JP2018133387A - ウエーハの加工方法 - Google Patents
ウエーハの加工方法 Download PDFInfo
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- JP2018133387A JP2018133387A JP2017024829A JP2017024829A JP2018133387A JP 2018133387 A JP2018133387 A JP 2018133387A JP 2017024829 A JP2017024829 A JP 2017024829A JP 2017024829 A JP2017024829 A JP 2017024829A JP 2018133387 A JP2018133387 A JP 2018133387A
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- 238000003672 processing method Methods 0.000 title claims abstract description 12
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims abstract description 239
- 238000005520 cutting process Methods 0.000 claims abstract description 221
- CURLTUGMZLYLDI-UHFFFAOYSA-N Carbon dioxide Chemical compound O=C=O CURLTUGMZLYLDI-UHFFFAOYSA-N 0.000 claims abstract description 70
- 229910002092 carbon dioxide Inorganic materials 0.000 claims abstract description 35
- 239000001569 carbon dioxide Substances 0.000 claims abstract description 35
- 238000004140 cleaning Methods 0.000 claims description 49
- 238000007599 discharging Methods 0.000 claims description 4
- 238000000034 method Methods 0.000 claims 1
- 239000008367 deionised water Substances 0.000 abstract 3
- 229910021641 deionized water Inorganic materials 0.000 abstract 3
- 230000006378 damage Effects 0.000 abstract 2
- 239000000203 mixture Substances 0.000 abstract 1
- 235000012431 wafers Nutrition 0.000 description 88
- 238000005406 washing Methods 0.000 description 9
- 238000003860 storage Methods 0.000 description 8
- 230000005611 electricity Effects 0.000 description 6
- 230000003068 static effect Effects 0.000 description 6
- 239000002699 waste material Substances 0.000 description 6
- 230000015556 catabolic process Effects 0.000 description 3
- 230000002093 peripheral effect Effects 0.000 description 3
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 2
- 238000011109 contamination Methods 0.000 description 2
- 239000012530 fluid Substances 0.000 description 2
- 238000003780 insertion Methods 0.000 description 2
- 230000037431 insertion Effects 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 239000006061 abrasive grain Substances 0.000 description 1
- 239000000428 dust Substances 0.000 description 1
- 238000005323 electroforming Methods 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 230000013011 mating Effects 0.000 description 1
- 238000002844 melting Methods 0.000 description 1
- 230000008018 melting Effects 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- 230000000149 penetrating effect Effects 0.000 description 1
- 238000007747 plating Methods 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 238000011144 upstream manufacturing Methods 0.000 description 1
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B28—WORKING CEMENT, CLAY, OR STONE
- B28D—WORKING STONE OR STONE-LIKE MATERIALS
- B28D5/00—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
- B28D5/0058—Accessories specially adapted for use with machines for fine working of gems, jewels, crystals, e.g. of semiconductor material
- B28D5/0076—Accessories specially adapted for use with machines for fine working of gems, jewels, crystals, e.g. of semiconductor material for removing dust, e.g. by spraying liquids; for lubricating, cooling or cleaning tool or work
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B28—WORKING CEMENT, CLAY, OR STONE
- B28D—WORKING STONE OR STONE-LIKE MATERIALS
- B28D1/00—Working stone or stone-like materials, e.g. brick, concrete or glass, not provided for elsewhere; Machines, devices, tools therefor
- B28D1/02—Working stone or stone-like materials, e.g. brick, concrete or glass, not provided for elsewhere; Machines, devices, tools therefor by sawing
