JP2019004144A - 過負荷電流通電能力を有する半導体デバイス - Google Patents
過負荷電流通電能力を有する半導体デバイス Download PDFInfo
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- JP2019004144A JP2019004144A JP2018108490A JP2018108490A JP2019004144A JP 2019004144 A JP2019004144 A JP 2019004144A JP 2018108490 A JP2018108490 A JP 2018108490A JP 2018108490 A JP2018108490 A JP 2018108490A JP 2019004144 A JP2019004144 A JP 2019004144A
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- 229910002601 GaN Inorganic materials 0.000 description 8
- 238000005259 measurement Methods 0.000 description 7
- JMASRVWKEDWRBT-UHFFFAOYSA-N Gallium nitride Chemical compound [Ga]#N JMASRVWKEDWRBT-UHFFFAOYSA-N 0.000 description 5
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- APFVFJFRJDLVQX-UHFFFAOYSA-N indium atom Chemical compound [In] APFVFJFRJDLVQX-UHFFFAOYSA-N 0.000 description 5
- RNQKDQAVIXDKAG-UHFFFAOYSA-N aluminum gallium Chemical compound [Al].[Ga] RNQKDQAVIXDKAG-UHFFFAOYSA-N 0.000 description 4
- 238000006243 chemical reaction Methods 0.000 description 4
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- 229910000577 Silicon-germanium Inorganic materials 0.000 description 3
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- 238000013459 approach Methods 0.000 description 2
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- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 description 2
- 229910010271 silicon carbide Inorganic materials 0.000 description 2
- 239000000758 substrate Substances 0.000 description 2
- 238000012546 transfer Methods 0.000 description 2
- 229910004613 CdTe Inorganic materials 0.000 description 1
- 229910005540 GaP Inorganic materials 0.000 description 1
- GYHNNYVSQQEPJS-UHFFFAOYSA-N Gallium Chemical compound [Ga] GYHNNYVSQQEPJS-UHFFFAOYSA-N 0.000 description 1
- 229910001218 Gallium arsenide Inorganic materials 0.000 description 1
- 229910000530 Gallium indium arsenide Inorganic materials 0.000 description 1
