JP2018195775A - 半導体装置 - Google Patents
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- JP2018195775A JP2018195775A JP2017100704A JP2017100704A JP2018195775A JP 2018195775 A JP2018195775 A JP 2018195775A JP 2017100704 A JP2017100704 A JP 2017100704A JP 2017100704 A JP2017100704 A JP 2017100704A JP 2018195775 A JP2018195775 A JP 2018195775A
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- 239000004065 semiconductor Substances 0.000 title claims abstract description 61
- 239000012535 impurity Substances 0.000 claims abstract description 86
- 239000000758 substrate Substances 0.000 claims abstract description 40
- 239000002070 nanowire Substances 0.000 claims description 22
- 239000010410 layer Substances 0.000 description 71
- 229910052751 metal Inorganic materials 0.000 description 68
- 239000002184 metal Substances 0.000 description 68
- 230000004048 modification Effects 0.000 description 13
- 238000012986 modification Methods 0.000 description 13
- 239000011229 interlayer Substances 0.000 description 12
- 230000003071 parasitic effect Effects 0.000 description 12
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 5
- 229910052814 silicon oxide Inorganic materials 0.000 description 5
- 230000005669 field effect Effects 0.000 description 4
- 229910021332 silicide Inorganic materials 0.000 description 4
- FVBUAEGBCNSCDD-UHFFFAOYSA-N silicide(4-) Chemical compound [Si-4] FVBUAEGBCNSCDD-UHFFFAOYSA-N 0.000 description 4
- NRTOMJZYCJJWKI-UHFFFAOYSA-N Titanium nitride Chemical compound [Ti]#N NRTOMJZYCJJWKI-UHFFFAOYSA-N 0.000 description 3
- 230000009977 dual effect Effects 0.000 description 3
- 125000006850 spacer group Chemical group 0.000 description 3
- 229910052715 tantalum Inorganic materials 0.000 description 3
- GUVRBAGPIYLISA-UHFFFAOYSA-N tantalum atom Chemical compound [Ta] GUVRBAGPIYLISA-UHFFFAOYSA-N 0.000 description 3
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 2
- 230000004888 barrier function Effects 0.000 description 2
- 229910052802 copper Inorganic materials 0.000 description 2
- 239000010949 copper Substances 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 239000003292 glue Substances 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- MZLGASXMSKOWSE-UHFFFAOYSA-N tantalum nitride Chemical compound [Ta]#N MZLGASXMSKOWSE-UHFFFAOYSA-N 0.000 description 2
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 2
- 229910052721 tungsten Inorganic materials 0.000 description 2
- 239000010937 tungsten Substances 0.000 description 2
- 229910052581 Si3N4 Inorganic materials 0.000 description 1
- 108010021188 Superoxide Dismutase-1 Proteins 0.000 description 1
- 102100038836 Superoxide dismutase [Cu-Zn] Human genes 0.000 description 1
- 102100032891 Superoxide dismutase [Mn], mitochondrial Human genes 0.000 description 1
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 1
- QCWXUUIWCKQGHC-UHFFFAOYSA-N Zirconium Chemical compound [Zr] QCWXUUIWCKQGHC-UHFFFAOYSA-N 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 229910017052 cobalt Inorganic materials 0.000 description 1
- 239000010941 cobalt Substances 0.000 description 1
