JP2018095916A - 基板処理装置、リソグラフィ用テンプレートの製造方法、プログラム - Google Patents
基板処理装置、リソグラフィ用テンプレートの製造方法、プログラム Download PDFInfo
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- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
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Abstract
Description
本発明の第一実施形態について説明する。
図例のように、基板処理装置100は、容器202を備えている。容器202内には、基板200を処理する処理空間205と、基板200を処理空間205に搬送する際に基板200が通過する搬送空間206とが形成されている。容器202は、上部容器202aと下部容器202bで構成される。上部容器202aと下部容器202bの間には仕切り板208が設けられる。
次に基板載置部の詳細について、図3を用いて説明する。図3は基板載置台212を拡大した説明図である。前述のようにバッファ構造211は凸部211aを有する。凸部211aは、基板外周裏面200eを支持するものであり、例えば周状で構成される。凸部211aの上端面が基板外周裏面200eを支持することで、基板200とバッファ構造211の底面を構成する底部211eとの間に空間211bが構成される。
シャワーヘッド230の蓋231に設けられたガス導入孔231aと連通するよう、蓋231には共通ガス供給管242が接続される。共通ガス供給管242には、第一ガス供給管243a、第二ガス供給管244a、第三ガス供給管245aが接続されている。第二ガス供給管244aは共通ガス供給管242に接続される。なお、本実施形態においては、第一ガス供給管243a、第二ガス供給管244a、第三ガス供給管245aから供給されるガスを処理ガスと呼ぶ。
第一ガス供給管243aには、上流方向から順に、第一ガス源243b、流量制御器(流量制御部)であるマスフローコントローラ(MFC)243c、及び開閉弁であるバルブ243dが設けられている。
第二ガス供給管244aには、上流方向から順に、第二ガス源244b、流量制御器(流量制御部)であるマスフローコントローラ(MFC)244c、及び開閉弁であるバルブ244d、リモートプラズマユニット244eが設けられている。
第三ガス供給管245aには、上流方向から順に、第三ガス源245b、流量制御器(流量制御部)であるマスフローコントローラ(MFC)245c、及び開閉弁であるバルブ245dが設けられている。
容器202の雰囲気を排気する排気系は、容器202に接続された複数の排気管を有する。処理空間205に接続される排気管(第1排気管)262と、搬送空間206に接続される排気管(第2排気管)261とを有する。また、各排気管261,262の下流側には、排気管(第3排気管)264が接続される。
次に、図5を用いてコントローラ280の詳細を説明する。基板処理装置10は、基板処理装置10の各部の動作を制御するコントローラ280を有している。
次に、基板処理装置100を使用して、基板200上に薄膜を形成する工程について、図6を参照しながら説明する。図6は、本発明の実施形態にかかる成膜工程のフロー図である。
基板搬入・載置工程S202を説明する。基板処理装置100では基板載置台212を基板200の搬送位置まで下降させることにより、基板載置台212の貫通孔214にリフトピン207を貫通させる。その結果、リフトピン207が、基板載置台212表面よりも所定の高さ分だけ突出した状態となる。続いて、ゲートバルブ206を開き、図示しない基板移載機を用いて、処理室内に基板200を搬入し、リフトピン207上に基板200を移載する。これにより、基板200は、基板載置台212の表面から突出したリフトピン207上に水平姿勢で支持される。
S202の後は、S204の成膜工程を行う。成膜工程S204では、プロセスレシピに応じて、第一ガス供給系、第二ガス供給系を制御して各ガスを処理空間205に供給すると共に、排気系を制御して処理空間を排気し、基板200上、特にパターン形成領域上にハードマスク膜を形成する。なお、ここでは第一ガスと第二ガスとを同時に処理空間に存在させてCVD処理を行ったり、第一ガスと第二ガスとを交互に供給してサイクリック処理を行ったりしても良い。
S206では、上述したS202と逆の手順にて、処理済みの基板200を容器202の外へ搬出する。そして、S202と同様の手順にて、次に待機している未処理の基板200を容器202内に搬入する。その後、搬入された基板200に対しては、S204が実行されることになる。
続いて第二の実施形態を、図7を用いて説明する。第一の実施形態とは基板載置台212の形状が相違する。以下、相違点を中心に説明する。
続いて第三の実施形態を、図8を用いて説明する。第一の実施形態とは基板載置台212の形状が相違する。以下、相違点を中心に説明する。
以上に、本発明の実施形態を具体的に説明したが、それに限定されるものではなく、その要旨を逸脱しない範囲で種々変更可能である。