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- 229910021417 amorphous silicon Inorganic materials 0.000 description 1
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- 229910044991 metal oxide Inorganic materials 0.000 description 1
- 150000004706 metal oxides Chemical class 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
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- 229910021421 monocrystalline silicon Inorganic materials 0.000 description 1
- 150000004767 nitrides Chemical class 0.000 description 1
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- 238000011084 recovery Methods 0.000 description 1
- 230000002829 reductive effect Effects 0.000 description 1
- SBEQWOXEGHQIMW-UHFFFAOYSA-N silicon Chemical compound [Si].[Si] SBEQWOXEGHQIMW-UHFFFAOYSA-N 0.000 description 1
- 229910052714 tellurium Inorganic materials 0.000 description 1
- PORWMNRCUJJQNO-UHFFFAOYSA-N tellurium atom Chemical compound [Te] PORWMNRCUJJQNO-UHFFFAOYSA-N 0.000 description 1
- 238000011144 upstream manufacturing Methods 0.000 description 1
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Abstract
Description
1−1 トランジスタセル
1−2 ダイオードセル
1−3 補助セル
2 ゲートドライバ
2−1 ゲート信号
3 回路機構
4 方法
11 半導体領域
11−1 第1のpn接合
11−2 第2のpn接合
11−3 第3のpn接合
12 第2のトレンチ
13 第1のトレンチ
21 ゲート信号発生器
22 過負荷電流検出器
111 半導体チャネル領域
112 半導体補助領域
113 半導体アノード領域
114 半導体ソース領域
121 ゲート電極
122 第2の絶縁体
131 第1の電極
132 第1の絶縁体
Claims (21)
- 半導体デバイス(1)であって、
第1の導電型の電荷キャリアを有する半導体領域(11)と、
前記半導体領域(11)内に含まれるトランジスタセル(1−1)と、
前記トランジスタセル(1−1)内に含まれる半導体チャネル領域(111)であって、前記第1の導電型に相補的な第2の導電型の電荷キャリアの第1のドーピング濃度を有し、前記半導体チャネル領域(111)と前記半導体領域(11)との間の移行部は第1のpn接合(11−1)を形成する、半導体チャネル領域(111)と、
前記半導体領域(11)内に含まれ、前記半導体チャネル領域(111)と異なる半導体補助領域(112)であって、前記半導体補助領域(112)は前記第2の導電型の電荷キャリアの第2のドーピング濃度を有し、前記第2のドーピング濃度は、前記第1のドーピング濃度と比べて少なくとも30%、より高く、前記半導体補助領域(112)と前記半導体領域(11)との間の移行部は第2のpn接合(11−2)を形成し、前記第2のpn接合(11−2)は、前記第1のpn接合(11−1)と比べて前記半導体領域(11)内において同じ深さに、またはより深く位置付けられ、前記半導体補助領域(112)は、前記第2の導電型の電荷キャリアを含み、さらなるpn接合を形成する前記半導体デバイス(1)の任意の他の半導体領域と比べて、前記半導体領域(11)との前記半導体チャネル領域(111)に最も近接して位置付けられる、半導体補助領域(112)と、
