JP2018146983A - 露光装置及びデバイス製造方法 - Google Patents
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70691—Handling of masks or workpieces
- G03F7/70758—Drive means, e.g. actuators, motors for long- or short-stroke modules or fine or coarse driving
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70691—Handling of masks or workpieces
- G03F7/70716—Stages
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/708—Construction of apparatus, e.g. environment aspects, hygiene aspects or materials
- G03F7/70808—Construction details, e.g. housing, load-lock, seals or windows for passing light in or out of apparatus
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/708—Construction of apparatus, e.g. environment aspects, hygiene aspects or materials
- G03F7/70808—Construction details, e.g. housing, load-lock, seals or windows for passing light in or out of apparatus
- G03F7/70816—Bearings
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02K—DYNAMO-ELECTRIC MACHINES
- H02K41/00—Propulsion systems in which a rigid body is moved along a path due to dynamo-electric interaction between the body and a magnetic field travelling along the path
- H02K41/02—Linear motors; Sectional motors
- H02K41/03—Synchronous motors; Motors moving step by step; Reluctance motors
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02K—DYNAMO-ELECTRIC MACHINES
- H02K41/00—Propulsion systems in which a rigid body is moved along a path due to dynamo-electric interaction between the body and a magnetic field travelling along the path
- H02K41/02—Linear motors; Sectional motors
- H02K41/03—Synchronous motors; Motors moving step by step; Reluctance motors
- H02K41/031—Synchronous motors; Motors moving step by step; Reluctance motors of the permanent magnet type
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02K—DYNAMO-ELECTRIC MACHINES
- H02K7/00—Arrangements for handling mechanical energy structurally associated with dynamo-electric machines, e.g. structural association with mechanical driving motors or auxiliary dynamo-electric machines
- H02K7/08—Structural association with bearings
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02K—DYNAMO-ELECTRIC MACHINES
- H02K2201/00—Specific aspects not provided for in the other groups of this subclass relating to the magnetic circuits
- H02K2201/18—Machines moving with multiple degrees of freedom
Abstract
Description
また、上記実施形態では、一対のY駆動用車輪61とX駆動用車輪62とが設けられた場合について説明したが、駆動輪は、必ずしも設けなくても良い。図8(A)及び図8(B)には、駆動輪が設けられていない変形例に係るウエハステージWST’の側面図及び底面図がそれぞれ示されている。この場合、図8(B)からわかるように、ウエハステージ本体22の底面には、2つの噴出し口73のみが設けられ、開口及び開閉扉等は存在しない。しかるに、図8(A)に示されるように、ウエハステージWST’が定盤30の上面に着地している場合、気室72が形成されている。このため、気体供給装置82から加圧気体(高圧空気)を管路74内に送り込み、噴出し口73から気室72内に噴き出させることで、気室72内を、外部に対して陽圧にすることができる。これにより、ウエハステージWST’の重量を少なくとも一部キャンセルすることができ、この状態で、ウエハステージWST’を作業者が、牽引及び/又は押すことで、手動によりウエハステージWST’を定盤30上で移動させることが可能である。
Claims (1)
- ベース部材と、
該ベース部材上に配置され、該ベース部材上で2次元移動可能な移動体と、
前記ベース部材に設けられた固定子と、前記移動体に設けられた可動子とを有し、前記移動体を前記ベース部材上で駆動する磁気浮上方式の平面モータと、を備え、
前記移動体は、移動体本体と、該移動体本体の前記ベース部材に対向する下面のうち、前記可動子の周囲に設けられ、前記ベース部材に対向する面が、前記可動子を含む他の部分と同一面又は前記可動子を含む他の部分より前記ベース部材側に突出した枠状部材と、前記移動体本体に設けられ、外部から供給された加圧気体を前記ベース部材に向けて噴き出す噴出し口とを有する移動体装置。
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
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JP2012219946 | 2012-10-02 | ||
JP2012219946 | 2012-10-02 |
Related Parent Applications (1)
