非対称反射成分(102)の半値幅は、特に限定されないが、それぞれ、例えば100秒以下、好ましくは30秒以下である。前記XRC半値幅の測定値の下限値は、特に限定されないが、理想的には、0または測定機器による測定限界値以下の値である。
まず、厚さ約1000μmのサファイア基板(φ150mm)上に厚さ約5μmのGaN層が積層された種結晶形性基板(POWDEC社製、商品名GaNエピウエファ150−5−1000)を準備した(種結晶形成基板提供工程)。つぎに、この種結晶形性基板の前記サファイア基板側から、下記表1に記載の条件によりレーザー光照射し、前記GaN層の、前記サファイア基板と接触している部分の一部を前記サファイア基板から分離させた(種結晶一部分離工程)。なお、前記GaN層の、前記レーザー光照射により加工して前記サファイア基板から分離させた部分と、加工せずに残した部分との、大きさおよび形状については、後述する。
[表1]
光源 :YAGレーザー
波長 :257.5nm
繰り返し周波数 :50kHz―200kHz
平均出力 :0.4W―1.0W
パルス幅 :100ps
パルスエネルギー :8μJ―5μJ
スポット径 :50μm
レーザー照射手段移動速度 :50−100mm/s
[表2]
温度[℃] 870
圧力[MPa] 4.0
時間[h] 72
Ga:Na 27:73
C[mol%] 0.5
液位[cm] 0.8
坩堝 Al2O3
種結晶(GaN)膜厚[μm] 5
前記種結晶形性基板に、レーザー光照射による加工(種結晶一部分離工程)を行わず、そのまま前記結晶成長工程に供したこと以外は実施例と同様にしてGaN結晶を製造した。
12 III−V族化合物結晶(III−V族化合物結晶層)
12a III−V族化合物種結晶(III−V族化合物種結晶層)
13 レーザー光
14 レーザー光13の照射位置(加工位置)
15 加工痕
16 III−V族化合物結晶の原料
1000 気相成長炉
1001 テーブル
1002 原料収容部
1003 アンモニアガス(NH3)導入管
1004 水素ガス(H2)導入管
1005 塩化水素ガス(HCl)導入管
1006 ヒータ
1007 排気管
361 原料ガスタンク
362 圧力調整器
363 リーク用バルブ
364 ステンレス容器
365 電気炉
366 坩堝
10:レーザー加工装置
20:静止基台
30:保持テーブル機構
320:第1の滑動ブロック
330:第2の滑動ブロック
370:加工送り手段
380:第1の割り出し送り手段
360:保持テーブル
3610:保持部材:水供給手段
40:レーザー光照射ユニット支持機構
420:可動支持基台
430:第2の割り出し送り手段
50:レーザー光照射ユニット
510:ユニットホルダ
60:レーザー光照射手段
640:集光器
90:撮像手段
530:集光点位置調整手段
400:被加工物
F:環状のフレーム
T:粘着テープ
Claims (12)
- 基板上にIII−V族化合物種結晶が形成された種結晶形成基板を提供する種結晶形成基板提供工程と、
前記III−V族化合物種結晶の、前記基板と接触している部分の一部を前記基板から分離させる種結晶一部分離工程と、
前記種結晶一部分離工程後に、前記III−V族化合物種結晶を核としてIII族元素とV族元素とを反応させることによって、III−V族化合物結晶を生成させ成長させる結晶成長工程と、
を含むことを特徴とするIII−V族化合物結晶の製造方法。 - 前記種結晶一部分離工程において、前記種結晶形性基板の前記基板側から前記III−V族化合物種結晶にレーザー光を照射することにより、前記III−V族化合物種結晶の、前記基板と接触している部分の一部を分離する請求項1記載の製造方法。
- さらに、前記種結晶一部分離工程後に、前記III−V族化合物種結晶の、前記基板と反対側の表面を金属融液に接触させる接触工程を含み、
前記結晶成長工程において、前記III族元素と前記V族元素とを前記金属融液中で反応させる請求項1または2記載の製造方法。 - 前記V族元素が、窒素であり、
前記金属融液が、アルカリ金属融液であり、
前記III−V族化合物が、III族窒化物であり、
前記結晶成長工程において、窒素を含む雰囲気下において、III族元素と前記窒素とを前記アルカリ金属融液中で反応させることによって、前記III−V族化合物種結晶を核としてIII族窒化物結晶を生成させ成長させる、請求項3記載の製造方法。 - 前記結晶成長工程において、前記III族元素と前記V族元素とを気相中で反応させる請求項1または2記載の製造方法。
- 前記種結晶一部分離工程において、前記III−V族化合物種結晶の、前記基板と接触している部分を、島状に残す請求項1から5のいずれか一項に記載の製造方法。
- 前記III−V族化合物種結晶および前記III−V族化合物結晶が、窒化ガリウム(GaN)である請求項1から6のいずれか一項に記載の製造方法。
- 前記結晶成長工程後に、前記III−V族化合物結晶から前記基板を分離する基板分離工程をさらに含む請求項1から7のいずれか一項に記載の製造方法。
- 前記基板分離工程において、温度変化による前記III−V族化合物結晶と前記基板との膨張率または収縮率の差によって、前記III−V族化合物結晶から前記基板を分離する請求項8記載の製造方法。
- 前記基板分離工程において、前記III−V族化合物結晶および前記基板を冷却する請求項9記載の製造方法。
- 前記基板がサファイア基板である請求項1から10のいずれか一項に記載の製造方法。
- 請求項1から11のいずれか一項に記載の製造方法により前記III−V族化合物結晶を製造する工程を含むことを特徴とする、前記III−V族化合物結晶を含む半導体装置の製造方法。
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TWI761596B (zh) | 2022-04-21 |
US10910511B2 (en) | 2021-02-02 |
DE102018216146A1 (de) | 2019-03-21 |
DE102018216146B4 (de) | 2021-03-25 |
KR102499221B1 (ko) | 2023-02-10 |
CN109537056A (zh) | 2019-03-29 |
US20190088816A1 (en) | 2019-03-21 |
KR20190033424A (ko) | 2019-03-29 |
JP7117690B2 (ja) | 2022-08-15 |
TW201915232A (zh) | 2019-04-16 |
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