前記半導体領域(11)内に含まれるダイオードセル(1−2)であって、前記ダイオードセル(1−2)は半導体アノード領域(113)を含み、前記半導体アノード領域(113)は前記第2の導電型の電荷キャリアの第3のドーピング濃度を有し、前記第2のドーピング濃度は前記第3のドーピング濃度よりも高い、ダイオードセル(1−2)と、
を含む、半導体デバイス(1)。 - 前記トランジスタセル(1−1)内に含まれ、前記半導体チャネル領域(111)と接触する半導体ソース領域(114)であって、前記半導体ソース領域(114)は前記第1の導電型の電荷キャリアを含む、半導体ソース領域(114)をさらに含む、請求項1に記載の半導体デバイス(1)。
- 前記半導体アノード領域(113)と前記半導体領域(11)との間の移行部が第3のpn接合(11−3)を形成し、前記第2のpn接合(11−2)が、前記第3のpn接合(11−3)と比べて前記半導体領域(11)内において同じ深さに、またはより深く位置付けられる、請求項1に記載の半導体デバイス(1)。
- 前記ダイオードセル(1−2)内に含まれる少なくとも2本の第1のトレンチ(13)をさらに含み、各々の第1のトレンチ(13)は第1の電極(131)および第1の絶縁体(132)を含み、各々の第1の絶縁体(132)は前記それぞれの第1のトレンチ(13)の前記第1の電極(131)を前記半導体本体(11)から絶縁し、前記第1のトレンチ(13)のうちの2本の間に、前記2本の第1のトレンチ(13)の前記第1の絶縁体(132)と接触して前記半導体アノード領域(113)が位置付けられる、請求項1に記載の半導体デバイス(1)。
- 前記半導体領域(11)内に含まれる補助セル(1−3)をさらに含み、前記補助セル(1−3)は前記半導体補助領域(112)を含み、前記トランジスタセル(1−1)に隣接して位置付けられる、請求項1に記載の半導体デバイス(1)。
- 前記補助セル(1−3)と前記トランジスタセル(1−1)との間の距離が、前記ダイオードセル(1−2)と前記トランジスタセル(1−1)との間の距離と比べて、より小さい、請求項5に記載の半導体デバイス(1)。
- 前記トランジスタセル(1−1)内に含まれる少なくとも2本の第2のトレンチ(12)であって、各々の第2のトレンチ(12)はゲート電極(121)および第2の絶縁体(122)を含み、各々の第2の絶縁体(122)は前記それぞれの第2のトレンチ(12)の前記ゲート電極(121)を前記半導体領域(11)から絶縁する、少なくとも2本の第2のトレンチ(12)をさらに含み、
前記半導体補助領域(112)が前記半導体チャネル領域(111)と接触し、前記第2のトレンチ(12)のうちの2本の間に位置付けられるか、または
前記第2のトレンチ(12)のうちの少なくとも1本が前記半導体補助領域(112)と前記半導体チャネル領域(111)との間に位置付けられ、前記半導体補助領域(112)および前記半導体チャネル領域(111)は両方とも前記少なくとも1本の第2のトレンチ(12)の前記第2の絶縁体(122)と接触するか、または
前記半導体補助領域(112)が、前記第2のトレンチ(12)と比べて前記半導体領域(11)内において同じ深さに、またはより深く、前記半導体チャネル領域(111)から離れて位置付けられる、
請求項1に記載の半導体デバイス(1)。 - 前記半導体補助領域(112)の前記第2のドーピング濃度が前記半導体チャネル領域(111)の前記第1のドーピング濃度の少なくとも2倍の高さである、請求項1に記載の半導体デバイス(1)。
- 前記半導体デバイス(1)が順電流モードおよび逆電流モードのうちの少なくとも1つで動作可能であり、前記半導体デバイス(1)が前記順電流モードで動作されている場合には、前記半導体チャネル領域(111)が、順方向の定格負荷電流(FC)の少なくとも一部を導通するように構成され、前記半導体デバイス(1)が前記逆電流モードで動作されている場合には、前記半導体補助領域(112)が、逆方向の過負荷電流(ROLC)の少なくとも一部を導通するように構成される、請求項1に記載の半導体デバイス(1)。
- 前記第2のpn接合(11−2)が、前記第1のpn接合(11−1)の前記深さと比べて少なくとも50nm、より深い深さに位置付けられる、請求項1に記載の半導体デバイス(1)。
- 半導体デバイス(1)であって、前記半導体デバイス(1)は順電流モードおよび逆電流モードのうちの少なくとも1つで動作可能であり、前記順電流モードの最中には順方向の負荷電流(FC)を導通し、前記逆電流モードの最中には逆方向の負荷電流(RC)を導通するように構成され、前記半導体デバイス(1)は、
半導体領域(11)と、