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JP2014539782A Division JP6394967B2 (ja) | 2012-10-02 | 2013-10-02 | 移動体装置、露光装置、及びデバイス製造方法 |
Publications (2)
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JP2018146983A true JP2018146983A (ja) | 2018-09-20 |
JP6566218B2 JP6566218B2 (ja) | 2019-08-28 |
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JP2014539782A Active JP6394967B2 (ja) | 2012-10-02 | 2013-10-02 | 移動体装置、露光装置、及びデバイス製造方法 |
JP2018107438A Active JP6566218B2 (ja) | 2012-10-02 | 2018-06-05 | 露光装置及びデバイス製造方法 |
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JP2014539782A Active JP6394967B2 (ja) | 2012-10-02 | 2013-10-02 | 移動体装置、露光装置、及びデバイス製造方法 |
Country Status (7)
Country | Link |
---|---|
US (2) | US10133194B2 (ja) |
EP (1) | EP2905804B1 (ja) |
JP (2) | JP6394967B2 (ja) |
KR (1) | KR102126664B1 (ja) |
CN (2) | CN104798178B (ja) |
HK (2) | HK1211134A1 (ja) |
WO (1) | WO2014054689A1 (ja) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR20230055952A (ko) | 2021-10-19 | 2023-04-26 | 도쿄엘렉트론가부시키가이샤 | 기판 반송 장치 및 기판 반송 방법 |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN111435222B (zh) * | 2019-01-14 | 2021-04-02 | 上海微电子装备(集团)股份有限公司 | 一种运动台随动压力补偿装置、光刻机系统及其驱动方法 |
WO2020260566A1 (de) * | 2019-06-27 | 2020-12-30 | Beckhoff Automation Gmbh | Anordnung von statormodulen für ein planarantriebssystem |
DE102021127039A1 (de) * | 2021-10-19 | 2023-04-20 | Beckhoff Automation Gmbh | Verfahren zum Betreiben eines Planarantriebssystems und Planarantriebssystem |
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2013
- 2013-10-02 WO PCT/JP2013/076819 patent/WO2014054689A1/ja active Application Filing
- 2013-10-02 CN CN201380060751.6A patent/CN104798178B/zh active Active
- 2013-10-02 CN CN201810642219.XA patent/CN108983554A/zh active Pending
- 2013-10-02 EP EP13843307.3A patent/EP2905804B1/en active Active
- 2013-10-02 JP JP2014539782A patent/JP6394967B2/ja active Active
- 2013-10-02 KR KR1020157011466A patent/KR102126664B1/ko active IP Right Grant
- 2013-10-02 US US14/432,513 patent/US10133194B2/en active Active
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2015
- 2015-11-27 HK HK15111738.7A patent/HK1211134A1/xx unknown
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2018
- 2018-06-05 JP JP2018107438A patent/JP6566218B2/ja active Active
- 2018-11-06 US US16/181,689 patent/US10474044B2/en active Active
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2019
- 2019-01-28 HK HK19101385.0A patent/HK1258908A1/zh unknown
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Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR20230055952A (ko) | 2021-10-19 | 2023-04-26 | 도쿄엘렉트론가부시키가이샤 | 기판 반송 장치 및 기판 반송 방법 |
Also Published As
Publication number | Publication date |
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KR20150060982A (ko) | 2015-06-03 |
EP2905804A4 (en) | 2017-01-25 |
EP2905804B1 (en) | 2019-05-01 |
CN104798178A (zh) | 2015-07-22 |
JP6394967B2 (ja) | 2018-09-26 |
HK1211134A1 (en) | 2016-05-13 |
JPWO2014054689A1 (ja) | 2016-08-25 |
US10133194B2 (en) | 2018-11-20 |
JP6566218B2 (ja) | 2019-08-28 |
US20150301458A1 (en) | 2015-10-22 |
HK1258908A1 (zh) | 2019-11-22 |
CN108983554A (zh) | 2018-12-11 |
EP2905804A1 (en) | 2015-08-12 |
WO2014054689A1 (ja) | 2014-04-10 |
US10474044B2 (en) | 2019-11-12 |
CN104798178B (zh) | 2018-07-20 |
KR102126664B1 (ko) | 2020-06-25 |
US20190079415A1 (en) | 2019-03-14 |
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