- GUTLYIVDDKVIGB-UHFFFAOYSA-N cobalt atom Chemical compound [Co] GUTLYIVDDKVIGB-UHFFFAOYSA-N 0.000 description 1
- 230000006378 damage Effects 0.000 description 1
- -1 for example Substances 0.000 description 1
- 229910052732 germanium Inorganic materials 0.000 description 1
- GNPVGFCGXDBREM-UHFFFAOYSA-N germanium atom Chemical compound [Ge] GNPVGFCGXDBREM-UHFFFAOYSA-N 0.000 description 1
- 229910052735 hafnium Inorganic materials 0.000 description 1
- VBJZVLUMGGDVMO-UHFFFAOYSA-N hafnium atom Chemical compound [Hf] VBJZVLUMGGDVMO-UHFFFAOYSA-N 0.000 description 1
- 238000005468 ion implantation Methods 0.000 description 1
- 238000002955 isolation Methods 0.000 description 1
- 229910052746 lanthanum Inorganic materials 0.000 description 1
- FZLIPJUXYLNCLC-UHFFFAOYSA-N lanthanum atom Chemical compound [La] FZLIPJUXYLNCLC-UHFFFAOYSA-N 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- RUFLMLWJRZAWLJ-UHFFFAOYSA-N nickel silicide Chemical compound [Ni]=[Si]=[Ni] RUFLMLWJRZAWLJ-UHFFFAOYSA-N 0.000 description 1
- 229910021334 nickel silicide Inorganic materials 0.000 description 1
- 238000000059 patterning Methods 0.000 description 1
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 1
- 229920005591 polysilicon Polymers 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 1
- 108010045815 superoxide dismutase 2 Proteins 0.000 description 1
- 239000010936 titanium Substances 0.000 description 1
- 229910052719 titanium Inorganic materials 0.000 description 1
- 229910052727 yttrium Inorganic materials 0.000 description 1
- VWQVUPCCIRVNHF-UHFFFAOYSA-N yttrium atom Chemical compound [Y] VWQVUPCCIRVNHF-UHFFFAOYSA-N 0.000 description 1
- 229910052726 zirconium Inorganic materials 0.000 description 1
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- H01L27/0203—Particular design considerations for integrated circuits
- H01L27/0248—Particular design considerations for integrated circuits for electrical or thermal protection, e.g. electrostatic discharge [ESD] protection
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- H01L29/0619—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions characterised by particular constructional design considerations, e.g. for preventing surface leakage, for controlling electric field concentration or for internal isolations regions for preventing surface leakage or controlling electric field concentration for increasing or controlling the breakdown voltage of reverse biased devices by the doping profile or the shape or the arrangement of the PN junction, or with supplementary regions, e.g. junction termination extension [JTE] with a supplementary region doped oppositely to or in rectifying contact with the semiconductor containing or contacting region, e.g. guard rings with PN or Schottky junction
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- H01L27/0251—Particular design considerations for integrated circuits for electrical or thermal protection, e.g. electrostatic discharge [ESD] protection for MOS devices
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Abstract
Description
図1は、第1の実施の形態に係る半導体装置の回路図である。図1に示すように、半導体装置1は、N型の電界効果型トランジスタ(FET)であるNMOS11(第1トランジスタ)と、N型の電界効果型トランジスタであるNMOS12(第2トランジスタ)とを有している。NMOS11及びNMOS12は、VDDとVSSとの間に直列に接続されている。NMOS11のゲート電極113及びNMOS12のゲート電極123には、ESDトリガー回路C11が接続されている。D11は、寄生ダイオードである。