前記半導体領域(11)内に電荷キャリアを注入するように構成され、制御信号に応答する制御可能な電荷キャリアインジェクタ(112、113)と、
を含み、
前記制御可能な電荷キャリアインジェクタは、前記半導体デバイス(1)を、前記逆電流モードになっている時には、前記制御信号に依存して定格状態または過負荷状態にセットするようにさらに構成され、
前記定格状態では、前記制御可能な電荷キャリアインジェクタ(113)は、前記半導体領域(11)が前記逆方向の定格負荷電流(RC)を導通することを可能にするために、前記半導体領域(11)内に第1の電荷キャリア密度を誘導するように構成され、
前記過負荷状態では、前記制御可能な電荷キャリアインジェクタ(112)は、前記半導体領域(11)が前記逆方向の過負荷電流(ROLC)を導通することを可能にするために、前記半導体領域(11)内に第2の電荷キャリア密度を誘導するように構成され、前記第2の電荷キャリア密度は前記第1の電荷キャリア密度よりも高い、
半導体デバイス(1)。 - 前記半導体デバイス(1)を動作させるためのゲート電極(121)をさらに含み、前記ゲート電極(121)は前記制御可能な電荷キャリアインジェクタ(112、113)に電気結合され、ゲート信号(2−1)を受信し、前記受信されたゲート信号(2−1)に依存して前記制御信号を発生するように構成される、請求項11に記載の半導体デバイス(1)。
- 前記順電流モードにおいて、前記ゲート電極(121)が、前記順方向の負荷電流(FC)の流れを阻止するために、前記受信されたゲート信号(2−1)に基づいて前記半導体デバイス(1)をターンオフするように構成される、請求項12に記載の半導体デバイス(1)。
- 前記第2の電荷キャリア密度が前記第1の電荷キャリア密度の少なくとも2倍の高さである、請求項11に記載の半導体デバイス(1)。
- 前記半導体領域(11)が第1の導電型の電荷キャリアを有し、半導体チャネル領域(111)を含む前記半導体領域(11)内に含まれるトランジスタセル(1−1)が存在し、前記半導体チャネル領域(111)は、前記第1の導電型に相補的な第2の導電型の電荷キャリアの第1のドーピング濃度を有し、前記半導体チャネル領域(111)と前記半導体領域(11)との間の移行部は第1のpn接合(11−1)を形成し、前記制御可能な電荷キャリアインジェクタ(112、113)が、
前記半導体領域(11)内に含まれ、前記半導体チャネル領域(111)と異なる半導体補助領域(112)であって、前記半導体補助領域(112)は前記第2の導電型の電荷キャリアの第2のドーピング濃度を有し、前記第2のドーピング濃度は、前記第1のドーピング濃度と比べて少なくとも30%、より高く、前記半導体補助領域(112)と前記半導体領域(11)との間の移行部は第2のpn接合(11−2)を形成し、前記第2のpn接合(11−2)は、前記第1のpn接合(11−1)と比べて前記半導体領域(11)内において同じ深さに、またはより深く位置付けられ、前記半導体補助領域(112)は、前記第2の導電型の電荷キャリアを含み、さらなるpn接合を形成する前記半導体デバイス(1)の任意の他の半導体領域と比べて、前記半導体領域(11)との前記半導体チャネル領域(111)に最も近接して位置付けられる、半導体補助領域(112)
を含む、請求項11に記載の半導体デバイス(1)。 - 前記半導体領域(11)内に含まれるダイオードセル(1−2)をさらに含み、前記制御可能な電荷キャリアインジェクタ(112、113)が、前記ダイオードセル(1−2)内に含まれる半導体アノード領域(113)をさらに含み、前記半導体アノード領域(113)は前記第2の導電型の電荷キャリアの第3のドーピング濃度を有し、前記第2のドーピング濃度が前記第3のドーピング濃度よりも高い、請求項15に記載の半導体デバイス(1)。
- 半導体デバイス(1)と、前記半導体デバイス(1)に動作可能に結合されるゲートドライバ(2)とを備える回路機構(3)であって、前記半導体デバイス(1)は順電流モードおよび逆電流モードのうちの少なくとも1つで動作可能であり、
半導体領域(11)と、
前記半導体領域(11)内に電荷キャリアを注入するように構成される制御可能な電荷キャリアインジェクタ(112、113)と、
前記制御可能な電荷キャリアインジェクタ(112、113)に電気結合され、ゲート信号(2−1)を受信するように構成されるゲート電極(121)と、
を含み、
前記ゲートドライバ(2)は、
前記半導体領域(11)によって導通される前記逆方向の負荷電流は閾値を超えるか否かを検出するように構成される過負荷電流検出器(22)と、