図例のように、基板処理装置100は、容器202を備えている。容器202内には、基板200を処理する処理空間205と、基板200を処理空間205に搬送する際に基板200が通過する搬送空間206とが形成されている。容器202は、上部容器202aと下部容器202bで構成される。上部容器202aと下部容器202bの間には仕切り板208が設けられる。処理空間を構成する部屋を処理室と呼ぶ。
Claims (7)
- 中央にパターン形成領域を有し、その外周に非接触領域を有する基板のうち、前記非接触領域の裏面を支持する凸部と、前記凸部と共に空間を構成する底部と、を有する基板載置台と、
前記基板載置台を有する処理室と、
前記処理室に処理ガスを供給する処理ガス供給部と、
前記空間にホットガスを供給するホットガス供給部と
を有する基板処理装置。 - 前記ホットガス供給部は、前記底部に設けられる供給管を有し、前記供給管にはガスを加熱する加熱部が設けられる請求項1に記載の基板処理装置。
- 前記空間は、少なくとも前記パターン形成領域と前記非接触領域それぞれの裏面の下方に設けられる請求項1または請求項2に記載の基板処理装置。
- 垂直方向において、前記凸部の上端と前記底部の間に分散板が設けられる請求項1から請求項3のうち、いずれか一項に記載の基板処理装置。
- 前記分散板は、前記基板と並行に配される請求項4に記載の基板処理装置。
- 中央にパターン形成領域を有し、その外周に非接触領域を有する基板を処理室に搬入する工程と、
前記非接触領域の裏面を支持する凸部と、前記凸部と共に空間を構成する底部と、を有する基板載置台のうち、前記凸部に前記非接触領域の裏面を支持する工程と、
前記空間にホットガスを供給した状態で前記処理室に処理ガスを供給し、基板を処理する工程と、
を有するリソグラフィ用テンプレートの製造方法。 - 中央にパターン形成領域を有し、その外周に非接触領域を有する基板を処理室に搬入する処理と、
前記非接触領域の裏面を支持する凸部と、前記凸部と共に空間を構成する底部と、を有する基板載置台のうち、前記凸部に前記非接触領域の裏面を支持する処理と、
前記空間にホットガスを供給した状態で前記処理室に処理ガスを供給し、基板を処理する処理と、
をコンピュータによって基板処理装置に実行させるプログラム。
Priority Applications (5)
Application Number | Priority Date | Filing Date | Title |
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JP2016241145A JP2018095916A (ja) | 2016-12-13 | 2016-12-13 | 基板処理装置、リソグラフィ用テンプレートの製造方法、プログラム |
KR1020170100907A KR20180068277A (ko) | 2016-12-13 | 2017-08-09 | 기판 처리 장치, 리소그래피 템플릿의 제조 방법 및 기록 매체 |
CN201710697329.1A CN108615693A (zh) | 2016-12-13 | 2017-08-15 | 衬底处理装置、光刻用模板的制造方法及记录程序的记录介质 |
US15/701,977 US10156798B2 (en) | 2016-12-13 | 2017-09-12 | Substrate processing apparatus |
TW106134449A TW201822248A (zh) | 2016-12-13 | 2017-10-06 | 基板處理裝置、微影用模板之製造方法、程式 |
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US (1) | US10156798B2 (ja) |
JP (1) | JP2018095916A (ja) |
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CN (1) | CN108615693A (ja) |
TW (1) | TW201822248A (ja) |
Cited By (1)
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JP2018125449A (ja) * | 2017-02-02 | 2018-08-09 | 株式会社日立国際電気 | リソグラフィ用テンプレートの製造方法、プログラム及び基板処理装置 |
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KR20180068277A (ko) | 2018-06-21 |
CN108615693A (zh) | 2018-10-02 |
TW201822248A (zh) | 2018-06-16 |
US20180164702A1 (en) | 2018-06-14 |
US10156798B2 (en) | 2018-12-18 |
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