第1の実施の形態の変形例1では、半導体装置1がFinFET(フィン(FIN)形状のチャネルを有する電界効果型トランジスタ)である場合の例を示す。なお、第1の実施の形態の変形例1において、既に説明した実施の形態と同一構成部についての説明は省略する場合がある。
第1の実施の形態の変形例2では、半導体装置1がナノワイヤFETである場合の例を示す。なお、第1の実施の形態の変形例2において、既に説明した実施の形態と同一構成部についての説明は省略する場合がある。
第2の実施の形態では、VSS配線の配置が異なる例を示す。なお、第2の実施の形態において、既に説明した実施の形態と同一構成部についての説明は省略する場合がある。
第3の実施の形態では、ガードリングの一部を共有する例を示す。なお、第3の実施の形態において、既に説明した実施の形態と同一構成部についての説明は省略する場合がある。
第4の実施の形態では、ガードリングの一部を削除する例を示す。なお、第4の実施の形態において、既に説明した実施の形態と同一構成部についての説明は省略する場合がある。
11、12 NMOS
111 第1不純物領域
112 第2不純物領域
113、123 ゲート電極
113D、123D ゲート電極構造
115 ナノワイヤ
117、127 ガードリング
121 第3不純物領域
122 第4不純物領域
130 基板
131 P−Well
132 STI
133 シリサイド層
134 ゲート絶縁膜
135 スペーサ膜
136、137、138、139 層間絶縁膜
151、154 配線
152 VDD配線
153 VSS配線
155、156 ビア
170 I/Oセル
Claims (9)
- 基板と、
前記基板に形成され、第1導電型の第1不純物領域、及び前記第1導電型の第2不純物領域を有する第1トランジスタと、
前記基板に形成され、前記第2不純物領域に電気的に接続する前記第1導電型の第3不純物領域、及び前記第1導電型の第4不純物領域を有する第2トランジスタと、
前記第1不純物領域に電気的に接続する電源端子と、
前記第4不純物領域に電気的に接続する接地端子と、
前記基板に形成され、平面視で前記第1トランジスタを囲み、前記接地端子と電気的に接続し、前記第1導電型とは異なる第2導電型を有する第1ガードリングと、
前記基板に形成され、平面視で前記第2トランジスタを囲み、前記接地端子と電気的に接続し、前記第2導電型を有し、前記第1ガードリングよりも平面視で幅が狭い第2ガードリングと、を有することを特徴とする半導体装置。 - 前記第1ガードリング上に設けられ、前記第1ガードリングと前記接地端子とを電気的に接続する経路の一部をなす第1ビアと、
前記第2ガードリング上に設けられ、前記第2ガードリングと前記接地端子とを電気的に接続する経路の一部をなす第2ビアと、を有し、
前記第1ガードリングの幅方向に設けられた前記第1ビアの数は、前記第2ガードリングの幅方向に設けられた前記第2ビアの数よりも多いことを特徴とする請求項1に記載の半導体装置。 - 前記第1ガードリング上及び前記第2ガードリング上に設けられ、前記第1ガードリング及び前記第2ガードリングと前記接地端子とを電気的に接続する経路の一部をなす第1配線を有し、
前記第1ガードリング上に位置する前記第1配線の第1部分の幅は、前記第2ガードリング上に位置する前記第1配線の第2部分の幅よりも太いことを特徴とする請求項1又は2に記載の半導体装置。 - 前記第1不純物領域は、前記第2不純物領域よりも前記第1ガードリングに近い位置に配置されていることを特徴とする請求項1乃至3の何れか一項に記載の半導体装置。
- 前記電源端子と電気的に接続される電源配線は、平面視で前記第1トランジスタと重なって配置され、
前記接地端子と電気的に接続される接地配線は、平面視で前記第2トランジスタと重なって配置されていることを特徴とする請求項1乃至4の何れか一項に記載の半導体装置。 - 前記電源端子と電気的に接続される電源配線は、平面視で前記第1トランジスタと重なって配置され、
前記接地端子と電気的に接続される接地配線は、平面視で前記第2トランジスタ及び前記第1トランジスタと重なって配置され、
前記第1トランジスタ上の前記電源配線と前記第1トランジスタ上の前記接地配線とは平面視で交互に配置されていることを特徴とする請求項1乃至4の何れか一項に記載の半導体装置。 - 前記第1トランジスタ及び前記第2トランジスタがFinFETであることを特徴とする請求項1乃至6の何れか一項に記載の半導体装置。
- 前記第1トランジスタ及び前記第2トランジスタがナノワイヤFETであることを特徴とする請求項1乃至6の何れか一項に記載の半導体装置。
- 前記第1ガードリング及び前記第2ガードリングが、板状の構造を有し、ナノワイヤ構造を有さないことを特徴とする請求項8に記載の半導体装置。
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JP2017100704A JP6828588B2 (ja) | 2017-05-22 | 2017-05-22 | 半導体装置 |
US15/972,949 US10461150B2 (en) | 2017-05-22 | 2018-05-07 | Semiconductor device |
CN201810437042.XA CN108962886B (zh) | 2017-05-22 | 2018-05-09 | 半导体装置 |
US16/563,670 US10854710B2 (en) | 2017-05-22 | 2019-09-06 | Semiconductor device |
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JP6841161B2 (ja) * | 2017-05-25 | 2021-03-10 | 株式会社ソシオネクスト | 半導体装置 |
CN113841228A (zh) * | 2019-05-23 | 2021-12-24 | 株式会社索思未来 | 半导体装置 |
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CN111564411B (zh) * | 2020-06-08 | 2022-12-23 | 深圳铨力半导体有限公司 | 一种半导体装置及其形成方法 |
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KR100431066B1 (ko) * | 2001-09-27 | 2004-05-12 | 삼성전자주식회사 | 정전 방전 보호 기능을 가진 반도체 장치 |
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JP6828588B2 (ja) * | 2017-05-22 | 2021-02-10 | 株式会社ソシオネクスト | 半導体装置 |
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