- B28D1/04—Working stone or stone-like materials, e.g. brick, concrete or glass, not provided for elsewhere; Machines, devices, tools therefor by sawing with circular or cylindrical saw-blades or saw-discs
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B28—WORKING CEMENT, CLAY, OR STONE
- B28D—WORKING STONE OR STONE-LIKE MATERIALS
- B28D5/00—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
- B28D5/0005—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor by breaking, e.g. dicing
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B28—WORKING CEMENT, CLAY, OR STONE
- B28D—WORKING STONE OR STONE-LIKE MATERIALS
- B28D5/00—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
- B28D5/0005—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor by breaking, e.g. dicing
- B28D5/0052—Means for supporting or holding work during breaking
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B28—WORKING CEMENT, CLAY, OR STONE
- B28D—WORKING STONE OR STONE-LIKE MATERIALS
- B28D7/00—Accessories specially adapted for use with machines or devices of the preceding groups
- B28D7/02—Accessories specially adapted for use with machines or devices of the preceding groups for removing or laying dust, e.g. by spraying liquids; for cooling work
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B28—WORKING CEMENT, CLAY, OR STONE
- B28D—WORKING STONE OR STONE-LIKE MATERIALS
- B28D7/00—Accessories specially adapted for use with machines or devices of the preceding groups
- B28D7/04—Accessories specially adapted for use with machines or devices of the preceding groups for supporting or holding work or conveying or discharging work
- B28D7/046—Accessories specially adapted for use with machines or devices of the preceding groups for supporting or holding work or conveying or discharging work the supporting or holding device being of the vacuum type
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02041—Cleaning
- H01L21/02076—Cleaning after the substrates have been singulated
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/302—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting
- H01L21/304—Mechanical treatment, e.g. grinding, polishing, cutting
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67092—Apparatus for mechanical treatment
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L21/6835—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using temporarily an auxiliary support
- H01L21/6836—Wafer tapes, e.g. grinding or dicing support tapes
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/77—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate
- H01L21/78—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B28—WORKING CEMENT, CLAY, OR STONE
- B28D—WORKING STONE OR STONE-LIKE MATERIALS
- B28D5/00—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
- B28D5/02—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor by rotary tools, e.g. drills
- B28D5/022—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor by rotary tools, e.g. drills by cutting with discs or wheels
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2221/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof covered by H01L21/00
- H01L2221/67—Apparatus for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components; Apparatus not specifically provided for elsewhere
- H01L2221/683—Apparatus for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L2221/68304—Apparatus for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components; Apparatus not specifically provided for elsewhere for supporting or gripping using temporarily an auxiliary support
