JP2018076567A5 - - Google Patents
Download PDFInfo
- Publication number
- JP2018076567A5 JP2018076567A5 JP2016220078A JP2016220078A JP2018076567A5 JP 2018076567 A5 JP2018076567 A5 JP 2018076567A5 JP 2016220078 A JP2016220078 A JP 2016220078A JP 2016220078 A JP2016220078 A JP 2016220078A JP 2018076567 A5 JP2018076567 A5 JP 2018076567A5
- Authority
- JP
- Japan
- Prior art keywords
- transition metal
- laminate
- oxide film
- thermoplastic resin
- metal oxide
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 229910052723 transition metal Inorganic materials 0.000 claims description 20
- 150000003624 transition metals Chemical class 0.000 claims description 18
- 238000000034 method Methods 0.000 claims description 12
- 229910044991 metal oxide Inorganic materials 0.000 claims description 8
- 150000004706 metal oxides Chemical class 0.000 claims description 8
- 229920005992 thermoplastic resin Polymers 0.000 claims description 8
- 238000004519 manufacturing process Methods 0.000 claims description 7
- 239000000758 substrate Substances 0.000 claims description 7
- 239000002994 raw material Substances 0.000 claims description 6
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 claims description 4
- 239000012159 carrier gas Substances 0.000 claims description 4
- 239000003595 mist Substances 0.000 claims description 4
- 230000000737 periodic effect Effects 0.000 claims description 4
- 229910052719 titanium Inorganic materials 0.000 claims description 4
- 239000010936 titanium Substances 0.000 claims description 4
- 229920000178 Acrylic resin Polymers 0.000 claims description 2
- 239000004925 Acrylic resin Substances 0.000 claims description 2
- 239000011261 inert gas Substances 0.000 claims description 2
- 238000002834 transmittance Methods 0.000 claims description 2
- 239000007788 liquid Substances 0.000 claims 1
- 238000000889 atomisation Methods 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2016220078A JP6924458B2 (ja) | 2016-11-10 | 2016-11-10 | 積層体の製造方法および積層体 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2016220078A JP6924458B2 (ja) | 2016-11-10 | 2016-11-10 | 積層体の製造方法および積層体 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2018076567A JP2018076567A (ja) | 2018-05-17 |
| JP2018076567A5 true JP2018076567A5 (enExample) | 2019-12-26 |
| JP6924458B2 JP6924458B2 (ja) | 2021-08-25 |
Family
ID=62148810
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2016220078A Active JP6924458B2 (ja) | 2016-11-10 | 2016-11-10 | 積層体の製造方法および積層体 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP6924458B2 (enExample) |
Family Cites Families (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4205912B2 (ja) * | 2002-08-13 | 2009-01-07 | 時田シーブイディーシステムズ株式会社 | 透明な酸化イットリウム膜とその製造方法 |
| JP2004300575A (ja) * | 2003-03-14 | 2004-10-28 | Showa Denko Kk | 金属酸化物の成膜方法 |
| JP4257518B2 (ja) * | 2003-12-05 | 2009-04-22 | Ｊｓｒ株式会社 | ペロブスカイト型結晶粒子の製造方法、ペロブスカイト型結晶粒子分散体の製造方法および誘電体膜 |
| JP2006016668A (ja) * | 2004-07-01 | 2006-01-19 | Seiko Epson Corp | 成膜方法、無機物膜、電子部品および電子機器 |
| JP5055747B2 (ja) * | 2004-11-10 | 2012-10-24 | 大日本印刷株式会社 | 金属酸化物膜の製造方法 |
| JP4829036B2 (ja) * | 2006-08-11 | 2011-11-30 | 株式会社小糸製作所 | 透光性積層体 |
| WO2011027425A1 (ja) * | 2009-09-02 | 2011-03-10 | 東芝三菱電機産業システム株式会社 | 金属酸化膜の成膜方法、金属酸化膜および金属酸化膜の成膜装置 |
| JP5688911B2 (ja) * | 2010-03-03 | 2015-03-25 | 東京エレクトロン株式会社 | 成膜装置、システム及び成膜方法 |
| JP6103633B2 (ja) * | 2013-02-08 | 2017-03-29 | 高知県公立大学法人 | オゾン支援による高品質均質金属酸化物薄膜作製技術、及び、該薄膜作製技術による酸化物薄膜トランジスタの製造方法 |
| CN111876751A (zh) * | 2015-02-18 | 2020-11-03 | 株式会社尼康 | 电子器件制造装置及方法、半导体装置和显示器 |
-
2016
- 2016-11-10 JP JP2016220078A patent/JP6924458B2/ja active Active
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| AU2015220290A1 (en) | Resin-coated metal sheet for container and method for manufacturing the same | |
| JP2016216332A5 (enExample) | ||
| WO2011049811A3 (en) | Point-of-use silylamine generation | |
| AU2015220288A1 (en) | Resin-coated metal sheet for containers and method for manufacturing the same | |
| MX2020011803A (es) | Proceso para formar un producto de pelicula formado. | |
| MY173073A (en) | Mold release film and process for producing semiconductor package | |
| JP2016138260A5 (enExample) | ||
| MY158750A (en) | Method for producing siliceous film and polysilazane coating treatment liquid used therefor | |
| MY180709A (en) | Transparent substrate with stacked film and manufacturing method thereof | |
| JP2018140352A5 (enExample) | ||
| MY162184A (en) | Method for producing gas barrier plastic molded body | |
| MY157422A (en) | Water-reactive al-based thermally sprayed film, process for production of such al-based thermally sprayed film, and constituent member for film-forming chamber | |
| WO2015153381A3 (en) | Decarboxylative cross-coupling and applications thereof | |
| MX370343B (es) | Composicion de revestimiento de uretano para sustrato metalico. | |
| AR044334A1 (es) | Proceso para preparar un material compuesto | |
| JP2017022294A5 (enExample) | ||
| JP2013254783A5 (enExample) | ||
| WO2008096456A1 (ja) | 光触媒薄膜、光触媒薄膜の形成方法及び光触媒薄膜被覆製品 | |
| JP2018076567A5 (enExample) | ||
| PH12015501537A1 (en) | Coating liquid for forming alkali barrier layer, and article | |
| JP2016155963A5 (enExample) | ||
| RU2014145855A (ru) | Композитная емкость с внутренним элементом, служащим барьером для газа, и способ ее изготовления | |
| JP2017010967A5 (enExample) | ||
| WO2016108594A3 (ko) | 유기발광소자용 광추출 기판 제조방법, 유기발광소자용 광추출 기판 및 이를 포함하는 유기발광소자 | |
| WO2015014326A3 (es) | Oligoesteres modificados y métodos de fabricación de dichos oligoésteres |