前記ゲート信号(2−1)を発生するためのゲート信号発生器(21)と、を含み、前記ゲート信号発生器(21)は前記過負荷電流検出器(22)に動作可能に結合され、
前記過負荷電流検出器(22)が、前記逆方向の前記現在の負荷電流は前記閾値を超えないことを指示する場合には、前記半導体領域(11)が前記逆方向の定格負荷電流(RC)を導通することを可能にするために、前記ゲート電極(121)が前記電荷キャリアインジェクタ(113)に前記半導体領域(11)内に第1の電荷キャリア密度を誘導させるように、前記ゲート信号(2−1)に定格電圧範囲(R1)内の電圧を提供することによって、前記半導体デバイス(1)を定格状態で動作させることと、
前記過負荷電流検出器(22)が、前記逆方向の前記現在の負荷電流は前記閾値を実際に超えることを指示する場合には、前記半導体領域(11)が前記逆方向の過負荷電流(ROLC)を導通することを可能にするために、前記ゲート電極(121)が前記電荷キャリアインジェクタ(112)に前記半導体領域(11)内に第2の電荷キャリア密度を誘導させるように、前記ゲート信号(2−1)に過負荷電圧範囲(R2)内の電圧を提供することによって、前記半導体デバイス(1)を過負荷状態で動作させることであって、前記第2の電荷キャリア密度は前記第1の電荷キャリア密度よりも高い、動作させることと、
をするように構成される、回路機構(3)。 - 前記ゲート信号(2−1)に前記定格電圧範囲(R1)内の電圧が提供される場合には、前記制御可能な電荷キャリアインジェクタ(112、113)の少なくとも一部(113)が、前記半導体領域(11)内に電荷キャリアを注入することを控えるように構成される、請求項17に記載の回路機構(3)。
- 半導体デバイス(1)を動作させる方法(4)であって、前記半導体デバイス(1)は順電流モードおよび逆電流モードのうちの少なくとも1つで動作可能であり、半導体領域(11)と、前記半導体領域(11)内に電荷キャリアを注入するように構成される制御可能な電荷キャリアインジェクタ(112、113)と、前記制御可能な電荷キャリアインジェクタ(112、113)に電気結合され、ゲート信号(2−1)を受信するように構成されるゲート電極(121)と、を含み、前記方法は、
前記逆電流モードにおいて、前記半導体領域(11)によって導通される前記逆方向の負荷電流は閾値を超えるか否かを検出すること(41)と、
前記逆方向の前記現在の負荷電流が前記閾値を超えない場合には、前記半導体領域(11)が前記逆方向の定格負荷電流(RC)を導通することを可能にするために、前記ゲート電極(121)が前記電荷キャリアインジェクタ(113)に前記半導体領域(11)内に第1の電荷キャリア密度を誘導させるように、前記ゲート信号(2−1)に定格電圧範囲(R1)内の電圧を提供することによって、前記半導体デバイス(1)を定格状態で動作させること(42)と、
前記逆方向の前記現在の負荷電流が前記閾値を実際に超える場合には、前記半導体領域(11)が前記逆方向の過負荷電流(ROLC)を導通することを可能にするために、前記ゲート電極(121)が前記電荷キャリアインジェクタ(112)に前記半導体領域(11)内に第2の電荷キャリア密度を誘導させるように、前記ゲート信号(2−1)に過負荷電圧範囲(R2)内の電圧を提供することによって、前記半導体デバイス(1)を過負荷状態で動作させること(43)であって、前記第2の電荷キャリア密度は前記第1の電荷キャリア密度よりも高い、動作させること(43)と、
を含む、方法(4)。 - 前記逆方向の前記現在の負荷電流が前記閾値を超えない場合には、前記ゲート信号(2−1)の前記電圧をターンオン値(V1)とターンオフ値(V2)との間で各スイッチング周期(T)内に少なくとも1回交番させることによって、前記半導体デバイス(1)を定格動作周波数で動作させることと、
前記逆方向の前記現在の負荷電流が前記閾値を実際に超える場合には、前記半導体デバイス(1)を、前記スイッチング周期(T)の倍数と等しいかまたはそれよりも長い少なくとも最小期間の間、前記過負荷状態で動作させることと、
をさらに含む、請求項19に記載の方法。 - 前記半導体デバイス(1)を前記定格状態で動作させること(42)が、前記ゲート信号(2−1)に、最大期間以下の間、前記過負荷電圧範囲(R2)内の電圧を提供することを含み、前記最大期間は前記スイッチング周期(T)の何分の1かと等しいか、またはそれよりも短い、請求項20に記載の方法。
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