- H01L2221/68327—Apparatus for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components; Apparatus not specifically provided for elsewhere for supporting or gripping using temporarily an auxiliary support used during dicing or grinding
Abstract
Description
図1に示す切削装置1は、被加工物であるウエーハWに切削を施す切削装置の一例である。切削装置1は、装置ベース2を有しており、装置ベース2の前部には、複数の被加工物であるウエーハWを収容するカセット3が配設されている。装置ベース2の上面2aには、カセット3から切削前のウエーハWを搬出するとともにカセット3に切削後のウエーハWを搬入する搬入出手段4と、ウエーハWが仮置きされる仮置き領域5と、ウエーハWを保持するチャックテーブル7とが配設されている。カセット3の近傍には、仮置き領域5とチャックテーブル7との間でウエーハWを搬送する第1の搬送手段6aが配設されている。
次に、切削装置1を用いて、図1に示すウエーハWを切削して個々のデバイスDに分割するウエーハの加工方法について説明する。ウエーハWは、円形板状の被加工物の一例であって、例えばシリコンウエーハである。ウエーハWの表面Waには、格子状に形成された複数の分割予定ラインSによって区画された複数の領域にデバイスDが形成されている。ウエーハWの表面Waと反対側にある裏面Wbは、例えばダイシングテープTに貼着される。そして、ウエーハWは、ダイシングテープTを介して環状のフレームFと一体となっており、この状態でカセット3に複数収容されている。
まず、搬入出手段4は、ダイシングテープTを介してフレームFと一体となったウエーハWをカセット3から引き出して仮置き領域5に仮置きする。次いで、第1の搬送手段6aが、仮置き領域5に仮置きされたウエーハWを搬出し、ダイシングテープT側から搬入出領域P1で待機するチャックテーブル7の保持面7aに載置する。そして、図示しない吸引源の吸引力の作用を受けた保持面7aにおいてウエーハWを吸引保持するとともに、クランプ部7bによってフレームFを固定する。
次に、切削送り手段9によってチャックテーブル7を切削領域P2に向けて移動させる。ブレードカバー30が装着された切削手段20の下方にチャックテーブル7が移動してきたら、図3で示したスピンドル220が回転し、切削ブレード21を所定の回転速度で回転させるとともに、切削手段20をZ軸方向に下降させ、切削ブレード21の切り刃213によってウエーハWの表面Waに対して切削を行う。
5:仮置き領域 6a:第1の搬送手段 6b:第2の搬送手段
7:チャックテーブル 7a:保持面 7b:クランプ部 8:移動基台
9:切削送り手段 10:洗浄水供給手段 11:支持片 12:ノズル 13:ツマミ
14:固定接続部 15:流体供給孔 16:貫通孔 17:洗浄水噴出口
20:切削手段 21:切削ブレード 210:ハブ基台ボス部
211:ハブ基台テーパー部 212:外周部 213:切り刃
213a:刃先 214:マウント固定ナット 215:マウントフランジ
22:スピンドルユニット 220:スピンドル 221:スピンドルハウジング
30:ブレードカバー 300:カバー本体 300a:後部側カバー
300b:前部側カバー 301:底部 31:開口部
32:エアー取り込み路 33:吸引開口部 34:排出路 35:排出口
36:排出手段 37:吸引源 38:スピンドル用挿入孔
39:マウントフランジ収容部
40:切削水供給手段 41:供給部 42:切削水供給口 43:切削水供給路
44:接続供給路 45a,45b:切削水供給領域 46:切削屑
50:混合水生成装置 51:純水供給源 52:第一の供給経路
53:第二の供給経路 54:第一の混合手段 55:キャッチ弁 56:タンク
57:ストップ弁 58:ガス流量調整弁 59:キャッチ弁
60:フィルタ 61:第1の濃度測定手段 62:貯水タンク
63:第一の流量調整弁 64:第二の混合手段 65:キャッチ弁
66:第二の流量調整弁 67:第三の水流量調整弁 68:第二の濃度測定手段
69:第四の流量調整弁 70:洗浄水 71:切削水
Claims (3)
- 表面に格子状に形成された複数の分割予定ラインによって区画された複数の領域にデバイスが形成されたウエーハを、該分割予定ラインに沿って分割するウエーハの加工方法であって、
切削装置に備えるチャックテーブルにダイシングテープを介してウエーハを保持する保持ステップと、
切削ブレードでウエーハを該分割予定ラインに沿って切削する分割ステップと、を備え、
該分割ステップでは、ウエーハの表面には純水に二酸化炭素を混合させた洗浄水を供給し、切削ブレードには該純水または該洗浄水よりも低い濃度の二酸化炭素を混合させた純水からなる切削水を供給することを特徴とするウエーハの加工方法。 - 前記切削ブレードは、ブレードカバーによって覆われ、
該ブレードカバーは、底部に該切削ブレードの先端を突出させるスリット状の開口部と、
前記切削水を該切削ブレードに供給する切削水噴出口と、
該切削水を排出する排出手段と、を少なくとも備えることを特徴とする請求項1に記載のウエーハの加工方法。 - 前記洗浄水は、前記チャックテーブルの移動経路に交差する方向に配設されるノズルによってウエーハの表面に供給されることを特徴とする請求項1に記載のウエーハの加工方法。
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JP2017024829A JP6837859B2 (ja) | 2017-02-14 | 2017-02-14 | ウエーハの加工方法 |
US15/892,493 US10562207B2 (en) | 2017-02-14 | 2018-02-09 | Wafer processing method |
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JP7428519B2 (ja) | 2020-01-10 | 2024-02-06 | 株式会社ディスコ | 切削装置、及び、切削方法 |
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CN110867501B (zh) * | 2018-08-28 | 2020-11-27 | 山东浪潮华光光电子股份有限公司 | 一种GaAs基发光二极管芯片的切割方法 |
US11081334B2 (en) * | 2019-08-07 | 2021-08-03 | Taiwan Semiconductor Manufacturing Company, Ltd. | Particle prevention in wafer edge trimming |
CN112077746A (zh) * | 2020-09-28 | 2020-12-15 | 德清之家纺织有限公司 | 一种工艺品打磨装置用粉尘吸收结构 |
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JP2007242726A (ja) * | 2006-03-06 | 2007-09-20 | Tokyo Seimitsu Co Ltd | ダイシング装置 |
JP2014210303A (ja) * | 2013-04-18 | 2014-11-13 | 株式会社ディスコ | 切削装置 |
JP2015082646A (ja) * | 2013-10-24 | 2015-04-27 | 株式会社ディスコ | 切削装置 |
JP2015139860A (ja) * | 2014-01-30 | 2015-08-03 | 株式会社ディスコ | 切削方法 |
JP2016159376A (ja) * | 2015-02-27 | 2016-09-05 | 株式会社ディスコ | 切削装置 |
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JP7428519B2 (ja) | 2020-01-10 | 2024-02-06 | 株式会社ディスコ | 切削装置、及び、切削方法 |
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